TW200611872A - PDMS valve-less micro pump structure and method for producing the same - Google Patents
PDMS valve-less micro pump structure and method for producing the sameInfo
- Publication number
- TW200611872A TW200611872A TW093130898A TW93130898A TW200611872A TW 200611872 A TW200611872 A TW 200611872A TW 093130898 A TW093130898 A TW 093130898A TW 93130898 A TW93130898 A TW 93130898A TW 200611872 A TW200611872 A TW 200611872A
- Authority
- TW
- Taiwan
- Prior art keywords
- micro pump
- pdms
- lead
- producing
- same
- Prior art date
Links
- 239000004205 dimethyl polysiloxane Substances 0.000 title abstract 6
- 235000013870 dimethyl polysiloxane Nutrition 0.000 title abstract 6
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 title abstract 6
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 title abstract 6
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 title abstract 6
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000012528 membrane Substances 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
A PDMS valve-less micro pump structure includes a PDMS body having a contour surface, a membrane covering the contour surface of the PDMS body, and a PZT actuator located on the membrane. The contour surface of the PDMS body to be sealed by the membrane and the PZT actuator has in series a lead-in cavity, a lead-in nozzle structure, a main cavity, a lead-out nozzle structure, and a lead-out cavity. The PZT actuator is located right above the main cavity. By providing the PDMS as a material to form the body of the micro pump, the micro pump can then be mass-produced with less cost and simpler structuring. Also, substantial elasticity and bio-compatibility for the micro pump can be achieved.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW093130898A TWI256374B (en) | 2004-10-12 | 2004-10-12 | PDMS valve-less micro pump structure and method for producing the same |
US11/041,956 US20060083639A1 (en) | 2004-10-12 | 2005-01-26 | PDMS valve-less micro pump structure and method for producing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW093130898A TWI256374B (en) | 2004-10-12 | 2004-10-12 | PDMS valve-less micro pump structure and method for producing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200611872A true TW200611872A (en) | 2006-04-16 |
TWI256374B TWI256374B (en) | 2006-06-11 |
Family
ID=36180959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093130898A TWI256374B (en) | 2004-10-12 | 2004-10-12 | PDMS valve-less micro pump structure and method for producing the same |
Country Status (2)
Country | Link |
---|---|
US (1) | US20060083639A1 (en) |
TW (1) | TWI256374B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111692400A (en) * | 2020-06-23 | 2020-09-22 | 东北电力大学 | Micro valve for controlling flow velocity of micro-fluidic chip based on piezoelectric film feedback |
Families Citing this family (19)
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WO2007013287A1 (en) * | 2005-07-27 | 2007-02-01 | Kyushu Institute Of Technology | Valveless micropump |
US20070085449A1 (en) * | 2005-10-13 | 2007-04-19 | Nanyang Technological University | Electro-active valveless pump |
US20070122299A1 (en) * | 2005-11-29 | 2007-05-31 | Chih-Yung Wen | Valveless micro impedance pump |
CN101490419B (en) * | 2006-12-09 | 2011-02-02 | 株式会社村田制作所 | Piezoelectric pump |
JP2008303805A (en) * | 2007-06-08 | 2008-12-18 | Alps Electric Co Ltd | Diaphragm air pump |
US20090050299A1 (en) * | 2007-08-21 | 2009-02-26 | Tektronix, Inc. | Cooling facility for an electronic component |
CN101377192B (en) * | 2007-08-30 | 2012-06-13 | 研能科技股份有限公司 | Fluid delivery device |
CN101389200B (en) * | 2007-09-14 | 2011-08-31 | 富准精密工业(深圳)有限公司 | Miniature fluid cooling system and miniature fluid driving device |
CN101463808B (en) * | 2007-12-21 | 2010-12-08 | 研能科技股份有限公司 | Fluid delivery device |
TWI392639B (en) | 2008-10-31 | 2013-04-11 | Univ Nat Pingtung Sci & Tech | Electromagnetic micro-pump |
EP2438301B1 (en) * | 2009-06-03 | 2015-10-28 | The Technology Partnership Plc | Fluid disc pump |
JP6046491B2 (en) * | 2009-12-16 | 2016-12-21 | ザ ボード オブ トラスティーズ オブ ザ ユニヴァーシティー オブ イリノイ | In vivo electrophysiology using conformal electronics |
CN102539617B (en) * | 2010-12-27 | 2015-04-15 | 中国科学院大连化学物理研究所 | Micro-fluidic driving pump and application thereof |
CN102252666B (en) * | 2011-06-21 | 2014-04-23 | 南京航空航天大学 | Gyro based on conical spiral flow pipe valve-pressure-free electric pump |
CN103542956A (en) * | 2013-09-29 | 2014-01-29 | 柳州市宏亿科技有限公司 | Zigbee temperature sensor manufacturing method |
CN104832404A (en) * | 2015-05-13 | 2015-08-12 | 长春工业大学 | Piezoelectric micropump based on PDMS (Polydimethylsiloxane) |
CN106849747A (en) * | 2017-02-28 | 2017-06-13 | 厦门大学 | A kind of MEMS piezoelectric ultrasonic pumps |
JP2021014787A (en) * | 2017-09-28 | 2021-02-12 | 日本電産株式会社 | Liquid application device |
CN113586409A (en) * | 2021-06-28 | 2021-11-02 | 宁波工程学院 | Valveless three-dimensional piezoelectric pump |
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US6227809B1 (en) * | 1995-03-09 | 2001-05-08 | University Of Washington | Method for making micropumps |
SE9502258D0 (en) * | 1995-06-21 | 1995-06-21 | Pharmacia Biotech Ab | Method for the manufacture of a membrane-containing microstructure |
US6720710B1 (en) * | 1996-01-05 | 2004-04-13 | Berkeley Microinstruments, Inc. | Micropump |
US6071087A (en) * | 1996-04-03 | 2000-06-06 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Ferroelectric pump |
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US7198250B2 (en) * | 2000-09-18 | 2007-04-03 | Par Technologies, Llc | Piezoelectric actuator and pump using same |
CN1269637C (en) * | 2000-09-18 | 2006-08-16 | 帕尔技术有限责任公司 | Piezoelectric actuator and pump using same |
US6450773B1 (en) * | 2001-03-13 | 2002-09-17 | Terabeam Corporation | Piezoelectric vacuum pump and method |
US7025323B2 (en) * | 2001-09-21 | 2006-04-11 | The Regents Of The University Of California | Low power integrated pumping and valving arrays for microfluidic systems |
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US6921253B2 (en) * | 2001-12-21 | 2005-07-26 | Cornell Research Foundation, Inc. | Dual chamber micropump having checkvalves |
US6869275B2 (en) * | 2002-02-14 | 2005-03-22 | Philip Morris Usa Inc. | Piezoelectrically driven fluids pump and piezoelectric fluid valve |
AU2003225762A1 (en) * | 2002-03-15 | 2003-09-29 | United States Of America As Represented By The Administrator Of The National Aeronautics And Space | Electro-active device using radial electric field piezo-diaphragm for control of fluid movement |
US7090471B2 (en) * | 2003-01-15 | 2006-08-15 | California Institute Of Technology | Integrated electrostatic peristaltic pump method and apparatus |
US7284966B2 (en) * | 2003-10-01 | 2007-10-23 | Agency For Science, Technology & Research | Micro-pump |
-
2004
- 2004-10-12 TW TW093130898A patent/TWI256374B/en not_active IP Right Cessation
-
2005
- 2005-01-26 US US11/041,956 patent/US20060083639A1/en not_active Abandoned
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111692400A (en) * | 2020-06-23 | 2020-09-22 | 东北电力大学 | Micro valve for controlling flow velocity of micro-fluidic chip based on piezoelectric film feedback |
CN111692400B (en) * | 2020-06-23 | 2022-06-07 | 东北电力大学 | Micro valve for controlling flow velocity of micro-fluidic chip based on piezoelectric film feedback |
Also Published As
Publication number | Publication date |
---|---|
TWI256374B (en) | 2006-06-11 |
US20060083639A1 (en) | 2006-04-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |