TW200609389A - A swing electric plating apparatus and a method for electric plating articles - Google Patents

A swing electric plating apparatus and a method for electric plating articles

Info

Publication number
TW200609389A
TW200609389A TW093127393A TW93127393A TW200609389A TW 200609389 A TW200609389 A TW 200609389A TW 093127393 A TW093127393 A TW 093127393A TW 93127393 A TW93127393 A TW 93127393A TW 200609389 A TW200609389 A TW 200609389A
Authority
TW
Taiwan
Prior art keywords
electric plating
articles
tank
swing
driving mechanism
Prior art date
Application number
TW093127393A
Other languages
Chinese (zh)
Other versions
TWI255868B (en
Inventor
Jiun-Shian Yu
Wu-Chin Chien
Original Assignee
Phoenix Prec Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Phoenix Prec Technology Corp filed Critical Phoenix Prec Technology Corp
Priority to TW93127393A priority Critical patent/TWI255868B/en
Publication of TW200609389A publication Critical patent/TW200609389A/en
Application granted granted Critical
Publication of TWI255868B publication Critical patent/TWI255868B/en

Links

Abstract

A swing electric plating apparatus and a method for electric plating articles are proposed. The swing electric plating apparatus includes a tank for containing electrolyte, at least a cathode structure disposed in the tank for coupling articles to be plated, at least an anode structure is disposed in the tank for retaining plating metal, a first driving mechanism for driving the cathode structure to move in a first direction and a second driving mechanism for driving the first driving mechanism to move in a second direction. By this arrangement, an article such as a circuit through vias and blind vias coupled to the cathode structure is capable of being reciprocally moved in two different directions same time for electric plating, allowing the article to have a uniform plated surface.
TW93127393A 2004-09-10 2004-09-10 A swing electric plating apparatus and a method for electric plating articles TWI255868B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93127393A TWI255868B (en) 2004-09-10 2004-09-10 A swing electric plating apparatus and a method for electric plating articles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93127393A TWI255868B (en) 2004-09-10 2004-09-10 A swing electric plating apparatus and a method for electric plating articles

Publications (2)

Publication Number Publication Date
TW200609389A true TW200609389A (en) 2006-03-16
TWI255868B TWI255868B (en) 2006-06-01

Family

ID=37613998

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93127393A TWI255868B (en) 2004-09-10 2004-09-10 A swing electric plating apparatus and a method for electric plating articles

Country Status (1)

Country Link
TW (1) TWI255868B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113718308A (en) * 2021-08-31 2021-11-30 浙江同芯祺科技有限公司 Wafer double-side electroplating device and process

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI397615B (en) * 2010-04-01 2013-06-01 Zhen Ding Technology Co Ltd Plating apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113718308A (en) * 2021-08-31 2021-11-30 浙江同芯祺科技有限公司 Wafer double-side electroplating device and process

Also Published As

Publication number Publication date
TWI255868B (en) 2006-06-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees