TW200604389A - Ecmp system - Google Patents
Ecmp systemInfo
- Publication number
- TW200604389A TW200604389A TW094103216A TW94103216A TW200604389A TW 200604389 A TW200604389 A TW 200604389A TW 094103216 A TW094103216 A TW 094103216A TW 94103216 A TW94103216 A TW 94103216A TW 200604389 A TW200604389 A TW 200604389A
- Authority
- TW
- Taiwan
- Prior art keywords
- ecmp
- correction
- drop
- electrode
- polishing
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Automation & Control Theory (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
An improved electrochemical IR calculation and correction system allows for the precise measurement and control of the interfacial voltage drop at an electrode double layer. In an exemplary use of the invention, this improved IR correction ability allows ECMP to be used for precise surface polishing that would otherwise be impractical with ECMP. The system according to an embodiment of the invention comprises a working electrode, a counter electrode, and a reference electrode. An electrical perturbation is applied to the system and a unique IR calculation circuit is used to determine the IR drop. In an embodiment of the invention applicable to ECMP, an IR correction is provided such that the polishing at the surface of interest is precisely controlled despite the IR drop in the system.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/769,936 US20050167266A1 (en) | 2004-02-02 | 2004-02-02 | ECMP system |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200604389A true TW200604389A (en) | 2006-02-01 |
Family
ID=34808221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094103216A TW200604389A (en) | 2004-02-02 | 2005-02-02 | Ecmp system |
Country Status (4)
Country | Link |
---|---|
US (1) | US20050167266A1 (en) |
JP (1) | JP2007519830A (en) |
TW (1) | TW200604389A (en) |
WO (1) | WO2005075712A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE502004006578D1 (en) * | 2004-06-30 | 2008-04-30 | Siemens Ag | Method and device for surface treatment of a component |
CA2840640C (en) * | 2011-11-07 | 2020-03-24 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods |
CN110528039B (en) * | 2019-07-31 | 2020-11-17 | 浙江大学 | Micro-nano structure local electrodeposition device based on weak ionic current detection monitoring |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3838032A (en) * | 1972-02-01 | 1974-09-24 | Technion Res & Dev Foundation | Compensated polarograph |
US4123335A (en) * | 1976-02-03 | 1978-10-31 | Seyl Rogert G | Voltage measurement with spaced reference electrode |
US5256565A (en) * | 1989-05-08 | 1993-10-26 | The United States Of America As Represented By The United States Department Of Energy | Electrochemical planarization |
US5180968A (en) * | 1991-03-01 | 1993-01-19 | Research Foundation Of State University Of New York | Method and apparatus for compensation of double layer charging current in electrochemical cells |
US5217586A (en) * | 1992-01-09 | 1993-06-08 | International Business Machines Corporation | Electrochemical tool for uniform metal removal during electropolishing |
US5575706A (en) * | 1996-01-11 | 1996-11-19 | Taiwan Semiconductor Manufacturing Company Ltd. | Chemical/mechanical planarization (CMP) apparatus and polish method |
US6990422B2 (en) * | 1996-03-27 | 2006-01-24 | World Energy Labs (2), Inc. | Method of analyzing the time-varying electrical response of a stimulated target substance |
US5980708A (en) * | 1997-02-12 | 1999-11-09 | Champagne; Gilles Y. | High sensitivity multiple waveform voltammetric instrument |
US5807165A (en) * | 1997-03-26 | 1998-09-15 | International Business Machines Corporation | Method of electrochemical mechanical planarization |
US5911619A (en) * | 1997-03-26 | 1999-06-15 | International Business Machines Corporation | Apparatus for electrochemical mechanical planarization |
AU1468199A (en) * | 1997-11-25 | 1999-06-15 | Johns Hopkins University, The | Electrochemical-control of abrasive polishing and machining rates |
US6395152B1 (en) * | 1998-07-09 | 2002-05-28 | Acm Research, Inc. | Methods and apparatus for electropolishing metal interconnections on semiconductor devices |
US6413388B1 (en) * | 2000-02-23 | 2002-07-02 | Nutool Inc. | Pad designs and structures for a versatile materials processing apparatus |
DE19900173C1 (en) * | 1999-01-05 | 2000-05-31 | Max Planck Gesellschaft | Process for electrochemically processing a workpiece comprises measuring the geometry of the intermediate space between both electrodes so that only the points of the zones to be processed lie within a specified maximum distance |
US7160421B2 (en) * | 1999-04-13 | 2007-01-09 | Semitool, Inc. | Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece |
US6299741B1 (en) * | 1999-11-29 | 2001-10-09 | Applied Materials, Inc. | Advanced electrolytic polish (AEP) assisted metal wafer planarization method and apparatus |
US6368190B1 (en) * | 2000-01-26 | 2002-04-09 | Agere Systems Guardian Corp. | Electrochemical mechanical planarization apparatus and method |
US7059948B2 (en) * | 2000-12-22 | 2006-06-13 | Applied Materials | Articles for polishing semiconductor substrates |
US7066800B2 (en) * | 2000-02-17 | 2006-06-27 | Applied Materials Inc. | Conductive polishing article for electrochemical mechanical polishing |
US6537144B1 (en) * | 2000-02-17 | 2003-03-25 | Applied Materials, Inc. | Method and apparatus for enhanced CMP using metals having reductive properties |
US6375549B1 (en) * | 2000-03-17 | 2002-04-23 | Motorola, Inc. | Polishing head for wafer, and method for polishing |
US6478936B1 (en) * | 2000-05-11 | 2002-11-12 | Nutool Inc. | Anode assembly for plating and planarizing a conductive layer |
US6811680B2 (en) * | 2001-03-14 | 2004-11-02 | Applied Materials Inc. | Planarization of substrates using electrochemical mechanical polishing |
US6592742B2 (en) * | 2001-07-13 | 2003-07-15 | Applied Materials Inc. | Electrochemically assisted chemical polish |
US6951599B2 (en) * | 2002-01-22 | 2005-10-04 | Applied Materials, Inc. | Electropolishing of metallic interconnects |
-
2004
- 2004-02-02 US US10/769,936 patent/US20050167266A1/en not_active Abandoned
-
2005
- 2005-01-27 JP JP2006551430A patent/JP2007519830A/en active Pending
- 2005-01-27 WO PCT/US2005/002433 patent/WO2005075712A2/en active Application Filing
- 2005-02-02 TW TW094103216A patent/TW200604389A/en unknown
Also Published As
Publication number | Publication date |
---|---|
JP2007519830A (en) | 2007-07-19 |
US20050167266A1 (en) | 2005-08-04 |
WO2005075712A2 (en) | 2005-08-18 |
WO2005075712A3 (en) | 2006-04-27 |
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