TW200635046A - Liquid crystal display device using thin film transistor and method for manufacturing the same - Google Patents
Liquid crystal display device using thin film transistor and method for manufacturing the sameInfo
- Publication number
- TW200635046A TW200635046A TW094140878A TW94140878A TW200635046A TW 200635046 A TW200635046 A TW 200635046A TW 094140878 A TW094140878 A TW 094140878A TW 94140878 A TW94140878 A TW 94140878A TW 200635046 A TW200635046 A TW 200635046A
- Authority
- TW
- Taiwan
- Prior art keywords
- liquid crystal
- crystal display
- manufacturing
- display device
- thin film
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
- G02F1/136295—Materials; Compositions; Manufacture processes
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/42—Arrangements for providing conduction through an insulating substrate
Abstract
In performing half-tone exposure in TFT manufacturing steps of the LCD apparatus, not only the corresponding miniaturization of half-tone photo mask is difficult to be prepared, but also the photoresist of half-tone exposure portion will become not uniform. In the formation of a so-called island in a TFT manufacturing process of a liquid crystal display apparatus, both of a resist pattern 62 based on exposure and a resist pattern 71 based on ink jet application are used for half-tone exposure.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005079455A JP4542452B2 (en) | 2005-03-18 | 2005-03-18 | Thin film transistor manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200635046A true TW200635046A (en) | 2006-10-01 |
TWI289361B TWI289361B (en) | 2007-11-01 |
Family
ID=37100411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094140878A TWI289361B (en) | 2005-03-18 | 2005-11-21 | Liquid crystal display device using thin film transistor and method for manufacturing the same |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4542452B2 (en) |
KR (1) | KR100799852B1 (en) |
TW (1) | TWI289361B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007299779A (en) * | 2006-04-27 | 2007-11-15 | Tokyo Electron Ltd | Forming method of mask pattern and manufacturing method of tft |
KR101348025B1 (en) | 2007-04-04 | 2014-01-06 | 삼성전자주식회사 | Method for manufacturing thin film transistor |
JP5331321B2 (en) * | 2007-08-31 | 2013-10-30 | ゴールドチャームリミテッド | Manufacturing method of display device |
KR101501699B1 (en) | 2007-09-19 | 2015-03-16 | 삼성디스플레이 주식회사 | Organic thin film transistor substrate and method of manufacturing the same |
JP2021027199A (en) * | 2019-08-06 | 2021-02-22 | 株式会社ジャパンディスプレイ | Display and method for manufacturing the same |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100532085B1 (en) * | 2002-05-23 | 2005-11-30 | 엘지.필립스 엘시디 주식회사 | Printing device of photo resist and fabricating method of tft-lcd therewith |
JP4615197B2 (en) * | 2002-08-30 | 2011-01-19 | シャープ株式会社 | Manufacturing method of TFT array substrate and manufacturing method of liquid crystal display device |
JP4423864B2 (en) * | 2003-02-21 | 2010-03-03 | コニカミノルタホールディングス株式会社 | Thin film transistor element and manufacturing method thereof |
KR100652214B1 (en) * | 2003-04-03 | 2006-11-30 | 엘지.필립스 엘시디 주식회사 | Fabrication method of liquid crystal display device |
-
2005
- 2005-03-18 JP JP2005079455A patent/JP4542452B2/en not_active Expired - Fee Related
- 2005-11-09 KR KR1020050106871A patent/KR100799852B1/en not_active IP Right Cessation
- 2005-11-21 TW TW094140878A patent/TWI289361B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2006261538A (en) | 2006-09-28 |
KR100799852B1 (en) | 2008-01-31 |
KR20060101192A (en) | 2006-09-22 |
TWI289361B (en) | 2007-11-01 |
JP4542452B2 (en) | 2010-09-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |