TW200632288A - Thermal mass flow rate sensor having fixed bypass ratio - Google Patents

Thermal mass flow rate sensor having fixed bypass ratio

Info

Publication number
TW200632288A
TW200632288A TW094139522A TW94139522A TW200632288A TW 200632288 A TW200632288 A TW 200632288A TW 094139522 A TW094139522 A TW 094139522A TW 94139522 A TW94139522 A TW 94139522A TW 200632288 A TW200632288 A TW 200632288A
Authority
TW
Taiwan
Prior art keywords
flow rate
main conduit
sensor
rate sensor
tube
Prior art date
Application number
TW094139522A
Other languages
English (en)
Inventor
Ali Shajii
Paul Meneghini
Daniel Alexander Smith
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of TW200632288A publication Critical patent/TW200632288A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow
    • G01F5/005—Measuring a proportion of the volume flow by measuring pressure or differential pressure, created by the use of flow constriction

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
TW094139522A 2004-11-12 2005-11-11 Thermal mass flow rate sensor having fixed bypass ratio TW200632288A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/987,718 US7121139B2 (en) 2004-11-12 2004-11-12 Thermal mass flow rate sensor having fixed bypass ratio

Publications (1)

Publication Number Publication Date
TW200632288A true TW200632288A (en) 2006-09-16

Family

ID=35788486

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094139522A TW200632288A (en) 2004-11-12 2005-11-11 Thermal mass flow rate sensor having fixed bypass ratio

Country Status (7)

Country Link
US (1) US7121139B2 (zh)
JP (1) JP2008519981A (zh)
KR (1) KR20070074663A (zh)
DE (1) DE112005002770T5 (zh)
GB (1) GB2434209A (zh)
TW (1) TW200632288A (zh)
WO (1) WO2006055223A1 (zh)

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US20080250854A1 (en) * 2007-04-12 2008-10-16 Junhua Ding Mass flow device using a flow equalizer for improving the output response
US8113046B2 (en) 2010-03-22 2012-02-14 Honeywell International Inc. Sensor assembly with hydrophobic filter
US8656772B2 (en) 2010-03-22 2014-02-25 Honeywell International Inc. Flow sensor with pressure output signal
US8397586B2 (en) 2010-03-22 2013-03-19 Honeywell International Inc. Flow sensor assembly with porous insert
US8756990B2 (en) 2010-04-09 2014-06-24 Honeywell International Inc. Molded flow restrictor
GB2480881B (en) 2010-06-04 2012-10-24 Servomex Group Ltd Thermal fluid flow apparatus
US8418549B2 (en) * 2011-01-31 2013-04-16 Honeywell International Inc. Flow sensor assembly with integral bypass channel
US9003877B2 (en) 2010-06-15 2015-04-14 Honeywell International Inc. Flow sensor assembly
US8695417B2 (en) 2011-01-31 2014-04-15 Honeywell International Inc. Flow sensor with enhanced flow range capability
US9273986B2 (en) * 2011-04-14 2016-03-01 Trane International Inc. Water flow measurement device
US8826731B2 (en) * 2011-10-20 2014-09-09 Honeywell International Inc. Flow sensor with bypass taps in laminarizing channel and flow restrictor in a bypass channel
JP5969760B2 (ja) * 2011-12-27 2016-08-17 株式会社堀場エステック 熱式流量センサ
US9052217B2 (en) 2012-11-09 2015-06-09 Honeywell International Inc. Variable scale sensor
US9795757B2 (en) 2013-06-28 2017-10-24 Vyaire Medical Capital Llc Fluid inlet adapter
US9541098B2 (en) 2013-06-28 2017-01-10 Vyaire Medical Capital Llc Low-noise blower
US9707369B2 (en) 2013-06-28 2017-07-18 Vyaire Medical Capital Llc Modular flow cassette
US9746359B2 (en) 2013-06-28 2017-08-29 Vyaire Medical Capital Llc Flow sensor
US9962514B2 (en) 2013-06-28 2018-05-08 Vyaire Medical Capital Llc Ventilator flow valve
US10139259B2 (en) * 2014-12-05 2018-11-27 General Electric Company System and method for metering gas based on amplitude and/or temporal characteristics of an electrical signal
DE102014119556A1 (de) * 2014-12-23 2016-06-23 Endress + Hauser Flowtec Ag Thermisches Durchflussmessgerät
US9952079B2 (en) 2015-07-15 2018-04-24 Honeywell International Inc. Flow sensor
KR101682145B1 (ko) * 2015-08-20 2016-12-02 엠케이프리시젼 주식회사 소결필터가 장착된 열식 질량유량계
GB2553002B (en) * 2016-08-19 2020-12-30 Cameron Tech Ltd Assembly for control and/or measurement of fluid flow
WO2019051017A1 (en) * 2017-09-06 2019-03-14 Mott Corporation DEVICES, SYSTEMS, AND METHODS FOR DIVIDING FLUID FLOWS WITH POROUS MEDIA
US10837812B2 (en) 2017-11-09 2020-11-17 Honeywell International Inc Miniature flow sensor with shroud
CN109117579B (zh) * 2018-08-30 2022-12-27 沈阳云仿致准科技股份有限公司 一种多孔孔板流量计的设计计算方法
EP3953427B1 (en) * 2019-12-02 2023-03-29 Dow Silicones Corporation Composition for preparing a release coating

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SE421349B (sv) * 1977-12-16 1981-12-14 Graende Per Olof Flodesmetare for registrering av verkligt forlopp hos pulserade vetskefloden
US4282751A (en) * 1979-08-29 1981-08-11 Eaton Corporation Fluid flowmeter
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US4497202A (en) * 1983-05-31 1985-02-05 Dresser Industries, Inc. Laminar flowmeter
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US4800754A (en) * 1987-10-07 1989-01-31 Sierra Instruments, Inc. Wide-range, adjustable flowmeter
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US5750892A (en) * 1996-09-27 1998-05-12 Teledyne Industries, Inc. Laminar flow element with inboard sensor taps and coaxial laminar flow guides
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Also Published As

Publication number Publication date
GB0708933D0 (en) 2007-06-20
JP2008519981A (ja) 2008-06-12
DE112005002770T5 (de) 2007-09-27
GB2434209A (en) 2007-07-18
US7121139B2 (en) 2006-10-17
US20060101907A1 (en) 2006-05-18
KR20070074663A (ko) 2007-07-12
WO2006055223A1 (en) 2006-05-26

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