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Application filed by Teco Nanotech Co LtdfiledCriticalTeco Nanotech Co Ltd
Priority to TW92134495ApriorityCriticalpatent/TWI247034B/zh
Publication of TW200519186ApublicationCriticalpatent/TW200519186A/zh
Application grantedgrantedCritical
Publication of TWI247034BpublicationCriticalpatent/TWI247034B/zh
Method of manufacturing thin film, substrate having thin-film, electron emission material, method of manufacturing electron emission material, and electron emission device