TW200622315A - Diffractive element for polarization separation of unpolarized electromagnetic radiation in the UV range and method of producing such diffractive element - Google Patents

Diffractive element for polarization separation of unpolarized electromagnetic radiation in the UV range and method of producing such diffractive element

Info

Publication number
TW200622315A
TW200622315A TW094128392A TW94128392A TW200622315A TW 200622315 A TW200622315 A TW 200622315A TW 094128392 A TW094128392 A TW 094128392A TW 94128392 A TW94128392 A TW 94128392A TW 200622315 A TW200622315 A TW 200622315A
Authority
TW
Taiwan
Prior art keywords
diffractive element
radiation
polarization separation
range
electromagnetic radiation
Prior art date
Application number
TW094128392A
Other languages
Chinese (zh)
Inventor
Oliver Sandfuchs
Ulrich Strobner
Robert Brunner
Johannes Ruoff
Jorn Greif-Wustenbecker
Original Assignee
Zeiss Carl Sms Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Carl Sms Gmbh filed Critical Zeiss Carl Sms Gmbh
Publication of TW200622315A publication Critical patent/TW200622315A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1838—Diffraction gratings for use with ultraviolet radiation or X-rays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G02B5/188—Plurality of such optical elements formed in or on a supporting substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3075—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state for use in the UV
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Polarising Elements (AREA)

Abstract

A diffractive element for polarization separation of unpolarized electromagnetic radiation in the UV range is provided, said element comprising a carrier (1), which is transparent for UV radiation and comprises a plurality of spaced apart grooves (2) extending in a non-rectilinear manner, with the gap between two adjacent grooves being greater than the wavelength of the UV radiation, wherein, for polarization separation, the diffractive element diffracts the supplied unpolarized radiation into a first predetermined order of diffraction having a first of two mutually orthogonal polarization conditions and into a second predetermined order of diffraction having the second of the two orthogonal polarization conditions, and wherein the groove depth (h) is used for setting whether the radiation of the first predetermined order of diffraction has the first or the second polarization condition.
TW094128392A 2004-08-20 2005-08-19 Diffractive element for polarization separation of unpolarized electromagnetic radiation in the UV range and method of producing such diffractive element TW200622315A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200410040534 DE102004040534B4 (en) 2004-08-20 2004-08-20 Diffractive polarization-separating element for unpolarized electromagnetic radiation in the UV range, system with two such elements and method for producing such an element

Publications (1)

Publication Number Publication Date
TW200622315A true TW200622315A (en) 2006-07-01

Family

ID=35115884

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094128392A TW200622315A (en) 2004-08-20 2005-08-19 Diffractive element for polarization separation of unpolarized electromagnetic radiation in the UV range and method of producing such diffractive element

Country Status (3)

Country Link
DE (1) DE102004040534B4 (en)
TW (1) TW200622315A (en)
WO (1) WO2006021288A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8270077B2 (en) 2004-01-16 2012-09-18 Carl Zeiss Smt Gmbh Polarization-modulating optical element
CN101726863B (en) 2004-01-16 2012-08-29 卡尔蔡司Smt有限责任公司 Polarization-modulating optical element
US20070019179A1 (en) 2004-01-16 2007-01-25 Damian Fiolka Polarization-modulating optical element

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3542453A (en) * 1967-10-25 1970-11-24 Frederick W Kantor Grating device composed of elongated layers
US5085496A (en) * 1989-03-31 1992-02-04 Sharp Kabushiki Kaisha Optical element and optical pickup device comprising it
CA2017229A1 (en) * 1989-06-30 1990-12-31 James A. Cox Binary optical element for an optical disk read/write head
DE19621512A1 (en) * 1996-05-29 1997-12-04 Univ Schiller Jena Polarisation establishment with respect to wavelength of source spectra
US7306827B2 (en) * 2000-10-30 2007-12-11 Sru Biosystems, Inc. Method and machine for replicating holographic gratings on a substrate
JP2003255113A (en) * 2002-02-28 2003-09-10 Canon Inc Light separation element and optical appliance using the same
US7206059B2 (en) * 2003-02-27 2007-04-17 Asml Netherlands B.V. Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems
AU2003255441A1 (en) * 2003-08-14 2005-03-29 Carl Zeiss Smt Ag Illuminating device for a microlithographic projection illumination system
US7304719B2 (en) * 2004-03-31 2007-12-04 Asml Holding N.V. Patterned grid element polarizer

Also Published As

Publication number Publication date
WO2006021288A1 (en) 2006-03-02
DE102004040534B4 (en) 2006-06-14
DE102004040534A1 (en) 2006-04-13

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