TW200514615A - Waste gases treatment apparatus and method - Google Patents

Waste gases treatment apparatus and method

Info

Publication number
TW200514615A
TW200514615A TW092129311A TW92129311A TW200514615A TW 200514615 A TW200514615 A TW 200514615A TW 092129311 A TW092129311 A TW 092129311A TW 92129311 A TW92129311 A TW 92129311A TW 200514615 A TW200514615 A TW 200514615A
Authority
TW
Taiwan
Prior art keywords
waste gases
heating chamber
treatment apparatus
gases
lengthen
Prior art date
Application number
TW092129311A
Other languages
Chinese (zh)
Other versions
TWI272121B (en
Inventor
Byung-Il Lee
Sung-Jin Jung
Man-Su Lee
Chang-Wook Jeong
Geun-Sik Lee
Original Assignee
Unisem Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unisem Co Ltd filed Critical Unisem Co Ltd
Priority to TW92129311A priority Critical patent/TWI272121B/en
Publication of TW200514615A publication Critical patent/TW200514615A/en
Application granted granted Critical
Publication of TWI272121B publication Critical patent/TWI272121B/en

Links

Landscapes

  • Treating Waste Gases (AREA)

Abstract

A waste gases treatment apparatus is provided with a waste gases pre-treatment apparatus for treating waste gases discharged from semiconductor (or LCD) manufacturing equipment by using a dry-type treatment method to lengthen a life span of the waste gases treatment apparatus, and provided with a humidity eliminating device for eliminating moisture contained in the finally treated gases to prevent a exhaust duct from dewing. In addition, composing a shield unit in a heating chamber for combusting the waste gases prevents an inner part of the heating chamber from corroding by fluorine gases, improving a cooling structure for cooling a lower part of the heating chamber prevents powder clogging, and improving a supply structure of the waste gases supplied to the heating chamber lengthen a staying time of the waste gases in the heating chamber.
TW92129311A 2003-10-22 2003-10-22 Waste gases treatment apparatus and method TWI272121B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92129311A TWI272121B (en) 2003-10-22 2003-10-22 Waste gases treatment apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92129311A TWI272121B (en) 2003-10-22 2003-10-22 Waste gases treatment apparatus and method

Publications (2)

Publication Number Publication Date
TW200514615A true TW200514615A (en) 2005-05-01
TWI272121B TWI272121B (en) 2007-02-01

Family

ID=38441140

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92129311A TWI272121B (en) 2003-10-22 2003-10-22 Waste gases treatment apparatus and method

Country Status (1)

Country Link
TW (1) TWI272121B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109786288A (en) * 2017-11-13 2019-05-21 台湾积体电路制造股份有限公司 Flue, gas supply system and the method, semi-conductor device manufacturing method using it
CN111346478A (en) * 2018-12-21 2020-06-30 夏泰鑫半导体(青岛)有限公司 Exhaust module, wafer processing system and method for exhausting waste gas
TWI698272B (en) * 2019-10-29 2020-07-11 漢科系統科技股份有限公司 Exhaust gas treatment system
TWI817142B (en) * 2020-06-16 2023-10-01 德商達斯環境專家有限責任公司 Gas scrubber for removing particles from an exhaust gas and an exhaust gas disposal system with a gas scrubber

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0902234D0 (en) * 2009-02-11 2009-03-25 Edwards Ltd Method of treating an exhaust gas stream
US8764882B2 (en) * 2009-05-22 2014-07-01 Daikin Industries, Ltd. Fluid treatment method, fluid treatment apparatus, and fluid
TWI386251B (en) * 2010-06-07 2013-02-21 Macronix Int Co Ltd Local scrubber for processing waste gas and method for processing waste gas
TWI721293B (en) * 2018-07-20 2021-03-11 金索股份有限公司 Dry chemical adsorption treatment device for cyclone dust collection

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109786288A (en) * 2017-11-13 2019-05-21 台湾积体电路制造股份有限公司 Flue, gas supply system and the method, semi-conductor device manufacturing method using it
CN109786288B (en) * 2017-11-13 2022-12-09 台湾积体电路制造股份有限公司 Gas pipe, gas supply system and method for manufacturing semiconductor device using the same
CN111346478A (en) * 2018-12-21 2020-06-30 夏泰鑫半导体(青岛)有限公司 Exhaust module, wafer processing system and method for exhausting waste gas
TWI698272B (en) * 2019-10-29 2020-07-11 漢科系統科技股份有限公司 Exhaust gas treatment system
TWI817142B (en) * 2020-06-16 2023-10-01 德商達斯環境專家有限責任公司 Gas scrubber for removing particles from an exhaust gas and an exhaust gas disposal system with a gas scrubber
US12076685B2 (en) 2020-06-16 2024-09-03 Das Environmental Expert Gmbh Gas scrubber for removing particles from an exhaust gas and an exhaust gas disposal system with a gas scrubber

Also Published As

Publication number Publication date
TWI272121B (en) 2007-02-01

Similar Documents

Publication Publication Date Title
TW200514615A (en) Waste gases treatment apparatus and method
PE20070940A1 (en) SYSTEMS FOR THE PREVENTION OF PAH EMISSIONS AND FOR EFFICIENT DRYING / DEHYDRATING PROCESSES
DE69727497D1 (en) DEVICE AND METHOD FOR TREATING LIGNOCELLULOSE MATERIALS AT HIGH TEMPERATURE
EA200870294A1 (en) DEVICE FOR TREATMENT OF HYDROGEN
FR2826931B1 (en) COMBINED EXHAUST GAS AND BALLAST WATER TREATMENT DEVICE AND BALLAST WATER TREATMENT METHOD
WO2004045815A3 (en) Apparatus and method for the heat treatment of lignocellulosic material
WO2008051304A3 (en) Treatment of airflow
WO2005034163A3 (en) Apparatus and method for plasma treating a substrate
TW200618034A (en) Excimer light apparatus
BRPI0710267B8 (en) METHOD AND EQUIPMENT FOR PROCESS GAS TREATMENT
DE60000184D1 (en) POWER SUPPLY FOR TREATING GASEOUS MEDIA
DE50308366D1 (en) CONVECTIVE DRYING PROCESS
TW201506240A (en) Exhaust processor
DE59903032D1 (en) Process for the heat treatment of metallic workpieces
MY136966A (en) Oven
FR2751580B1 (en) WOOD RETIFICATION PROCESS
NO20062766L (en) Supply device for ultraviolet lamps used in water treatment
ATE409497T1 (en) ARRANGEMENT FOR INFLUENCING AND TREATING THE AIR OF AT LEAST ONE ROOM
EG23990A (en) Device and method for treating odours of a stuffy gas stream with a cold plasma
FR2869645B1 (en) METHOD FOR MANAGING AN EXHAUST GAS TREATMENT DEVICE
DK1011956T3 (en) Apparatus for corona treatment of surfaces of a substrate
NO20034397D0 (en) Process and installation for waste treatment
RU2001101680A (en) METHOD FOR NEUTRALIZING GASES OF BURNING BREED DAMPS
JP2011131127A (en) Low temperature magnetic decomposition treatment apparatus for waste organic matter
PT102722A (en) Incineration of volatile organic compounds in exhaust gases involves thermal degradation in chamber containing products for heat treatment, with gas circulation

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees