200534958 ⑴ 玖、發明說明 【發明所屬之技術領域】 本發明，是關於將硏磨粒投射衝突於大型零件的表面 來進行硏磨的大型零件的硏磨方法及使用於此方法的硏磨 粒。 【先前技術】 具代表性的大型零件有如蒸氣渦輪或蒸氣渦輪，特別 是動靜翼、渦輪轉子、流體通路部的零件（蒸热閥、蒸氣 管、交叉管、渦輪入口部、出口部、噴嘴盒內部），其表 面粗度的狀態因會大大影響渦輪性能，所以需藉由硏磨改 善這些的表面狀態。 在此，大型零件是以蒸氣渦輪爲例，將其槪略結構由 第6圖及第7圖說明。 第7圖是將蒸氣渦輪整體槪略顯示的剖面圖。在渦輪 轉子1中，約百枚前後的動翼是植設在其周方向而形成翼 列的同時，此翼列，依據通過此的蒸氣的壓力及溫度，使 動翼1 a的軸方向的長度相異且相互有數列程度間隔地配 設。 一方面，在渦輪外殼2中是配設有如第6圖所示的噴嘴 隔膜3，配置於前述各翼列間。 噴嘴隔膜3，是由噴嘴隔膜內輪4及噴嘴隔膜外輪5形 成，靜翼6被挾持其間。 而且，藉由設置渦輪外殼2，在渦輪轉子1的軸方向且 -5- 200534958 (2) 在前述翼列間配設有噴嘴隔膜3的靜翼6 ° 其結果，動翼1 a及靜翼6是對於渦輪轉子1的軸方向 交互並列，由此動翼及靜翼的1組的組合而形成段落° 藉由這將種段落數段並列，而形成高壓渦輪7、中壓 渦輪8、低壓渦輪9。 接著，說明這種蒸氣渦輪的蒸氣的流動。 在第7圖，從無圖示鍋爐導入的高溫高壓的蒸氣，最 初被送出至高壓渦輪，熱能量是藉由前述各段落變換成機 械地的旋轉能量，使高壓渦輪7旋轉。 高壓渦輪7的蒸氣，再度由鍋爐內的再熱器再成爲高 溫高壓的蒸氣，導入至中壓渦輪。 在此，旋轉中壓渦輪8而產生的蒸氣’是就這樣地排 氣至交叉管1 〇並流動其內部而導入低壓渦輪9。 被導入至低壓渦輪的蒸氣，是與前述同樣，在旋轉低 壓渦輪9之後，排氣至復水器Π ’在此凝縮復水而變回水 。此復水是再度返回至鍋爐而成爲蒸氣’導入渦輪地返覆 循環。 這種結構的蒸氣渦輪，爲了提高其性能，是需要使渦 輪零件的表面粗度極少地硏磨，來下降蒸氣流動時的流路 阻力。 第8圖，是顯示蒸氣渦輪的熱効率及通路部表面粗度 的關係圖，目前的設計規格的表面粗度Ry6.3的段落的效 率爲1 〇〇的情況時，進一步改善表面粗度時的段落效率。 從此圖可了解，藉由讓通過由動翼及靜翼所構成的段 -6 - 200534958 (3) 落內的蒸氣的部分更平滑地精整，就可獲得比目前約8 5 % 的效率改善。 目前，由各式各樣的手段，雖進行蒸氣渦輪的效率改 善進一步進行發電效率的改善用的技術開發的，但是不需 要這種大的設計變更或機器的改造的方法是受到屬目被， 已經在實機被開始適用。 但是，例如動翼1根是超過1 m等，其形狀非常複雜， 因爲必需硏磨狭隘的部分，所以自動化或機械化困難。 因此，習知的渦輪零件的硏磨作業，是由壓縮空氣或 電動的砂輪機等的旋轉工具、或者是具硏磨效果的液體、 紙、布、化學纖維等的拋光輪硏磨1來進行手作業硏磨。 但是，在這種渦輪零件的硏磨方法中，需要很多的成 本及時間。 最近的被硏磨材的硏磨方法，是有藉由壓縮空氣投射 陶瓷系的投射材來硏磨被硏磨構件的表面的噴砂法。 但是，此噴砂法，對於投射範圍全域，表面的洗淨、 膜等的除去的處理雖可能，但是加工性佳的反面，表面的 減肉量多的話，表面粗度會悪化，且有灰塵等的環境的問 題。特別是如渦輪零件的表面粗度，要精整成Ry6.3或是 Ral .0以下的表面粗度是非常困難的。 一方面，對於蒸氣渦輪是在每固定期間進行定期檢點 ，此時是檢查高溫的蒸氣通過的內部的動翼1 a或靜翼6的 部分。 在這種蒸氣中，包含微量的氧化水垢的不純物，其會 200534958 (4) 隨著長期運轉而堆積在前述動翼la或靜翼6。因此氧化皮 膜是多附著於其表面。 而且，這些的氧化水垢或氧化皮膜，是會使定期檢點 時進行的非破壞檢查的精度顯著低下。即，非破壞檢查， 因爲是將液體從表面浸透至內部，或照射X線或超音波 等從內部的反射波等檢查內部的狀態，成爲內部資訊的窗 的表面的粗度的狀態差的話，這些內部的資訊會由表面打 亂，使檢查精度低下。 因此，在定期檢點時的檢查中，一定需將這些氧化水 垢或氧化皮膜除去後再進行，爲了使其表面粗度極少而需 進行手作業。因此耗費時間及勞力，且人手作業的表面的 粗度的程度相異，檢查精度也不一定佳。 進一步，附著於上述動翼1 a及靜翼6的氧化水垢等， 因爲會變化設計時的翼剖面形狀，所以蒸氣渦輪的性能也 會低落。因此，在定期檢點時，雖會進行這些的氧化水垢 等剝取得作業，但是特別是翼之後緣端因爲是非常地薄的 構造，所在上述噴砂法中反而會增加變形。 但是，工件表面的硏削方法，在由彈力性的多孔質的 植物纖維構成的擔體，將包含於植物纖維的脂肪分或是糖 分作爲粘接劑附著於硏削粉的磁粒，混合硏削液並從傾斜 多數噴射並與工件表面衝突，一邊將擔體塑性變形一邊使 上述砥粒滑動於工件表面，藉由硏削粉將工件表面精整（ 例如，有專利第29 5 7492號公報）。 200534958 (5) 【發明內容】 但是，在此硏削方法中，雖適合如齒科補綴物 的工件硏磨中，但是如渦輪零件的大形，且蒸氣流 性上，其形狀非常複雜，硏磨狭隘的部分的表面是 〇 本發明的目的，是提供一種使硏磨困難的包含 件的狭隘部、嵌合部的表面硏磨可能，且不會悪化 磨，將表面的氧化皮膜除去可能，可以達成非破壞 品質提高的是大型零件的硏磨方法及使用於此方法 粒。 第1發明，是大型零件的硏磨方法，其特徵爲 將使作爲硏磨材的投射添付於砥粒材的周圍或是分 投射材的內部的0.1 m m以上1 0.0 m m以下的粒狀體 粒，以分速600m以上3 8 00m以下且單位面積成 3 00cm3/cm2.sec的量地吹附於被硏磨面，使前述硏 此被硏磨面衝突，並藉由滑動而使添付或是分散於 磨粒的砥粒硏磨前述硏磨面。 第2發明，如第1發明的大型零件的硏磨方法， 前述投射材，是由比重爲0.5〜1.8Xl(T3kg/Cm3、彈 10〜200kg/cm3的合成纖維、合成樹脂、合成橡膠 成的石油化學系高分子材料或是天然橡膠、植物性 由植物性種子等形成的天然素材所構成。 第3發明，如第1或2發明的大型零件的硏磨方 中，前述硏磨粒，是對於被硏磨面的法線方向從3 ( 的小型 入的特 困難的 渦輪零 表面硏 檢查的 的硏磨 :藉由 散於此 的硏磨 ，爲5〜 磨粒與 前述硏 其中， 性率爲 等所形 纖維、 法，其 丨。〜8 0 -9 - 200534958 (6) °的方向吹附。 第4發明 ，前述砥粒， 第5發明 其中，投射材 氯、硫酸、二 分所構成。 第6發明 磨粒，其特徵 的周圍添付此 、及在此投射 爲硏磨材的砥 的任一的方法 第7發明 的硏磨粒，其 的任一。 第8發明 的硏磨粒，其 硫酸、二氧化 構成。 本發明， 合部表面硏磨 於表面的氧化 ，是如第1發明的大型零件的硏磨方法，其中 是 SiC、Si〇2、Al2〇3、Zr02的任一。 ，是如第1或2發明的大型零件的硏磨方法’ 及砥粒，前述投射材及前述砥粒，是至少由 氧化矽、硼、鐵、銅、鎳、鉻、鈷以外的成 ，使用於第2發明的大型零件的硏磨方法的硏 爲：前述硏磨粒，是由：在成爲核的投射材 投射材本身具有粘接力的作爲硏磨材的砥粒 材周圍塗抹具有彈性的接合材並藉此添付作 粒、及在此投射材內將硏磨材砥粒分散添付 所形成。 ，是如第6發明的使用於大型零件的硏磨方法 中，前述砥粒，是 SiC、Si〇2、Al2〇3、Zr02 ，是如第6發明的使用於大型零件的硏磨方法 中，前述投射材及前述砥粒，是至少由氯、 矽、硼、鐵、銅、鎳、鉻、鈷以外的成分所 是將硏磨困難的包含大型零件的狭隘部、嵌 可能，且不會悪化表面硏磨面，可除去成長 皮膜，而可達成非破壞檢查的品質提高。200534958 ⑴ 发明, description of the invention [Technical field to which the invention belongs] The present invention relates to a honing method for a large part which hones a projected abrasive grain against a surface of the large part and hones the grain, and a honing grain used in the method. [Prior art] Typical large parts are steam turbines or steam turbines, in particular parts of moving and stationary wings, turbine rotors, and fluid passages (steam heating valves, steam pipes, cross pipes, turbine inlets, outlets, nozzle boxes (Internal), because the surface roughness state will greatly affect the turbine performance, it is necessary to improve these surface conditions by honing. Here, a large-size component is a steam turbine as an example, and its outline structure will be described with reference to FIGS. 6 and 7. FIG. 7 is a cross-sectional view showing the entire steam turbine. In the turbine rotor 1, while about a hundred front and rear moving wings are planted in the circumferential direction to form a wing row, this wing row makes the axial direction of the moving wing 1 a according to the pressure and temperature of the steam passing through it. The lengths are different and are arranged at intervals of a series of intervals. On the other hand, a nozzle diaphragm 3 as shown in Fig. 6 is arranged in the turbine casing 2 and is arranged between the aforementioned wing rows. The nozzle diaphragm 3 is formed by a nozzle diaphragm inner wheel 4 and a nozzle diaphragm outer wheel 5 with a stationary blade 6 held therebetween. Furthermore, by providing the turbine casing 2, the stationary blade 6 of the nozzle diaphragm 3 is arranged between the wing rows in the axial direction of the turbine rotor 1 and the 2005-5-958 (2). As a result, the movable blade 1a and the stationary blade 6 is the parallel rotation of the turbine rotor 1 in the axial direction, and a paragraph is formed by the combination of a moving wing and a static wing. By arranging these paragraphs and paragraphs in parallel, a high-pressure turbine 7, an intermediate-pressure turbine 8, and a low-pressure are formed. Turbine 9. Next, the flow of steam from such a steam turbine will be described. In Fig. 7, the high-temperature and high-pressure steam introduced from a boiler (not shown) is initially sent to a high-pressure turbine, and the thermal energy is converted into mechanical ground rotation energy by the foregoing paragraphs to rotate the high-pressure turbine 7. The steam of the high-pressure turbine 7 is again converted into high-temperature and high-pressure steam by the reheater in the boiler, and is introduced into the medium-pressure turbine. Here, the steam 'generated by rotating the intermediate-pressure turbine 8 is exhausted to the cross pipe 10 as it is, and flows into the inside thereof to be introduced into the low-pressure turbine 9. The steam introduced into the low-pressure turbine is the same as that described above. After the low-pressure turbine 9 is rotated, the exhaust gas is discharged to the water reclaimer Π ', where it is condensed and rehydrated to return to water. This re-water is returned to the boiler to become steam 'and is introduced into the turbine in a recirculation cycle. In order to improve the performance of the steam turbine having such a structure, it is necessary to hob the surface roughness of the turbine parts to a minimum to reduce the flow path resistance when the steam flows. FIG. 8 is a diagram showing the relationship between the thermal efficiency of the steam turbine and the surface roughness of the passage portion. When the efficiency of the paragraph of the surface roughness Ry6.3 of the current design specification is 100, the surface roughness is further improved. Paragraph efficiency. It can be understood from this figure that by smoothing the part of the vapor passing through the segment composed of the moving and static wings -6-200534958 (3), an efficiency improvement of about 85% can be obtained. At present, although various methods have been used to improve the efficiency of steam turbines and further develop the technology for improving power generation efficiency, methods that do not require such a large design change or machine modification are subject to the permutation. It has been applied on the real machine. However, for example, if the number of rotor blades exceeds 1 m, the shape is very complicated, and it is difficult to automate or mechanize it because it is necessary to grind a narrow part. Therefore, the conventional honing of turbine parts is performed by rotating tools such as compressed air or electric grinders, or polishing wheels 1 such as liquid, paper, cloth, and chemical fiber with honing effects. Honing by hand. However, this method of honing turbine parts requires a lot of cost and time. A recent honing method for a material to be honed is a sand blasting method for honing a surface of a member to be honed by projecting a ceramic-based projection material with compressed air. However, although this sandblasting method is possible for the entire projection range, the surface can be cleaned, and the film can be removed. However, on the reverse side with good processability, if the amount of meat on the surface is reduced, the surface roughness will be reduced, and dust will be present Environmental issues. Especially for the surface roughness of turbine parts, it is very difficult to finish the surface roughness to Ry6.3 or below Ral .0. On the one hand, for the steam turbine, periodic inspections are performed every fixed period. At this time, it is the part of the inner moving wing 1 a or static wing 6 that inspects the passage of high-temperature steam. Impurities containing a small amount of oxidized scale are contained in this vapor, which will accumulate in the aforementioned moving wing la or static wing 6 with long-term operation. Therefore, the oxide film is mostly attached to its surface. In addition, these oxidized scales or oxide films significantly reduce the accuracy of non-destructive inspections performed at regular inspections. In other words, non-destructive inspection is performed by immersing a liquid from the surface to the inside or irradiating X-rays or ultrasonic waves from the inside to reflect the internal conditions. If the state of the surface of the window that becomes internal information is poor, This internal information will be disturbed by the surface, making the inspection less accurate. Therefore, it is necessary to remove these oxidized scales or oxide coatings before performing inspections at regular inspections, and manual work is required to minimize surface roughness. Therefore, it takes time and labor, and the degree of roughness of the surface of the manual operation varies, and the inspection accuracy is not necessarily good. Furthermore, the oxidized scale and the like attached to the moving wing 1 a and the stationary wing 6 may change the shape of the wing section at the time of design, so that the performance of the steam turbine may be lowered. Therefore, during periodic inspections, these peeling operations, such as oxidized scale, are performed, but especially the trailing edge of the airfoil is extremely thin because of its extremely thin structure, which increases deformation in the above-mentioned sandblasting method. However, in the method of cutting the surface of a workpiece, fat or sugar contained in the vegetable fiber is attached to a magnetic particle of the pulverized powder as a binder on a support made of elastic porous plant fibers, and mixed with 硏The cutting fluid is sprayed from an inclined majority and collides with the surface of the workpiece. The plastic particles are slid on the surface of the workpiece while plastically deforming the support body, and the surface of the workpiece is finished by honing the powder (for example, Patent No. 29 5 7492 ). 200534958 (5) [Content of the invention] However, although this honing method is suitable for honing a workpiece such as a dental patch, the shape of the turbine part is large and the shape of the steam flow is very complicated. Grinding the surface of the narrow part is an object of the present invention, and is to provide a possible honing of the surface of the narrow part and the fitting part of the inclusion, which is difficult to hob, without honing and removing the oxide film on the surface. What can achieve non-destructive quality improvement is the honing method for large parts and the particles used in this method. The first invention is a honing method for a large part, which is characterized in that a granular body grain of 0.1 mm or more and 1 0.0 mm or less is added to the periphery of the honing grain material or the inside of the sub-projecting material as a honing material. At a speed of 600m above 3,800m and a unit area of 3 00cm3 / cm2.sec, it is blown to the honing surface, so that the aforementioned honing surface conflicts, and the sliding surface is used to add or The above-mentioned honing surface is honed by the honing particles dispersed in the abrasive grains. The second invention is the honing method for large parts as in the first invention. The projection material is made of synthetic fiber, synthetic resin, and synthetic rubber with a specific gravity of 0.5 to 1.8 × 1 (T3kg / Cm3, 10 to 200kg / cm3). Petrochemical polymer materials or natural rubber, plant-based natural materials formed from plant seeds, etc. In the third aspect of the honing method for large parts such as the first or second aspect, the honing grains are For the normal direction of the honing surface, the honing of the ultra-difficult turbine zero-surface honing from 3 (into the honing): The honing is scattered to 5 ~ The fiber is formed in the shape of isotopes, and it is blown in the direction of ~ 8 0 -9-200534958 (6) °. The fourth invention, the aforementioned pellets, and the fifth invention are composed of a projection material chlorine, sulfuric acid, and dichotomy. The abrasive grains of the sixth invention are characterized in that they are added to the surroundings, and a method of projecting a halide as a honing material thereon. The seventh invention of the abrasive grains is any one of them. The eighth invention of the abrasive grains is It is composed of sulfuric acid and dioxide. According to the present invention, the surface of the joint is honed to the surface Surface oxidation is the honing method for large parts as in the first invention, which is any one of SiC, Si02, Al203, and Zr02. It is the honing method for large parts as in the first or second invention ' And honing grains, the projection material and the honing grains are made of at least silicon oxide, boron, iron, copper, nickel, chromium, and cobalt, and are used in the honing method for large parts of the second invention as follows: The honing grains are formed by applying elastic bonding material around the honing material which is a honing material and having the adhesive force of the projecting material which has become the core, and adding granules therefrom. The honing material is formed by dispersing and adding particles. It is the honing method used for large parts as in the sixth invention. The aforementioned honing particles are SiC, Si〇2, Al203, and Zr02, as in the sixth invention. In the honing method used for large parts, the projection material and the honing particles are made of components other than chlorine, silicon, boron, iron, copper, nickel, chromium, and cobalt, and the large parts are difficult to hob. Narrow parts and inserts are possible, and the matte surface will not be hardened, so it can be removed and grown The film can improve the quality of non-destructive inspection.
-10- 200534958 (7) 【實施方式】 第i圖，是本發明所使用的硏磨粒的剖面構造圖。 硏磨粒1 1 0，是在中心配置成爲芯的投射材1 1 1，在其 周圍添付硏磨材砥粒1 1 2。 第2圖是將本硏磨方法的特徵槪略地顯示的圖。 硏磨粒1 1 〇，對於被硏磨面1 1 3有角度地被吹附至被硏 磨面1 1 3並衝突，硏磨粒1 1 〇是一邊彈性變形一邊在其表面 上極短時間滑行。 而且，再度對於硏磨面1 1 3有角度地濺離。 滑行於此被硏磨面1 1 3上時，添付於硏磨粒1 1 〇的表面 的砥粒U 2會硏磨被硏磨面1 1 3。從此原理，作爲硏磨粒 1 1 0的芯的投射材1 1 1，只要是比被硏磨面的材質軟，吹附 至被硏磨面11 3時可具有適度彈性地反彈的話，基本上材 質不問。 但是，本發明的對象的被硏磨材，是以大型的零件爲 對象，如其具代表的蒸氣渦輪的構成零件，如動翼、靜翼 、轉子、蒸氣閥、大口徑的蒸氣配管類等。 而且，這些的零件的硏磨作業，非放在手邊或是手持 地進行硏磨作業，一般是移動硏磨機器到有零件處爲止， 或載置於大型的作業台上進行硏磨作業。 因此，在本發明中，從先前的硏磨原理的關係，前述 硏磨粒從硏磨機器至被硏磨面爲止若無一定能量的話，完 全無法進行硏磨作業。 即，硏磨粒的比重是大者及小者相同速度吹附的情況 -11 - 200534958 (8) 時，因爲硏磨粒的比重愈大，運動能量是愈大而可飛行較 遠，可將被硏磨面設定較遠’且被硏磨面的速度不易落下 而可有效率地硏磨。 一方面，比重小者，會因空氣阻力等，到達距離短在 被硏磨面的速度也低下，爲了可以進行有效率的硏磨作業 ，需要接近被硏磨面。 在此，發明人等爲了發現本發明的硏磨方法的最適合 的投射材的物性値，而進行以下的實驗。 即，由投射材的初速爲1 45 ，投射距離（即， 被硏磨面爲止的距離）爲1 2 0 0 mm，比重0 · 5的發泡尿烷及比 重1 .7的聚鹽化亞乙烯，調查其硏磨效果。 其結果，此範圍的比重的話，硏磨效果良好。即，其 以上的比重的話，硏磨過度，反而表面變粗，一方面其以 下的比重的話，在被硏磨面的投射材的速度低下，而無法 獲得滿足的硏磨。 在此，在本發明中將投射材的比重限定爲0.5〜 1 · 8 g/cm3 〇 接著，也對於：朝被硏磨面的衝突時的變形量（即被 硏磨面的扁平率）、滑行於被硏磨面的時間、與被硏磨面 衝突後反彈程度等的彈性率，進行有關實驗。 較佳的投射材的彈性率，是依存於：對於給與其投射 材運動能量的影響（速度依存性）、及被硏磨面上的滑動時 所產生的摩擦熱的影響（溫度依存性）的2點，與被硏磨面 快速度衝突的情況時是低彈性率者，而被硏磨面的滑動時 -12- 200534958 (9) 溫度高的情況中高彈性率者，會顯示良好的硏磨効率。 且，此速度依存性及溫度依存性雖會相互影響，但是 發明人等實驗的結果，發現速度依存性是較溫度依存性更 會硏磨效果影響。 即，投射距離固定、被投射速度（初速）爲600 m/mi η的 話，即使彈性率200kg/cm2程度的較硬質，硏磨效果也較 佳，一方面，提高至投射速度（初速）3 8 0 0m/min的話，即 使彈性率lOkg/cm2程度的軟質，硏磨效果也較佳。 在此，本發明的投射材的彈性率，是限定成1 0〜 200kg/cm2的範圍。 本發明的投射材，是基本上具有彈性的話，皆使用可 能。 因此，從上述實驗的結果，多使用於工業的石油化學 系高分子材料，即，上述實驗所使用的發泡聚胺基甲酸乙 酯或聚鹽化亞乙烯、軟質氯乙烯等的合成樹脂、合成纖維 、合成橡膠等，或具有彈性的天然素材，例如軟化米粒、 絲瓜、海綿、明膠等。 對於本發明的硏磨方法因爲使用硏磨粒進行硏削，所 以與使用相同硏磨粒進行比較的情況，在進行硏磨効率更 高的硏磨作業的情況，投射速度（初速）是同一的話，硏磨 粒的噴射量多且單位時間及單位面積所衝突的硏磨粒的量 較多的一方，且，相同量的硏磨粒時投射速度是較快的一 方，是可有效率地硏磨。 在此，發明人等是爲了發現此投射速度（初速）的最適 -13- 200534958 (10) 値，而進行實驗。 第3圖，是顯示有關本發明的硏磨方法的最適合的投 射速度（初速）的實驗的結果。 圖中，縱軸是硏磨後的被硏磨面的表面粗度，橫軸是 投射材的投射速度（初速）。而且，縱軸的Ry = 6.3是現狀的 蒸氣渦輪零件的設計時的表面粗度容許値，此値以下的話 ，性能上無問題。 從此圖可了解，投射速度（初速）600m/sec未滿的話， 未見表面粗度的改善。此速度，是與使用習知的硏削作業 的陶瓷砥石的內面硏削時的下限周速一致，且即使本發明 的硏磨方法，也無法獲得顯著的硏削效果。 一方面，在投射速度（初速）3 8 00m/SeC以上時，表面 粗度的改善效果是到達限度。此速度，雖是習知的螺栓硏 削或溝硏削所使用的彈性砥石的周速的幾乎上限値，但是 在本發明的硏磨方法中，在此速度下考慮投射材會造成被 硏磨面破壞或投射裝置的構造的話，3、00 Om/sec幾乎是 上限。 在此，在本發明中，投射材的投射速度（初速）是限定 爲 600〜3800m/sec 〇 投射量的體積，是依據被硏磨物的形狀、投射距離、 硏磨粒的密度而大變化。 窄隘部的微小領域的硏磨中，減少投射量，縮小的投 射速度，由5cc/cm2.sec程度進行硏磨。 進行比較寬領域的硏磨的情況時，可確保3 00c c/cm 2 -14- 200534958 (11) .sec的投射量的話’是非常有效率。 基本上，被硏磨物是小的零件的情況’硏磨領域是狹 窄的情況時，增大投射速度並縮小投射量地進行硏磨’擔 心由硏磨所產生的變形的情況時，縮小的投射速度並增大 投射量地進行硏磨。 投射距離大的情況時，使用比重的大的硏磨粒’硏磨 效果較大。 從以上的結果，硏磨粒的比重雖變化’但是在本實施 例中特定爲單位面積5〜300cc/cm2.sec。 如此將由具有彈性的比重爲〇.5〜1.8g/cm3，彈性率爲 10〜200kg/cm2的石油化學系高分子材料（合成纖維、合成 樹脂、合成橡膠），或是具有彈性的天然素材（天然橡膠、 植物性纖維、植物性種子）的投射材及砥粒構成的硏磨粒 ，以分速600m以上3 8 00m以下的速度且單位面積5〜 30〇CC/Cm2.SeC的體積量投射，藉由衝突，可以提高被硏 磨材的表面的表面粗度。 接著，本發明的第2實施例，是說明使用於本發明的 硏磨方法的硏磨粒的製出。 成爲第1圖所示的硏磨粒1 1 〇的芯投射材1 1 1的物性値 ’是所使用如上述石油化學系高分子材料，即，上述實驗 所使用的發泡聚胺基甲酸乙酯或聚鹽化亞乙烯等的合成樹 月旨、合成纖維、合成橡膠等，或具有彈性的天然素材，例 如軟化米粒、絲瓜、海綿、明膠等。 而且，雖在這些的投射材η 1的周圍添付（附與）作爲 -15- 200534958 (12) 硏磨材的砥粒形成硏磨粒，但是其添付的方法，在本發明 中有下述4個方法。 第1硏磨粒，是利用使用於投射材11 :[的材料其本身所 具有的粘接性。即，投射材1 1 1是添加如献酸酯的可塑材 的軟質氯乙烯的情況時，其本身因具有接合性、粘接性， 所以利用其將砥粒添付（附與）於此投射材1 1 1的周圍。 第2硏磨粒，是對於投射材！ i i所使用的高分子材料無 接合性、粘接性的情況，是適用於通常的塑膠材料全般的 方法。在這種情況中，在投射材1 1 1的周圍使用具有彈性 的接合材並添付於砥粒。 具代表性的具有這種彈性的接合材，有木工用黏結劑 的1種的酢酸乙烯樹脂乳劑接合材。其硬化後呈半透明的 外觀且具有充分的彈性。 其他如尿烷系、乳劑系、合成橡膠系的接合材或含有 矽聚合物的接合材也適用可能。 且’工業上被廣泛使用的砥石的結合材的彈性黏結劑 的橡膠黏結劑、樹脂型黏結劑、蟲膠黏結劑、聚乙烯醇黏 結劑也可以適用。 第3硏磨粒，是物理地將胝粒投錨於投射材；[n，使用 靜電力附與（添付）的方法。 第4硏磨粒’是使投射材1 n由合成橡膠或天然橡膠、 合成纖維或植物纖維等的材料所構成的情況。 在上述第1至第3硏磨粒中，砥粒雖只添付於投射材 1 1 1的周圍’但是在第4硏磨粒中，製作硏磨粒時可簡單將 -16- 200534958 (13) 砥粒分散至投射材η 1的內部。 而且，即使本發明的硏磨方法的這些第1硏磨粒至第4 硏磨粒的任一，皆並非將其硏磨效果移到投射材；[i 1，而 是移到其周圍或是分散於內部的砥粒。 進一步’在本發明的硏磨方法中，並非使用習知的硏 削液等’只在硏磨粒的乾燥狀態下進行硏磨作業爲其特徵 。藉由不使用硏削液，如上述第2硏磨粒，使用怕水分的 接合材的砥粒的投射材的添付（附與）可能。 由上述方法所製出的硏磨粒的大小，是依據於被硏磨 面的狀況適宜選擇可能。 但是’如上述本發明的硏磨方法中，因將硏磨粒投射 於被硏磨面的關係，在0.1 mm以下的硏磨粒中，在微小領 域的硏磨中雖最適，但是因投射時空氣的阻力等的關係， 所以高速投射困難。 一方面，在1 〇 m m以上的硏磨粒中，反之給與被硏磨 面的破壞變大，且因爲投射裝置大型化而使作業性顯著下 降。 由此，在本發明中，硏磨粒的大小是限定爲0 . 1〜 10.0mm。 且，硏磨粒的形狀，硏磨原理上雖希望接近球狀，但 是在實質上只要是粒狀的話，工業上皆充分適用可能。 進一步，添付於作爲芯的投射材的周圍的砥粒材質， 是只要是氧化物系陶瓷、碳化物系陶瓷、鑽石等的高硬度 的話，基本上雖皆適用可能，但是在此選用工業上廣泛被 -17- 200534958 (14) 使用的 SiC、Si02、A1203、Zr02° 在上述第1至第4硏磨粒，製出硏磨效果的投射材表面 的砥粒，是藉由硏磨施工中的連續的噴射、衝突而從投射 材表面漸漸地脫落◦此磁粒的脫落所起因的硏磨效果的下 降，藉由將砥粒再度附與於投射材表面，就可充分再生。 然而，硏磨粒的大小、形狀的範圍及其化學成分如以 下也可以。 第1至第4硏磨粒的大小，對於形狀，是微小領域硏磨 用的0.2 m m至5.0 m m的範圍的粒狀，對於化學成分，投射 材是不含：將磁粒的化學成分由原子力機器厳格管理的氯 、硫酸、二氧化矽、硼、鐵、銅、鎳、鉻、鈷也可以。 藉由這種尺寸、形狀及化學成分構成的硏磨粒，也可 以適用於原子力機器。 進一步，前述第1實施例或是第2實施例的大型零件的 硏磨方法中，依據作爲被硏磨對象物的大型零件的表面狀 態、表面硬度、表面粗度來改變前述第1至第4硏磨粒的砥 粒，使階段地改善表面粗度也可以。 由習知的手法鏡面硏磨的情況時，使用粗粒度進行粗 硏磨，漸漸地使砥粒粒度變細來改善表面粗度。即使本實 施例，可藉由硏磨粒的選擇來控制硏磨後的表面粗度層級 。因此，需要改變附與於投射材的砥粒，或者是準備多種 類已附與不同砥粒的硏磨粒。 接著說明本發明的第3實施例。 本實施例，對於使用前述的第1實施例及第2實施例所 -18- 200534958 (15) 說明的硏磨粒Π 〇的大型零件的硏磨方法，藉由對於被硏 磨面法線方向從3 0 °〜8 0 °的角度方向將硏磨粒1 1 0投射 ，使提高被硏磨面的表面粗度。 本發明的硏磨方法是如上述，因爲利用藉由將硏磨粒 投射於被硏磨面，其衝突時只有極短時間硏磨粒會滑動於 被硏磨面，所以被硏磨面及硏磨粒的投射角度，對於硏磨 效果影響很大。 第4圖，是顯示硏磨粒的投射角度（被硏磨面的法線角 度）及單位時間投射後的表面粗度的關係。 由此圖可知，法線角度愈大的情況，即被對於硏磨面 ，硏磨粒是從愈接近接線方向的角度投射，其表面粗度的 改善效果是愈大。 這是因爲，硏磨粒是愈接近被硏磨面的接線，在其表 面滑動的時間愈長。相反地角度過大的話，投射時的硏磨 粒的能量，只朝滑動方向工作，對於被硏磨面方向幾乎不 工作’而不易獲得硏磨效果。 一方面，法線角度小的情況，即對於被硏磨面，硏磨 粒是從接近垂直方向的角度投射的情況時，硏磨粒的滑動 時間會變短。且’投射時的硏磨粒的能量，是對於非被硏 磨面的面方向過度工作，在滑動方向因爲幾乎不工作，所 以硏磨粒幾乎不會滑動於被硏磨面。其結果，不易獲得被 由添付（附與）於硏磨粒外周的砥粒所產生的硏磨效果。 在發明人等的實驗中，在法線方向角度4 5。〜8 0。確 g忍充分的硏磨效果’考慮實際具有3次元形狀的大型零件 -19- 200534958 (16) 的硏磨作業的話，硏磨粒的投射方向不一定也如上述效果 的角度。 因此，在本發明的硏磨方法中，雖多少硏磨效果是悪 化，但是將可充分改善現狀的表面粗度的法線方向角度 3 〜8 0°定爲硏磨粒的投射角度。 接著，藉由前述第1實施例至第3實施例的硏磨方法， 說明硏磨：具代表性的大型零件的氣體渦輪或蒸氣渦輪零 件，特別是供長期間運轉，其表面粗度悪化的渦輪的動靜 翼、渦輪轉子及蒸氣或燃燒氣體等的流體流通路部的零件 (蒸氣閥、蒸氣配管、交叉管、渦輪入口部、出口部、噴 嘴盒內部）的情況的效果。 在渦輪零件的硏磨中，其目的是除去附著生成於對象 物表面的水垢或是氧化物的同時，回復並提高表面粗度。 如前述動靜翼、轉子、燃燒氣體或蒸氣通路部的零件 的多數，運轉中是曝露在高溫高壓的蒸氣或氣體，而在表 面生成氧化皮膜，且從燃燒器或鍋爐側飛來的生鏽或髒物 也會在表面呈鱗狀附著。 這些是成爲檢點時的非破壞檢查的外亂要素，在習知 是藉由使用陶瓷系投射材的噴氣（法除去。即使習知手法 雖也可除去有害要因，但也可能悪化表面粗度。 且對於旋轉零件的，使用陶瓷系投射材的噴氣法的適 用，因爲被對象物的硏削量大，所以可能會破壞旋轉體本 體的重量平衡，實際上也有因蒸氣渦輪動翼的洗淨作業而 產生不平衡的事例。 -20- 200534958 (17) 依據前述第1實施例乃至第3實施例的硏磨方法，可除 去包含硬質的氧化物、水垢的上述的有害要因，且不會破 壞旋轉體的平衡，可回復、提高表面粗度，健全的洗淨效 果之外也可享受硏磨效果。 且，藉由前述第1實施例乃至第3實施例的硏磨方法， 不需將既有的蒸氣渦輪動翼從渦輪轉子拔取，在植入狀態 就可回復、提高表面粗度。 蒸氣渦輪的動翼，對於與發電機直結且將渦輪轉子旋 轉上是非常重要的工作，無關反動渦輪、衝動渦輪的型式 的不同，轉翼的表面粗度會影響渦輪性能。特別是高溫高 壓的蒸氣流通路部的表面粗度，雖對渦輪性能的影響顯著 ，但是位置於高溫高壓的蒸氣通路部的動翼（所謂高壓渦 輪），因爲有効部的曝露於蒸氣的部分短且護罩外周側的 拘束板大，所以狭隘處多，硏磨作業非常困難。 依據前述第1實施例乃至第3實施例的硏磨方法，因爲 可以將硏磨粒以預定的角度與被硏磨對象衝突硏磨，所以 即使將動翼植入渦輪轉子的狀態，也可硏磨渦輪翼的狭隘 部。 進一步，本發明的硏磨方法，是將蒸氣渦輪的靜翼以 圓環狀的噴嘴隔膜的狀態或是將其形成半環的狀態（1 8 0 ° 位置分割的狀態），使硏磨時之後緣端的變形量是2mm以 下，氧化水垢的附著或腐鈾等經年地新設時，變得較薄的 後緣端部的硏磨也充分可能，而不會破壞形狀，可以回復 、提高表面粗度。 -21 - 200534958 (18) 同樣地因爲藉由將硏磨粒以預定的角度與被硏磨對象 衝突，可以硏磨，所以作業困難的狭隘部的硏磨可能。 由此，不需分解在習知手法中困難的蒸氣渦輪靜翼的 翼面、蒸氣通路部的壁面、噴嘴隔膜及壁面嵌合部等的狭 隘部，就可進行硏磨。 一方面，藉由前述第1實施例乃至第3實施例的硏磨方 法，施加了耐腐食和耐摩耗塗抹的渦輪動靜翼、渦輪轉子 、其他的渦輪零件的耐腐食和耐摩耗塗抹表面的表面粗度 ，也可以回復、提高。 耐腐食塗抹，是爲了防止電、化學腐蝕環境下的母材 的腐鈾而施工，特別是多適用於供地熱發電用的蒸氣渦輪 構件。 且，耐摩耗塗抹，是爲了防止鍋爐水垢等的固體粒子 侵蝕，而滑動、衝擊、振動等所產生的機械的減厚對策， 可適用各式各樣的材質。 施工於大型零件之中特別是如渦輪零件的複雜形狀的 零件的這些的塗抹，因爲皮膜的缺陷或剥離等容易，通常 爲了回避皮膜層的破壞，對於施工後的皮膜是不進行表面 粗度的處理。 但是’依據第〗實施例乃至第3實施例的硏磨方法，因 爲由摩耗所產生的減厚量非常少，且被硏磨面的物理和機 械的影響小’所以即使複雜的形狀的塗抹的施工後的渦輪 零件也可以改善其表面粗度。 且’依據前述第1實施例乃至第3實施例的硏磨方法， -22- 200534958 (19) 藉由硏磨粒的衝突效果可附與壓縮應力於被硏磨對象物的 極表層部。 例如，動翼的新製品零件，在習知，爲了素材的機械 加工後的形狀的最終調整及表面的硏磨，而將旋轉工具的 硏磨，對於翼有効部全面進行。 在這種習知的製作方法中，在新製動翼有効部的極表 層部會殘留拉伸的殘留應力。特別是在運轉時的動翼’因 爲由隨著渦輪轉子旋轉的離心力所產生的拉伸應力會隨時 負荷，因爲靜止時也會殘留此拉伸的殘留應力，而無多余 可應付旋轉時的應力，設計上不佳。 在前述第1實施例乃至第3實施例的硏磨方法中，如第 5圖所示的從翼表面的深度方向的殘留應力分布，在硏磨 過程，因硏磨粒的衝突效果所以殘留應力的層級小，可將 與習知的錘擊效果相似的壓縮的殘留應力給與翼的表層部 〇 進一步，在前述第1實施例乃至第3實施例的硏磨方法 ，除去附著、生成於被硏磨面的硬質的氧化皮膜的同時， 藉由提高表面粗度，可以提高非破壞檢查的品質。 即，供運轉的蒸氣渦輪，是在預先決定的固定期間依 據各目的進行多種多樣的非破壞檢查。其中特別是在高溫 高壓下使用的零件，是要求高度的檢查技術及精度。 但是，在現狀中，運轉中所附著、生成的硬質的氧化 皮膜的除去困難，使檢查精度有限度。 依據前述第1實施例乃至第3實施例的硏磨方法，除去 -23- 200534958 (20) 表面的氧化皮膜將的同時可提高表面粗度，結果可以達成 非破壞檢查的品質提高。 接著說明本發明的第4實施例。 在第4實施例中，由前述第1至第3實施例的硏磨方法 ，硏磨特別是具代表性的大型零件渦輪動靜翼時，對於後 緣線是從略相互垂直方向將硏磨粒投射、衝突。 依據此第4實施例，藉由在蒸氣渦輪動靜翼之後緣線 朝略相互垂直方向，即與蒸氣的流動方向平行地進行硏磨 ，可以使因硏磨所導致的微細的刮傷（硏磨痕）而讓與蒸氣 的流動方向平行的流體（蒸氣）受表面粗度的影響減至最小 限度。 因此，即使相同表面粗度，與未在後緣線以略相互垂 直方向硏磨的情況相比較，可以防止流體朝的阻力變大。 在此，說明藉由本發明的大型零件的硏磨方法硏磨蒸 氣渦輪動翼的情況的實施例。 蒸氣渦輪動翼，是由12Cr鋼的壓延或是鍛造的素材 削出動翼形狀，在最終地的階段進行表面硏磨，組裝入渦 輪轉子。此時，表面狀態是精整成Ry6.3或是Ryl.O程度 〇 習知技術的硏磨中，藉由將具有3次元曲線的葉片的 有効部沿著蒸氣的流動方向進行手硏磨將，使硏磨的表面 粗度的方向性固定。在此所指的方向性，是在測量相互垂 直的2方向的表面粗度的情況，使表面粗度成爲最大的方 向是與蒸氣的流動方向相互垂直地硏磨。即，使與蒸氣的 -24- 200534958 (21) 流動方向平行的硏磨所產生的刮傷（硏磨痕）存在地進行硏 磨。 本發明的大型零件的硏磨方法中，藉由可消除在習知 手法的硏磨中無法回避的硏磨刮傷（硏磨痕），和由硏磨所 產生的被硏磨面側的減肉量減至非常小，就可進行精密且 局精度的表面硏磨。 消除硏磨刮傷（硏磨痕），是指無硏磨方向性的意思’ 可使需要高度的技術的手作業的硏磨作業的依存度大幅降 低。 且，使由硏磨所產生的被硏磨面側的減肉量減至非常 小，可使對於未進行硏磨的部分的復原簡素化。進一步， 可精密且高精度的表面硏磨，對於精密檢查前的表面處理 也有大的效果。 然而，在上述各實施例中，雖主要是以硏磨蒸氣渦輪 或氣體渦輪的主要零件的渦輪的動翼或靜翼的情況爲中心 作說明，但是本發明的硏磨方法的適用零件是不限定於此 ’是中型至大型的零件的話，無特別限定。這種零件，如 旋轉驅動機器類的車軸旋轉部、油壓機器的活塞的外表面 、鐵道車輪的軌道接觸面等。 (產業上的利用可能性） 依據本發明，將硏磨困難的包含大型零件的狭隘部、 嵌合部表面硏磨可能，且不會悪化表面硏磨面，可除去成 長於表面的氧化皮膜，而可達成非破壞檢查的品質提高。 -25- 200534958 (22) 【圖式簡單說明】 第1圖是說明本發明的大型零件的硏磨方法的第i及第 2實施例用的硏磨粒的槪略結構的剖面圖。 第2圖是說明使硏磨材與被硏磨面衝突來製出硏磨效 果的原理用的模式圖。 第3圖是說明本發明的大型零件的硏磨方法的第丨實施 例用的投射材速度及硏磨效率的關係的圖表。 第4圖是說明本發明的大型零件的硏磨方法的第3實施 例用的投射角度及硏磨有效率的關係的圖表。 第5圖是本發明的大型零件的硏磨方法的第丨乃至第3 實施例，硏磨過程中因硏磨粒的衝突所導致的來自翼表面 的深度方向的殘留應力分布的圖表。 第6圖是顯示蒸氣渦輪的噴嘴隔膜的一半（1 8 0 ° )的立 體圖。 第7圖是將蒸氣渦輪設備整體槪略地顯示的剖面圖。 第8圖是顯示蒸氣渦輪的熱效率及蒸氣通路部的表面 粗度的關係的圖表。 【主要元件符號說明】 1 :渦輪轉子 1 a :動翼 2 :渦輪外殻 3 :噴嘴隔膜 4 :噴嘴隔膜內輪 -26- 200534958 (23) 5 :噴嘴隔膜外輪 r · 主尘習 6 .円尹異 7 :高壓渦輪 8 .中壓渦輪 9 :低壓渦輪 1 0 :交叉管 I 1 :復水器 II 0 :硏磨粒 1 1 1 :投射材 1 1 2 :砥粒 1 1 3 :被硏磨面 -27--10- 200534958 (7) [Embodiment] Fig. I is a sectional structure view of a honing grain used in the present invention. The honing grains 1 1 0 are the projecting materials 1 1 1 arranged as a core at the center, and the honing grains 1 1 2 are added around the honing grains 1 1 2. Fig. 2 is a diagram showing the features of the honing method in a simplified manner. The honing grains 1 1 〇, the honing surface 1 1 3 is blown at an angle to the honing surface 1 1 3 and conflicts, and the honing grains 1 1 〇 are elastically deformed on the surface for a very short time Taxi. Furthermore, the honing surface 1 1 3 was again splashed off at an angle. When sliding on the honing surface 1 1 3, the particles U 2 added to the surface of the honing surface 1 1 0 will honing the honing surface 1 1 3. From this principle, as long as the projection material 1 1 1 which is the core of the honing grains 1 1 0 is softer than the material of the honing surface and can be rebounded with a moderate elasticity when blown to the honing surface 11 3, basically, No matter the material. However, the target material to be honed in the present invention is a large-sized part, such as a representative component of a steam turbine, such as a moving wing, a stationary wing, a rotor, a steam valve, and a large-diameter steam pipe. In addition, honing operations of these parts are not carried out by hand or by hand. Generally, the honing machine is moved until there are parts, or the honing operation is carried on a large workbench. Therefore, in the present invention, from the relationship of the previous honing principle, the honing operation cannot be performed at all without the energy from the honing machine to the honing surface. That is, when the specific gravity of honing grains is blown at the same speed by the larger and smaller ones-11-200534958 (8), because the larger the specific gravity of the honing grains, the greater the movement energy and the longer the flight distance, the The honing surface is set farther away, and the speed of the honing surface is not easy to drop, so that the honing surface can be efficiently honed. On the one hand, if the specific gravity is small, due to air resistance, the reach distance is short and the speed of the honing surface is also low. In order to carry out efficient honing operations, it is necessary to approach the honing surface. Here, the inventors conducted the following experiments in order to discover the physical properties of the projection material most suitable for the honing method of the present invention. That is, the initial velocity of the projection material is 1 45, the projection distance (that is, the distance to the honing surface) is 12 0 0 mm, the foamed urethane with a specific gravity of 0.5, and the polysalinated sub-specific gravity of 1.7. Investigate the honing effect of ethylene. As a result, if the specific gravity is in this range, the honing effect is good. That is, if the specific gravity is higher than the honing, the surface becomes coarser. On the other hand, if the specific gravity is lower, the speed of the projection material on the honing surface is lowered, and satisfactory honing cannot be obtained. Here, in the present invention, the specific gravity of the projection material is limited to 0.5 to 1 · 8 g / cm3. Next, the amount of deformation (i.e., flatness of the honing surface) at the time of collision with the honing surface, Experiments were performed on the time of sliding on the honing surface, the elasticity of the degree of rebound after conflict with the honing surface, and the like. The elasticity of a better projecting material is dependent on the effect on the energy of the projecting material's motion (speed dependence), and the effect of frictional heat (temperature dependence) when sliding on the honing surface. At 2 o'clock, the case where the speed of the honing surface conflicts with a low rate of elasticity, and the case where the honing surface slides is -12-200534958 (9) The case with a high rate of elasticity in the case of high temperature will show good honing. effectiveness. In addition, although this speed dependency and temperature dependency affect each other, as a result of experiments by the inventors, it has been found that the speed dependency is more affected by the honing effect than the temperature dependency. That is, if the projection distance is fixed and the projected speed (muzzle velocity) is 600 m / mi η, the honing effect is better even if the elasticity is about 200 kg / cm2. On the one hand, the projection speed (muzzle velocity) is increased to 3 8 If 0 0 m / min, the honing effect is better even if the elasticity is about 10 kg / cm2. Here, the elastic modulus of the projection material of the present invention is limited to a range of 10 to 200 kg / cm2. The projection material of the present invention may be used if it is basically elastic. Therefore, from the results of the above experiments, many petrochemical polymer materials used in industry, that is, synthetic resins such as foamed polyurethane or polysalinized vinylidene, soft vinyl chloride, etc. used in the above experiments, Synthetic fibers, synthetic rubber, etc., or natural materials with elasticity, such as softened rice grains, loofah, sponges, gelatin, etc. Since the honing method of the present invention uses honing grains for honing, compared with the case where the same honing grains are used for comparison, when the honing operation is performed with higher honing efficiency, the projection speed (muzzle velocity) is the same. The one with a large number of honing grains and a large number of honing grains per unit time and unit area, and the projecting speed of the same amount of honing grains is the faster one, which is efficient mill. Here, the inventors conducted experiments in order to find the optimum projection velocity (muzzle velocity) -13- 200534958 (10) 値. Fig. 3 is a result of an experiment showing the most suitable projection velocity (muzzle velocity) of the honing method according to the present invention. In the figure, the vertical axis is the surface roughness of the honing surface after honing, and the horizontal axis is the projection speed (muzzle velocity) of the projection material. In addition, Ry = 6.3 on the vertical axis is the current allowable surface roughness when designing a steam turbine part, and there is no problem in performance if it is below this. It can be understood from this figure that if the projection speed (muzzle velocity) is less than 600 m / sec, no improvement in surface roughness is seen. This speed is consistent with the lower limit peripheral speed when the inner surface of a ceramic vermiculite using a conventional honing operation is cut, and even with the honing method of the present invention, a significant cutting effect cannot be obtained. On the one hand, when the projection speed (muzzle velocity) is above 3 800 m / SeC, the effect of improving the surface roughness is the limit. This speed is almost the upper limit of the peripheral speed of the elastic vermiculite used in conventional bolt honing or groove honing. However, in the honing method of the present invention, it is considered that the projecting material will cause honing at this speed. The surface destruction or the structure of the projection device is almost 3,000 Om / sec. Here, in the present invention, the projection speed (initial velocity) of the projection material is a volume limited to 600 to 3800 m / sec. The amount of projection is a large change depending on the shape of the object to be hoisted, the projection distance, and the density of the honing grains. . In the honing of a small area in a narrow crotch, the amount of projection is reduced, and the projection speed is reduced, and the honing is performed at about 5 cc / cm2.sec. When a relatively wide range of honing is performed, a projection amount of 3 00c c / cm 2 -14- 200534958 (11) .sec can be ensured, which is very effective. Basically, when the object to be honed is a small part, when the honing area is narrow, honing is performed while increasing the projection speed and reducing the amount of projection. Honing is performed at a projection speed and an increased projection amount. In the case where the projection distance is large, the honing effect using a large specific gravity honing grain is large. From the above results, although the specific gravity of the honing grains is changed ', in this embodiment, it is specifically 5 to 300 cc / cm2.sec. In this way, a petrochemical polymer material (synthetic fiber, synthetic resin, synthetic rubber) with a specific gravity of 0.5 to 1.8 g / cm3 and an elastic modulus of 10 to 200 kg / cm2 or a natural material with elasticity ( Natural rubber, plant fibers, and plant seeds) and abrasive grains composed of grains are projected at a speed of 600m to 3800m and a volume per unit area of 5 to 30 CC / Cm2.SeC. By conflict, the surface roughness of the surface of the material to be honed can be increased. Next, a second embodiment of the present invention will explain the production of honing grains used in the honing method of the present invention. The physical properties of the core projection material 1 1 1 serving as the abrasive grains 1 1 0 shown in FIG. 1 are the above-mentioned petrochemical polymer materials, that is, the foamed polyurethane used in the above experiments. Ester or poly-salinized vinylene and other synthetic trees, synthetic fibers, synthetic rubber, etc., or natural materials with elasticity, such as softened rice kernels, loofah, sponges, gelatin, etc. In addition, although these projection materials η 1 are added (attached) as -15-200534958 (12) the abrasive grains of the abrasive material are formed into abrasive grains, the method of adding them is as follows in the present invention. 4 Methods. The first honing grain uses the adhesiveness of the material used for the projection material 11: [itself. That is, when the projection material 1 1 1 is a soft vinyl chloride such as a plastic material such as an acid ester, since it itself has bonding and adhesiveness, it is used to add (attach) granules to the projection material. 1 1 1 around. The 2nd abrasive grain is for the projection material! If the polymer material used in i i does not have adhesiveness or adhesion, it is a general method suitable for ordinary plastic materials. In this case, a bonding material having elasticity is used around the projection material 1 1 1 and added to the pellets. A typical bonding material having such elasticity is a vinyl acetate emulsion bonding material, which is a type of woodworking adhesive. After hardening, it has a translucent appearance and has sufficient elasticity. Other bonding materials such as urethane-based, emulsion-based, synthetic rubber-based, or silicone-based bonding materials are also applicable. In addition, rubber adhesives, resin adhesives, shellac adhesives, and polyvinyl alcohol adhesives, which are widely used in the industry as a vermiculite binder, are also applicable. The third abrasive grain is a method of physically anchoring the abrasive grain to the projection material; [n, a method of attaching (adding) an electrostatic force. The 4th abrasive grain 'is a case where the projection material 1 n is made of a material such as synthetic rubber, natural rubber, synthetic fiber, or plant fiber. Among the above-mentioned first to third abrasive grains, although the abrasive grains are only added around the projection material 1 1 1 ', in the fourth abrasive grains, when making the abrasive grains, -16-200534958 (13) The particles are dispersed inside the projection material η 1. Moreover, even if any of the first to fourth honing grains of the honing method of the present invention does not move the honing effect to the projection material; [i 1 but to the surroundings or Pellets scattered throughout. Further, in the honing method of the present invention, it is characteristic that the honing operation is not performed only in a dry state of the honing grains without using a conventional honing fluid or the like. By not using a cutting fluid, such as the above-mentioned second abrasive grains, it is possible to add (attach) a projection material using a cemented grain of a moisture-resistant bonding material. The size of the honing grains produced by the above method is appropriately selected depending on the condition of the honing surface. However, as in the honing method of the present invention described above, since honing grains are projected on the surface to be honed, honing grains of 0.1 mm or less are most suitable for honing in a small area, but due to It is difficult to project at high speed because of the air resistance. On the one hand, among honing grains larger than 10 mm, damage to the honing surface is increased, and workability is significantly reduced due to the large size of the projection device. Therefore, in the present invention, the size of the honing grains is limited to 0.1 to 10.0mm. In addition, although the shape of the honing grains is expected to be approximately spherical in principle, as long as the grains are substantially granular, they are industrially fully applicable. Furthermore, the grain material added to the surroundings of the projection material as the core is basically applicable as long as it has high hardness such as oxide-based ceramics, carbide-based ceramics, and diamonds, but it is widely used industrially here. The SiC, SiO2, A1203, and Zr02 ° used by -17-200534958 (14) produced the honing grains on the surface of the projection material with honing effects on the first to fourth honing grains. Continuous jets and collisions gradually fall off the surface of the projection material. ◦ The honing effect caused by the falling of the magnetic particles is reduced. By attaching the particles to the surface of the projection material again, it can be fully regenerated. However, the size and shape of the honing grains and the chemical composition thereof may be as follows. The size of the 1st to 4th honing grains is granular in the range of 0.2 mm to 5.0 mm for honing in a small area. As for the chemical composition, the projection material does not contain: the chemical composition of the magnetic particles is atomic force. Chlorine, sulfuric acid, silicon dioxide, boron, iron, copper, nickel, chromium, and cobalt can also be managed by the machine. Honed grains of this size, shape and chemical composition can also be applied to atomic force machines. Furthermore, in the honing method for the large part in the first or second embodiment, the first to fourth parts are changed depending on the surface state, surface hardness, and surface roughness of the large part as an object to be honed. The abrasive grains of the abrasive grains may improve the surface roughness stepwise. In the case of mirror honing by a conventional method, coarse honing is performed using a coarse grain size, and the grain size of the grain is gradually reduced to improve the surface roughness. Even in this embodiment, the surface roughness level after honing can be controlled by the choice of honing particles. Therefore, it is necessary to change the grit attached to the projection material, or to prepare a plurality of types of grit that have been attached to different types of grit. Next, a third embodiment of the present invention will be described. In this embodiment, the honing method for large parts using the honing grains Π 〇 described in the first and second embodiments described in -18-200534958 (15) is performed in the normal direction of the honing surface. The honing particles 1 1 0 are projected from an angle direction of 30 ° to 80 ° to increase the surface roughness of the surface to be honed. The honing method of the present invention is as described above. Because the honing particles are projected on the honing surface, only the honing particles will slide on the honing surface in a very short time during the conflict. The projection angle of the abrasive particles greatly affects the honing effect. Figure 4 shows the relationship between the projection angle of the honing grains (the normal angle of the honing surface) and the surface roughness after the unit time projection. It can be seen from this figure that the larger the normal angle is, that is, for the honing surface, the honing particles are projected from an angle closer to the wiring direction, and the effect of improving the surface roughness is greater. This is because the closer the honing grain is to the wiring of the honing surface, the longer it slides on the surface. Conversely, if the angle is too large, the energy of the honing grains during projection only works in the sliding direction, and it hardly works in the direction of the honing surface, and it is difficult to obtain the honing effect. On the one hand, if the normal angle is small, that is, when the honing grains are projected from an angle close to the vertical direction, the sliding time of the honing grains becomes shorter. In addition, the energy of the honing grains during the projection is excessively applied to the non-honed surface in the direction of the surface. Since it hardly works in the sliding direction, the honing grains hardly slide on the honing surface. As a result, it is difficult to obtain the honing effect which is caused by the grains added (attached) to the periphery of the grains. In experiments by the inventors, the angle is 45 in the normal direction. ~ 80. To ensure a sufficient honing effect 'Considering the honing operation of a large part having a three-dimensional shape -19- 200534958 (16), the projection direction of the honing particles may not be the same as the angle of the above effect. Therefore, in the honing method of the present invention, although the honing effect is somewhat honing, a normal direction angle 3 to 80, which can sufficiently improve the current surface roughness, is set as the projection angle of the honing particles. Next, the honing methods of the first to third embodiments are used to describe honing: representative gas turbine or steam turbine parts of large parts, especially for long-term operation, the surface roughness of which is roughened The effect of the turbine's dynamic and static wings, turbine rotor, and parts of the fluid flow path (steam valve, steam piping, cross pipe, turbine inlet, outlet, and nozzle box) such as steam or combustion gas. In the honing of turbine parts, the purpose is to remove scale and oxides adhering to the surface of the object while restoring and improving the surface roughness. As mentioned above, most of the parts of the moving and static wings, rotors, combustion gases or steam passages are exposed to high-temperature and high-pressure steam or gas during operation, and an oxide film is formed on the surface, and rust or flying from the burner or boiler side Dirt is also scaly on the surface. These are the elements of external disturbances that are used for non-destructive inspection at the time of inspection. They are conventionally removed by air-blasting using a ceramic-based projection material. Although the conventional methods can remove harmful factors, they may also reduce the surface roughness. In addition, for rotating parts, the application of the air-jet method using ceramic-based projection materials, because the amount of object to be cut is large, the weight balance of the rotating body may be disrupted. In fact, there is also a cleaning operation due to the steam turbine rotor blades. An imbalance occurs. -20- 200534958 (17) According to the honing methods of the first to third embodiments, the above-mentioned harmful factors including hard oxides and scales can be removed, and the rotation will not be damaged. The balance of the body can restore and increase the surface roughness, and the honing effect can be enjoyed in addition to the sound cleaning effect. Moreover, the honing method of the first embodiment to the third embodiment described above does not require the existing The steam turbine rotor blade is removed from the turbine rotor, and the surface roughness can be restored in the implanted state. The steam turbine rotor blade is directly connected to the generator and rotates the turbine rotor. Often important work, regardless of the type of the reaction turbine or impulse turbine, the surface roughness of the rotor will affect the turbine performance. In particular, the surface roughness of the steam flow path at high temperature and pressure has a significant impact on the turbine performance, but The moving wing (the so-called high-pressure turbine) located at the high-temperature and high-pressure steam passage is short in the effective part and exposed to steam and has a large restraint plate on the outer side of the shroud, so there are many narrow places, and honing is very difficult. In the honing methods of the first to third embodiments, since the honing grains can be honed at a predetermined angle with the honing object, the turbine can be honed even when the moving blade is implanted in the turbine rotor. The narrow part of the wing. Further, the honing method of the present invention is a state in which the stationary blade of the steam turbine is in the shape of a ring-shaped nozzle diaphragm or a state in which it is formed into a half-ring (a state of 180 ° position division), When the amount of deformation of the trailing edge during honing is less than 2mm, when the adhesion of oxidized scale or uranium decay is newly established over the years, the honing of the trailing edge that is thinner is also possible. The shape will not be broken, and the surface roughness can be restored. -21-200534958 (18) Similarly, since the honing grains collide with the object to be honed at a predetermined angle, the honing can be performed, so the narrow part where the work is difficult Honing is possible. Therefore, honing can be performed without disassembling the narrow surfaces such as the airfoil surface of the steam turbine stator blade, the wall surface of the steam passage portion, the nozzle diaphragm, and the wall surface fitting portion, which are difficult in the conventional technique. On the one hand, according to the honing methods of the first to third embodiments, the surfaces of the surfaces of the surfaces of the turbine that are resistant to corrosion and abrasion are applied, such as the rotor blades, turbine rotors, and other turbine parts. The coarseness can also be restored and improved. Corrosion-resistant coating is used to prevent the corrosion of uranium from the base metal in the environment of electricity and chemical corrosion, especially for steam turbine components for geothermal power generation. In addition, abrasion-resistant coating is to prevent the erosion of solid particles such as boiler scale, and it is possible to apply various materials to reduce the thickness of machinery caused by sliding, shock, and vibration. Coating of large parts, especially parts of complex shapes such as turbine parts, is easy because of the defect or peeling of the film. Usually, in order to avoid the damage of the film layer, the surface roughness of the film after construction is not carried out. deal with. However, according to the honing method according to the first to third embodiments, the amount of thickness reduction due to friction is very small, and the physical and mechanical influence of the honing surface is small. The surface roughness of the turbine parts after construction can also be improved. In addition, according to the honing method of the first to third embodiments, -22-200534958 (19) The compressive stress can be attached to the polar surface layer portion of the object to be honed by the conflicting effect of the honing particles. For example, the new parts of the moving wing are conventionally honing for the effective part of the wing for the final adjustment of the shape of the material after machining and the honing of the surface. In this conventional manufacturing method, tensile residual stress remains in the polar surface layer portion of the effective portion of the new brake wing. Especially when the rotor is in operation, the tensile stress caused by the centrifugal force that rotates with the turbine rotor will be loaded at any time, because the residual residual stress of this tension will remain when it is stationary, and there is no need to deal with the stress during rotation. , Poor design. In the honing methods of the first to third embodiments, the residual stress distribution in the depth direction from the wing surface as shown in FIG. 5 shows the residual stress due to the conflicting effect of the honing particles during the honing process. The step size is small, and it is possible to apply a compressive residual stress similar to the conventional hammering effect to the surface layer portion of the wing. Further, in the honing methods of the first embodiment to the third embodiment described above, the adhesion is removed and generated on the surface The hardness of the hard oxide film on the honing surface can also improve the quality of non-destructive inspection by increasing the surface roughness. That is, the steam turbine to be operated is subjected to various non-destructive inspections in accordance with various purposes during a predetermined fixed period. Among them, the parts used under high temperature and pressure require a high degree of inspection technology and precision. However, in the current situation, it is difficult to remove the hard oxide film attached and generated during operation, which limits the accuracy of inspection. According to the honing methods of the first embodiment to the third embodiment, the surface roughness can be improved while removing the oxide film on the surface of -23- 200534958 (20). As a result, the quality of non-destructive inspection can be improved. Next, a fourth embodiment of the present invention will be described. In the fourth embodiment, according to the honing methods of the first to third embodiments described above, when honing, particularly the representative large-part turbine dynamic and stationary wing, the honing grains are formed from the directions of the trailing edges approximately perpendicular to each other. Projection, conflict. According to this fourth embodiment, by performing honing on the trailing edges of the steam turbine moving and stationary wings in a direction that is slightly perpendicular to each other, that is, parallel to the steam flow direction, it is possible to make fine scratches (honing caused by honing) Marks) and minimize the influence of the surface roughness on the fluid (vapor) parallel to the flow direction of the vapor. Therefore, even if the surface roughness is the same, it is possible to prevent the resistance of the fluid from increasing as compared with the case where the rear edge lines are not honed in a slightly perpendicular direction. Here, an example of a case where the steam turbine rotor blade is honed by the honing method of a large part according to the present invention will be described. The steam turbine rotor blade is a 12Cr steel rolled or forged material. The rotor blade shape is cut out, and the surface is honed at the final stage to assemble the turbine rotor. At this time, the surface state is refined to Ry6.3 or Ryl.O. In conventional honing, the effective part of the blade having a three-dimensional curve is hand-honed along the direction of vapor flow. , So that the directionality of the surface roughness of the honing is fixed. The directivity referred to here refers to the case where the surface roughness in two directions perpendicular to each other is measured, and the direction in which the surface roughness is maximized is honing perpendicular to the direction of vapor flow. In other words, honing is performed in such a manner that scratches (honing marks) caused by honing in parallel with the direction of vapor -24- 200534958 (21) flow. In the honing method for large parts according to the present invention, honing scratches (honing marks) that are unavoidable in honing in conventional methods can be eliminated, and the reduction of the honing surface side by honing can be eliminated. With a very small amount of meat, precise and local honing can be performed. The elimination of honing scratches (honing marks) means that there is no honing directionality ', which can greatly reduce the dependency of honing operations requiring high-tech manual work. In addition, by reducing the amount of meat on the honing surface by honing to a very small amount, it is possible to simplify the restoration of the part that has not been honing. Furthermore, it is possible to perform precise and high-precision surface honing, which has a great effect on surface treatment before precise inspection. However, in each of the above-mentioned embodiments, although the description is mainly focused on the case of honing the moving or stationary wing of a turbine that is a main part of a steam turbine or a gas turbine, the applicable parts of the honing method of the present invention are not If it is limited to this, it is not particularly limited if it is a medium to large-sized part. Such parts are, for example, axle rotating parts of rotary driving machines, outer surfaces of pistons of hydraulic machines, or rail contact surfaces of railway wheels. (Industrial Applicability) According to the present invention, it is possible to grind the surface of the narrow part and the fitting part including large parts that are difficult to grind, without honing the surface honing surface, and removing the oxide film growing on the surface. The quality of non-destructive inspection can be improved. -25- 200534958 (22) [Brief description of the drawings] Fig. 1 is a cross-sectional view showing a rough structure of the honing grains used in the i and the second embodiment of the honing method of a large part of the present invention. Fig. 2 is a schematic diagram for explaining the principle of making a honing effect by making a honing material collide with a surface to be honed. Fig. 3 is a graph illustrating the relationship between the speed of the projection material and the honing efficiency used in the honing method of the large part according to the first embodiment of the present invention. Fig. 4 is a graph illustrating the relationship between the projection angle and the honing efficiency in the third embodiment of the honing method for large parts according to the present invention. Fig. 5 is a graph showing the residual stress distribution in the depth direction from the surface of the wing due to the collision of the honing grains during the honing process in the first to third embodiments of the honing method for large parts of the present invention. Figure 6 is a perspective view showing one half (180 °) of the nozzle diaphragm of the steam turbine. FIG. 7 is a cross-sectional view schematically showing the entire steam turbine facility. Fig. 8 is a graph showing the relationship between the thermal efficiency of the steam turbine and the surface roughness of the steam passage portion. [Description of main component symbols] 1: Turbine rotor 1 a: Moving wing 2: Turbine housing 3: Nozzle diaphragm 4: Nozzle diaphragm inner wheel-26- 200534958 (23) 5: Nozzle diaphragm outer wheel r · Main dust habit 6. Yin Yi 7: High-pressure turbine 8. Medium-pressure turbine 9: Low-pressure turbine 1 0: Cross-pipe I 1: Rehydrator II 0: Honed grain 1 1 1: Projection 1 1 2: Honed 1 1 3: Quilted Polished surface-27-