US20060083639A1 - PDMS valve-less micro pump structure and method for producing the same - Google Patents
PDMS valve-less micro pump structure and method for producing the same Download PDFInfo
- Publication number
- US20060083639A1 US20060083639A1 US11/041,956 US4195605A US2006083639A1 US 20060083639 A1 US20060083639 A1 US 20060083639A1 US 4195605 A US4195605 A US 4195605A US 2006083639 A1 US2006083639 A1 US 2006083639A1
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- pdms
- lead
- micro pump
- cavity
- valve
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- 239000004205 dimethyl polysiloxane Substances 0.000 title claims abstract description 146
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 title claims abstract description 146
- 235000013870 dimethyl polysiloxane Nutrition 0.000 title claims abstract 48
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 title claims abstract 48
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 title claims abstract 48
- 238000004519 manufacturing process Methods 0.000 title claims description 33
- 239000000463 material Substances 0.000 claims abstract description 57
- 239000012528 membrane Substances 0.000 claims abstract description 45
- 238000007789 sealing Methods 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 23
- 239000012530 fluid Substances 0.000 claims description 19
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 16
- 229910052802 copper Inorganic materials 0.000 claims description 16
- 239000010949 copper Substances 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 16
- 238000009413 insulation Methods 0.000 claims description 7
- 238000002156 mixing Methods 0.000 claims description 7
- 239000003795 chemical substances by application Substances 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 5
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 229920002939 poly(N,N-dimethylacrylamides) Polymers 0.000 claims 1
- 238000003756 stirring Methods 0.000 claims 1
- 229920001971 elastomer Polymers 0.000 description 4
- 239000000806 elastomer Substances 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- -1 polydimethylsiloxane Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Definitions
- the invention relates to a valve-less micro pump structure and a method for producing the same, and more particularly to the structure that includes an elastomer main body made of polydimethylsiloxane (PDMS).
- PDMS polydimethylsiloxane
- micro fluid-detection and control components are crucial in utilization related to the precision automation industry.
- the micro pump as a fluid-control element is one of the key elements to make a micro fluid mechanism work.
- micro pumps with micro valve structures are usually made of a silicon-base material by a semiconductor manufacturing process. These micro pumps often have the following weakness.
- the semiconductor manufacturing process for producing the micro pumps cannot meet a rapid production requirement.
- Cost for the silicon-base material for producing the micro pumps is high.
- the brittle silicon-base material for producing the micro pumps is vulnerable to impact and thus crack.
- the silicon-base material for producing the micro pumps has poor bio-compatibility, and so limits the application of the micro electric mechanical components.
- the PDMS valve-less micro pump structure includes a PDMS body, a membrane, and a piezoelectric (PZT) actuator.
- the PDMS body as an elastomer made of a PDMS material, has a contour surface.
- the contour surface further is curved to form a main cavity, a lead-in cavity and a lead-out cavity.
- the lead-in cavity can be located aside to the main cavity and in spatial communication with the main cavity through a lead-in nozzle.
- the lead-out cavity can be located also aside to the main cavity and in spatial communication with the main cavity through a lead-out nozzle.
- the membrane having a center hole is layered on top of the PDMS body (i.e. on the contour surface) to seal the lead-in cavity, the lead-in nozzle, the lead-out nozzle and the lead-out cavity, but have the center hole positioned on top of the main cavity so as to expose the main cavity through the center hole.
- the PZT actuator is mounted on top of the membrane by a predetermined peripheral sealing way that can seal the main cavity by covering the center hole of the membrane.
- the membrane of the PDMS valve-less micro pump structure can be made of a PDMS material, and preferably have a thickness ranged between 200 ⁇ m and 300 ⁇ m.
- the PZT actuator can further include a PZT plate, a copper plate layered under the PZT plate, an insulation layer sandwiched between the PZT plate and the copper plate to avoid electrically shorting in between, and a bottom layer layered under the copper plate to prohibit direct contact between the copper plate and a fluid in the main cavity.
- the insulation layer and the bottom layer are both layers made of the PDMS material.
- the predetermined peripheral sealing way to mount the PZT actuator onto the membrane can be a sealing way having supports at nodes of the PZT actuator, having supports at a periphery of the PZT actuator, or having bonding at the periphery of the PZT actuator.
- the PDMS valve-less micro pump structure i.e. the PDMS body as described above, can be produced in accordance with a method having the following steps of:
- the die for forming the PDMS body is preferably made of a polymethylmethacrylate (PMMA) material.
- PMMA polymethylmethacrylate
- the fluid-state PDMS material for forming the PDMS body can be prepared by mixing a Sylgard 184 base (having short-chain PDMS molecules) and a Sylgard 184 agent at a 10:1 ratio.
- the mixing can be achieved by blending the Sylgard 184 base and the Sylgard 184 agent in a magnetic stirrer for a predetermined period at a predetermined speed and then slowing the speed of the magnetic stirrer to de-bubble the PDMS material.
- the predetermined baking process for solidifying the fluid-state PDMS material on the die can be a vacuum-baking process including a 20-30 minute low-pressure de-bubbling step, a heating step at 110-130° C. for 2-4 hours, and a free cooling step.
- the PDMS valve-less micro pump can be produced by a method comprising the following steps of:
- the predetermined baking process to confirm the combination among the PDMS body, the membrane and the actuator can be is a vacuum-baking process including a heating step at 110-130° C. for 2-4 hours.
- FIG. 1 is a perspective exploded view of a preferred embodiment of the PDMS valve-less micro pump in accordance with the present invention
- FIG. 2 is a flowchart showing a preferred method for producing the PDMS body in accordance with the present invention
- FIG. 3 is a flowchart showing a preferred method for producing the valve-less micro pump in accordance with the present invention
- FIG. 4 is a cross-sectional view of a preferred valve-less micro pump in accordance with the present invention.
- FIG. 5 is an application state of FIG. 4 ;
- FIG. 6 is another application state of FIG. 4 ;
- FIG. 7 is a schematic view to show a predetermined sealing way for mounting the PZT actuator on the membrane in accordance with the present invention.
- FIG. 8 is a schematic view to show another predetermined sealing way for mounting the PZT actuator on the membrane in accordance with the present invention.
- FIG. 9 is a schematic view to show a further predetermined sealing way for mounting the PZT actuator on the membrane in accordance with the present invention.
- FIG. 10 is an enlarged cross-sectional view of the PZT actuator of the present invention.
- the invention disclosed herein is directed to a PDMS valve-less micro pump structure and a method for producing the same.
- numerous details are set forth in order to provide a thorough understanding of the present invention. It will be appreciated by one skilled in the art that variations of these specific details are possible while still achieving the results of the present invention. In other instance, well-known components are not described in detail in order not to unnecessarily obscure the present invention.
- FIG. 1 a perspective exploded view of a preferred PDMS valve-less micro pump in accordance with the present invention is shown to mainly have a PDMS body 11 , a membrane 12 , and a PZT actuator 13 .
- the PDMS body 11 of the present invention is an elastomer that can be made of a PDMS material.
- the PDMS body 11 has a contour surface 110 .
- the contour surface 110 is curved to form a main cavity 111 , a lead-in cavity 113 and a lead-out cavity 112 .
- the lead-in cavity 113 can be located aside (for example, left-hand side in the figure) to the main cavity 111 and be in spatial communication (or say, in a channel-wise connection) with the main cavity 111 through a lead-in nozzle 115 also formed in the PDMS body 11 .
- the lead-out cavity 112 can be located aside (for example, right-hand side in the figure) to the main cavity 111 and in spatial communication with the main cavity 111 through a lead-out nozzle 114 formed in the PDMS body 11 .
- the PDMS material is an elastic polymer featuring in hydrophilic and transparent property.
- the contact angle between a PDMS molecule and a water molecule is about 108 degree.
- the PDMS material is much suitable for producing the bio-medical components.
- the PDMS material has an excellent electric-insulation property and a damper property to absorb any foreign impact.
- the dielectric strength of the PDMS material is also acceptable to most applications.
- the aforesaid properties of the PDMS material can be maintained under any environmental temperature and moisture situation.
- the PDMS material itself is an inertial material that is damp to the O 3 and the ultraviolet ray. Yet, the PDMS material can be easily adhered to an ordinary smooth surface, for example a surface of a silicon wafer, a glass, or a PMMA object.
- the lead-in cavity 113 and the lead-out cavity 112 are located to opposite sides of the main cavity 111 .
- such an arrangement doesn't imply that the present invention prohibits other arrangements of the lead-in cavity 113 and the lead-out cavity 112 with respect to the main cavity 111 .
- any arrangement that separates the lead-in cavity 113 from the lead-out cavity 112 around the main cavity 111 can be acceptable to the present invention.
- an end of the lead-in nozzle 115 that has a larger cross section is connected with the lead-in cavity 113 , while another end having a smaller cross section is connected with the main cavity 111 .
- the end of the lead-out nozzle 114 that has a larger cross section is connected with the main cavity 111 , while another end having a smaller cross section is connected with the lead-out cavity 112 .
- the membrane 12 of the present invention for adhering or layering on the contour surface 110 of the PDMS body 11 has a center hole 121 .
- the membrane 12 is used to seal or cover the lead-in cavity 113 , the lead-in nozzle 115 , the lead-out nozzle 114 and the lead-out cavity 112 so that the curved-in structures of the lead-in cavity 113 , the lead-in nozzle 115 , the lead-out nozzle 114 and the lead-out cavity 112 can be formed as flow channel structures.
- the main cavity 111 is still exposed to the membrane 12 by having the center hole 121 of the membrane 12 positioned right on top of the main cavity 111 .
- the membrane 12 is preferably made of a PDMS material, and preferably has a thickness ranged between 200 ⁇ m and 300 ⁇ m.
- the PZT actuator 13 of the present invention is mounted on top of the membrane 12 by a predetermined peripheral sealing way that can seal the main cavity 111 by sitting on or covering the center hole 121 of the membrane 12 .
- the method can include the following steps.
- Step 100 Preparing a die 14 .
- the die 14 has a profiling protrusion 141 forming on a top surface of the die 14 .
- the profiling protrusion 141 By properly providing the profiling protrusion 141 , the aforesaid concave structures of the PDMS body 11 such as the main cavity 111 , the lead-in cavity 113 , the lead-in nozzle 115 , the lead-out cavity 112 , and the lead-out nozzle 114 can be formed by the following molding.
- Step 200 Pouring a PDMS material in a fluid state 11 onto the top surface of the die 14 by covering fully the profiling protrusion 141 .
- Step 300 Performing a predetermined baking process on the assembly of the die 14 and the PDMS material 11 so as to solidify the PDMS material 11 for forming the aforesaid PDMS body 11 .
- Step 400 Removing the solidified PDMS material 11 from the die 14 to complete the production of the PDMS body 11 for the PDMS valve-less micro pump of the present invention.
- the die 14 for forming or molding the PDMS body 11 is preferably made of a PMMA material.
- the PDMS material can be obtained in a Sylgard 184 Silicone Elastomer Kit provided by the Dow Coing Company in the United States.
- the PDMS material for molding the PDMS body 11 can be prepared by mixing a Sylgard 184 base (having short-chain PDMS molecules) and a Sylgard 184 agent at a 10:1 ratio.
- the mixing can be performed by blending the Sylgard 184 base and the Sylgard 184 agent in a magnetic stirrer for a predetermined period at a predetermined speed and then slowing the speed of the magnetic stirrer to de-bubble the fluid-state PDMS material.
- the predetermined baking process for solidifying the fluid-state PDMS material 11 molded on the die 14 can be a vacuum-baking process that includes a 20-30 minute low-pressure de-bubbling step, a heating step at 110-130° C. for 2-4 hours, and a free cooling step for cooling down the PDMS material 11 to the room temperature.
- FIG. 3 a flowchart for a preferred method for producing the PDMS valve-less micro pump in accordance with the present invention is shown. The method comprises the following steps.
- Step 500 Preparing the PDMS body 11 .
- the PDMS body 11 already has the main cavity 111 , the lead-in cavity 113 , the lead-in nozzle 115 , the lead-out cavity 112 and the lead-out nozzle 114 formed concavely on the contour surface 110 of the PDMS body 11 .
- Step 600 Adhering the membrane 12 having the center hole 121 onto the contour surface 110 of the PDMS body 11 .
- the adhering is done by having the membrane 12 seal the lead-in cavity 113 , the lead-in nozzle 115 , the lead-out nozzle 114 and the lead-out cavity 112 , but having the center hole 121 of the membrane 12 positioned on top of the main cavity 111 .
- Step 700 Mounting the PZT actuator 13 on the membrane 12 by a predetermined peripheral sealing way.
- the main cavity 111 can be sealed by the PZT actuator 13 and thus form as a central tank of the fluid channel that includes in series the lead-in cavity 113 , the lead-in nozzle 115 , the main cavity 111 , the lead-out nozzle 114 and the lead-out cavity 112 .
- Step 800 Performing a baking process to solidify the combination of the PDMS body 11 , the membrane 12 , and the PZT actuator 13 . After the baking, a production of the PDMS valve-less micro pump according to the present invention is done.
- the predetermined baking process to confirm the combination among the PDMS body 11 , the membrane 12 and the actuator 13 can be also is a vacuum-baking process including a heating step at 110-130° C. for 2-4 hours.
- FIG. 4 a cross-section view of a preferred PDMS valve-less micro pump along line a-a of FIG. 1 is shown, in which the lead-in nozzle 115 and the lead-out nozzle 114 are not shown.
- a lead-in channel 116 and a lead-out channel 117 are constructed under the lead-in cavity 113 and the lead-out cavity 112 , respectively.
- the lead-in channel 116 is provided so that a fluid outside the PDMS body 11 can be sent into and/or out off the lead-in cavity 113 .
- the lead-out channel 117 is there so that the fluid outside the PDMS body 11 can be sent into and/or out off the lead-out cavity 112 .
- the forming of the lead-in channel 116 and the lead-out channel 117 can be directly done by piecing a needle or a like piecing structure into the PDMS body 11 at the application site of the micro pump.
- This channel-forming work is well known to a skilled person in the related art, and so details will be omitted herein.
- a down (or concave) state of the PZT actuator 13 is shown by a dashed line 13 ′.
- the PZT actuator 13 is controlled to present a concave configuration 13 ′ so as to depress the main cavity 111 or say to reduce the volume inside the main cavity 111 .
- the fluid inside the main cavity 111 would be squeezed out to both the lead-in cavity 113 and the lead-out cavity 112 through the lead-in nozzle 115 and the lead-out nozzle 114 , respectively.
- the nozzles 114 and 115 For the directional arrangement of the nozzles 114 and 115 (referred to FIG.
- the fluid amount qo leaving the main cavity 111 through the lead-in nozzle 1115 , the lead-in cavity 113 and the lead-in channel 116 would be less than the fluid amount Qo leaving the main cavity 111 through the lead-out nozzle 114 , the lead-out cavity 112 and the lead-out channel 117 .
- an up (or convex) state of the PZT actuator 13 is shown by another dashed line 13 ′′.
- the PZT actuator 13 is controlled to present a convex configuration 13 ′′ so as to dilate the main cavity 111 or say to suddenly enlarge the volume inside the main cavity 111 .
- the fluid in the lead-in cavity 113 and the lead-out cavity 112 would be sucked into the main cavity 111 through the lead-in nozzle 115 and the lead-out nozzle 114 , respectively.
- the nozzles 114 and 115 For the directional arrangement of the nozzles 114 and 115 (referred to FIG.
- the fluid amount qin entering the main cavity 111 through the lead-in channel 116 , the lead-in cavity 113 and the lead-in nozzle 115 would be larger than the fluid amount Qin entering the main cavity 111 through the lead-out channel 117 , the lead-out cavity 112 and the lead-out nozzle 114 .
- a preset amount of the fluid (Qo-Qin) or (qin-qo) can then be transported from the lead-in channel 116 to the lead-out channel 117 of the PDMS body 11 .
- the PZT actuator 13 is fixed air-tightly onto the membrane 12 through the predetermined peripheral sealing way.
- the predetermined peripheral sealing way can be a sealing way as shown in FIG. 7 that provides annular supports 132 at nodes 131 of the PZT actuator 13 , a sealing way as shown in FIG. 8 that provides annular supports 132 at a periphery 133 of the PZT actuator 13 , or a sealing way as shown in FIG. 9 that provides annular bonding 132 at the periphery 133 of the PZT actuator 13 . It should be noted that different sealing ways would cause different state appearance of the PZT actuator 13 .
- the PZT actuator 13 can include a PZT plate 134 and a copper plate 136 layered under the PZT plate 135 .
- the PZT plate 134 and the copper plate 135 need to connect with respective electrodes 138 so as to act as a positive end and a negative end, respectively, so an insulation layer 136 is introduced to be sandwiched between the PZT plate 134 and the copper plate 135 for avoiding possible electrically shorting in between.
- a bottom layer 137 coated or layered under the copper plate 135 is provided to prohibit such direct contact between the copper plate 135 and a fluid in the main cavity 111 .
- both the insulation layer 136 and the bottom layer 137 can be made of the PDMS material.
- the copper plate 135 can then have better flexibility to satisfy the concave and convex operations of the PDMS valve-less micro pump. Thereby, the throughput of the PDMS valve-less micro pumps can be increased.
- the bottom of the PZT actuator 13 can be brushed and thus coat a layer of a PDMS solution for adhering the PZT actuator 13 .
- the applicability of the PDMS valve-less micro pumps in the biomedical or chemical industry can be increased.
- the production of the micro pumps can be simply, low cost, and flexible, and the product can be more bio-compatible.
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- Reciprocating Pumps (AREA)
Abstract
A PDMS valve-less micro pump structure includes a PDMS body having a contour surface, a membrane covering the contour surface of the PDMS body, and a PZT actuator located on the membrane. The contour surface of the PDMS body to be sealed by the membrane and the PZT actuator has in series a lead-in cavity, a lead-in nozzle structure, a main cavity, a lead-out nozzle structure, and a lead-out cavity. The PZT actuator is located right above the main cavity. By providing the PDMS as a material to form the body of the micro pump, the micro pump can then be mass-produced with less cost and simpler structuring. Also, substantial elasticity and bio-compatibility for the micro pump can be achieved.
Description
- (1) Field of the Invention
- The invention relates to a valve-less micro pump structure and a method for producing the same, and more particularly to the structure that includes an elastomer main body made of polydimethylsiloxane (PDMS).
- (2) Description of the Prior Art
- In micro electric mechanical engineering, particularly that of biomedical field, micro fluid-detection and control components are crucial in utilization related to the precision automation industry. Among all the micro components, the micro pump as a fluid-control element is one of the key elements to make a micro fluid mechanism work.
- In the art, micro pumps with micro valve structures are usually made of a silicon-base material by a semiconductor manufacturing process. These micro pumps often have the following weakness.
- 1. The semiconductor manufacturing process for producing the micro pumps cannot meet a rapid production requirement.
- 2. Cost for the silicon-base material for producing the micro pumps is high.
- 3. For the silicon-base material for producing the micro pumps is brittle, inherent problems in fatigue and pitting can never be neglected.
- Also, it is well known that a brittle material is not suitable for application in the biomedical engineering.
- 4. The brittle silicon-base material for producing the micro pumps is vulnerable to impact and thus crack.
- 5. The silicon-base material for producing the micro pumps has poor bio-compatibility, and so limits the application of the micro electric mechanical components.
- Therefore, to overcome various disadvantages from adopting the silicon-base material to the micro pumps by a semiconductor manufacturing process, a substitute material and an improved method for forming the micro pumps are definitely welcome to the skilled persons in the art.
- Accordingly, it is an object of the present invention to provide a PDMS valve-less micro pump structure and a method for producing the same, in which the PDMS material is widely used to have the production of the micro pumps to be simply structured, low cost, flexible, and more bio-compatible.
- The PDMS valve-less micro pump structure includes a PDMS body, a membrane, and a piezoelectric (PZT) actuator.
- The PDMS body, as an elastomer made of a PDMS material, has a contour surface. The contour surface further is curved to form a main cavity, a lead-in cavity and a lead-out cavity. The lead-in cavity can be located aside to the main cavity and in spatial communication with the main cavity through a lead-in nozzle. Also, the lead-out cavity can be located also aside to the main cavity and in spatial communication with the main cavity through a lead-out nozzle.
- The membrane having a center hole is layered on top of the PDMS body (i.e. on the contour surface) to seal the lead-in cavity, the lead-in nozzle, the lead-out nozzle and the lead-out cavity, but have the center hole positioned on top of the main cavity so as to expose the main cavity through the center hole.
- The PZT actuator is mounted on top of the membrane by a predetermined peripheral sealing way that can seal the main cavity by covering the center hole of the membrane.
- In one embodiment of the present invention, the membrane of the PDMS valve-less micro pump structure can be made of a PDMS material, and preferably have a thickness ranged between 200 μm and 300 μm.
- In one embodiment of the present invention, the PZT actuator can further include a PZT plate, a copper plate layered under the PZT plate, an insulation layer sandwiched between the PZT plate and the copper plate to avoid electrically shorting in between, and a bottom layer layered under the copper plate to prohibit direct contact between the copper plate and a fluid in the main cavity. Preferably, the insulation layer and the bottom layer are both layers made of the PDMS material.
- In one embodiment of the present invention, the predetermined peripheral sealing way to mount the PZT actuator onto the membrane can be a sealing way having supports at nodes of the PZT actuator, having supports at a periphery of the PZT actuator, or having bonding at the periphery of the PZT actuator.
- In the present invention, the PDMS valve-less micro pump structure, i.e. the PDMS body as described above, can be produced in accordance with a method having the following steps of:
- (1) Preparing a die, the die having a profiling protrusion forming on a top surface to configure concavely the main cavity, the lead-in cavity, the lead-in nozzle, the lead-out cavity, and the lead-out nozzle of the PDMS body;
- (2) Pouring a PDMS material in a fluid state onto the top surface of the die by covering fully the profiling protrusion;
- (3) Performing a predetermined baking process on the die and the PDMS material so as to solidify the PDMS material for forming the PDMS body; and
- (4) Removing the solidified PDMS material from the die to complete the production of the PDMS body, i.e. the PDMS valve-less micro pump structure of the present invention.
- In the present invention, the die for forming the PDMS body is preferably made of a polymethylmethacrylate (PMMA) material.
- In one embodiment of the present invention, the fluid-state PDMS material for forming the PDMS body can be prepared by mixing a Sylgard 184 base (having short-chain PDMS molecules) and a Sylgard 184 agent at a 10:1 ratio. Preferably, the mixing can be achieved by blending the Sylgard 184 base and the Sylgard 184 agent in a magnetic stirrer for a predetermined period at a predetermined speed and then slowing the speed of the magnetic stirrer to de-bubble the PDMS material.
- In one embodiment of the present invention, the predetermined baking process for solidifying the fluid-state PDMS material on the die can be a vacuum-baking process including a 20-30 minute low-pressure de-bubbling step, a heating step at 110-130° C. for 2-4 hours, and a free cooling step.
- In the present invention, the PDMS valve-less micro pump can be produced by a method comprising the following steps of:
- (1) Preparing the PDMS body, the PDMS body already having the main cavity, the lead-in cavity, the lead-in nozzle, the lead-out cavity and the lead-out nozzle formed concavely on the contour surface of the PDMS body;
- (2) Adhering the membrane having the center hole onto the contour surface of the PDMS body by having the membrane seal the lead-in cavity, the lead-in nozzle, the lead-out nozzle and the lead-out cavity but having the center hole pf the membrane positioned on top of the main cavity;
- (3) Mounting the PZT actuator onto the membrane by a predetermined peripheral sealing way so as to seal the main cavity that is exposed in the previous step; and
- (4) Performing a baking process to solidify the combination of the PDMS body, the membrane, and the PZT actuator.
- In one embodiment of the present invention, the predetermined baking process to confirm the combination among the PDMS body, the membrane and the actuator can be is a vacuum-baking process including a heating step at 110-130° C. for 2-4 hours.
- All these objects are achieved by the PDMS valve-less micro pump structure and the method for producing the same described below.
- The present invention will now be specified with reference to its preferred embodiment illustrated in the drawings, in which:
-
FIG. 1 is a perspective exploded view of a preferred embodiment of the PDMS valve-less micro pump in accordance with the present invention; -
FIG. 2 is a flowchart showing a preferred method for producing the PDMS body in accordance with the present invention; -
FIG. 3 is a flowchart showing a preferred method for producing the valve-less micro pump in accordance with the present invention; -
FIG. 4 is a cross-sectional view of a preferred valve-less micro pump in accordance with the present invention; -
FIG. 5 is an application state ofFIG. 4 ; -
FIG. 6 is another application state ofFIG. 4 ; -
FIG. 7 is a schematic view to show a predetermined sealing way for mounting the PZT actuator on the membrane in accordance with the present invention; -
FIG. 8 is a schematic view to show another predetermined sealing way for mounting the PZT actuator on the membrane in accordance with the present invention; -
FIG. 9 is a schematic view to show a further predetermined sealing way for mounting the PZT actuator on the membrane in accordance with the present invention; and -
FIG. 10 is an enlarged cross-sectional view of the PZT actuator of the present invention. - The invention disclosed herein is directed to a PDMS valve-less micro pump structure and a method for producing the same. In the following description, numerous details are set forth in order to provide a thorough understanding of the present invention. It will be appreciated by one skilled in the art that variations of these specific details are possible while still achieving the results of the present invention. In other instance, well-known components are not described in detail in order not to unnecessarily obscure the present invention.
- Referring now to
FIG. 1 , a perspective exploded view of a preferred PDMS valve-less micro pump in accordance with the present invention is shown to mainly have aPDMS body 11, amembrane 12, and aPZT actuator 13. - The
PDMS body 11 of the present invention is an elastomer that can be made of a PDMS material. ThePDMS body 11 has acontour surface 110. As shown, thecontour surface 110 is curved to form amain cavity 111, a lead-incavity 113 and a lead-out cavity 112. The lead-incavity 113 can be located aside (for example, left-hand side in the figure) to themain cavity 111 and be in spatial communication (or say, in a channel-wise connection) with themain cavity 111 through a lead-innozzle 115 also formed in thePDMS body 11. Similarly, the lead-out cavity 112 can be located aside (for example, right-hand side in the figure) to themain cavity 111 and in spatial communication with themain cavity 111 through a lead-outnozzle 114 formed in thePDMS body 11. - In the present invention, the PDMS material is an elastic polymer featuring in hydrophilic and transparent property. The contact angle between a PDMS molecule and a water molecule is about 108 degree. For having an acceptable bio-compatibility, the PDMS material is much suitable for producing the bio-medical components. The PDMS material has an excellent electric-insulation property and a damper property to absorb any foreign impact. Also, the dielectric strength of the PDMS material is also acceptable to most applications. Importantly, the aforesaid properties of the PDMS material can be maintained under any environmental temperature and moisture situation.
- The PDMS material itself is an inertial material that is damp to the O3 and the ultraviolet ray. Yet, the PDMS material can be easily adhered to an ordinary smooth surface, for example a surface of a silicon wafer, a glass, or a PMMA object.
- As shown in
FIG. 1 , the lead-incavity 113 and the lead-out cavity 112 are located to opposite sides of themain cavity 111. However, such an arrangement doesn't imply that the present invention prohibits other arrangements of the lead-incavity 113 and the lead-out cavity 112 with respect to themain cavity 111. Basically, any arrangement that separates the lead-incavity 113 from the lead-out cavity 112 around themain cavity 111 can be acceptable to the present invention. - As shown, an end of the lead-in
nozzle 115 that has a larger cross section is connected with the lead-incavity 113, while another end having a smaller cross section is connected with themain cavity 111. On the other hand, the end of the lead-outnozzle 114 that has a larger cross section is connected with themain cavity 111, while another end having a smaller cross section is connected with the lead-out cavity 112. - In
FIG. 1 , themembrane 12 of the present invention for adhering or layering on thecontour surface 110 of thePDMS body 11 has acenter hole 121. Themembrane 12 is used to seal or cover the lead-incavity 113, the lead-innozzle 115, the lead-outnozzle 114 and the lead-out cavity 112 so that the curved-in structures of the lead-incavity 113, the lead-innozzle 115, the lead-outnozzle 114 and the lead-out cavity 112 can be formed as flow channel structures. Also, it is noted that themain cavity 111 is still exposed to themembrane 12 by having thecenter hole 121 of themembrane 12 positioned right on top of themain cavity 111. - In the present invention, the
membrane 12 is preferably made of a PDMS material, and preferably has a thickness ranged between 200 μm and 300 μm. - The PZT actuator 13 of the present invention is mounted on top of the
membrane 12 by a predetermined peripheral sealing way that can seal themain cavity 111 by sitting on or covering thecenter hole 121 of themembrane 12. - Referring now to
FIG. 2 , a flowchart for a preferred method for producing thePDMS body 11 is shown. The method can include the following steps. - Step 100: Preparing a
die 14. Thedie 14 has aprofiling protrusion 141 forming on a top surface of thedie 14. By properly providing theprofiling protrusion 141, the aforesaid concave structures of thePDMS body 11 such as themain cavity 111, the lead-incavity 113, the lead-innozzle 115, the lead-out cavity 112, and the lead-outnozzle 114 can be formed by the following molding. - Step 200: Pouring a PDMS material in a
fluid state 11 onto the top surface of the die 14 by covering fully theprofiling protrusion 141. - Step 300: Performing a predetermined baking process on the assembly of the
die 14 and thePDMS material 11 so as to solidify thePDMS material 11 for forming theaforesaid PDMS body 11. - Step 400: Removing the solidified
PDMS material 11 from the die 14 to complete the production of thePDMS body 11 for the PDMS valve-less micro pump of the present invention. - In the present invention, the
die 14 for forming or molding thePDMS body 11 is preferably made of a PMMA material. - In the present invention, the PDMS material can be obtained in a Sylgard 184 Silicone Elastomer Kit provided by the Dow Coing Company in the United States. In this kit, the PDMS material for molding the
PDMS body 11 can be prepared by mixing a Sylgard 184 base (having short-chain PDMS molecules) and a Sylgard 184 agent at a 10:1 ratio. Preferably, the mixing can be performed by blending the Sylgard 184 base and the Sylgard 184 agent in a magnetic stirrer for a predetermined period at a predetermined speed and then slowing the speed of the magnetic stirrer to de-bubble the fluid-state PDMS material. - In the present invention, the predetermined baking process for solidifying the fluid-
state PDMS material 11 molded on the die 14 can be a vacuum-baking process that includes a 20-30 minute low-pressure de-bubbling step, a heating step at 110-130° C. for 2-4 hours, and a free cooling step for cooling down thePDMS material 11 to the room temperature. - Referring now to
FIG. 3 , a flowchart for a preferred method for producing the PDMS valve-less micro pump in accordance with the present invention is shown. The method comprises the following steps. - Step 500: Preparing the
PDMS body 11. ThePDMS body 11 already has themain cavity 111, the lead-incavity 113, the lead-innozzle 115, the lead-out cavity 112 and the lead-outnozzle 114 formed concavely on thecontour surface 110 of thePDMS body 11. - Step 600: Adhering the
membrane 12 having thecenter hole 121 onto thecontour surface 110 of thePDMS body 11. The adhering is done by having themembrane 12 seal the lead-incavity 113, the lead-innozzle 115, the lead-outnozzle 114 and the lead-out cavity 112, but having thecenter hole 121 of themembrane 12 positioned on top of themain cavity 111. - Step 700: Mounting the
PZT actuator 13 on themembrane 12 by a predetermined peripheral sealing way. Thereby, themain cavity 111 can be sealed by thePZT actuator 13 and thus form as a central tank of the fluid channel that includes in series the lead-incavity 113, the lead-innozzle 115, themain cavity 111, the lead-outnozzle 114 and the lead-out cavity 112. - Step 800: Performing a baking process to solidify the combination of the
PDMS body 11, themembrane 12, and thePZT actuator 13. After the baking, a production of the PDMS valve-less micro pump according to the present invention is done. - In the present invention, the predetermined baking process to confirm the combination among the
PDMS body 11, themembrane 12 and theactuator 13 can be also is a vacuum-baking process including a heating step at 110-130° C. for 2-4 hours. - Referring now to
FIG. 4 , a cross-section view of a preferred PDMS valve-less micro pump along line a-a ofFIG. 1 is shown, in which the lead-innozzle 115 and the lead-outnozzle 114 are not shown. InFIG. 4 , a lead-inchannel 116 and a lead-outchannel 117 are constructed under the lead-incavity 113 and the lead-out cavity 112, respectively. The lead-inchannel 116 is provided so that a fluid outside thePDMS body 11 can be sent into and/or out off the lead-incavity 113. Similarly, the lead-outchannel 117 is there so that the fluid outside thePDMS body 11 can be sent into and/or out off the lead-out cavity 112. - In the present invention, for the PDMS material is a soft elastomer, the forming of the lead-in
channel 116 and the lead-outchannel 117 can be directly done by piecing a needle or a like piecing structure into thePDMS body 11 at the application site of the micro pump. This channel-forming work is well known to a skilled person in the related art, and so details will be omitted herein. - As shown in
FIG. 4 , before the PDMS valve-less micro pump of the present invention works,proper wiring 15 should also be established between the actuator 13 and a foreign power device (not shown in the figure). Thereby, thePZT actuator 13 can thus be controlled to perform its up-and-down action upon themain cavity 111. - Referring now to
FIG. 5 , a down (or concave) state of thePZT actuator 13 is shown by a dashedline 13′. In this state, thePZT actuator 13 is controlled to present aconcave configuration 13′ so as to depress themain cavity 111 or say to reduce the volume inside themain cavity 111. Thereby, the fluid inside themain cavity 111 would be squeezed out to both the lead-incavity 113 and the lead-out cavity 112 through the lead-innozzle 115 and the lead-outnozzle 114, respectively. For the directional arrangement of thenozzles 114 and 115 (referred toFIG. 1 ), the fluid amount qo leaving themain cavity 111 through the lead-in nozzle 1115, the lead-incavity 113 and the lead-inchannel 116 would be less than the fluid amount Qo leaving themain cavity 111 through the lead-outnozzle 114, the lead-out cavity 112 and the lead-outchannel 117. - Referring now to
FIG. 6 , an up (or convex) state of thePZT actuator 13 is shown by another dashedline 13″. In this state, thePZT actuator 13 is controlled to present aconvex configuration 13″ so as to dilate themain cavity 111 or say to suddenly enlarge the volume inside themain cavity 111. Thereby, the fluid in the lead-incavity 113 and the lead-out cavity 112 would be sucked into themain cavity 111 through the lead-innozzle 115 and the lead-outnozzle 114, respectively. For the directional arrangement of thenozzles 114 and 115 (referred toFIG. 1 ), the fluid amount qin entering themain cavity 111 through the lead-inchannel 116, the lead-incavity 113 and the lead-innozzle 115 would be larger than the fluid amount Qin entering themain cavity 111 through the lead-outchannel 117, the lead-out cavity 112 and the lead-outnozzle 114. - In the present invention, after an operational stroke of the PZT actuator 13 (including a down state and an up state), a preset amount of the fluid, (Qo-Qin) or (qin-qo), can then be transported from the lead-in
channel 116 to the lead-outchannel 117 of thePDMS body 11. - In the present invention, the
PZT actuator 13 is fixed air-tightly onto themembrane 12 through the predetermined peripheral sealing way. In practice, the predetermined peripheral sealing way can be a sealing way as shown inFIG. 7 that providesannular supports 132 atnodes 131 of thePZT actuator 13, a sealing way as shown inFIG. 8 that providesannular supports 132 at aperiphery 133 of thePZT actuator 13, or a sealing way as shown inFIG. 9 that providesannular bonding 132 at theperiphery 133 of thePZT actuator 13. It should be noted that different sealing ways would cause different state appearance of thePZT actuator 13. However, for thesupports 132 in all three cases stand on themembrane 12, so different sealing ways of thePZT actuator 13 can only render minor difference in state appearance of thePZT actuator 13. That is to say that the configuration of thePZT actuator 13 shown inFIG. 5 orFIG. 6 can still prevail no matter what kind of the sealing way is applied. - Referring now to
FIG. 10 , an enlarged cross-sectional view of thePZT actuator 13 of the present invention is shown. ThePZT actuator 13 can include aPZT plate 134 and acopper plate 136 layered under thePZT plate 135. In operation, for thePZT plate 134 and thecopper plate 135 need to connect withrespective electrodes 138 so as to act as a positive end and a negative end, respectively, so aninsulation layer 136 is introduced to be sandwiched between thePZT plate 134 and thecopper plate 135 for avoiding possible electrically shorting in between. On the other hand, to prevent thecopper plate 135 from directly contacting the fluid in themain cavity 111 of thePDMS body 11, abottom layer 137 coated or layered under thecopper plate 135 is provided to prohibit such direct contact between thecopper plate 135 and a fluid in themain cavity 111. - Preferably in the present invention, both the
insulation layer 136 and thebottom layer 137 can be made of the PDMS material. By introducing the elastic PDMS material to wrap thecopper plate 135 in a thin layer wise, thecopper plate 135 can then have better flexibility to satisfy the concave and convex operations of the PDMS valve-less micro pump. Thereby, the throughput of the PDMS valve-less micro pumps can be increased. - In the present invention, prior to mounting the
PZT actuator 13 onto themembrane 12, the bottom of thePZT actuator 13 can be brushed and thus coat a layer of a PDMS solution for adhering thePZT actuator 13. - In the present invention, for all the inner surfaces of the formed channel structures in the PDMS body are made as PDMS surfaces, the applicability of the PDMS valve-less micro pumps in the biomedical or chemical industry can be increased.
- By providing the PDMS valve-less micro pump structure and the molding method for producing the same in accordance with the present invention, the production of the micro pumps can be simply, low cost, and flexible, and the product can be more bio-compatible.
- While the present invention has been particularly shown and described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be without departing from the spirit and scope of the present invention.
Claims (23)
1. A PDMS valve-less micro pump structure, comprising:
a PDMS body, having a contour surface, the contour surface further being curved to form thereof:
a main cavity;
a lead-in cavity, located aside to the main cavity and in spatial communication with the main cavity through a lead-in nozzle; and
a lead-out cavity, located also aside to the main cavity and in spatial communication with the main cavity through a lead-out nozzle;
a membrane having a center hole, layered on top of the PDMS body by sealing the lead-in cavity, the lead-in nozzle, the lead-out nozzle and the lead-out cavity but having the center hole positioned on top of the main cavity; and
a PZT actuator, mounted on top of the membrane by a predetermined peripheral sealing way so as to seal the main cavity.
2. The PDMS valve-less micro pump structure according to claim 1 , wherein said membrane is made of a PDMS material.
3. The PDMS valve-less micro pump structure according to claim 1 , wherein said membrane has a thickness ranged between 200 μm and 300 μm.
4. The PDMS valve-less micro pump structure according to claim 1 , wherein said predetermined peripheral sealing way is a sealing way having supports at nodes of said PZT actuator.
5. The PDMS valve-less micro pump structure according to claim 1 , wherein said predetermined peripheral sealing way is a sealing way having supports at a periphery of said PZT actuator.
6. The PDMS valve-less micro pump structure according to claim 1 , wherein said predetermined peripheral sealing way is a sealing way having bonding at a periphery of said PZT actuator.
7. The PDMS valve-less micro pump structure according to claim 1 , wherein said PZT actuator has a bottom coated with a PDMS material.
8. The PDMS valve-less micro pump structure according to claim 1 , wherein said PZT actuator further comprising:
a PZT plate;
a copper plate, layered under the PZT plate;
an insulation layer, sandwiched between the PZT plate and the copper plate to avoid electrically shorting in between; and
a bottom layer, layered under the copper plate to prohibit direct contact between the copper plate and a fluid in said main cavity.
9. The PDMS valve-less micro pump structure according to claim 8 , wherein said insulation layer is made of a PDMS material.
10. The PDMS valve-less micro pump structure according to claim 8 , wherein said bottom layer is made of a PDMS material.
11. A method for producing a PDMS valve-less micro pump structure, comprising the steps of:
preparing a die, the die having a profiling protrusion forming on a top surface thereof;
pouring a PDMS material in a fluid state onto the top surface of the die to cover fully the profiling protrusion;
performing a predetermined baking process on the die and the PDMS material to solidify the PDMS material; and
removing the solidified PDMS material from the die to complete a production of the PDMS valve-less micro pump structure;
wherein the profiling protrusion of the die is characterized to form concavely a main cavity, a lead-in cavity, a lead-in nozzle, a lead-out cavity and a lead-out nozzle in the PDMS material.
12. The method for producing a PDMS valve-less micro pump according to claim 11 , wherein said die is made of a PMMA material.
13. The method for producing a PDMS valve-less micro pump according to claim 11 , wherein said PDMA material in the fluid state is prepared by mixing a Sylgard 184 base and a Sylgard 184 agent at a 10:1 ratio.
14. The method for producing a PDMS valve-less micro pump according to claim 13 , wherein said Sylgard 184 base and said Sylgard 184 agent are blended by a magnetic stirrer by stirring a predetermined period at a predetermined speed and then slowing to de-bubble said PDMS material.
15. The method for producing a PDMS valve-less micro pump according to claim 11 , wherein said predetermined baking process is a vacuum-baking process including a 20-30 minute low-pressure de-bubbling step, a heating step at 110-130° C. for 2-4 hours, and a free cooling step.
16. A method for producing a PDMS valve-less micro pump, comprising the steps of:
preparing a PDMS body, the PDMS body having a main cavity, a lead-in cavity, a lead-in nozzle, a lead-out cavity and a lead-out nozzle formed concavely on a contour surface thereof;
adhering a membrane having a center hole onto the contour surface of the PDMS body by sealing the lead-in cavity, the lead-in nozzle, the lead-out nozzle and the lead-out cavity but having the center hole positioned on top of the main cavity;
mounting a PZT actuator onto the membrane by a predetermined peripheral sealing way so as to seal the main cavity; and
performing a baking process to solidify the combination of the PDMS body, the membrane, and the PZT actuator.
17. The method for producing a PDMS valve-less micro pump according to claim 16 , wherein said membrane is made of a PDMS material.
18. The method for producing a PDMS valve-less micro pump according to claim 16 , wherein said membrane has a thickness ranged between 200 μm and 300 μm.
19. The method for producing a PDMS valve-less micro pump according to claim 16 , wherein said predetermined baking process is a vacuum-baking process including a heating step at 110-130° C. for 2-4 hours.
20. The method for producing a PDMS valve-less micro pump according to claim 16 , wherein said predetermined peripheral sealing way is a sealing way having supports at nodes of said PZT actuator.
21. The method for producing a PDMS valve-less micro pump according to claim 16 , wherein said predetermined peripheral sealing way is a sealing way having supports at a periphery of said PZT actuator.
22. The method for producing a PDMS valve-less micro pump according to claim 16 , wherein said predetermined peripheral sealing way is a sealing way having bonding at a periphery of said PZT actuator.
23. The method for producing a PDMS valve-less micro pump according to claim 16 , wherein said “mounting a PZT actuator onto the membrane by a predetermined peripheral sealing way” is performed by coating a PDMS solution to a bottom of said PZT actuator.
Applications Claiming Priority (2)
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TW093130898A TWI256374B (en) | 2004-10-12 | 2004-10-12 | PDMS valve-less micro pump structure and method for producing the same |
TW93130898 | 2004-10-12 |
Publications (1)
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US20060083639A1 true US20060083639A1 (en) | 2006-04-20 |
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US11/041,956 Abandoned US20060083639A1 (en) | 2004-10-12 | 2005-01-26 | PDMS valve-less micro pump structure and method for producing the same |
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