200528753 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種光資訊網路、光LAN等之光通信領域 之光開關或可變型光衰減器用之鏡子、稜鏡、光閘等之光 元件。 【先前技術】 習知’如顯示於特開2001-350105號公報，作為該種光裝 置者，眾知例如顯示於圖7之光開關900。該光開關9〇〇具有 光纖9 11、921及透鏡系912、922，形成輸入口 9 1 〇a、920a， 具有將通過之光線作成平行光線之光纖光軸儀91〇、920與 光纖931、941及透鏡系93 2、942，形成輸出口 930a、940a， 包含將通過之光線作成平行光線之光纖光軸儀93〇、940之2 輸入、2輸出之2x2光開關。 另外’光開關900包含有光轉換元件950、支撐板960、驅 動促動器970、引導機構980及連接機構990 ;該轉換元件950 係具有直角稜鏡951、952 ;該支撐板960係支撐光轉換元件 950;該驅動促動器970係使光轉換元件950移動至箭頭符號 950a及箭頭符號950b之顯示方向例如螺線管促動器等；該 引導機構980係藉驅動促動器970導引光轉換元件950之移 動；該連接機構990係連結驅動促動器970及引導機構980。 而且，光開關900係藉驅動促動器970使光轉換元件950移動 至前頭付號9 5 0 a之顯不方向’由光纖光轴儀91 〇、9 2 0及光 纖光軸儀930、940之間藉拉伸，使在光纖光軸儀910、920 射出之光線，直接射入各個光纖光軸儀930、940。 95976.doc 200528753 一方面，光開關900藉驅動促動器970，使光轉換元件95〇 移動至箭頭符號950b之顯示方向，以光纖光軸儀91〇、92〇 射入之光線，各個如圖7所顯示，藉光轉換元件950改變光 射入光纖光軸儀940、930。如此，在光纖光軸儀91〇、92〇 及光纖光軸儀930、940之間，依據是否插入光轉換元件 950,可以轉換以光纖光軸儀910、920射出之光線射入光纖 光軸儀93 0、940之光與射入以光纖光軸儀91〇、920射出之 光纖光軸儀940、93 0之光路。 然而，在光開關900中，轉換元件950隨著在光路中沒有 的情形，轉換元件950配置於光路中，即使在轉換光路的情 形亦期望插入損失較小。 轉換元件950配置於光路中，為了縮小轉換光路時之插入 損失’由形成輸入口 910a、920a之光纖光軸儀91〇、920射 出之光線，有必要縮小當射入形成輸出口 930a、940a之光 纖光軸儀93 0、940時之損失。 但是’在上述習知之光開關900中，當轉換光路時，以較 高角度精度及位置精度將光轉換元件950插入光中，具有很 難縮小插入損失之問題。也就是，在將由光纖光軸儀射出 之光束之直徑Φ增加0.4 mm程度插入損失抑制於οι dB以 下的情形，精密引導構造為了將光轉換元件的角度偏移抑 制於0.02度以下’當導體之高度為3 mm時，導體面與滑動 器之間隙若不設計加工於〇_〇〇1 mm以下，則很難製造。 另外，若周圍之溫度變化，則藉導體與滑動器之熱膨脹 差產生間隙。藉由製造上之誤差與熱膨脹之影響產生之機 95976.doc 200528753 械的間隙，滑動器在移動時在導體面内旋轉。例如在圖8 中，在y軸方向形成間隙的情形，與由χ軸方向看之導體面 直行之方向（圖8之Φ及〇方向）之旋轉，雖藉導體面抑制，不 過Θ方向之旋轉不能抑制，因機械的損壞光轉換元件的㊀方 向的傾斜角度變大，插入損失增大，也有使光開關的特性 劣化之問題。 進一步，制的損土裏不僅滑動器旋轉，也形成平行變位 之要因。滑動器若對導體變位，則與滑動器一體移動之直 角稜鏡也同樣變位。以直㈣鏡反射、折回光束的情形， 直角馱鏡在與射入光束之光軸正交之方向若僅△續位，則2 次反射，折回光束作2倍之虹，也就是2Μ變位。反射光束 之光軸之變位招致在射出側光纖光軸儀之光結合之 插入損失增大。 【發明内容】 在此，本發明與習知作比較，其目的在於提供-種加於φ 及φ方向，θ方向之旋轉也維持較高之角度精度，同時也维 持鏡子之較高位置精度之引導構造。 上依據本發明’形成下述結構··於具有引導機構之光袈置， 該料機構包含：光射入手段，其係由外部射入光；光射 ，手段其係使以前述光射人手段射人之前述光射出至外 部，光變化構件，其係變化前述光的物理量或路徑，配置 於前述光射人手段與前述光射出手段之間之光路中；構件 移動手段，其係使前述光變化構件移動；及移動㈣構件， 其係藉前述構件移動手段導引前述光變化構件之移動；前 95976.doc 200528753 =移動導引構件至少具有2面與移動 平面具有交綠， _ ^卞仃之十面，該2 俨減“ 係與前述移動方向略平行。 依據本發明，前述構件 並孫、助予&包含·驅動部；引導邱， 爲者移動導引構件移動，·及 ^ 變化構件，·在前述引導部形成二八係固定前述光 動導引構件之各平面密合亦可：仃之千面，以便與前述移 依據本發明，設置推麼 手段與前述引導部平〇_^ ，以便前述構件移動 丨導邛千仃之平面間密合亦可。 依據本發明，使用彈 可。作為彈性體，有板^ ㈣力作用手段亦 有板弹耳、螺旋彈簧、橡膠等。 本^明，使用永久磁鐵及電磁 述推壓力作用手段亦可。 夕方作為則 =本發明’在前述構件移動手段與前述引 十面間及前述制動器施以潤滑手段亦可。 為Γ:本發明’將前述潤滑手段作為固體潤滑劑亦可。作 為固體潤滑劑，有氟塗層” 屬材料塗層等。 i塗層專之軟質金 平!:康：發Γ，與前述移動導引構件之移動方向平行之2 曲开/成之角度為略9〇度亦可。 依據本發明，前述構件移動手段之 構件以同材質形成亦可。 導應 ::本發明，一體形成前述構件移動手段與該構件移動 又，、驅動手段之連結部亦可。 依據本發明，以制動器支撐前述引導部之引導構件亦 95976.doc 200528753 可。作為制動器，有板彈簧等。 之 依據本發明，在前述構件移 平面間及前述制動器施以潤滑手段=前=導部平π 有潤滑油、固體潤滑劑 乍為濶滑手段， 依據本發明，以背二Γ 之塗層等。 可。 —補助前述引導構件之背面亦 依據本發明，以下面制 可。 ㈣^助前料導構件之下面亦 依據本發明，以固體潤 面制動器及則述下面制動器中之 下面制動器中之至少—方亦可。1…面制動器及前述 依據本發明，將前述背 至少一方作為板彈簧亦可 依據本發明 隙空間，以便 導引構件在驅 在前述移動導引構件設置 固定於前述構件㈣手段之構件與前述移 動時不干擾亦可。 另外，以本案❹之光變化構件，不僅可以控制光路， 亦可以抆制光罝與偏光等之光的物理量全部。 :斤述依據本發明，即使不以高精度之尺寸精度 十製k由於相互抑制在各個平面之直動之滑動器之自 由1’所以可以抑制直動之滑動器的變位及旋轉，可以容 易提f與滑動器一體滑動之反射鏡之角度精度及位置精 度。藉容易提高反射鏡之角度精度及位置精度，可以縮小 抑制裝置的插入損失。 進步’若依據本發明，若使用油空壓與磁力即使重複 95976.doc 200528753 的移動朝導體之推壓力，壓力源亦不會隸，由於特性沒 有劣化所以可以得到耐久性優良之引導機構。 依據本發明’為了低磨耗化，藉賴滑材插人導體與滑 動器之間，可以省能源。 另外’依據本發明，藉使用固體潤滑劑作為前述潤滑手 段，可以防止潤滑材料飛散。 依據本發明，可以以較弱之力提昇黏著度。進一步，可 以減低驅動時之u喿音。 依據本發明’可以簡易的加工。進一步可以提昇耐久性。 另外’以本案使用之光變化構件不僅可以控制光路，亦 可以控制光量與偏光等之光的物理量全部。 【實施方式】 以下’依據圖面說明本發明之較佳實施形態。 圖1A〜3B為關於本發明之光開關之實施形態之圖。 光開關100係由1個光射入手段之光纖光軸儀1與2個光射 出手段之光纖光軸儀2、3所形成之1射入2射出之1 χ2光開 關。光纖光軸儀1係由光纖1 01及光轴儀102所形成，將通過 之光線作成平行光線。光纖光軸儀2、3係由光纖1〇4、1〇5 及光軸儀103、106所形成，將平行光線有效率地引導至光 纖。 另外，光開關1〇〇包含直角棱鏡109、滑動器108及促動器 110，該直角稜鏡109為反射鏡透鏡；滑動器108係形成與直 角稜鏡109—體移動；該促動器110係在直線運動前述直角 稜鏡109與前述滑動器108時’產生用以使成為位置與角度 95976.doc -10- 200528753 之基準之導體1〇7與前述直角稜鏡1〇9與滑動器1〇8移動之 力量。又，在本實施例，導體107構成移動引導手段，與滑 動器108—體設置之直角稜鏡109相當於本發明之光變化構 件。本發明之構件移動手段係由滑動器1〇8與驅動部之促動 器110所構成，滑動器1〇8包含有作為固定直角棱鏡1〇9之固 定部之功能，與作為和導體107抵接移動之引導部之功能。 光纖光軸儀1與光纖光軸儀2對向，配置成光結合。在完 全不遮蔽由光纖光軸射出之光束之位置，將配置直角： 鏡1〇9時之直角稜鏡109之位置稱為下位置（圖ia的位置）。 在完全遮蔽由光纖光軸儀丨射出之光束之位置，將配置直角 稜鏡109時之直角稜鏡1〇9之位置稱為上位置（圖ΐβ的位 置）。直角稜鏡H)9沿著導體107形成與移動於圖W箭頭符 號之方向之滑動器1()8—體移動。滑動器⑽依照來自未圖 不之控& Θ之電氣信號’藉促動器之電磁螺線管}職生之 力學的力，移動至圖1A箭頭符號所顯示之滑動器之移動方 向0 直角稜鏡隨著滑動器移動至圖以之箭頭符號之方向向下 方下降，當直角稜鏡1〇9位於不遮蔽由光纖光軸儀1射出之 光束之位置時，以光纖光抽儀2受光由圖1A及圖3績顯示 之光纖光軸儀1射出之平行光束。將此時之光之路徑作為第 1光路。 如圖1B及圖3B所顯示，前述滑動器1〇8沿著直角棱鏡⑽ 與導體107移動至圖中上方向，#位於上位置時，由光纖光 季儀1射出之則述平行光束，在直角稜鏡的斜面反射，光束 95976.doc 200528753 彎曲90度，再在直角稜鏡1〇9的斜面反射，更進一步彎曲9〇 度。光纖光軸儀3係配置固定成結合以直角稜鏡2次彎曲之 光束，朝外部射出光。 此等為第2光路。 在直角稜鏡之反射面，以真空蒸鍍法等蒸鍍金、鋁等之 金屬膜’糟1 μηι程度蒸鑛可以容易得到高性能之反射膜。 另外，反射膜即使為藉電鍍法相互疊層金屬薄膜與丁丨〇2與200528753 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a light of a light switch such as an optical information network, an optical LAN, or a mirror, a chirp, a shutter for a variable optical attenuator, etc. element. [Prior art] As shown in Japanese Unexamined Patent Publication No. 2001-350105, it is known that, for such an optical device, for example, the optical switch 900 shown in FIG. 7 is known. The optical switch 900 has optical fibers 9 11, 921 and lens systems 912, 922, forms input ports 9 10a, 920a, and has optical fiber optical axis meters 91, 920 and optical fibers 931, The 941 and the lens systems 93 and 942 form output ports 930a and 940a, and include a 2x2 optical switch with two inputs and two outputs of a fiber optic axis meter 93o and 940 that make the passing light into parallel rays. In addition, the optical switch 900 includes a light conversion element 950, a support plate 960, a driving actuator 970, a guide mechanism 980, and a connection mechanism 990; the conversion element 950 has right angles 稜鏡 951 and 952; and the support plate 960 supports light Conversion element 950; the drive actuator 970 moves the light conversion element 950 to the display direction of the arrow symbol 950a and the arrow symbol 950b, such as a solenoid actuator; the guide mechanism 980 is guided by the drive actuator 970 The movement of the light conversion element 950; the connection mechanism 990 connects the driving actuator 970 and the guide mechanism 980. In addition, the optical switch 900 is used to drive the actuator 970 to move the optical conversion element 950 to the display direction of the front number 9 5 0 a. The optical fiber optical axis meters 91 0, 9 2 0, and the optical fiber optical axis meters 930 and 940 are used. By stretching, the light emitted from the optical fiber optical axis meters 910 and 920 directly enters each of the optical fiber optical axis meters 930 and 940. 95976.doc 200528753 On the one hand, the optical switch 900 drives the actuator 970 to move the light conversion element 95o to the display direction of the arrow symbol 950b, and the light beams incident on the fiber optic axis meters 91 and 92 are as shown in the figure. As shown in FIG. 7, the light conversion element 950 changes the light incident on the optical fiber optical axis meters 940 and 930. In this way, between the optical fiber optical axis meters 91 and 92 and the optical fiber optical axis meters 930 and 940, depending on whether or not the optical conversion element 950 is inserted, the light emitted by the optical fiber optical axis meters 910 and 920 can be converted into the optical fiber optical axis meters. Lights of 930 and 940 and the optical paths of 940 and 930 of fiber optic axes emitted by fiber optic axemeters 91 and 920. However, in the optical switch 900, as the conversion element 950 is not present in the optical path, the conversion element 950 is disposed in the optical path, and even in the case of converting the optical path, it is expected that the insertion loss is small. The conversion element 950 is arranged in the optical path. In order to reduce the insertion loss when the optical path is converted, the light emitted by the optical fiber optical axis meters 91 and 920 that form the input ports 910a and 920a must be reduced when incident to the output ports 930a and 940a. The loss of the fiber optic axis meter at 930,940. However, in the conventional optical switch 900, when the optical path is switched, the optical conversion element 950 is inserted into the light with high angular accuracy and positional accuracy, which has a problem that it is difficult to reduce the insertion loss. That is, when the diameter Φ of the light beam emitted by the optical fiber optical axis meter is increased by 0.4 mm and the insertion loss is suppressed to οι dB or less, the precision guide structure is designed to suppress the angular shift of the light conversion element to 0.02 degrees or less. When the height is 3 mm, it is difficult to manufacture the gap between the conductor surface and the slider unless it is designed and processed below 0 mm. In addition, if the ambient temperature changes, a gap is created by the difference in thermal expansion between the conductor and the slider. Due to the manufacturing error and the effect of thermal expansion, the slider is rotated in the conductor surface when it moves. For example, in FIG. 8, when a gap is formed in the y-axis direction, the rotation of the conductor surface in a straight direction (Φ and 〇 directions in FIG. 8) viewed from the χ-axis direction is suppressed by the conductor surface, but the rotation in the θ direction It cannot be restrained, and the mechanical tilt of the light conversion element increases the inclination angle in the ㊀ direction, which increases the insertion loss and deteriorates the characteristics of the optical switch. Further, not only the slider rotates in the damaged soil, but also the cause of parallel displacement. If the slider displaces the conductor, the right angle 稜鏡 that moves integrally with the slider is also displaced. In the case of a rectangular mirror to reflect and fold back the beam, if the right-angle mirror is in the direction orthogonal to the optical axis of the incident beam, if it is only △ continued, it will be reflected twice, and the folded beam will be doubled as a rainbow, which is 2M displacement. . The displacement of the optical axis of the reflected beam causes an increase in the insertion loss of the optical combination of the optical fiber optical axis meter on the exit side. [Summary of the Invention] Here, the present invention is compared with the prior art, and its purpose is to provide a kind of rotation that is added to the φ and φ directions, and the θ direction also maintains a high angular accuracy, while also maintaining a high position accuracy of the mirror. Guide construction. According to the present invention, the following structure is formed: ... on a light set having a guide mechanism, the material mechanism includes: a light-injecting means for incident light from the outside; a light-injection means for emitting a person with the aforementioned light The aforementioned light emitted by the means is emitted to the outside, and the light changing member changes the physical quantity or path of the aforementioned light, and is arranged in the optical path between the aforementioned means for emitting light and the aforementioned means for emitting light; the means for moving the member, which causes the aforementioned The light changing member moves; and the moving ㈣ member is used to guide the movement of the light changing member by the aforementioned means for moving the member; before 95976.doc 200528753 = the moving guide member has at least 2 faces and the moving plane has a green color, _ ^ 卞 仃 之On the ten sides, the 2 subtraction "is slightly parallel to the aforementioned moving direction. According to the present invention, the aforementioned members are descended from each other, and the assistant & includes a driving unit; guides Qiu, moves the guide member to move, and ^ changes the member The planes of the two or eight series of fixed light-moving guide members can be formed on the aforementioned guides. The planes can also be in close contact with each other. The guide part is flat so that the movement of the aforementioned components, and the planes of the guides can be tightly adhered. According to the present invention, the use of a spring is possible. As an elastic body, there is a plate ^ force acting means also a plate spring ear, Spiral springs, rubber, etc. In this specification, it is also possible to use permanent magnets and electromagnetic pushing means. Even if the party is equal to the present invention, it is also possible to apply lubricating means between the aforementioned means for moving the member and the aforementioned surface and the aforementioned brake. For Γ: In the present invention, the aforementioned lubricating means may be used as a solid lubricant. As a solid lubricant, a fluorine coating is used. The i-coating is made of soft gold !: Kang: Fa Γ, the angle of 2 bends / angles parallel to the moving direction of the aforementioned moving guide member may be slightly 90 degrees. According to the present invention, the members of the member moving means may be formed of the same material. [Induction]: According to the present invention, the aforementioned means for moving a member and the movement of the member may be integrally formed, and a connection portion of the driving means may be formed. According to the present invention, a guide member that supports the aforementioned guide portion with a brake is also 95976.doc 200528753. As the brake, there are leaf springs and the like. According to the present invention, lubricating means is applied between the moving planes of the aforementioned components and the foregoing brakes = front = flat guides. Lubricating oil and solid lubricants are used as slippery means. According to the present invention, coatings such as back Γ are used. . can. -The back side of the above-mentioned guide member is supplemented according to the present invention and can be manufactured as follows. According to the present invention, the lower surface of the front guide member is also based on at least one of the solid surface brake and the lower brake among the lower brakes. 1 ... surface brake and the foregoing according to the present invention, at least one of the backs may be used as a leaf spring, and the clearance space may also be used according to the present invention, so that the guide member is driven in the moving guide member, and the member fixed to the member ㈣ means and the movement No interference at all times. In addition, with the light changing member of this case, not only the optical path can be controlled, but also all physical quantities of light such as light and polarized light can be controlled. : According to the present invention, even without high-precision dimensional accuracy, since the freedom 1 'of the sliders that linearly move in each plane is suppressed, it is possible to suppress the displacement and rotation of the sliders that are directly moved. Raise the angular accuracy and position accuracy of the mirror that slides integrally with the slider. By easily improving the angular accuracy and position accuracy of the mirror, the insertion loss of the suppression device can be reduced. According to the present invention, if oil pressure and magnetic force are used to repeat the movement of 95976.doc 200528753 toward the conductor, the pressure source will not be affected, and the guide mechanism with excellent durability can be obtained because the characteristics are not deteriorated. According to the present invention, in order to reduce abrasion, energy can be saved by inserting a sliding material between a conductor and a slider. In addition, according to the present invention, by using a solid lubricant as the aforementioned lubricating means, it is possible to prevent the lubricating material from scattering. According to the present invention, the adhesion can be improved with a weaker force. Further, it is possible to reduce the u noise during driving. According to the present invention, it can be easily processed. Further, durability can be improved. In addition, the light changing member used in this case can control not only the optical path, but also the physical quantities of light such as light quantity and polarized light. [Embodiment] Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. 1A to 3B are diagrams showing an embodiment of an optical switch according to the present invention. The optical switch 100 is a 1 x 2 optical switch formed by a fiber optical axis meter 1 with one light incident means and a fiber optical axis meter 2 with 3 light emitting means. The optical fiber optical axis instrument 1 is formed by the optical fiber 101 and the optical axis instrument 102, and the passing light is made into parallel rays. The optical fiber optical axis meters 2 and 3 are formed by the optical fiber axes 104 and 105 and the optical axis meters 103 and 106, which efficiently guide parallel light rays to the optical fibers. In addition, the optical switch 100 includes a right-angle prism 109, a slider 108, and an actuator 110. The right-angle 稜鏡 109 is a mirror lens; the slider 108 is formed so as to move with the right-angle 稜鏡 109; the actuator 110 When the aforementioned right angle 稜鏡 109 and the slider 108 are moved in a straight line, a conductor 107 which is used as a reference for the position and angle 95976.doc -10- 200528753 and the aforementioned right angle 稜鏡 109 and the slider 1 are generated. 〇8 The power of movement. In this embodiment, the conductor 107 constitutes a moving guide means, and the right angle 稜鏡 109 provided integrally with the slider 108 corresponds to the light changing member of the present invention. The component moving means of the present invention is composed of a slider 108 and an actuator 110 of a driving part. The slider 108 includes a function as a fixed part for fixing the right-angle prism 10 and resists the conductor 107. Connect the function of the moving guide. The optical fiber optical axis meter 1 and the optical fiber optical axis meter 2 face each other, and are arranged to be optically combined. At a position where the light beam emitted from the optical fiber's optical axis is not shielded at all, the position of the right angle: the right angle 稜鏡 109 when the mirror 1009 is called the lower position (the position in FIG. Ia). At the position where the light beam emitted by the fiber optic axis instrument is completely shielded, the position where the right angle 稜鏡 109 when the right angle 稜鏡 109 is arranged is called the upper position (the position of Fig. Ϊ́β). The right angle 稜鏡 H) 9 is formed along the conductor 107 and the slider 1 () 8 moves in the direction of the arrow sign in FIG. Slider 移动 According to the electric signal from the control & Θ not shown in the figure, "by the electromagnetic solenoid of the actuator} the mechanical force of the student, move to the direction of movement of the slider shown by the arrow symbol in Figure 1A. 0 right angle稜鏡 As the slider moves to the downward direction of the arrow symbol shown in the figure, when the right angle 9109 is located at a position that does not block the light beam emitted by the optical fiber optical axis instrument 1, the optical fiber optical pump 2 receives light from The parallel light beams emitted from the optical fiber optical axis device 1 shown in FIG. 1A and FIG. 3 are shown. Let the path of light at this time be the first optical path. As shown in FIG. 1B and FIG. 3B, the slider 108 moves to the upper direction in the figure along the right-angle prism ⑽ and the conductor 107. When # is in the upper position, the parallel beam emitted by the optical fiber quarter meter 1 is described in FIG. The oblique reflection of the right angle 稜鏡, the light beam 95976.doc 200528753 bends 90 degrees, and then reflects on the oblique surface of the right angle 9109, which is further bent 90 degrees. The optical fiber axemeter 3 is arranged and fixed so as to combine light beams bent twice at a right angle to emit light to the outside. These are the second optical paths. On a reflective surface of a right angle, a high-performance reflective film can be easily obtained by vapor-depositing a metal film of gold, aluminum, or the like by vacuum evaporation. In addition, even if the reflective film is a metal thin film and a d
Si〇2等氧化膜之電介質多層膜，亦可以得到高性能之反射 膜。 石英玻璃之折射率約為1 ·5。朝直角稜鏡之反射面之射入 角為45度且為石英玻璃製的情形，45度的反射面，全反射 的條件成立，對透鏡不施以反射膜亦可以得到1〇〇%的反 射。 另外，在直角稜鏡的射入面，藉以疊層丁丨〇2與si〇2等氧 化膜之電介質多層膜施以反射防止膜，光的損失可以大幅 地縮減。 藉滑動器108的上下移動產生之機械的間隙，針對直角棱 鏡的位置偏差與角度偏差的抑制效果更詳細的加以說明。 由滑動器108的内面以板彈簧向導體1〇7的2面之頂點加 上壓力，藉板彈簧之力，滑動器108其力加於導體面、 l〇7b，推壓至1〇7a、107b，沿著面移動。首先，僅針對導 體面107a加以考慮。 如圖3A、3B所顯示，垂直於藉固定於導體（移動引導構 件）1〇7之板彈簧114產生之導體面ιοπ之方向之力，將滑動 95976.doc 12 200528753 之旋轉與移動， 器ι〇8推壓至導體面107a，僅容許面内方向 不容許其他方向之角度變化與位置變化。 其次，僅針對與導體面職正交之導體面嶋加以考慮。 導體面107b也與導體面1〇7a同樣，藉板彈菁ιΐ4的變形產 生之力，將滑動器⑽推壓至導體面㈣，僅容許面内方向 之旋轉與移動，不容許其他方向之角度變化與位置變化。 由於導體面107a及職相互正交，所以容許滑動器1〇8的 角度變化與位置變化之自由度不存在。Dielectric multilayer films of oxide films such as SiO2 can also obtain high-performance reflective films. The refractive index of quartz glass is about 1.5. When the incident angle to the right-angled reflecting surface is 45 degrees and is made of quartz glass, the 45-degree reflecting surface has the condition of total reflection, and 100% reflection can be obtained without applying a reflective film to the lens. . In addition, an anti-reflection film is formed on the incident surface of the right-angled beam by applying a dielectric multilayer film such as butyl oxide and SiO2, and the light loss can be greatly reduced. The mechanical clearance generated by the up-and-down movement of the slider 108 will explain the effect of suppressing the positional deviation and angular deviation of the right-angle prism in more detail. Pressure is applied from the inner surface of the slider 108 to the vertices of the two surfaces of the leaf spring guide 107, and by the force of the leaf spring, the force of the slider 108 is applied to the conductor surface, 107b, and pushed to 107a, 107b, moving along the surface. First, only the conductive surface 107a is considered. As shown in FIGS. 3A and 3B, the force perpendicular to the direction of the conductor surface ιοπ generated by the plate spring 114 fixed to the conductor (moving guide member) 107 will slide the rotation and movement of 95976.doc 12 200528753. 〇8 Pressing on the conductor surface 107a allows only the in-plane direction and the angular change and position change of other directions are not allowed. Secondly, only the conductor planes orthogonal to the conductor plane are considered. The conductor surface 107b is also the same as the conductor surface 107a. The slider ⑽ is pushed to the conductor surface 借 by the force generated by the deformation of the plate spring ΐ4. Only the in-plane rotation and movement are allowed, and the angle in other directions is not allowed. Change and position change. Since the conductor plane 107a and the duty are orthogonal to each other, there is no degree of freedom in allowing the angle change and position change of the slider 108.
導體面咖與⑽的面方向，即使與正交條件多少不 同’不過可以容易瞭解的是正交之射影成分之力形成拘束 力0 由以上事項，瞭解到在原理上不平行之2個平面間，由朝 1個平面之力與朝其他平面之正交之成分之力，喪失滑動器 ⑽在圖i揭示之滑動方向以外之自由渡。2平面約略正交 時，滑動器108之拘束力更有效果。 從而，習知問題之境子之高精度之角度變化之抑制，係 加力於2平面之引導構造，與2平面之頂點之方向，藉在2 平面稱為引導之簡便之構成，在滑動器1〇8之移動時，全部 方向的角度變化可以得到較少之引導構造。 另外，若由設計、製造上之觀點檢討本發明，則僅引導 面之2平面與滑動器108之2平面之分別所形成之角度特性 較大影響，在圖1A、1B，引導之2平面之長度若比滑動器 之2平面較長的話，則其尺寸精度較緩和，較不嚴苛。進一 步，在裝配引導與滑動器時，由於引導之2平面連接之邊與 95976.doc 13 200528753 相反侧大大的開著，所以較容易插入裝配滑動器。即使滑 動器多少彎曲安裝於導體，藉加力於2平面連接之邊的方 向’亦可以安定的收納於正確的位置。 又加上如壓接於2個引導面之壓力之力，除了板彈簧以 外，利用螺旋彈簧、橡膠等之構件與空氣魔、油慶等、或 利用滑動器本身的重量與固定祥石它於滑動器等之重力，亦 可以帶來同樣之效果。 進v導體12 1的材質為強磁性體，且藉滑動器123本 身或固定磁鐵於滑動器123,在磁鐵與磁鐵之間，磁性吸引 力作動，壓力可以加於導體面。 使用圖4A〜4E詳細加以說明。 顯示導體121與滑動器123的配置。 包含較多稱為淬入材或鋼材之碳之材料，適合製作強度 較強之精密構造體。鋼材若接近磁鐵則磁化，產生磁性吸 引力如圖4A所顯示，若將磁鐵〗24黏著固定於與以不鏽鋼 等之非磁性材料製作之滑動器123之導體121相反側，則導 體121藉磁鐵124之磁力磁化，產生磁性吸引力，滑動器123 被推壓至導體面。 磁力的大小依磁鐵的大小、配置、材質等而變化，可以 將推壓力作成所希望之大小。 在圖4B，將磁鐵127擴張至導體125的側面為止，可以增 加推壓力。另外，磁場平衡也提升，安定性提升。 圖4C顯不將磁鐵13〇固定於滑動器ι29的導體ι28側之 例，在本例吸附之導體128與磁鐵13〇之間隔狹窄，推壓力 95976.doc 14 200528753 增加。 在圖4D導體131及滑動器132為非磁性體，藉在固定於導 體131之磁鐵135與固定於滑動器132之磁鐵134之間作動之 磁性吸引力，將滑動器132推壓至導體13 1。 在圖4E導體141及滑動器142為非磁性體，配置固定於滑 動器142之磁鐵143,與固定於外部不動之磁鐵144，藉在磁 鐵143與144之間作動之磁性反抗力推壓至導體i4i。 在本實施例作為經常賦予減力之構造，係藉直角棱鏡 僅配置於圖1B之位置時賦予推壓力之構造，進一步也可以 減輕促動器驅動時之摩擦。例如使用電磁鐵替代例如電磁 W43、144,當滑動器142僅位於圖⑺之位置時流動電流， 使其產生推壓力之方法等。 其次，針對將油等之潤滑材料插入導體及滑動器之間時 的情形加以說明。 在滑動軸承機構中，為了 動動力源之省能源之觀點看 摩擦力期望較小。在此，藉 摩擦力化。 安定作動裝置與由滑動器之移 ’產生於導體與滑動器之間之 插入油等之潤滑材料等可以低 另外，亦可以將I樹脂、—#彳 一 &化鉬、金剛石同性碳等之 固體潤滑材塗敷於導體或滑動器一 ^ ^事替代油等之液體潤滑 材料，可以低摩擦力化。 另外，藉在導體面設置溝減少桩 W ^接觸面積，進一步產生低 摩擦化之效果。 其次，針對滑動ϋ由玻璃所形成，兼具有直角複鏡的功 95976.doc 200528753 能之例加以說明。 滑動器與導體連接之面形成90度之角度，直角稜鏡的高 度較高，在直角稜鏡的射出入面，以板彈簧將不遮蔽光束 之領域推壓至導體面。在直角稜鏡之斜面使光束反射，但 前述直角稜鏡之斜面作為與導引連接之面，藉以2平面導引 維持直角稜鏡的較高位置精度與較高角度精度。藉以2平面 導引產生維持直角稜鏡的較高位置精度與較高角度精度之 效果之機械裝置，係與在第丨實施例詳細說明者相同。 又’在上述說明雖已針對適合光開關之例加以說明，不 _ 過即使針對任意調節光量之可變型光衰減器之境子與光閘 之引導機構、使用可以依領域任意選擇透過波長之濾光器 之波長選擇濾光器模件等之濾光器的移動引導機構等，本 發明之引導機構亦可以適用。 其次’針對將促動器配置於滑動器的側面之例加以說明。 如圖5所顯示，將變位於滑動器1 〇8之移動方向之促動器 202配置於滑動器ι〇8之侧面，將促動器2〇3之驅動力透過連 桿機構201及202傳達至滑動器108。連桿機構2〇1及2〇2其前 _ 端具有三角形之爪，配置成由移動方向夾入促動器203之控 制桿204。促動器203可以使用螺線管等。控制桿2〇4藉電磁 力移動至箭頭符號2〇5之方向，連桿機構2〇1及202被壓至控 制桿204且移動至箭頭符號205之方向，將固定連桿機構2〇1 及202之滑動器1〇8移動至箭頭符號2〇5的方向。 連桿機構201及202的前端在圖5雖為三角形，不過即使為 圓筒狀與球狀亦無妨。 連才干枝1構2 01藉與控制桿2 〇 4較小面積的連接，安定促動 95976.doc -16 - 200528753 器203的驅動力在朝滑動器1〇8傳達時產生之旋轉模件。也 就是，傳達滑動器108的重心與驅動力之力之作用點若不 同，則使滑動H 1G8旋轉之模件作動，如圖5所顯示，將促 動器配置於滑動器之側面，透過連桿機構2〇1，藉作成傳達 驅動力之構成，可以削減促動器2〇3及連桿機構2〇ι所佔之 高度，可以實現高度較低之光開關。光開關等光元件之高 度若較低，則組入光元件之電子電路基板的高度總合的可 以較低，結果與裝置的小型化有關。 進一步，如圖5所顯示藉使用三角形狀之連桿機構，旋轉 模件經常一定，光開關之境子的角度安定化，插入損失安 定化。 其次，圖6顯示以1個構件構成連桿機構丨之例。 將没置開口部之連桿21〇固定於滑動器1〇8與管的側面。 將促動器203之控制桿204插入連桿21〇的開口部。促動器 203之控制桿204係移動於箭頭符號211之方向。促動器2〇3 之控制桿204的移動係透過連桿21〇傳達至滑動器1〇8，移動 至箭頭符號211之方向。上述，可以減低光開關的高度之優 點與將滑動器的旋轉模件作成一定，加上安定化光開關之 插入損失之優點，藉將連桿機構作成之構件，形成容易 裝配固定於滑動器108。 另外以本件使用之光轉換元件不僅光路亦可以控制光 里與偏光等之光的物理量全般。又，在實施例的說明，雖 已使用由光軸儀與光纖所形成之光纖光軸儀於光射入手 奴、光射出手段加以說明，不過並不限制於此等。亦可以 95976.doc -17- 200528753 使用種種之發光元件、受光元件、導光體，構成光射入手 段、光射出手段。 另外’光變化構件並不限定於光直角稜鏡，亦可以使用 鏡子、光閘、波長濾'光器等其他光學元件，使光的特性、 路徑變化。又，使用直角稜鏡的情形，由於可以以2平面導 引將直角稜鏡的斜面作為與移動導引構件連接之面，所以 特別適用於本發明。 其次，使用圖9及圖1〇依據圖面說明使用於本發明之光開 關之稜鏡之引導機構之第2實施例。 首先針對引導機構3 01之主要構造加以說明。引導機構 3(H在圖1〇中固定稜鏡，在用以在箭頭符號A方向驅動之滑 動器308,固定設置開口部於側面之連桿31〇。在此，滑動 器308與連桿310即使為別的構件亦可，不過若以線加工或 MIM等之模件加工一體成形，則滑動器3〇8與連桿31〇的接 合部消失，耐久性提升，進一步可以削減裝配成本。 將促動器303之控制桿304插入連桿310的開口部。促動器 303之控制桿304藉移動至箭頭符號a之方向，滑動器3〇8在 箭頭符號A之方向驅動。朝箭頭符號a之滑動器3〇8之移 動，剖面形狀成為二等邊三角形之滑動器3〇8之二等邊，形 成於導體309之前述二等邊三角形與將頂角夾於同型之溝 311之2邊藉黏著，可以將滑動器3〇8之移動限制於箭頭符號 A方向。在滑動器308與溝311之頂角部形成著與該二等邊三 角形相反方向之三角形之溝313。在三角形之溝313的底邊 形成著用以插入引導磁鐵317之溝。引導磁鐵317係固定於 95976.doc -18- 200528753 該溝。在滑動器鳩之二等邊三角形之頂角部固定著滑動器 磁鐵3】5’言亥滑動器磁鐵315係突出於前述溝313。在固定於 滑動益308之滑動器磁鐵315與引導磁鐵317，其引力相互作 動，滑動器则藉該引力黏著於溝311，僅限制於箭頭符號八 方向之私動4313在滑動器308之驅動時，滑動器3〇8與溝 3U之黏著度變差’例如滑動器3〇8以八方向軸為中心作旋轉 時’滑動磁鐵315形成三角形之形狀使其不接觸於導體 309。藉作成如此不接觸之構造，控制位置精度變差，進一 步可以避免最後的破壞，提升耐久性。 前述滑動器308與溝311之接觸面的形狀，雖作成容易加 工之二等邊三角形，不過若為可以限制滑動器谓的移動方 向之形狀’則不限定於此等。另外，即使針對溝313的形狀， 滑動器磁鐵化若為不接觸之形狀，則並不限定於三角形。 其次，針對抑制滑動器308之不穩之構造加以說明。 首先，針對滑動器308的背面之不穩，在導體3〇9固定板 狀之背面制動器321，使其抑制在滑動器3〇8之剖面看之二 等邊三角形之底邊的兩邊。所謂板狀之制動H321與在_ 器308之剖面看之二等邊三角形之底邊的兩端，較佳的是設 置用以抑制滑動器308的移動時之阻力之間隙作非接觸。做 為該㈣’依必要之精度’通常若為〇. j _〜〇2 _之間隙 即可。藉作成如此之構成，機械的動作之安定性提升。 其次’為了抑制達到滑動器308的最下面時之不穩，保持 在A方向之位置精度，將板狀之下面制動器功固定於導體 3〇9的下面。此時，滑動器3〇8到達最下面時，滑動器則 95976.doc -19- 200528753 接觸於使阻力不作動 成，、… 乍動於下面止動器323。藉作成如此之構 成’月動為之決定原點變容易， * 從而，衝程安定，可以 女…、定位置精度’ ^ ν 雀的决疋固定於滑動器308之稜鏡 ::應速::升—時之光量的振動，光轉換 讲另卜、μ制動$321與下面制動器323，藉鐘層固體潤 :’可以抑制摩耗提料久性。料固制滑材者有鑛氣 硫化鋇、及鍍金等之軟質鍍金屬材料等。 I作為則述制動器321與下面制動器323者，藉作為板彈 黃’吸收滑動器308驅動時之振動與不穩和噪音，進一步可 以使機械的動作更安定。 針對本案之構件移動手段，以促動器作成驅動滑動器之 構成知照移動導引手段雖顯示移動光變化構件之例，不 過並不限定於此等。 [產業上利用的可能性] 可以控制朝制度好的一方向之構件的移動。特別是可以 適用於光元件用引導機構。 【圖式簡單說明】 圖1A、1B為本發明之實施例之要部立體圖。 圖2為本發明之實施例之剖面圖。 圖3 A、3 B為本發明之實施例之導引部之上面圖。 圖4A〜4E為本發明之其他實施例之導引部之上面圖（要 部）0 圖5為本發明之其他驅動機構及其他驅動力傳達機構之 95976.doc -20- 200528753 例。 圖6為其他連桿機構之例。 圖7為顯示習知例之立體圖。 圖8為顯示習知例的問題之圖。 圖9為本發明之引導機構之第2實施例之上面圖。 圖1 〇為本發明之引導機構之第2實施例之側面圖。 【主要元件符號說明】 1 射入側光纖光軸儀 2、3 射出側光纖光軸儀 100 - 900 光開關 101 、 104 、 105 、 911 、 光纖 921 、 931 、 941 102 、 103 、 106 光軸儀 107 、 121 、 125 、 128 、 導體 134 、 141 、 309 107a 、 107b 導體面 108 、 123 、 129 、 132 、 滑動器 142 、 308 109 直角稜鏡 110 、 203 、 303 促動器 圖中之符號，1為射人侧光纖光軸儀，2、3為射出側光纖 光軸儀，107為引導，107a、b為引導面，1〇8為滑動器，1〇9 為直角稜鏡，110為促動器’ 114為板彈簧，124、127、13〇、 134、135、142、144為用以賦予應力之磁鐵。 95976.doc -21 - 200528753 114 板彈簧 124 、 127 、 130 、 134 、 磁鐵 135 、 142 、 143 、 144 、 317 201 、 202 連桿機構 204 、 304 控制桿 205、211、950a、950b 箭頭符號 210 、 310 連桿 301 、 980 引導機構 31卜 313 溝 315 滑動器磁鐵 317 引導磁鐵 321 、 323 制動器 910 ^ 920 > 930 > 940 光纖光軸儀 912 、 922 、 932 、 942 透鏡系 910a - 920a 輸入口 930a、940a 輸出口 950 光轉換元件 960 支撐板 970 驅動促動器 990 連接機構 oc - 22 -The plane directions of the conductor surface and the ⑽ are slightly different from the orthogonal condition, but it is easy to understand that the force of the orthogonal projective component forms a binding force. From the above, it is understood that between the two planes that are not parallel in principle By the force of the component facing one plane and the force of a component orthogonal to the other plane, the slider 丧失 loses its freedom of movement beyond the sliding direction disclosed in FIG. I. When the two planes are approximately orthogonal, the restraint of the slider 108 is more effective. Therefore, the suppression of the high-precision angle change of the realm of the conventional problem is the guidance structure of the two planes, and the direction of the apex of the two planes is referred to as the simple structure of guidance in the two planes. When the 108 is moved, the angle change in all directions can obtain less guiding structure. In addition, if the present invention is reviewed from the point of view of design and manufacturing, only the angular characteristics formed by the two planes of the guide plane and the two planes of the slider 108 are greatly affected. In FIGS. 1A and 1B, the two planes of the guide If the length is longer than the two planes of the slider, the dimensional accuracy will be moderate and less severe. Further, when assembling the guide and the slider, since the side of the two plane connection of the guide and the opposite side of 95976.doc 13 200528753 are largely open, it is easier to insert the assembling slider. Even if the slider is mounted on the conductor to some degree of bending, it can be stably stored in the correct position by applying a force to the direction of the two-plane connection side '. In addition to the force of pressure on the two guide surfaces, in addition to the leaf spring, the use of coil springs, rubber and other components and air magic, You Qing, etc., or the weight of the slider itself and the fixed auspicious stone. The gravity of sliders can also bring the same effect. The material of the inlet conductor 12 1 is a ferromagnetic body, and the slider 123 itself or a fixed magnet is attached to the slider 123. Between the magnet and the magnet, a magnetic attractive force is actuated, and pressure can be applied to the conductor surface. This will be described in detail using FIGS. 4A to 4E. The arrangement of the conductor 121 and the slider 123 is shown. Materials containing a large amount of carbon called hardened steel or steel are suitable for making precision structural bodies with stronger strength. If the steel material is close to the magnet, it will be magnetized to generate a magnetic attractive force. As shown in FIG. The magnetic force is magnetized to generate a magnetic attractive force, and the slider 123 is pushed to the conductor surface. The magnitude of the magnetic force varies depending on the size, arrangement, and material of the magnet, and the pushing force can be made as desired. In FIG. 4B, until the magnet 127 is expanded to the side of the conductor 125, the pushing force can be increased. In addition, the magnetic field balance is also improved, and the stability is improved. Fig. 4C shows an example in which the magnet 13o is fixed to the conductor 28 of the slider ι29. In this example, the distance between the conductor 128 attracted by the magnet 128 and the magnet 130 is narrow, and the pushing force 95976.doc 14 200528753 increases. In FIG. 4D, the conductor 131 and the slider 132 are non-magnetic bodies. By the magnetic attractive force acting between the magnet 135 fixed to the conductor 131 and the magnet 134 fixed to the slider 132, the slider 132 is pushed to the conductor 13 1 . In FIG. 4E, the conductor 141 and the slider 142 are non-magnetic, and a magnet 143 fixed to the slider 142 and an external stationary magnet 144 are arranged, and are pushed to the conductor by a magnetic reaction force acting between the magnets 143 and 144. i4i. In this embodiment, as a structure that often provides a force reduction, a right-angle prism is used to provide a pushing force only when it is disposed at the position shown in FIG. 1B, and the friction during driving of the actuator can be further reduced. For example, a method in which an electromagnet is used instead of, for example, the electromagnetic W43 and 144, and an electric current flows when the slider 142 is located at the position shown in FIG. Next, a case where a lubricant such as oil is inserted between the conductor and the slider will be described. In the sliding bearing mechanism, the friction force is expected to be small from the viewpoint of energy saving of the motive power source. Here, friction is used. The stable operating device and the lubricating material such as the oil inserted between the conductor and the slider by the movement of the slider can be low. In addition, I resin, — # 彳 一 & molybdenum, diamond homogeneous carbon, etc. The solid lubricating material is applied to the conductor or the slider to replace the liquid lubricating material such as oil, which can reduce the friction. In addition, by providing grooves on the conductor surface, the contact area of the pile W ^ is reduced, and the effect of reducing friction is further produced. Secondly, an example of the ability of the sliding cymbal to be formed of glass and having the function of a right-angle compound mirror is explained. The surface where the slider is connected to the conductor forms an angle of 90 degrees, and the height of the right angle 稜鏡 is high. At the exit surface of the right angle 稜鏡, a plate spring is used to push the area that does not block the light beam to the conductor surface. The light beam is reflected on the oblique surface of the right-angle 稜鏡, but the aforementioned oblique surface of the right-angle 稜鏡 is used as a surface connected to the guide, and the high-position accuracy and high angular accuracy of the right-angle 稜鏡 are maintained by 2-plane guidance. The mechanical device that produces the effects of maintaining the higher position accuracy and higher angle accuracy of the right angle 稜鏡 through the two-plane guidance is the same as that described in detail in the first embodiment. Also, although the above description has been described as an example of a suitable optical switch, the guide mechanism of the optical sub-gate and the shutter of the variable optical attenuator that arbitrarily adjusts the amount of light can be arbitrarily selected according to the field. The guide mechanism of the present invention can also be applied to a guide mechanism for moving a filter, such as a wavelength selection filter module of an optical device. Next, an example in which the actuator is arranged on the side of the slider will be described. As shown in FIG. 5, the actuator 202 which is located in the moving direction of the slider 108 is disposed on the side of the slider ι08, and the driving force of the actuator 203 is transmitted through the link mechanisms 201 and 202. Go to the slider 108. The front-end ends of the link mechanisms 201 and 202 have triangular claws, and are arranged to sandwich the control lever 204 of the actuator 203 in the moving direction. As the actuator 203, a solenoid or the like can be used. The control lever 204 is moved to the direction of the arrow symbol 205 by the electromagnetic force, and the link mechanisms 201 and 202 are pressed to the control lever 204 and moved to the direction of the arrow symbol 205, and the fixed link mechanism 20 and The slider 108 of 202 moves to the direction of the arrow symbol 205. Although the front ends of the link mechanisms 201 and 202 are triangular in FIG. 5, they may be cylindrical or spherical. With the smaller area of connection with the control lever 204, the evenly-stemmed branch 1 stably actuates the rotating module generated when the driving force of the device 203 is transmitted toward the slider 108 by 95976.doc -16-200528753. That is, if the point of transmission of the center of gravity of the slider 108 and the force of the driving force are different, the rotating H 1G8 rotating module is actuated. As shown in FIG. 5, the actuator is arranged on the side of the slider, The lever mechanism 201 can reduce the height occupied by the actuators 203 and the link mechanism 200 by constructing a structure that transmits driving force, and can realize a light switch with a relatively low height. If the height of optical components such as optical switches is low, the total height of the electronic circuit substrates incorporated in the optical components can be lower, and the result is related to the miniaturization of the device. Further, as shown in Fig. 5, by using a triangular link mechanism, the rotation module is often constant, the angle of the optical switch is stabilized, and the insertion loss is stabilized. Next, FIG. 6 shows an example in which the link mechanism is constituted by one member. The connecting rod 21 with no opening is fixed to the side of the slider 108 and the tube. The control lever 204 of the actuator 203 is inserted into the opening portion of the link 21. The control lever 204 of the actuator 203 moves in the direction of the arrow symbol 211. The movement of the control lever 204 of the actuator 20 is transmitted to the slider 108 through the link 21, and moves to the direction of the arrow symbol 211. As described above, the advantages of reducing the height of the optical switch and the fixed rotation module of the slider, plus the advantages of the insertion loss of the stable optical switch, can be easily assembled and fixed to the slider 108 by using the link mechanism as a component. . In addition, the light conversion element used in this device can control not only the optical path but also the physical quantities of light in the light and polarized light. In the description of the embodiment, although the optical fiber optical axis meter formed of the optical axis meter and the optical fiber has been used to describe the means for entering light into the slave and the means for emitting light, it is not limited to these. You can also use 95976.doc -17- 200528753 to use various light-emitting elements, light-receiving elements, and light guides to form light-injection means and light-exit means. The 'light changing member' is not limited to the right angle of light, and other optical elements such as mirrors, shutters, and wavelength filters can be used to change the characteristics and path of light. When the right angle 稜鏡 is used, the inclined plane of the right angle 稜鏡 can be used as a surface to be connected to the moving guide member by the two-plane guide. Therefore, it is particularly suitable for the present invention. Next, a second embodiment of a guide mechanism for a light switch of the present invention will be described with reference to Figs. 9 and 10. First, the main structure of the guide mechanism 301 will be described. The guide mechanism 3 (H is fixed in FIG. 10, and the slider 308 for driving in the direction of the arrow symbol A is fixedly provided with a link 31 with an opening on the side. Here, the slider 308 and the link 310 Even if it is another component, if it is integrally formed by wire processing or modular processing such as MIM, the joint between the slider 308 and the connecting rod 31 will disappear, durability will be improved, and assembly costs can be further reduced. The control lever 304 of the actuator 303 is inserted into the opening of the link 310. By moving the control lever 304 of the actuator 303 to the direction of the arrow symbol a, the slider 308 is driven in the direction of the arrow symbol A. Toward the arrow symbol a The slider 3008 is moved, and the cross-sectional shape of the slider 3208 is the second equilateral triangle. The second equilateral triangle formed on the conductor 309 and the apex angle are sandwiched between the two sides of the groove 311 of the same type. By adhesion, the movement of the slider 308 can be restricted to the direction of the arrow symbol A. A triangle groove 313 is formed at the top corner of the slider 308 and the groove 311 in the direction opposite to the equilateral triangle. In the triangle groove The bottom edge of 313 is formed to insert the guide magnet 3 17 groove. The guide magnet 317 is fixed at 95976.doc -18- 200528753 This groove. The slider magnet is fixed to the top corner of the slider dove equilateral triangle. 3] 5 'Yanhai slider magnet 315 is protruding In the aforementioned groove 313. At the slider magnet 315 and the guide magnet 317 fixed to the sliding benefit 308, the gravitational forces act on each other, and the slider is adhered to the groove 311 by this gravity, and is limited to the private movement of the arrow symbol 8 in the direction of the sliding 4313. When the driver 308 is driven, the adhesion between the slider 308 and the groove 3U becomes worse. 'For example, when the slider 308 rotates around the eight-axis axis', the sliding magnet 315 forms a triangular shape so that it does not contact the conductor 309. By making such a non-contact structure, the accuracy of the control position is deteriorated, which can further prevent the final damage and improve the durability. Although the shape of the contact surface between the slider 308 and the groove 311 is made into an equilateral triangle that is easy to process, If it is a shape that can restrict the moving direction of the slider, it is not limited to this. In addition, even for the shape of the groove 313, the slider magnetization is not limited to the shape Triangle. Next, the structure that suppresses the instability of the slider 308 will be described. First, with regard to the instability of the rear surface of the slider 308, a plate-shaped rear stopper 321 is fixed to the conductor 309 so as to suppress the slider 308. The two sides of the bottom of the two equilateral triangles seen in the cross section of 8. The two ends of the so-called plate-shaped brake H321 and the bottom of the two equilateral triangles seen in the cross section of _308 are preferably set to suppress sliding The gap of resistance during the movement of the device 308 is made non-contact. Generally, it is only necessary to set the gap of "j ~~ 2 @ 2" as the gap. By using such a structure, the stability of the mechanical operation is stable. Sexual improvement. Secondly, in order to suppress the instability when reaching the bottom of the slider 308 and maintain the positional accuracy in the A direction, the plate-like bottom stopper is fixed below the conductor 309. At this time, when the slider 30 reaches the bottom, the slider 95976.doc -19- 200528753 comes into contact with the resistance so that it does not actuate. By constructing such a structure, "the origin of the moon movement becomes easier to determine. * Therefore, the stroke is stable, and the position accuracy can be determined." ^ Ν The bird's decision is fixed to the slider 308 :: 应 速 :: Vibration of the amount of light in time, the light conversion is different, μ brake $ 321 and the lower brake 323, by the solid layer of the clock layer: 'can suppress wear and longevity. Materials for solid sliding materials include mineral gas barium sulfide and soft metal-plated materials such as gold plating. As the brake 321 and the lower brake 323, the plate brake yellow 'absorbs vibration, instability, and noise when the slider 308 is driven, and can further stabilize the operation of the machine. With regard to the means for moving the member in this case, the structure of the known photo movement guide means in which an actuator is used to drive the slider shows an example of a moving light changing member, but it is not limited to these. [Possibility of industrial use] It is possible to control the movement of components in the direction of good system. In particular, it can be applied to a guide mechanism for an optical element. [Brief Description of the Drawings] Figs. 1A and 1B are perspective views of essential parts of an embodiment of the present invention. Fig. 2 is a sectional view of an embodiment of the present invention. 3A and 3B are top views of the guide portion according to the embodiment of the present invention. Figs. 4A to 4E are top views (essential parts) of a guide portion of another embodiment of the present invention. Fig. 5 is an example of 95976.doc -20-200528753 of other driving mechanisms and other driving force transmission mechanisms of the present invention. FIG. 6 is an example of another link mechanism. FIG. 7 is a perspective view showing a conventional example. FIG. 8 is a diagram showing a problem of a conventional example. Fig. 9 is a top view of a second embodiment of the guide mechanism of the present invention. FIG. 10 is a side view of a second embodiment of the guide mechanism of the present invention. [Description of main component symbols] 1 Optical fiber optical axis meter on the input side 2, 3 Optical fiber optical axis meter on the output side 100-900 Optical switches 101, 104, 105, 911, optical fiber 921, 931, 941 102, 103, 106 optical axis meter 107, 121, 125, 128, conductors 134, 141, 309 107a, 107b, conductor surfaces 108, 123, 129, 132, sliders 142, 308 109 at right angles 稜鏡 110, 203, 303 Symbols in actuator figures, 1 Optical fiber optical axis meter for the human side, 2, 3 optical fiber optical axis meter for the emitting side, 107 for guidance, 107a, b for guiding surface, 108 for slider, 10 for right angle 稜鏡, 110 for actuation The device 114 is a leaf spring, and 124, 127, 130, 134, 135, 142, and 144 are magnets for imparting stress. 95976.doc -21-200528753 114 leaf spring 124, 127, 130, 134, magnet 135, 142, 143, 144, 317 201, 202 link mechanism 204, 304 lever 205, 211, 950a, 950b arrow symbol 210, 310 link 301, 980 guide mechanism 31, 313 groove 315 slider magnet 317 guide magnet 321, 323 brake 910 ^ 920 > 930 > 940 fiber optic axis meter 912, 922, 932, 942 lens system 910a-920a input port 930a, 940a output port 950 light conversion element 960 support plate 970 drive actuator 990 connection mechanism oc-22-