TW200620271A - Master substrate and method of manufacturing a high-density relief structure - Google Patents

Master substrate and method of manufacturing a high-density relief structure

Info

Publication number
TW200620271A
TW200620271A TW094135913A TW94135913A TW200620271A TW 200620271 A TW200620271 A TW 200620271A TW 094135913 A TW094135913 A TW 094135913A TW 94135913 A TW94135913 A TW 94135913A TW 200620271 A TW200620271 A TW 200620271A
Authority
TW
Taiwan
Prior art keywords
relief structure
recording
manufacturing
recording layers
master substrate
Prior art date
Application number
TW094135913A
Other languages
English (en)
Inventor
Erwin Rinaldo Meinders
Rolf Antonie Loch
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Publication of TW200620271A publication Critical patent/TW200620271A/zh

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/261—Preparing a master, e.g. exposing photoresist, electroforming

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
TW094135913A 2004-10-19 2005-10-14 Master substrate and method of manufacturing a high-density relief structure TW200620271A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04105155 2004-10-19

Publications (1)

Publication Number Publication Date
TW200620271A true TW200620271A (en) 2006-06-16

Family

ID=35686202

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094135913A TW200620271A (en) 2004-10-19 2005-10-14 Master substrate and method of manufacturing a high-density relief structure

Country Status (9)

Country Link
US (1) US20090201793A1 (zh)
EP (1) EP1805757A2 (zh)
JP (1) JP2008517416A (zh)
KR (1) KR20070073911A (zh)
CN (1) CN101044564A (zh)
CA (1) CA2584102A1 (zh)
MX (1) MX2007004251A (zh)
TW (1) TW200620271A (zh)
WO (1) WO2006043214A2 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2273501A1 (en) * 2009-06-24 2011-01-12 Singulus Mastering B.V. Master disc having a PTM layer and a nickel undercoat
JP2019057682A (ja) * 2017-09-22 2019-04-11 ルネサスエレクトロニクス株式会社 半導体装置の製造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2909913B2 (ja) * 1990-03-08 1999-06-23 松下電器産業株式会社 光学的情報記録媒体およびその製造方法および光学的情報記録方法
JP3016256B2 (ja) * 1991-01-11 2000-03-06 日本ビクター株式会社 高密度記録ディスク用スタンパとその製造方法
JPH06171236A (ja) * 1992-10-05 1994-06-21 Ricoh Co Ltd 光記録媒体
EP0596439A3 (en) * 1992-11-05 1995-02-08 Matsushita Electric Ind Co Ltd Method of manufacturing a mother disc usable for the production of optical discs.
US6030556A (en) * 1997-07-08 2000-02-29 Imation Corp. Optical disc stampers and methods/systems for manufacturing the same
US6706465B1 (en) * 1999-09-01 2004-03-16 Matsushita Electric Industrial Co., Ltd. Optical disk stamper mastering method and apparatus
JP4329208B2 (ja) * 2000-03-02 2009-09-09 ソニー株式会社 記録媒体の製造方法、記録媒体製造用原盤の製造方法、記録媒体の製造装置、および記録媒体製造用原盤の製造装置
US6872511B2 (en) * 2001-02-16 2005-03-29 Sharp Kabushiki Kaisha Method for forming micropatterns
JP2004227622A (ja) * 2003-01-20 2004-08-12 Toshiba Corp 光記録媒体および光記録再生方法

Also Published As

Publication number Publication date
WO2006043214A8 (en) 2006-07-27
WO2006043214A3 (en) 2006-06-29
WO2006043214A2 (en) 2006-04-27
EP1805757A2 (en) 2007-07-11
KR20070073911A (ko) 2007-07-10
JP2008517416A (ja) 2008-05-22
MX2007004251A (es) 2007-06-14
CA2584102A1 (en) 2006-04-27
CN101044564A (zh) 2007-09-26
US20090201793A1 (en) 2009-08-13

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