TW200619853A - Sublayer coating-forming composition containing metal oxide for lithography - Google Patents

Sublayer coating-forming composition containing metal oxide for lithography

Info

Publication number
TW200619853A
TW200619853A TW094135723A TW94135723A TW200619853A TW 200619853 A TW200619853 A TW 200619853A TW 094135723 A TW094135723 A TW 094135723A TW 94135723 A TW94135723 A TW 94135723A TW 200619853 A TW200619853 A TW 200619853A
Authority
TW
Taiwan
Prior art keywords
lithography
metal oxide
forming composition
composition containing
containing metal
Prior art date
Application number
TW094135723A
Other languages
Chinese (zh)
Other versions
TWI370329B (en
Inventor
Satoshi Takei
Yasushi Sakaida
Keisuke Hashimoto
Original Assignee
Nissan Chemical Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Chemical Ind Ltd filed Critical Nissan Chemical Ind Ltd
Publication of TW200619853A publication Critical patent/TW200619853A/en
Application granted granted Critical
Publication of TWI370329B publication Critical patent/TWI370329B/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers

Abstract

Disclosed is a bottom coating having a high content of an inorganic substance (hard mask) which is used in a lithography process for manufacturing a semiconductor device, is free from the intermixing with a photoresist and can be formed by the spin coating method, and a bottom coating forming composition for forming said bottom coating. A composition for forming a bottom coating for lithography which comprises a metal oxide obtainable through the hydrolysis reaction of an oxymetal compound such as zirconium alkoxide, and a solvent.
TW094135723A 2004-10-14 2005-10-13 Sublayer coating-forming composition containing metal oxide for lithography TWI370329B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004299716 2004-10-14

Publications (2)

Publication Number Publication Date
TW200619853A true TW200619853A (en) 2006-06-16
TWI370329B TWI370329B (en) 2012-08-11

Family

ID=36148252

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094135723A TWI370329B (en) 2004-10-14 2005-10-13 Sublayer coating-forming composition containing metal oxide for lithography

Country Status (3)

Country Link
JP (1) JP4793583B2 (en)
TW (1) TWI370329B (en)
WO (1) WO2006040956A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4793592B2 (en) 2007-11-22 2011-10-12 信越化学工業株式会社 Metal oxide-containing film forming composition, metal oxide-containing film, metal oxide-containing film-forming substrate, and pattern forming method using the same
JP5015892B2 (en) 2008-10-02 2012-08-29 信越化学工業株式会社 Silicon-containing film-forming composition, silicon-containing film-forming substrate, and pattern forming method
JP5015891B2 (en) 2008-10-02 2012-08-29 信越化学工業株式会社 Metal oxide-containing film forming composition, metal oxide-containing film forming substrate, and pattern forming method
WO2012133597A1 (en) * 2011-03-30 2012-10-04 Jsr株式会社 Multilayer resist process pattern forming method and inorganic film forming composition for multilayer resist process
JP5970933B2 (en) * 2011-09-15 2016-08-17 Jsr株式会社 Pattern formation method
JP5756134B2 (en) 2013-01-08 2015-07-29 信越化学工業株式会社 Metal oxide-containing film forming composition and pattern forming method
KR101674989B1 (en) 2013-05-21 2016-11-22 제일모직 주식회사 Resist underlayer composition, method of forming patterns and semiconductor integrated circuit device including the patterns
JP6288090B2 (en) 2013-07-24 2018-03-07 Jsr株式会社 Pattern formation method
JP6327484B2 (en) * 2013-10-07 2018-05-23 日産化学工業株式会社 Metal-containing resist underlayer film forming composition containing polyacid
JP6460899B2 (en) * 2015-04-24 2019-01-30 積水化学工業株式会社 Adhesive for semiconductor bonding
WO2023136260A1 (en) * 2022-01-14 2023-07-20 Jsr株式会社 Method for producing semiconductor substrate, method for forming resist underlayer film, and cleaning fluid

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1184321A (en) * 1981-06-30 1985-03-19 John C. Marinace Adhesion of a photoresist to a substrate
US4826564A (en) * 1987-10-30 1989-05-02 International Business Machines Corporation Method of selective reactive ion etching of substrates
JP2000010293A (en) * 1998-06-17 2000-01-14 Jsr Corp Composition for forming antireflection film and antireflection film
JP2000275820A (en) * 1999-03-24 2000-10-06 Dainippon Ink & Chem Inc Original plate of planographic printing plate and manufacture of printing plate using same
US6890448B2 (en) * 1999-06-11 2005-05-10 Shipley Company, L.L.C. Antireflective hard mask compositions
JP4320883B2 (en) * 1999-12-13 2009-08-26 Ｊｓｒ株式会社 Composition for resist underlayer film
JP2002198495A (en) * 2000-12-25 2002-07-12 Sony Corp Semiconductor device and manufacturing method therefor
JP2002343767A (en) * 2001-05-14 2002-11-29 Toshiba Corp Pattern forming method
JP3934996B2 (en) * 2001-06-11 2007-06-20 富士フイルム株式会社 Support for lithographic printing plate
US6740469B2 (en) * 2002-06-25 2004-05-25 Brewer Science Inc. Developer-soluble metal alkoxide coatings for microelectronic applications

Also Published As

Publication number Publication date
TWI370329B (en) 2012-08-11
JPWO2006040956A1 (en) 2008-05-15
JP4793583B2 (en) 2011-10-12
WO2006040956A1 (en) 2006-04-20

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