TW200600773A - Automatic optical inspection system for production line of TFT LCD panel manufacturing process and light source distribution method - Google Patents

Automatic optical inspection system for production line of TFT LCD panel manufacturing process and light source distribution method

Info

Publication number
TW200600773A
TW200600773A TW093117667A TW93117667A TW200600773A TW 200600773 A TW200600773 A TW 200600773A TW 093117667 A TW093117667 A TW 093117667A TW 93117667 A TW93117667 A TW 93117667A TW 200600773 A TW200600773 A TW 200600773A
Authority
TW
Taiwan
Prior art keywords
panel
clean room
light source
inspected
manufacturing process
Prior art date
Application number
TW093117667A
Other languages
Chinese (zh)
Other versions
TWI233991B (en
Inventor
jia-qi Qian
Yan-Song Lin
xian-zhang Cai
Ren-Xian Ni
Original Assignee
Hawkeye Vision Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hawkeye Vision Technology Co Ltd filed Critical Hawkeye Vision Technology Co Ltd
Priority to TW093117667A priority Critical patent/TWI233991B/en
Application granted granted Critical
Publication of TWI233991B publication Critical patent/TWI233991B/en
Priority to KR1020050052255A priority patent/KR20060049624A/en
Publication of TW200600773A publication Critical patent/TW200600773A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

The present invention provides an automated optical inspection system from production line of TFT LCD (thin film transistor liquid crystal display) panel manufacturing process, which includes a mini clean room, at least a gantry disposed in the mini clean room and having a camera thereon, at least a particulate air filter disposed on an upper top cover of the mini clean room, a panel conveyor disposed under the camera for loading the panel to be inspected, at least a lamp house providing at least a light source for the illumination necessary for photograph, and at least a light guide for guiding the light irradiated from the lamp house to the place at which the panel to be inspected on the panel conveyor in the mini clean room is located. When the light guided by the light guide illuminates on the panel to be inspected, the panel to be inspected can be determined if any foreign matter or defect presents thereon by means of the image acquired by the camera. Besides, in case of lamp house failure, it is not necessary to open the mini clean room for light source replacement. Furthermore, the present invention provides a light source distribution method of the automatic optical inspection system for production line of TFT LCD panel manufacturing process.
TW093117667A 2004-06-18 2004-06-18 Automatic optical inspection system for production line of TFT LCD panel manufacturing process and light source distribution method TWI233991B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW093117667A TWI233991B (en) 2004-06-18 2004-06-18 Automatic optical inspection system for production line of TFT LCD panel manufacturing process and light source distribution method
KR1020050052255A KR20060049624A (en) 2004-06-18 2005-06-17 Methods of light source installation of an automatic optical inspection machine for the tft lcd panel production lines

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW093117667A TWI233991B (en) 2004-06-18 2004-06-18 Automatic optical inspection system for production line of TFT LCD panel manufacturing process and light source distribution method

Publications (2)

Publication Number Publication Date
TWI233991B TWI233991B (en) 2005-06-11
TW200600773A true TW200600773A (en) 2006-01-01

Family

ID=36592681

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093117667A TWI233991B (en) 2004-06-18 2004-06-18 Automatic optical inspection system for production line of TFT LCD panel manufacturing process and light source distribution method

Country Status (2)

Country Link
KR (1) KR20060049624A (en)
TW (1) TWI233991B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI507679B (en) * 2011-05-30 2015-11-11 Tokyo Electron Ltd A substrate inspection apparatus, a substrate inspection method, and a memory medium
TWI615062B (en) * 2017-05-16 2018-02-11 廣達電腦股份有限公司 Fault detection devices and fault detection methods

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108107614A (en) * 2017-12-28 2018-06-01 深圳市华星光电半导体显示技术有限公司 Show inspection method and display check device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI507679B (en) * 2011-05-30 2015-11-11 Tokyo Electron Ltd A substrate inspection apparatus, a substrate inspection method, and a memory medium
TWI615062B (en) * 2017-05-16 2018-02-11 廣達電腦股份有限公司 Fault detection devices and fault detection methods

Also Published As

Publication number Publication date
KR20060049624A (en) 2006-05-19
TWI233991B (en) 2005-06-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees