TW200602561A - Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same - Google Patents
Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the sameInfo
- Publication number
- TW200602561A TW200602561A TW094106978A TW94106978A TW200602561A TW 200602561 A TW200602561 A TW 200602561A TW 094106978 A TW094106978 A TW 094106978A TW 94106978 A TW94106978 A TW 94106978A TW 200602561 A TW200602561 A TW 200602561A
- Authority
- TW
- Taiwan
- Prior art keywords
- same
- pumping system
- vacuum pumping
- transferring substrate
- driving method
- Prior art date
Links
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- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Environmental Sciences (AREA)
- Marine Sciences & Fisheries (AREA)
- Mechanical Engineering (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Animal Husbandry (AREA)
- Biodiversity & Conservation Biology (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve therebetween, and being alternately under a vacuum condition and under an atmospheric condition.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20040015544 | 2004-03-08 | ||
KR20040017627 | 2004-03-16 | ||
KR20040017832 | 2004-03-17 | ||
KR1020050014819A KR101118914B1 (en) | 2004-03-08 | 2005-02-23 | Vacuum pumping system and method, and process apparatus using the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200602561A true TW200602561A (en) | 2006-01-16 |
TWI370874B TWI370874B (en) | 2012-08-21 |
Family
ID=37148687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094106978A TWI370874B (en) | 2004-03-08 | 2005-03-08 | Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR101118914B1 (en) |
TW (1) | TWI370874B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113161264A (en) * | 2021-04-13 | 2021-07-23 | 上海广川科技有限公司 | Sealing air pumping and discharging system and method for wafer transmission |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100790789B1 (en) * | 2006-07-03 | 2008-01-02 | 코닉시스템 주식회사 | Semiconductor manufacturing apparatus |
KR100839189B1 (en) * | 2007-03-06 | 2008-06-17 | 세메스 주식회사 | Semiconductor manufacturing apparatus and method for transporting substrate to process chamber of the semiconductor manufacturing apparatus |
US20180061679A1 (en) * | 2016-08-25 | 2018-03-01 | Applied Materials, Inc. | Multi chamber processing system with shared vacuum system |
KR102241606B1 (en) * | 2019-06-27 | 2021-04-20 | 세메스 주식회사 | Apparatus and method for treating substrate |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100274308B1 (en) * | 1994-05-23 | 2001-01-15 | 히가시 데쓰로 | Multi Chamber Processing System |
KR100252213B1 (en) * | 1997-04-22 | 2000-05-01 | 윤종용 | Apparatus for manufacturing semiconductor device and method of manufacturing semiconductor device using the same |
KR100417245B1 (en) * | 2001-05-02 | 2004-02-05 | 주성엔지니어링(주) | Cluster tool for manufacturing a wafer |
-
2005
- 2005-02-23 KR KR1020050014819A patent/KR101118914B1/en not_active IP Right Cessation
- 2005-03-08 TW TW094106978A patent/TWI370874B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113161264A (en) * | 2021-04-13 | 2021-07-23 | 上海广川科技有限公司 | Sealing air pumping and discharging system and method for wafer transmission |
Also Published As
Publication number | Publication date |
---|---|
KR101118914B1 (en) | 2012-02-27 |
TWI370874B (en) | 2012-08-21 |
KR20060043107A (en) | 2006-05-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |