TW200616488A - Electret capacitor microphone - Google Patents

Electret capacitor microphone

Info

Publication number
TW200616488A
TW200616488A TW094129707A TW94129707A TW200616488A TW 200616488 A TW200616488 A TW 200616488A TW 094129707 A TW094129707 A TW 094129707A TW 94129707 A TW94129707 A TW 94129707A TW 200616488 A TW200616488 A TW 200616488A
Authority
TW
Taiwan
Prior art keywords
diaphragm
membrane region
capacitor microphone
electret capacitor
air gap
Prior art date
Application number
TW094129707A
Other languages
English (en)
Inventor
Tohru Yamaoka
Yuichi Miyoshi
Hiroshi Ogura
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Ind Co Ltd filed Critical Matsushita Electric Ind Co Ltd
Publication of TW200616488A publication Critical patent/TW200616488A/zh

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04RLOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00Electrostatic transducers
    • H04R19/01Electrostatic transducers characterised by the use of electrets
    • H04R19/016Electrostatic transducers characterised by the use of electrets for microphones

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Junction Field-Effect Transistors (AREA)
TW094129707A 2004-09-01 2005-08-30 Electret capacitor microphone TW200616488A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004253895A JP2008113057A (ja) 2004-09-01 2004-09-01 エレクトレットコンデンサー

Publications (1)

Publication Number Publication Date
TW200616488A true TW200616488A (en) 2006-05-16

Family

ID=35999869

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094129707A TW200616488A (en) 2004-09-01 2005-08-30 Electret capacitor microphone

Country Status (3)

Country Link
JP (1) JP2008113057A (zh)
TW (1) TW200616488A (zh)
WO (1) WO2006025211A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006055147B4 (de) * 2006-11-03 2011-01-27 Infineon Technologies Ag Schallwandlerstruktur und Verfahren zur Herstellung einer Schallwandlerstruktur
JP5412031B2 (ja) * 2007-07-24 2014-02-12 ローム株式会社 Memsセンサ
JPWO2009014118A1 (ja) * 2007-07-24 2010-10-07 ローム株式会社 Memsセンサおよびmemsセンサの製造方法
WO2009157122A1 (ja) 2008-06-24 2009-12-30 パナソニック株式会社 Memsデバイス、memsデバイスモジュール及び音響トランスデューサ
JP5588745B2 (ja) 2010-05-27 2014-09-10 オムロン株式会社 音響トランスデューサ、および該音響トランスデューサを利用したマイクロフォン
CN105637335B (zh) * 2013-10-25 2018-01-19 国立大学法人东京大学 压力传感器以及压力检测装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338642U (zh) * 1989-08-24 1991-04-15
JPH07221218A (ja) * 1994-02-03 1995-08-18 Toshiba Corp 半導体装置
JP2003153394A (ja) * 2001-11-16 2003-05-23 Seiko Epson Corp ダイヤフラム基板の製造方法、ダイヤフラム基板、コンデンサマイクロホンの製造方法、コンデンサマイクロホンおよび電子機器

Also Published As

Publication number Publication date
JP2008113057A (ja) 2008-05-15
WO2006025211A1 (ja) 2006-03-09

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