TW200510718A - Pressure compensated chemical sensor for use in a vacuum environment - Google Patents

Pressure compensated chemical sensor for use in a vacuum environment

Info

Publication number
TW200510718A
TW200510718A TW093105900A TW93105900A TW200510718A TW 200510718 A TW200510718 A TW 200510718A TW 093105900 A TW093105900 A TW 093105900A TW 93105900 A TW93105900 A TW 93105900A TW 200510718 A TW200510718 A TW 200510718A
Authority
TW
Taiwan
Prior art keywords
saw
monitored
measurement
vacuum environment
chemical sensor
Prior art date
Application number
TW093105900A
Other languages
Chinese (zh)
Inventor
Robert Bruce Grant
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc filed Critical Boc Group Plc
Publication of TW200510718A publication Critical patent/TW200510718A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/4409—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by comparison
    • G01N29/4436—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by comparison with a reference signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2468—Probes with delay lines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/32—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise
    • G01N29/323—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise compensating for pressure or tension variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0253—Condensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

A chemical species sensor comprises a reference surface acoustic wave device (SAW) 2 and a measurement surface acoustic wave device 1 (SAW). The measurement SAW 1 has applied thereto a chemically selective coating which is specifically sensitive to chemical species to be monitored by the sensor. The reference SAW 2 has a chemically inert coating applied thereto. The sensor comprises means 4, 5 for providing a temperature differential between the reference SAW and the measurement SAW. In use the relative frequencies of waves produced by the reference and measurement SAWs are monitored and from this the proportion of the monitored species within the monitored environment can be detected.
TW093105900A 2003-03-05 2004-03-05 Pressure compensated chemical sensor for use in a vacuum environment TW200510718A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0304895A GB2399170A (en) 2003-03-05 2003-03-05 Chemical sensor with temperature differential between measurement and reference SAWs

Publications (1)

Publication Number Publication Date
TW200510718A true TW200510718A (en) 2005-03-16

Family

ID=9954066

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093105900A TW200510718A (en) 2003-03-05 2004-03-05 Pressure compensated chemical sensor for use in a vacuum environment

Country Status (3)

Country Link
GB (1) GB2399170A (en)
TW (1) TW200510718A (en)
WO (1) WO2004079360A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITMI20042017A1 (en) * 2004-10-22 2005-01-22 Getters Spa GAS SURFACE SENSOR OF ACOUSTIC WAVES AND PROCEDURE FOR ITS MANUFACTURING
US10600952B2 (en) 2016-05-20 2020-03-24 Pulmostics Limited Surface acoustic wave sensor coating

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5012668A (en) * 1989-08-22 1991-05-07 The Boeing Company Inclined electrode surface acoustic wave substance sensor
US5465608A (en) * 1993-06-30 1995-11-14 Orbital Sciences Corporation Saw vapor sensor apparatus and multicomponent signal processing
US5795993A (en) * 1995-11-29 1998-08-18 Sandia Corporation Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent
US5918258A (en) * 1996-07-11 1999-06-29 Bowers; William D. High-sensitivity instrument to measure NVR in fluids
US5992215A (en) * 1997-05-29 1999-11-30 Sensor Research And Development Corp. Surface acoustic wave mercury vapor sensors
US6295861B1 (en) * 1999-01-28 2001-10-02 Advanced Technology Materials, Inc. Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same

Also Published As

Publication number Publication date
GB0304895D0 (en) 2003-04-09
WO2004079360A1 (en) 2004-09-16
GB2399170A (en) 2004-09-08

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