TW200530567A - Lateral pressure sensor based on Fiber Bragg Grating(FBG) - Google Patents

Lateral pressure sensor based on Fiber Bragg Grating(FBG) Download PDF

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TW200530567A
TW200530567A TW93105658A TW93105658A TW200530567A TW 200530567 A TW200530567 A TW 200530567A TW 93105658 A TW93105658 A TW 93105658A TW 93105658 A TW93105658 A TW 93105658A TW 200530567 A TW200530567 A TW 200530567A
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pressure
fiber
grating
fiber grating
polymer
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TW93105658A
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TWI247101B (en
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Wen-Fung Liu
Xiao-Song Bo
Hao-Ran Shen
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Univ Feng Chia
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Abstract

The present invention relates to a lateral pressure sensor based on fiber bragg grating, comprising a Fiber Bragg Grating (FBG) whose length is determined in accordance with user's needs and a lateral pressure sensor. The lateral pressure sensor has a hollow cylinder case wherein at least one aperture is disposed at the two sides thereof; at the aperture of the case, flexible polymer is filled and a hard sheet is disposed at the terminal of the polymer so as to encapsulate the fiber grating in the polymer and couple one of the terminals with the hard sheet while another extending through the case. By the configuration of the present invention, the lateral pressure sensor based on Fiber Bragg Grating can be constructed, which can be used as a pressure sensor, a water level recorder, or a underwater depth gauge.

Description

200530567 200530567 五、發明說明(2) 觀上’大多顯得非常厚重,且體 增加製造成本,而且減少工作場 在工業生產與大型載台(例 需的監測系統中,壓力感測器屬 數量上佔有很高的比率;此外, 用,亦可以達成如氣體、液體的 等之量測,因此進行光纖光栅壓 乃是步向全光路監測系統實用化 學者正從事光纖光柵為骨幹之壓 短幾年間,光纖光柵壓力感測器 1· 98x 10 —6/Mpa達到 _3· 41x 1( 之餘。因此,目前實際應用之壓 :uniform)光纖光柵(Fiber } 接或間接受外界壓力影響產生之 射光中心波長位移量,進而用以 中除5裸光纖光栅壓力感測器係 (其感測靈敏度僅達到-2 · 0 2x ] 感測器也可藉著光纖光柵受到特 麇縮應變放大的效果,以便於相 心波長彳立移量,然而其最大的靈 3. 41x 10^3 MPa-1 。是以,在 ’除了須對監控制系統中壓力感 外’若僅以習知光纖光柵壓力感 ’其感測靈敏度尚無法有效加以 、也因而魔大, 所钿, 口此不但 可運用的空間。 船艇、飛機箄1 :要的裝置二;:: 測器的充份運 或液體液面的高度等 的,測器的研究及應用, 大重點。以目前許多 ,測器研究而言,在短 勺靈敏度一再士访1 % !冉增加,已由 力“支曰進了有1 72 0倍 ^感剛裝置,係以均勻型 Grating, FBG)直 向壓縮應變所造成的反 映壓力的變化情形,其 接與媒體的壓力接觸外 g. 1 ),另外壓力 緣材料的封裝後,俾產生 同的壓力下獲得更大的中 敏度也僅達如上述之— 工業生產或安全的要求下 測的靈敏度有持續改進之 測的方式來做液位的量測 利用;且習知使用特殊材 Φ200530567 200530567 V. Description of the invention (2) Most of them seem very heavy, and they increase the manufacturing cost, and reduce the workplace in industrial production and large-scale platforms (such as the monitoring system required, pressure sensors are in the number Very high ratio; in addition, it can also be used to achieve measurements such as gas, liquid, etc. Therefore, the implementation of fiber grating compression is a step towards the all-optical path monitoring system. Practical chemists are engaged in fiber grating pressure for the backbone for a few years, Fiber Bragg Grating Pressure Sensor 1.98x 10 —6 / Mpa reaches _3 · 41x 1 (Except. Therefore, the current practical application pressure: uniform) Fiber Bragg Grating (Fiber) is connected to or indirectly receives the light generated by external pressure The amount of wavelength displacement is further used to eliminate the 5 bare fiber grating pressure sensor system (its sensing sensitivity is only -2 · 0 2x]. The sensor can also be subjected to the special constriction strain amplification effect by the fiber grating in order to At the phase center wavelength, the vertical displacement is 3.41x 10 ^ 3 MPa-1. However, in the case of 'except the pressure sense in the monitoring system', only the conventional fiber grating pressure sense is used. 'Its sensing sensitivity has not been effectively applied, which is why it is so big. So, it is not only a space that can be used. Boats, airplanes 箄 1: The required device two ;: The full transport of the detector or the liquid level The research and application of the measuring instrument is of great importance. For the current research of many measuring instruments, the sensitivity in the short spoon has been repeatedly visited by 1%! Ran has increased, and it has been improved by force. The fold sensing rigid device is based on uniform Grating (FBG) pressure change caused by direct compression strain, which is connected to the pressure contact of the media outside g. 1). In addition, after the pressure edge material is packaged, 俾 produces Under the same pressure to obtain greater middle sensitivity only as described above-industrial production or safety requirements, the sensitivity of the measurement has a continuous improvement of the way to measure the level of liquid level; and the use of special materials is known Φ

surface

第6頁 200530567 五、發明說明(3) |料封裝之壓力感測器’係屬於光纖光栅軸 的技術應用,於封裝過程中其位於結構中心受Ϊ測 I否關係著測量的品質,因此增加了封裝的難度童的正確與 緣此,本案發明人基於研究創新及未來== 事工業用途上的高度需纟,即以光纖光柵 業及軍 力感測器組成技術作更深入的創新盥改進,對壓 進感測靈敏度的壓力感測裝置,藉此突破習知=二種能增 I靈敏度之瓶^頸,並可供作為液位的量測裝置。I力感測器 【發明 前/已 j光纖光Y冊 壓力的k |纖光栅的 關係,其 I達到量測 而本 |機制,與 要較強的 用於組成 |有短光柵 光纖光柵 以調整壓 結合簡單 知裸光 (Fiber /為口而向短 中心波長 工作的機 的目的。 發明側壓 習知壓力 反射光時 壓力感測 獲得的問 ),亦可 力感側器 的光波長 纖光柵壓力感測器,其 Bragg Grating, FBG) 波長的方向偏移,換言 偏移,係與壓力的變化 制即以布拉格光纖光柵 式布拉格光纖光柵壓力 感測器不同,本發明在 ,短長度光纖光柵(短 器;若為了高反射強度 題,係可採用長度較長 組成壓力感測器;且本 尺寸方式,俾改變其感 解調機制就可以直接使 特色是 的中心 之’該 呈負斜 受壓力 感測裝 應用上 光纖光 的需求 的光纖 發明可 測的靈 用〇 以布拉袼 波長隨著 布拉袼光 率的線性 的壓縮來 置的工作 ,於不需 梅)即可 或其他如 光柵(長 視需要, 敏度,沛Page 6 200530567 V. Description of the invention (3) | The pressure sensor of the material package belongs to the technical application of the fiber grating axis. Whether it is located in the center of the structure during the packaging process and whether it is measured is related to the quality of the measurement, so it increases. In order to understand the difficulty and accuracy of packaging, the inventors of this case based on research and innovation and the future == high demand for industrial and industrial use, that is, the fiber grating industry and military sensor composition technology for deeper innovation and improvement, The pressure-sensing device for pressure-sensing sensitivity, which breaks the habit of knowing = two kinds of bottles that can increase I sensitivity, and can be used as a liquid level measuring device. I force sensor [Before / invention of k fiber fiber Y pressure pressure | fiber grating relationship, its I reached the measurement and this | mechanism, and to be stronger for the composition | fiber grating with short grating to adjust Compression bonding simply knows bare light (the purpose of the fiber / machine that works for short center wavelengths for the mouth. Invented the side pressure is known when pressure is reflected when the pressure is reflected), but also the optical wavelength fiber grating of the force sensor Pressure sensors, whose Bragg Grating (FBG) wavelength direction shifts, in other words, shifts, are different from pressure changes, that is, Bragg fiber grating Bragg fiber grating pressure sensors. The present invention relates to short-length fiber gratings. (Short device; for high reflection intensity problems, a longer length can be used to form a pressure sensor; and this size method, if you change its sensing demodulation mechanism, you can directly make the center of the feature is negative. The optical fiber for the optical fiber needs of the pressure sensing device is invented. The measurable spirit can work with the Bragg wavelength and the linear compression of the Brahm light rate. The other grating (as required length, acuity, Pei

200530567 五、發明說明(4) 本發明側壓式布拉格光纖光柵壓力感測裝置的主要實 施例’係包括一依據需求而擇定長度之均勻型(unif0rm )或其他種類布拉格光纖光柵(Fiber Bragg Grating, FBG),及一側壓式壓力感測器所組成;其中,該側壓式 壓力感測裔具有中空柱型外殼,選定外殼二側處分別設有 至少一與外界呈相通之開孔,並於外殼其開孔位置處之内 部填充具有彈性之聚合物,且選定於聚合物軸端部設有一 硬質板片’藉此令均勻型光纖光栅被包覆於聚合物中,以 其一端部與硬質板片叙合,且另一端延伸出外殼,藉此組 成本發明側壓式布拉格光纖光柵壓力感測裝置,而可應用 成為壓力感測器、水位計或水下深度計者。 如上所述,本發明該布拉格光纖光柵依據需求而擇定 實際應用之長度’其實施包括使用一短光纖光柵構成側壓 式壓力感測裝置,以及使用長光纖光柵構成側壓式壓力感 測裝置之二種形態。 【實施方式】 茲依附圖實施例將本發明結構特徵及其他之作用、目 的詳細說明·如下: β 如附圖所示,本發明所為之『側壓式布拉格光纖光栅 壓力感測裝置』設計,其主要係包括一布拉格光纖光柵工 及一側壓式壓力感測器2所組成,其中·· 、“布拉格光纖光柵1 ,係可為一種均勻型(uni f…約光 纖光栅(Fiber Bragg Grating,FBG)或其他種類之光纖 光柵,並依據需求反射光之強弱而擇定光纖光柵其長_度(200530567 V. Description of the invention (4) The main embodiment of the side-pressure Bragg fiber grating pressure sensing device according to the present invention includes a uniform length (unif0rm) or other types of Bragg fiber gratings , FBG), and a side pressure type pressure sensor; wherein the side pressure type pressure sensor has a hollow cylindrical shell, and at least one opening on the two sides of the selected shell is connected to the outside, And the interior of the housing at the opening position is filled with a polymer with elasticity, and a hard plate is selected at the end of the polymer shaft to thereby make the uniform fiber grating be covered in the polymer, and one end of the fiber grating It is combined with a hard plate, and the other end extends out of the casing, thereby constituting a side-pressure Bragg fiber grating pressure sensing device according to the present invention, and can be applied as a pressure sensor, a water level gauge or an underwater depth gauge. As described above, the Bragg fiber grating of the present invention selects a practical application length according to demand. The implementation includes the use of a short fiber grating to form a side pressure type pressure sensing device, and the use of a long fiber grating to form a side pressure type pressure sensing device. The two forms. [Embodiment] The following describes the structural features and other functions and purposes of the present invention in detail according to the embodiments of the accompanying drawings as follows: β As shown in the drawings, the present invention is designed as a "side pressure Bragg fiber Bragg grating pressure sensing device", It is mainly composed of a Bragg fiber grating and a pressure pressure sensor 2 on one side, of which, "Brag fiber grating 1" can be a uniform type (uni f ... about fiber grating (Fiber Bragg Grating, FBG) or other types of fiber gratings, and the length of the fiber grating is determined according to the strength of the reflected light.

第8頁 200530567 五、發明說明(5) 可於不需要較強的反射光4遠用短光纖光柵,或為了高反 射強度的需求而選用長光纖光柵), 側壓式壓力感測器2 ’係具有一中空柱型外殼21,於 外殼2 1二選定側分別設有至少一與外界相通之開孔2 2,並 於該開孔2 2處之外殼2 1内部填充有呈適滿狀態且材質具有 適當彈性之聚合物2 3 ’令該聚合物2 3可經由開孔承受外界 壓力,旅於該聚合物2 3軸向端部2 3 1設置一硬質板片2 4 ; 藉此,令一布拉格光纖光柵1形成被包覆於側壓式壓 力感測器2其外殼2 1内之聚合物2 3中,且令光纖光柵1 一 端固定於所述硬質板片24之内端,而光纖光柵1另一端延 伸出外殼2 1,若此即可組成由徑向壓力對聚合物2 3產生之 應變,玎帶動光,光柵1中心波長的偏移,進一步達成旦 測壓力作用之側壓式布拉袼光纖光柵壓力感測裝置。里 如上戶斤或本舍月該均勻型(uniform)或其他種類布 拉格光纖光柵,據需求而擇定實際應用之長度,其實施方 式係包栝使用短光纖光柵1 A而組成側壓式布拉格先 光柵壓力感挪裝置’如第一圖及第二圖所示,其係可採、、 圓管狀之中空柱型外殼2 1,於其二側分別設有一所述< ^ 孔2 2 (如圖所示可為圓孔),於外殼2 1内部包含有短走崎 光柵1 A ,以及適滿狀態(如圖所示可為半滿)而作為, 短光纖光柵1所A外概之聚合物23,於聚合物23軸向端部咳 2 3 1設置〆硬戶、板片2 4 (可為圓片體),並令該短光織永 柵1 A被究食包覆於彈性適當之聚合物2 3内,藉此組戍 需要較強的反、> 之側疋式布拉格光纖光拇壓力感剛裝Page 8 200530567 V. Description of the invention (5) Short fiber gratings can be used when strong reflected light is not needed, or long fiber gratings can be used for high reflection intensity requirements), side pressure pressure sensors 2 ' It has a hollow cylindrical shell 21, and at least one opening 22 connected to the outside is provided on the selected side of the shell 22, and the inside of the shell 21 at the opening 22 is filled with a full state and A polymer 2 3 'having a proper elasticity allows the polymer 2 3 to withstand external pressure through the opening, and a rigid plate 2 4 is provided at the axial end 2 3 1 of the polymer 2; A Bragg fiber grating 1 is formed in a polymer 2 3 coated in a side pressure type pressure sensor 2 in its casing 2 1, and one end of the fiber grating 1 is fixed to the inner end of the hard plate 24, and the optical fiber is The other end of the grating 1 extends out of the housing 21, if this can constitute the strain generated by the radial pressure on the polymer 23, the chirp drives the light, and the center wavelength of the grating 1 is shifted to further achieve the side pressure type of the pressure measurement effect. Bragg fiber grating pressure sensing device. In the above example, the uniform or other types of Bragg fiber gratings are selected according to demand. The implementation method is to use a short fiber grating 1 A to form a side-pressure Bragg fiber. As shown in the first and second figures, the grating pressure sensing device is a hollow cylindrical cylindrical housing 2 1 that can be adopted, and one of the < ^ holes 2 2 (such as As shown in the figure, it can be a round hole). The inside of the housing 2 1 contains a short-traveling grating 1 A and a full state (half-full as shown in the figure). Object 23, cough 2 3 1 at the axial end of the polymer 23, and set up a hard house and a plate 2 4 (which can be a disc), and make the short light-woven woven grid 1 A covered with elasticity In the polymer 2 3, this group requires a strong reaction, > side-type Bragg fiber optic thumb pressure sensor just installed

200530567200530567

五、發明說明(6) 另者,本發明實施方式並包括使用一县也 κ九纖# Μ 1 R 所組成之側壓式布拉格光纖光柵壓力感測裝置· = 土 及第四圖所示,亦採以圓管狀之中空柱型外h ’如第二圖 Γ杈2 1,於苴二 側分設有一開孔2 2 (如圖所示可為圓孔),认 爪/、 %夕卜Μ $ 1 j^q立β 包含有長光纖光柵1 Β ,以及適滿狀態(如R ^ Π α| 滿)而作為該長光纖光柵1 B外觀之聚合物? Q ’、 一 乙3, 於帶人物 2 3軸向端部2 3 1設置一硬質板片2 4 (亦可為圓Η ' Λ 口、 . θ體),並 々該長光纖光柵1Β被完全包覆於彈性適當之&V. Description of the invention (6) In addition, the embodiment of the present invention also includes a side-pressure Bragg fiber Bragg grating pressure sensing device composed of Yixian κ 九 κ # Μ 1 R It also adopts a circular hollow column-shaped outer h 'as shown in the second figure Γ fork 21, and an opening hole 2 2 is provided on the two sides of the cymbal (as shown in the figure, it can be a round hole). Μ $ 1 j ^ q 立 β contains a long fiber grating 1 Β and a polymer in a suitable state (such as R ^ Π α | full) as the polymer of the appearance of the long fiber grating 1 B? Q ', a second 3, a hard plate 2 4 (also a round Η' Λ port,. Θ body) is provided at the axial end 2 3 1 with the character 23, and the long fiber grating 1B is completely covered Cover & Flexible

Q Α 〈來合物23内 ’且於該外殼2 1選定端設有一段可以容納長光纖光拇丄β 之通道2 5,藉此組成高反射光強度需求之側壓式布拉格光 纖光柵壓力感測裝置。 ° 運用本發明側壓式布拉格光纖光柵壓力感測裝置設計 ’其短光纖光柵側壓式壓力感測器中心波長與壓力的關係 為:短光纖光柵1 Α係以聚合物2 3為外襯,且令光纖光柵 1 A位於聚合物2 3的中心;首先考量三維空間中,聚合物 2 3的y方向受壓力或應力的情形(如第五圖所示),當環Q Α <inside the compound 23 'and a channel 2 5 is provided at the selected end of the housing 2 1 to accommodate a long fiber optic thumb β, thereby forming a pressure-sensing side-pressure Bragg fiber grating pressure sensor with high reflected light intensity requirements测 装置。 Testing device. ° Using the side pressure Bragg fiber grating pressure sensing device of the present invention to design 'the relationship between the center wavelength and pressure of the short fiber grating side pressure pressure sensor is: the short fiber grating 1 A is lined with polymer 2 3, Let the fiber grating 1 A be located at the center of the polymer 2 3; first consider the situation where the polymer 2 3 is under pressure or stress in the y direction in three-dimensional space (as shown in the fifth figure).

境中僅有y方向存在^力,且壓力為P時,v與E分別為聚合 物的卜松比和彈性模數,則可以得到如下:When there is only a force in the y direction and the pressure is P, v and E are the Busson's ratio and the elastic modulus of the polymer, respectively.

ε广-冲yE ε,ρ1Λ 也就是當有y方向的壓力ρ產生時,將可分別於Χ、yεwide-rush yE ε, ρ1Λ, that is, when the pressure ρ in the y direction is generated, it will be divided into X and y, respectively.

第10頁 200530567 五、發明說明(7) z方向產生 〜心,〜的應變。 現若將彈性核數‘為且截面積為 酌短光纖光柄 1 A延著z軸埋設置於此聚合物2 3的中心軸上(如第六圖 所示Page 10 200530567 V. Description of the invention (7) The z-direction produces ~ heart, ~ strain. Now, if the number of elastic cores is ′ and the cross-sectional area is short, the optical fiber shank 1 A is buried along the z axis and set on the central axis of this polymer 2 3 (as shown in the sixth figure).

),且短光纖光栅1 A的一端膠著於面積與聚合物23截面 積相同且平貼於聚合物2 3端面的一圓型硬質板片2 4的中心 點上,另一端則固定於聚合物2 3底面的中心點上。當y方 向受到P的壓力時,會沿著軸向(Z方向)產生一應力,而 在聚合物2 3的端面圓型硬質板片2 4上會產生大小為 的力,其中圓型硬質板片2 4的面積為A,此力同 時作用於短光纖光栅1 A與聚合物2 3,所以可表示為: FR = ^b6r + ^fiber = ^fiber ^fiber ^polymtr = εpolymer X X^p〇fymer), And one end of the short fiber grating 1 A is glued to the center point of a circular rigid plate 2 4 with the same cross-sectional area as that of the polymer 23 and flat against the end face of the polymer 2 3, and the other end is fixed to the polymer 2 3 At the center point of the bottom surface. When the y-direction is subjected to a pressure of P, a stress is generated along the axial direction (Z-direction), and a large force is generated on the end face of the round hard plate 2 of the polymer 23, wherein the round hard plate The area of sheet 24 is A. This force acts on the short fiber grating 1 A and polymer 2 3 at the same time, so it can be expressed as: FR = ^ b6r + ^ fiber = ^ fiber ^ fiber ^ polymtr = εpolymer XX ^ p〇fymer

當感測器受壓時,由於聚合物2 3與短光纖光柵1 A (FBG)產生的軸向應變相同 ,艮p ~ εfiber = £ polymer ,戶斤以 即為: -vPxA^ sz[axEfiUr + {A-a)Epolymer]When the sensor is under pressure, since the polymer 2 3 has the same axial strain as the short fiber grating 1 A (FBG), that is, p ~ εfiber = £ polymer, which means that: -vPxA ^ sz [axEfiUr + {Aa) Epolymer]

因此:therefore:

__-vPA fiber + ~ a)^fotywey 若此聚合物2 3是存在於一的外殼2 1中(如第七圖所示), 則除了 X方向的〜因外殼2 1的被覆而不會發生外,y與z方 向的應變仍為值較 ^值甚小,因此可忽略5__- vPA fiber + ~ a) ^ fotywey If the polymer 2 3 is present in the outer shell 21 of 1 (as shown in the seventh figure), except for the X direction ~ it will not happen due to the coating of the outer shell 21 In addition, the strains in the y and z directions are still very small compared to ^, so they can be ignored.

第11頁 200530567Page 11 200530567

。這種結構的側壓式布拉袼光纖 ^波長與壓力的關係主要受到軸 其光纖中心波長受應力影響的 造成光柵中心波長的影響 光栅壓力感測器其光柵中 向應變的影響(z方向) 相關數學式子為: =中%為中心波長位移量,^為未受壓力前中心波 的’為光纖應變係數及&amp;為受到的應變量。而此種结構 所=壓式布拉袼光纖光柵壓力感測器主要工作機制便^辦. The relationship between the wavelength and pressure of a side-pressed Bradford fiber with this structure is mainly affected by the stress of the center wavelength of the fiber, which affects the center wavelength of the grating. The pressure of the grating pressure sensor in the grating (z direction) Relevant mathematical formulas are: = medium% is the center wavelength displacement amount, ^ is the central wave before pressure, 'is the fiber strain coefficient, and &amp; is the amount of strain. And this kind of structure = the main working mechanism of the pressure type Bragg fiber grating pressure sensor

=到的壓力藉由聚合物的辅助,轉換成軸向應變,進而 力t i靈敏度特性,於是上式可改寫為光纖中心波長受塵 力衫響的關係,表示為: fiber + (-^ a)-^p〇lywer =將〜整理如以下式,可以觀察出,若圓型硬質板片 、面積(A )愈大於光纖的截面積,光栅軸向應變則愈大= The pressure obtained is converted into axial strain by the aid of the polymer, and then the sensitivity characteristic of the force ti, so the above formula can be rewritten as the relationship between the central wavelength of the fiber and the impact of the dust, which is expressed as: fiber + (-^ a) -^ p〇lywer = finishing ~ as shown below, it can be observed that if the circular rigid plate, the area (A) is larger than the cross-sectional area of the fiber, the larger the axial strain of the grating

=- -VP a ---—=--VP a -----

/至於長光纖光柵側壓式壓力感測器中心波長與壓义 ,係為.此種感測器與上述短光纖光柵感測器的不同肩 =於聚合物23的軸向長度與光纖光柵(FBG)的長度不 L =構的感:器可以解決在高強度布拉格反㈣ 戶,求^有使用較長之光纖光栅必要時採用。(如第》 生:ir方:上到=力時,會沿著軸向&quot;方向) 大小:而在\“勿23的端面圓型硬質板片24上會J 為―〜的力,此力又同時作用於光纖光柵與聚/ As for the center wavelength and pressure sense of the long fiber grating side pressure pressure sensor, the difference between this type of sensor and the short fiber grating sensor described above is the axial length of the polymer 23 and the fiber grating ( FBG) length is not L = structure sense: the device can solve the problem of high-intensity Bragg customers, and it is necessary to use a longer fiber grating if necessary. (Such as: "iron: up to = force, it will be along the axis &quot; direction) Size: And on the end of the round hard plate 24 of" 23 "will be J ~ ~ force, this Force acts on both the fiber grating and the

200530567 五、發明說明(9) 合物即: = ^fiber ^polymer200530567 V. Description of the invention (9) The compound is: ^ fiber ^ polymer

Ffiber=4⑽ XaxEfber ^polymer = ^polymer ^ ^ ^ polymer 當感測器感受壓力時,聚合物23與光纖光栅(FBG) 的軸向長度變化量會相同,然而在兩者原始長度不相同的 情形下,會使得產生的應變量不同,即:Ffiber = 4⑽ XaxEfber ^ polymer = ^ polymer ^ ^ ^ polymer When the sensor is under pressure, the amount of change in the axial length of polymer 23 and fiber grating (FBG) will be the same, but in the case where the original lengths of the two are different Will make the resulting dependent variables different, namely:

所以and so

(Α-α)ΕρσΙ^€τ(Α-α) ΕρσΙ ^ € τ

=hL 已知: 則:= hL Known: Then:

-vP^A -[(«xEfiher) + {Λ~α)Ερφηβγ] Lfiber ^pofymtr £ fiber-vP ^ A-[(«xEfiher) + (Λ ~ α) Ερφηβγ] Lfiber ^ pofymtr £ fiber

AL 因此: L fiber λΕAL therefore: L fiber λΕ

^ fiber ^p〇fym€T {A-d)E¥〇lywer 而由光纖中心波長受應力影響的相關數學式子可以經 由上式改寫成光纖中心波長受壓力影響,表示如下: 所以:^ fiber ^ p〇fym € T {A-d) E ¥ 〇lywer The related mathematical expressions affected by the stress of the fiber's center wavelength can be rewritten by the above formula to be affected by the pressure of the fiber's center wavelength, which is expressed as follows: So:

-vPA {A-a)Epi L fiber-vPA (A-a) Epi L fiber

第13頁 200530567 五、發明說明(10) 以長光纖光柵1 B之長度為聚合物2 3軸向長度的兩倍為例 貫施,則: (卜巧) 藉上揭實施形態,在使用側壓式短光纖光栅壓力感測 機構的靈敏度實驗中,可得如第九圖A及第九圖B之結果 ’該圖係為側壓式短光纖光柵壓力感測器之壓力與波長關 係圖’由圖示可知短光纖光柵1 A的反射中心波長由原來 的1 5 3 9 · 8 n m偏移至1 5 4 5 · 6 n m,此種壓力感測器的機能,以 每增加0· IMpa的壓力,會以2. 88nm的增幅線性向上偏移, 換言之,其對壓力量測的靈敏度為1. 87x10-2Mpa。 —而另外在實施側壓式長光纖光柵壓力感測機構的靈敏 度實驗中,也可以得如第十圖A至第十圖e之結果(其係 為側壓式長光纖光柵壓力感測器之壓力與波長關係圖^ , 其中第十圖A至第十圖D分別代表侧壓式長光纖光柵壓力 ,測器受到 0· 02Mpa、 〇. 05Mpa、 〇·lMpa、 〇· 2Mpa的壓力, 栅匕的偏移情形,由第十圖e圖可知長光纖光 栅b的反射中心波長由原來的1 539.922nm偏移至 —46. 42 9nm’此種長光纖光柵壓力感測器的機能 母增加0 · 1 M p a的壓力,以q π 7 R n i 、曰由 換U : r ί ,以3·3 8 76—增幅線性向上偏移, 、=t /、對壓力夏測的靈敏度可達到2.2xl0_2 。 用目光柵對壓力感測的靈敏度有⑯,為達實 的’可將光纖光栅實施如本發明特殊封裂結構後Page 13 200530567 V. Description of the invention (10) Taking the length of the long fiber grating 1 B as twice as the axial length of the polymer 2 3 as an example, then: (Bu Qiao) Borrow the implementation form on the use side In the sensitivity experiment of the pressure type short fiber grating pressure sensing mechanism, the results as shown in Figure 9 and Figure 9B can be obtained. 'This figure is a pressure-wavelength relationship diagram of a side pressure short fiber grating pressure sensor.' As shown in the figure, the reflection center wavelength of the short fiber grating 1 A is shifted from the original 1 5 3 9 · 8 nm to 1 5 4 5 · 6 nm. The function of this pressure sensor is increased by 0 · IMpa. 87x10-2Mpa。 Pressure, will increase linearly with an increase of 2. 88nm, in other words, its sensitivity to pressure measurement is 1. 87x10-2Mpa. -In addition, in the sensitivity experiment of the side-pressing type long fiber grating pressure sensing mechanism, the results shown in Figures 10A to 10e (which are the results of the side-pressing type long fiber grating pressure sensor) can be obtained. The relationship between pressure and wavelength ^, where the tenth graph A to tenth graph respectively represent the pressure of the side-pressing long fiber grating, the tester is subjected to a pressure of 0.02Mpa, 0.05Mpa, 0.00lpa, 0.2Mpa, From the tenth figure e, it can be seen that the reflection center wavelength of the long fiber grating b is shifted from the original 1 539.922 nm to -46. 42 9 nm. The function of such a long fiber grating pressure sensor increases by 0 · For 1 M pa pressure, change q π 7 R ni, say U: r ί, and shift upwards linearly by 3. 3 8 76—incremental, and the sensitivity to pressure summer measurement can reach 2.2xl0_2. The sensitivity of the optical grating to pressure sensing is not good. To achieve this, the fiber grating can be implemented as a special cracked structure of the present invention.

第14頁 200530567 五、發明說明(11) 軸向拉力的封裝確實可達成靈敏度更高的壓力感測效果, 在感測器的運用上,對強、弱光纖光柵的需求不同以及使 用空間大小的限制衍生出兩種可能之侧壓式光纖光柵壓力 結構感測器,此二形式之感測器由於其結構不同,其靈敏 度也有差異,可依據其需要選擇適用之感測器結構,即在 光訊號有強度上的需求時,即可以使用側壓式長光纖光柵 壓力感測機構來達成壓力感測目的,藉由測壓式光纖光柵 壓力感測器中的圓形硬質板片2 4面積的擴大,可以有效增 加壓力感測的靈敏度側壓式壓力感測機構由於具有體積小 的優點,也可以運用於空間使用有限制的環境中。 經上述實驗結果顯示,本發明側壓式光纖光柵壓力感 測器與半穩態解調光路結合後,確實具備有效執行壓力量 測之功能,且以高度壓力感測的靈敏度,廣泛的除了在水 位量測的應用上可發揮可觀的量測能力外,在水下載具潛 水深度的量測應用上亦具有高度的潛力。Page 14 200530567 V. Description of the invention (11) The packaging of axial tension can indeed achieve a more sensitive pressure sensing effect. In the application of the sensor, the requirements for strong and weak fiber gratings are different and the use of space Limitations have led to two possible side-pressed fiber Bragg grating pressure structure sensors. Due to their different structures, the sensitivity of these two types of sensors is also different. You can choose the appropriate sensor structure according to their needs. When the signal has a strength requirement, the side pressure type long fiber grating pressure sensing mechanism can be used to achieve the pressure sensing purpose. The circular hard plate in the pressure measuring fiber grating pressure sensor has a 2 4 area. Enlargement can effectively increase the sensitivity of pressure sensing. Because of its small size, the side pressure pressure sensing mechanism can also be used in environments where space usage is limited. The above experimental results show that the combination of the side-pressing fiber grating pressure sensor of the present invention and the semi-stable demodulation optical path does have the function of effectively performing pressure measurement, and the high sensitivity of pressure sensing is widely used in addition to In addition to the considerable measurement capability in water level measurement applications, it also has a high potential in the measurement and application of diving depth in water vehicles.

第15頁 200530567 圖式簡單說明 第一圖為本發明侧壓式短光纖光柵壓力感測器之斷面示意 圖。 第二圖為本發明侧壓式短光纖光栅壓力感測器之外觀示意 圖。 第三圖為本發明側壓式長光纖光栅壓力感測器之斷面示意 圖。 第四圖為本發明側壓式長光纖光柵壓力感測器之外觀示意 圖。 第五圖為本發明側壓式感測器内部聚合物軸向應變產生示 意圖。 第六圖為本發明側壓式感測器内部圓型平板軸向位移產生 示意圖。 第七圖為本發明短光纖光柵側壓式壓力感測器受壓示意圖 〇 第八圖為本發明長光纖光栅側壓式壓力感測器受壓示意圖 〇 第九圖A至第九圖B為本發明側壓式短光纖光柵壓力感測 器之壓力與波長關係圖。 第十圖A至第十圖B為本發明側壓式短光纖光柵壓力感測 器之壓力與波長關係圖。 【主要圖號說明】 布拉格光纖光柵 1 ; 短光纖光柵 1 A ;Page 15 200530567 Brief description of the drawings The first diagram is a schematic cross-sectional view of a side-pressure short fiber grating pressure sensor according to the present invention. The second figure is a schematic diagram of the appearance of a side-pressing short fiber grating pressure sensor according to the present invention. The third figure is a schematic sectional view of a side-pressing type long fiber grating pressure sensor according to the present invention. The fourth figure is a schematic diagram of the appearance of a side-pressing long fiber grating pressure sensor according to the present invention. The fifth figure is a schematic diagram of the axial strain generation of the polymer inside the side pressure sensor of the present invention. The sixth figure is a schematic diagram of the axial displacement of the circular flat plate inside the side pressure sensor of the present invention. The seventh diagram is a schematic diagram of the pressure of the short fiber grating side pressure type pressure sensor of the present invention. The eighth diagram is the schematic diagram of the pressure of the long fiber grating side pressure type pressure sensor of the present invention. The ninth diagram A to ninth diagram B are Pressure-wavelength relationship diagram of the side-pressing short-fiber grating pressure sensor of the present invention. The tenth graph A to the tenth graph B are pressure and wavelength diagrams of the side-pressing short fiber grating pressure sensor of the present invention. [Description of main drawing numbers] Bragg fiber grating 1; short fiber grating 1 A;

第16頁 200530567 圖式簡單說明 長光纖 光 柵 1 B 側壓式 壓 力感測器 2 ; 外殼 21 ; 開孔 22 ; 聚合物 23 ; 端部 231 硬質板 片 24 ; 通道 25 ;Page 16 200530567 Brief description of the drawing Long optical fiber grating 1 B Side pressure type pressure sensor 2; Housing 21; Opening hole 22; Polymer 23; End 231 Hard plate 24; Channel 25;

Claims (1)

200530567 六、申請專利範圍 1 、一種側壓 布拉 定光纖光 側壓 外殼二選 於該開孔 適當彈性 壓力,並 精此 力感測器 合於所述 成由徑向 中心波長 格光纖光 2 、如申請專 壓力感測 長度的光 壓力感測 、如申請專 壓力感測 度較長的 式壓力感 段可以容 4、如申請專 式布拉 格光纖 柵其長 式壓力 定側分 處之外 之聚合 於該聚 ,令布 其外殼 硬質板 壓力對 的偏移 柵壓力 利範圍 器,該 纖光柵 器其外 利範圍 is ’該 光纖光 測器其 納光纖 利範圍 格光纖光柵壓力感測裝置,包括: 光栅,係依據需求反射光之強弱而擇 度; 感測益,係具有一空心柱型外殼,於 別設有至少一與外界相通之開孔,並 殼内部填充有呈適滿狀態且材質具有 物,令該聚合物可經由開孔承受外界 合物軸向端部設置一硬質板片; 拉格光纖光栅形成被包覆於側壓式壓 内之聚合物中,且令光纖光柵一端耦 片端,而另一端延伸出殼體外,以組 聚合物產生之應變,可帶動光纖光栅 ’而達成量測壓力作用之側壓式布拉 感測裝置者。 第1項所述之側壓式布拉格光纖光柵 布拉格光纖光栅係可擇用所有種類短 (短光纖光拇),而被包覆於側壓式 殼内之聚合物中。 第1項所述之側壓式布拉格光纖光柵 布拉格光纖光柵係可擇用所有種類長 拇(長光纖光柵)’而被包覆於側壓 外殼内之聚合物中’且於外殼設有一 光柵之通道。 第1項所述之側壓式布拉格光纖光栅200530567 6. Scope of patent application 1. A side-pressure Bradden fiber optic side-pressure housing 2 is selected from the opening with appropriate elastic pressure, and the force sensor is combined with the optical fiber light with a radial center wavelength grid 2 For example, if you apply for light pressure sensing with a dedicated pressure sensing length, if you apply for a pressure sensing segment with a longer pressure sensing degree, you can accommodate 4.If you apply for a special Bragg fiber grating, its long pressure set is outside the fixed side branch. In this case, the offset grating pressure range device of the hard plate pressure pair of the outer casing of the cloth, the external range of the fiber grating device is' the optical fiber sensor, and the optical fiber range of the fiber grating pressure sensing device, including : Grating, which is selected according to the strength of the reflected light. The sensing benefit is a hollow cylindrical shell with at least one opening that communicates with the outside. The interior of the shell is filled with a full and material. With a material, the polymer can withstand a hard plate through an opening at the axial end of the foreign compound; a rag fiber grating is formed in a polymer encapsulated in a side pressure type And the fiber grating is coupled to the chip end at one end, and the other end extends out of the housing. With the strain generated by the polymer, the fiber grating can be driven to achieve a side-pressure Brass sensing device for measuring pressure. The side-pressed Bragg fiber grating described in item 1 Bragg fiber gratings can be used in all kinds of short (short fiber thumb), and they are coated in the polymer in the side-compressed shell. The side-pressed Bragg fiber gratings described in item 1 can use all kinds of long thumbs (long fiber gratings) 'coated in the polymer in the side-pressure housing' and a grating is provided in the housing. aisle. Side-pressed Bragg fiber gratings described in item 1 第18頁 200530567 六、申請專利範圍 壓力感測器,該布拉格光纖光柵係可為一種均勻型 (uniform) 光纖光柵。 5 、如申請專利範圍第1項所述之側壓式布拉格光纖光柵 壓力感測器,該側壓式壓力感測器可視需要而調整尺 寸,藉以改變感測之靈敏度。Page 18 200530567 6. Scope of patent application Pressure sensor, the Bragg fiber grating system can be a uniform fiber grating. 5. The side-pressure Bragg fiber grating pressure sensor as described in item 1 of the scope of patent application. The side-pressure pressure sensor can be adjusted in size as needed to change the sensing sensitivity. 第19頁Page 19
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US9588001B2 (en) * 2014-10-17 2017-03-07 National Kaohsiung University Of Applied Sciences Pressure detecting apparatus made by 3D printing technologies being able to be used in dangerous areas

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Publication number Priority date Publication date Assignee Title
CN114353867A (en) * 2021-12-23 2022-04-15 石家庄铁道大学 Multifunctional soil state monitoring device
CN114353867B (en) * 2021-12-23 2023-09-19 石家庄铁道大学 Multifunctional soil body state monitoring device

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