TW200625999A - Coating device for producing organic EL display device - Google Patents

Coating device for producing organic EL display device

Info

Publication number
TW200625999A
TW200625999A TW094140539A TW94140539A TW200625999A TW 200625999 A TW200625999 A TW 200625999A TW 094140539 A TW094140539 A TW 094140539A TW 94140539 A TW94140539 A TW 94140539A TW 200625999 A TW200625999 A TW 200625999A
Authority
TW
Taiwan
Prior art keywords
stage
coating
substrates
producing organic
display device
Prior art date
Application number
TW094140539A
Other languages
Chinese (zh)
Other versions
TWI294253B (en
Inventor
Masafumi Kawagoe
Mikio Masuichi
Yukihiro Takamura
Junichi Yoshida
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Publication of TW200625999A publication Critical patent/TW200625999A/en
Application granted granted Critical
Publication of TWI294253B publication Critical patent/TWI294253B/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour

Abstract

The present invention provides a coating device for use in coating the treatment liquid of an organic EL material or a hole transporting material onto a substrate (7), comprising a stage (4) for bearing substrates (7), a heater (41) provided within the stage (4) so as to heat the stage (4), a control means for controlling the heater (41) to make the substrates (7) in the stage have a temperature suitable for transportation after having been coated, and a nozzle unit (2) for flowing the treatment liquid down onto the substrates beared in the stage (4).
TW094140539A 2004-12-10 2005-11-18 Coating device for producing organic el display device TWI294253B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004358452A JP4636495B2 (en) 2004-12-10 2004-12-10 Coating device for manufacturing an organic EL display device

Publications (2)

Publication Number Publication Date
TW200625999A true TW200625999A (en) 2006-07-16
TWI294253B TWI294253B (en) 2008-03-01

Family

ID=36666649

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094140539A TWI294253B (en) 2004-12-10 2005-11-18 Coating device for producing organic el display device

Country Status (4)

Country Link
JP (1) JP4636495B2 (en)
KR (1) KR100787674B1 (en)
CN (1) CN100455362C (en)
TW (1) TWI294253B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009119395A (en) * 2007-11-16 2009-06-04 Dainippon Screen Mfg Co Ltd Coating system and coating method
KR101182226B1 (en) 2009-10-28 2012-09-12 삼성디스플레이 주식회사 Coating apparatus, coating method thereof, and method for making organic film using the same

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07231855A (en) * 1994-02-21 1995-09-05 Chizuko Otaki Heat-retaining chamber
JP3408137B2 (en) * 1998-02-27 2003-05-19 三洋電機株式会社 Cooking device
JPH11281985A (en) * 1998-03-27 1999-10-15 Asahi Glass Co Ltd Spacer discharging method and liquid crystal display element
JP3812144B2 (en) * 1998-05-26 2006-08-23 セイコーエプソン株式会社 Manufacturing method of light emitting display
JP2001297876A (en) * 2000-04-12 2001-10-26 Tokki Corp Manufacturing method and apparatus of organic el display element
JP4285264B2 (en) * 2000-11-28 2009-06-24 セイコーエプソン株式会社 Method for manufacturing organic electroluminescence device
US6736484B2 (en) * 2001-12-14 2004-05-18 Seiko Epson Corporation Liquid drop discharge method and discharge device; electro optical device, method of manufacture thereof, and device for manufacture thereof; color filter method of manufacture thereof, and device for manufacturing thereof; and device incorporating backing, method of manufacturing thereof, and device for manufacture thereof
JP2004000921A (en) * 2002-04-26 2004-01-08 Seiko Epson Corp Film body forming apparatus, manufacturing method of lens, manufacturing method of color filter, and manufacturing method of organic electroluminescent apparatus
JP4239560B2 (en) * 2002-08-02 2009-03-18 セイコーエプソン株式会社 Composition and method for producing organic conductive film using the same
JP2004111073A (en) * 2002-09-13 2004-04-08 Dainippon Screen Mfg Co Ltd Thin film forming device
JP4440523B2 (en) * 2002-09-19 2010-03-24 大日本印刷株式会社 Organic EL display device by inkjet method, color filter manufacturing method, manufacturing device
JP2004125878A (en) * 2002-09-30 2004-04-22 Seiko Epson Corp Method for manufacturing liquid crystal display device
JP2004192842A (en) * 2002-12-09 2004-07-08 Sony Corp Display device
US20060180806A1 (en) * 2003-01-24 2006-08-17 Takashi Arakane Organic electroluminescence device
JP4391094B2 (en) * 2003-01-24 2009-12-24 大日本印刷株式会社 Organic EL layer forming method
JP4311050B2 (en) * 2003-03-18 2009-08-12 セイコーエプソン株式会社 Functional droplet ejection head drive control method and functional droplet ejection apparatus
JP3988676B2 (en) * 2003-05-01 2007-10-10 セイコーエプソン株式会社 Coating apparatus, thin film forming method, thin film forming apparatus, and semiconductor device manufacturing method

Also Published As

Publication number Publication date
KR20060065490A (en) 2006-06-14
KR100787674B1 (en) 2007-12-21
TWI294253B (en) 2008-03-01
CN1785533A (en) 2006-06-14
JP4636495B2 (en) 2011-02-23
JP2006164905A (en) 2006-06-22
CN100455362C (en) 2009-01-28

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees