TWI247034B - A spray coating liquid of phosphors and its spray coating method - Google Patents

Abstract

This invention relates to a spray coating liquid of phosphors and its spray coating method, which provides a spray coating fabricating technique for the anode phosphors layer of field emission display. According to this invention: (1) using spray coating to fabricate the phosphors layer can control the evenness of its thickness distribution; (2) using spray coating to fabricate the phosphors layer can control the thickness to be suitable for the circuit driving requirement of low field voltage; (3) using spray coating to fabricate the phosphors layer can enhance the adhesiveness of phosphors layer to the anode and reduce the resistance; (4) the coating composition of the phosphors layer fabricated by spray coating is simplified so that material cost can be reduced.

Description

1247034

TECHNICAL FIELD OF THE INVENTION The present invention relates to a field emission display (Field Emissi() n

Display; FED) The fabrication technology of the anode panel phosphor powder coating, especially the production technology of the phosphor powder coating for the anode plate by spraying the phosphor powder. [Prior Art] The so-called field emission display of the present invention uses an electric field to cause a cathode electron emitter to generate electrons, and the electrons excite the phosphor powder of the anode plate to cause the phosphor powder to generate photons. Luminescence, which is characterized by light, thin, and effective display area size can be processed according to process and production. There is no such thing as a flat-panel LCD monitor. A conventional two-pole structure field emission display 丨a has at least an anode 3a and a cathode 4 in a unit structure 5a, and a rib 53a is provided between the anode and the cathode, and is provided as a unit anode 51a. Between the vacuum region of the cathode of the unit cathode 52a, and the support between the anode 3a and the cathode 43, as shown in the first figure, an anode 3a includes at least an anode glass substrate 31a', an anode conductive layer 32a, a cathode powder coating layer 33a; and a cathode 4 8 comprising at least a cathode glass substrate 413, a cathode conductive layer 42a, an electron emission source layer 43a; wherein the anode 3a and the cathode 4a The spacer is disposed by the barrier wall 53a, and functions to maintain the vacuum region between the cathode plate and the anode plate, and by providing an applied electric field, the electron source on the cathode plate generates electrons and is incident on the anode plate. The phosphor powder irritates and the phosphor powder emits light. The field emission display of the two-pole structure,

1247034

The gap between the pole and the anode can be between 5 〇 / / 2 2 〇〇 / / m, * the dynamic electric field strength does not need to exceed 丨〇 v / / zm, or the drive electric ^ ' V 〇 It age) is greater than 150v, The cathode can be made to generate electrons until the luminous efficiency of the powder depends on the characteristics of the phosphor material selected. Therefore, under the micron-scale anode-anode panel gap and voltage circuit structure, the glory powder layer on the anode plate == appears to be more restrictive, and the direct anti-shore ^ light performance is 罄#駚为* Z straight Responsive to the fluorescing first private mechanism is the anode plate ... 构 构 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 ,,, and mouth structure characteristics. The first one, the thick layer of the fluorescent powder layer is two or two. 'Because the gap between the anode and the cathode has been limited to the micron-scale structure, the second:: Ϊ ΐ Ϊ thickness distribution error must be smaller than the electric field anode and cathode gap In the true sound of the gossip, otherwise the fluorescing uniformity of the excited phosphor powder is also constitutive, and the uniformity of the two is affected; the so-called two, the phosphor powder layer; ί:= means the phosphor powder Fluorescent powder in the phosphor layer of the bulk layer = the driving voltage of the two-pole field emission display is at least _ dry 13⁄4 Torr A, but even in a so-called three-pole structure field emission; ! = ί % The polar horse voltage is also limited to less than 50 0 V. Therefore, the voltage is 彳曰, and the kinetic energy of the moving dice is limited. The number of stacked layers between the phosphor powders is _ 12 ^. Refer to the second figure. The first layer is refracted or diffracted by the electron beam 71 with 敫I曰, 6la', or the electrons are refracted or diffracted 7 2a (the second time there is enough secondary energy to be excited by the first layer of glory powder 72) , L Γ 再 再 再 ϋ 激发 激发 激发 激发 激发 激发 激发 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 62 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ (CRT) or plasma display 'Use two pressures (% pole 23KV) or high energy (piasma) to stimulate fluorescence

1247034 V. INSTRUCTIONS (3) Powders vary, so if a reference is made to the fabrication of the phosphor powder layer 33a for the anode, the conventional art system, using a conventional image tube (CRT) The spine coating process of the panel (panei) to form a glory powder layer, and then totemized by an exposure and development technology; 2. The process of a phosphor powder layer of a plasma display (PDP) anode panel The phosphor powder slurry is directly totemized on the electro-polar panel by a screen printing method. The above two types have their own advantages and disadvantages. First, the thickness of the coating produced by spin coating is relatively uniform, but the phosphorescence used in the phosphors is mostly between „到! ο" The layer π number is about 3 to 4 layers, so the coating thickness of the phosphor powder layer is distributed to about 2, and the demand for the field emission display used in the present invention is still ί The fluorescent powder of the diameter, but the process limitation of the light-making mechanism ^ = the number of layers of light will still reduce the amount of fluorescent powder displayed by the field emission, and the rate is reduced. 9. The process control is used to control the phosphor layer. Reduce the amount of glaze powder, easy to cause hole production*, in addition, the solid Ϊ2 of the production; only applied to the anode glass surface & of the image tube, not specially used to make the fluorescent powder adhere to the panel (known art department) Referring to the phosphor powder outside the phosphor powder layer to improve the luminous efficiency and slow down the field, ii. The process of vapor deposition is not applicable to the field emission display of the low-voltage driving circuit used in the present invention) Therefore, for the above.=Special concerns such as increasing the adhesion of the phosphor powder The glass substrate is totemized two--the printing process to make the filament layer, although the T-light powder layer can be directly used for four sounds, but the X-water layer on the 100,000...the particle size distribution is about 4 m. Fluorescent powder particle size slurry

Page 8 1247034 V. Description of the invention (4) As an example, the condensation of the coating is between 8//m and 15/zm, and the thickness of the printed phosphor layer is more than 12/m. Up to 1 6 / / m, the coating is still at least three layers of phosphor powder layer, although the particle size of the phosphor powder can be limited to reduce the thickness of the coating, but to print the thick film process and the stencil structure Restriction can reduce the thickness of the coating is still limited, and by the screen printing method, the mesh on the mesh also makes the coating surface thickness distribution not uniform, or the coating thickness is too low to reduce the coating thickness. Holes are more likely to cause uneven illumination and black shadows. The position is as follows: 1. How to provide a method for uniformizing the thickness of the phosphor powder coating to facilitate the uniformity of the luminescence performance. 2. A coating of a minimum phosphor powder layer in the phosphor powder coating layer can be produced. In order to facilitate the low electric field, voltage-driven phosphor powder can be fully stimulated the highest performance brightness; Third, it can provide an easiest and low-cost implementation to make the anode plate phosphor powder coating of the field emission display. The inventor designed a luminescent coating of an anode plate of a field emission display by spraying a phosphor powder, thereby making it possible to produce a phosphor powder coating by spraying to control the uniform thickness distribution. Second, the production of fluorescent powder coating by spraying can control the thickness to suit the circuit driving demand of low electric field voltage; Third, the coating composition of the fluorescent powder coating by spraying method is simple, which can reduce the material cost. . SUMMARY OF THE INVENTION In view of the fact that the coating thickness distribution of the phosphor powder coating of the anode plate of the field emission display manufactured by the prior art is still difficult to homogenize, it is difficult to homogenize the emission of the phosphor layer inside the coating. Too many layers lead to a decrease in luminous efficiency, and the production mode of the prior art requires a large-scale coating equipment or screen printing equipment, and the preparation and process of the coating is complicated, and the composition of the coating is complicated.

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The y ^ of the present invention can be greatly reduced; ^ Μ a purpose is to improve the self-study coating technology of the coating, the materials and the materials. I卞cost's application for commercialization of mass production. The purpose of the above-mentioned so-called : 萤 萤 萤 萤 萤 萤 及 及 及 及 及 及 及 及 及 萤 萤 萤 萤 萤 萤 萤 萤 萤 萤 萤 萤 萤 萤 萤 萤 萤 萤 萤And the application method of the conductive powder and the interface active agent is applied by the high-pressure air medium t coating in the thickness of the coating portion on the anode conductive layer, and the coating times can be adjusted and controlled, because the low viscosity is quickly scattered, and the fluorescence is easily made. The physical effect of the powder coating process, the anode anode conductive layer or the anode glass base can reduce the phosphor powder layer to enhance, and the field emission display can effectively improve the coating liquid of the fluorescent powder of the invention, and can be a characteristic in which a specific temperature range is dispersed; the fixing agent has a specific interfacial connection fixing property such that the phosphor powder is attached to the surface as a fixing agent; and the spraying surface is constructed by spraying the same in a plurality of times, in the specific invention A fluorescent powder layer is prepared by a spraying method; a spraying solution prepared by using a particle size fluorescent powder and a necessary fixing agent suitable for suspending and dispersing the fluorescent powder is used. The medium is sprayed on the phosphor powder spray solution or on the anode glass substrate to make the thickness of the coating layer and the uniformity of the thickness, and the coating solvent after the solvent is further volatilized is applied to the surface of the coating layer. The high-pressure air makes the stacked phosphor powder easy to deposit on the surface of the board to add a dense effect, which is the luminous efficiency of the phosphor powder coating of the driving circuit with low electric field voltage. The material composition comprises: a fluorescent powder; the volatilization by spraying, the suspension of the fluorescent powder can be distributed in the spraying solvent, and can be sprayed on the anode structure of an electronic device after a specific fixing process. The spray liquid of the light powder volatilizes the spraying solvent under the dryness of the electronic device, and

Page 11 1247034 V. INSTRUCTIONS (7) Perform the specific solid surface effect. The steps of the present invention are as follows: (1) constructing the sprayed surface and (3) spraying the spray film of the step-by-step light powder, in order to make the technical content, the drawings are only limited. [Embodiment] The present invention is suitable and volatile, and is made into a low-viscosity medium with a fluorescent powder, and a thickness of a fluorescing or anodized glass and a solvent of a thick volatilization are applied to the surface of the coating to form a stacked fluorescent plate. The surface layer is added to the low-intensity electric current program, and the fluorescent powder is sprayed on the anode structure to spray a fluorescent powder; (2) in a specific range (1) and (2) The thickness of the review committee can refer to the following description of the temperature range of the spray liquid for providing the reference and the spray liquid to reach the limit of the present invention, and the spray method includes volatilization under the anode of the electronic device. The spraying solvent; the specific number of times to understand the characteristics and detailed description of the present invention and the accompanying drawings, but not to provide a spray coating and the necessary spray coating powder on the spray substrate of the present invention, After evenly spreading, the high-powder is easy to deposit and compact. The pressure is driven by the spray, the fixing liquid, the coating is applied, and the layer is dissolved and the flat layer is applied. The light agent and the conductive layer can be sprayed on the layer thickness of the coating layer. The spray can be reduced by the spray of the agent on the anode guide to reduce the field emission as a fluorescent powder. The suspension powder and the medium method are higher than the coating portion. Use coating system to use - disperse, easy to make the process electrical layer or fluorescent powder layer display, body layer; select the medium anode active layer dispersed in the surface active agent to adjust the air to adjust the control low viscosity with fluorescent powder Easy to lay out, easy to use 11⁄4 pole glass base, and can be effectively applied

Page 12 1247034 V. Description of the invention (8) The phosphorescent coating is made by spraying. The coating is easy to fill smaller particles with a larger fluorescent viscosity solvent, and the particles form the phosphor powder. The spray coating of the present invention may be closely stacked; the coating solution is sprayed by a coating method, and the coating solution is sprayed and the air inlet powder spray solution is sprayed with a fixing agent to the anode plate. The phosphor powder of the fixing agent component may be a sulfur material, and the conductivity of the powder coating must be added to affect the luminous efficiency; the viscosity of the solvent prepared by the phosphor powder or the fixing is preferably good; The powder particle size of the solution powder is suitable for low electric field efficiency. Please use the fluorescent powder powder of the phosphor powder to make the stacking effect of the phosphor powder, and the spray method is used to spray the anode surface. The solid amount of at least a large amount of acetic acid dissimilar plate can be the main conductive powder of zinc boride at the high temperature to avoid, and the addition of the powder can be limited to 10 or the inside of the fluorescent light, or the voltage reference is shown in the third figure. The coating of the present invention is schematically illustrated The sprayed solution is a low drop on the surface of the glass substrate or conductive layer by the spray of high-pressure air and the particles of the fixing agent and the conductive agent, so the coating thickness is about 1 to 2 layers. Light efficiency can be improved. The anode glory powder gun of the field emission display uses a high pressure air to send the surface of the square plate to form a phosphor powder layer, and the content ratio is selected, and the appropriate coating is used for 160 1/min, and the fluorescent pentane 1 is used.曰 is a solvent solution, after adding necessary sintering, the phosphor powder is fixed to the anode glass powder or nitrocellulose; in addition, the silver powder or indium oxide of the semi-conductive particles of the main component of the composition or cerium oxide is selected to increase the fluorescent electric field. The charge driving the luminescence process accumulates the necessary interfacial surfactant to uniformly disperse the above in the isoamyl acetate solvent, cps, which has 12 to μ cpS powder and added fixing agent powder or conductive to control the coating Thickness, that is, the drive circuit requirements of the field emission display

The powder particle size of the so-called lacquer powder is preferably less than 1 _ 〇 / / m, and the powder particle size of the added slag powder and the conductive powder is less than 0 · 2 // m is better. 1247034 V. INSTRUCTION DESCRIPTION (9) The phosphor powder spraying solution prepared by the invention can be coated, and the suspended powder, the fixing agent, and the conductive powder in the solution are sprayed on the anode surface by the medium of high-pressure air. The selected phosphor powder particles are larger than the silver powder particles of the glass powder of the fixing agent. Therefore, these smaller particles are easy to fill the periphery and the gap between the powder particles, and the phosphor powder can be sprayed after spraying. Fixed on the surface of the anode glass substrate, and the dielectric relationship between the phosphor powder and the anode glass substrate; the second is a low viscosity volatile solution powder coated on the surface of the glass substrate by high-pressure air, the powder naturally faces the most stable pile It is easy to deposit the maximum dense relationship, so the thickness of the powder coating to 2 phosphor layers can form a thin layer of dense coating. The anode panel of the field-driven display of the piezoelectric field is required to describe the spraying method of the present invention. Application examples for making a phosphor powder layer; making a spray coating method of the present invention, preparing an anode coating method, preparing a system prepared by using an acetic acid isopentyl brewing solvent, adding: weight = octagonal ruthenium having a particle size of 0.3" The average particle size of the glass powder ί = 0% is 〇.3# TM The powder of tin is used as the conductive particles to increase the conductivity of the fluorescent layer, and the average particle size of the powder is added to 15~25%. Fluorescent 'one' is less light due to the sintering of particles and conductive powder and coated with larger fluorescing, which reduces the impedance increase, and deposits the powder coating structure due to the modulation medium, and does not need to be too thick, 1 satisfies a low power 〇 The weight percentage used in the following body layer is a fixing agent, and the silver powder and the indium light powder layer are added to the firefly 1 · 〇 / / m or less

1247034 V. Inventive Note (ίο) Fluorescent powder, in addition, add the necessary surfactant to prepare the desired phosphor powder spray solution, and the viscosity of the prepared solution is controlled at 15~18 cps. In addition, a spray gun for commercial coating has a nozzle diameter of 1.0 mm, a high-pressure air flow rate of 260 Ι/min, and a controlled solution discharge amount of 200 cc/min. The phosphor powder coating solution is sprayed on the anode conductive layer on the anode glass substrate to form a phosphor powder coating, and the anode glass substrate is sintered at a high temperature of 400 ° C to make the firefly. The powder layer and the anode conductive layer are fixed.曰 According to the invention, the solution phosphor powder configured by the invention is used

• - ^ , ^ in r - L L

ZnS: Cu, Al phosphor powder, the average particle size of which is preferably from 1 〇 / / m to 〇. 8 # melon, prepared and sprayed on the anode glass substrate to produce a phosphor powder layer, The thickness of the phosphor powder coating J of the present invention may be less than 1.m, and the thickness of the powder coating layer is less than 1.m. , the effect of greatly improving the surface hair squeezing effect of the fluorescent powder, the field emission display produced by the invention, the field emission display made by the second cymbal coating, the solution is also coated with a coating to rotate the coating pole; ;Powder:": The anode plate produced by the specific implementation of the production, after the production is completed, the invention

Scotch's adhesion test is verified by tape = commercial anode plate, about 95% by ",", and then coated on the test tape, if the #本# accumulation of fluorescent powder coating toughness Overlay test, UV light inspection: | # 蛍 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体 物体

1247034 V. Description of the Invention The light powder particles are prepared by the method of driving the electric field of the present invention, and the details of the sprayed body layer are referred to the characteristics of the fluorescent powder and the specific temperature; the surface is connected with the solid powder to fix the plurality of sprays. Coating surface, fixing procedure, forming a crucible on the surface of the invention, (11) The following electric field 4 is produced, and the other is applied to a large part, and the third spraying liquid range is fixed. After the specific application of the firefly, the sprayed phosphor powder is sprayed and the anode plate can be peeled off by the phosphor powder, and the element is shown by the 丨v/em, and the surface of the area of the α is implemented. The above is the disclosure. As shown in the figure, volatilization under #material composition, can be distributed in the range of spraying temperature through one-to-one electron-loading powder to fix the liquid to the electron beam by spraying the coating 3 3 The coating is applied to the test tape, and the over-package is used as a field emission display with a brightness of up to 60 nits. The π degree is not degraded. The spray technology can be easily fabricated, and it is easy to implement in large-area inventions. Spraying method for making this must include: There is a liquid for the specific fixation of the spray, and the volatile spray powder is excited on the electron anode glass to illuminate the phosphor powder solvent. The glass substrate coated with the solvent anode device emits light. The structure is structured, spray-dissolved and dispersed, and the anode is placed on the surface of the sprayed surface, and the anode of the anode plate is sprayed on the anode plate. In addition, the device is sprayed with the sprayer of the hairdresser. The powder of the present invention may be specified in the fluorescent material; the conductive layer of the phosphor powder of the present invention may be further included in the spray liquid of the present invention by constructing the specific surface effect; and the following details may be further included; The conductive powder has a conductive & anti-characteristic of reducing the sprayed surface layer and may further have an intervening agent to enable the intercalating agent, the fixing agent and the fluorescent powder to be more evenly distributed in the spraying solvent,

Page 16 1247034 V. Description of Invention (12) wherein the conductive powder may be a powder of silver powder, indium salt or indium tin oxide, the fixing agent is glass powder or nitrocellulose, and the spraying solvent is isoamyl acetate The viscosity of the sprayed liquid of the prepared phosphor powder can be controlled from 1 〇 to 20 cps, and wherein the specific fixing program is heat sintering or laser heating to form a glare powder coating 33. Please refer to the third figure. The method for spraying a phosphor powder spray solution comprises the following steps: (1) spraying the spray powder of the phosphor powder on the anode of the electronic device to construct a spray surface; 2) volatilizing the spray solvent at a specific temperature range; and (3) repeating steps (1) and (2) until a specific number of times is reached to achieve a specific range thickness of the spray film of the phosphor powder. The method for fabricating the method of the present invention may have various details as follows, further comprising a step of subjecting the sprayed film of step (3) to a specific fixing process to form a phosphor layer, and wherein the fixing procedure is sintering or Laser heating, etc., wherein the spraying liquid for spraying the fluorescent powder uses a commercial coating spray operating condition range: the nozzle diameter is 0·5-2·0 mm, and the high pressure air rolling flow is controlled at 240 -2 8 0 1 /min, the amount of the adjusted solution is controlled at 15 0-250 cc / min, wherein the powder particle size of the phosphor powder is selected from the fixing agent of less than 1. 〇#m' The powder particle size of the conductive powder is selected to be less than 0 · 2 / zm, and the phosphor powder coating 33 produced on the surface of the anode structure is of a thickness of i 5~2. It is verified that the advantages of the present invention are as follows: 1. The phosphor powder coating prepared according to the present invention can control the thickness of the coating layer and the coating thickness distribution is more uniform, which is beneficial to the performance of the fluorescent powder. 2) The phosphor powder coating produced by the invention can be made into a thin layer and

1247034 V. INSTRUCTIONS (13) Highly dense phosphor powder coating for field emission display panel requirements for low electric field (less than 5 V/# m) or low voltage (300 V) drive circuits. 3. According to the phosphor powder coating prepared by the invention, the solution preparation is simple, and the coating material is implemented, which can be implemented in commercial applications. In summary, the present invention can achieve the intended use purpose, and has novelty and progress, fully meets the requirements of the invention patent application, and submits an application according to the patent law. Please check and grant the patent in this case to protect the creation. The rights of the person.

However, the above description is only a preferred embodiment of the present invention, and thus the scope of the present invention is not limited thereto, and the equivalent structural changes of the present invention and the contents of the drawings are all included in the present invention. Within the scope of the invention, to protect the rights and interests of the inventors, Chen Ming.

Page 18 1247034 The drawing briefly illustrates the first figure, which is a schematic diagram of the structure of the field emission display element; the second figure, which is a schematic diagram of the fluorescent powder coating structure of the conventional screen printing technology; and the third figure, the spray of the invention Schematic diagram of the fluorescent powder coating structure of the coating technique. [Explanation of Symbols] Field emission display 1 a anode 3a anode glass substrate 31a anode conductive layer 32a phosphor powder layer 3 3a cathode 4a cathode glass substrate 41a cathode conductive layer 42a electron emission source layer 43a unit structure 5 a unit anode 51a unit Cathode 52a barrier wall 5 3a phosphor powder 61a phosphor powder 62a electron beam 71a secondary energy 72a anode glass substrate 31 anode conductive layer 32 phosphor powder coating 33 powder 61 electron beam 71 powder 81

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Claims (1)

1247034 VI. Patent application scope i, a spray liquid for fluorescent powder, used for the anode structure of an electronic device, comprising: a fluorescent powder; a spraying solvent, which can be volatilized under a specific temperature range, having the fluorescent powder a property in which the suspension is dispersed; a fixing agent may be distributed in the spraying solvent, and has a specific interface connection fixing property, and the fluorescent powder may be attached to the electronic device as a fixing agent after a specific fixing process The anode is configured to spray the surface; the spray coating of the phosphor powder is applied to the anode of the electronic device to spray the surface, and the spraying solvent is volatilized under a specific temperature range, and after the specific fixing process is performed, The effect of fixing the phosphor powder on the anode structure spraying surface is achieved. 2. If the spray powder of the phosphor powder described in the first application of the patent scope is applied, the conductive powder has further reduced the conductive impedance characteristics of the sprayed surface layer. 3. The spray liquid of the phosphor powder according to claim 2, further comprising an interface active agent to make the surfactant, the fixative and the glazing powder more uniformly distributed in the spray solvent. 4. The spray liquid of the phosphor powder according to claim 3, wherein the conductive powder is a powder of silver powder, indium salt or oxidized agar, the fixing agent is glass powder or nitrocellulose, and the fixing agent is glass powder or nitrocellulose. The spraying solvent is isovaleric acid acetate, and the viscosity of the spray liquid prepared by the fluorescent powder is controlled to be 10 to 20 cps. 5. The spray coating of the phosphor powder according to claim 1, wherein the specific fixing procedure is heat sintering or laser heating to form a phosphor powder coating. 1247034 6. Patent application scope 6. A spraying method for a spray liquid of a phosphor powder, which uses the spray liquid of the phosphor powder as described in claim 1 of the patent application, comprising the following steps: (1) spraying Applying the spray of the phosphor powder to the anode of the electronic device to construct the spray surface; (2) volatilizing the spray solvent at a specific temperature range; and (3) repeating steps (1) and (2) until reaching A specific number of times to achieve a specific range thickness of the spray film of the phosphor powder. 7. The method for spraying a phosphor powder according to claim 6, further comprising a step of causing the spray film of step (3) to perform a specific fixing process to form a phosphor layer. . 8. The spray coating method of the phosphor powder according to claim 7, wherein the fixing procedure is sintering or laser heating. 9. The spraying method of the fluorescent powder spraying solution according to claim 6, wherein the spraying liquid for spraying the fluorescent powder uses a spray gun for commercial coating, and the operating condition range is : The nozzle diameter is 0. 5 - 2. 0 mm, the high pressure air flow is controlled at 2 4 0 - 2 8 0 1 /mi η, and the adjustment solution discharge amount is controlled at 150-250 cc/min. The spraying method of the spraying liquid of the fluorescent powder according to the seventh aspect of the patent application, wherein the powder particle size of the fluorescent powder is selected to be less than 1.0//m, and the fixing agent and the additive are added. The powder particle size of the conductive powder is selected to be less than 0.2 / 2 m, and the phosphor powder coating formed on the surface of the anode structure is coated with a thickness of 1.5 to 2.5 / zm. Page 21