GB0304895D0 - Pressure compensated chemical sensor for use in a vacuum environment - Google Patents

Pressure compensated chemical sensor for use in a vacuum environment

Info

Publication number
GB0304895D0
GB0304895D0 GB0304895A GB0304895A GB0304895D0 GB 0304895 D0 GB0304895 D0 GB 0304895D0 GB 0304895 A GB0304895 A GB 0304895A GB 0304895 A GB0304895 A GB 0304895A GB 0304895 D0 GB0304895 D0 GB 0304895D0
Authority
GB
United Kingdom
Prior art keywords
vacuum environment
chemical sensor
pressure compensated
compensated chemical
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0304895A
Other versions
GB2399170A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GB0304895A priority Critical patent/GB2399170A/en
Publication of GB0304895D0 publication Critical patent/GB0304895D0/en
Priority to PCT/GB2004/000732 priority patent/WO2004079360A1/en
Priority to TW093105900A priority patent/TW200510718A/en
Publication of GB2399170A publication Critical patent/GB2399170A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
    • G01N29/4409—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by comparison
    • G01N29/4436—Processing the detected response signal, e.g. electronic circuits specially adapted therefor by comparison with a reference signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2468—Probes with delay lines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/32—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise
    • G01N29/323—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise compensating for pressure or tension variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0253—Condensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
GB0304895A 2003-03-05 2003-03-05 Chemical sensor with temperature differential between measurement and reference SAWs Withdrawn GB2399170A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0304895A GB2399170A (en) 2003-03-05 2003-03-05 Chemical sensor with temperature differential between measurement and reference SAWs
PCT/GB2004/000732 WO2004079360A1 (en) 2003-03-05 2004-02-24 Pressure compensated chemical surface acoustic wave sensor for use in a vacuum environment
TW093105900A TW200510718A (en) 2003-03-05 2004-03-05 Pressure compensated chemical sensor for use in a vacuum environment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0304895A GB2399170A (en) 2003-03-05 2003-03-05 Chemical sensor with temperature differential between measurement and reference SAWs

Publications (2)

Publication Number Publication Date
GB0304895D0 true GB0304895D0 (en) 2003-04-09
GB2399170A GB2399170A (en) 2004-09-08

Family

ID=9954066

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0304895A Withdrawn GB2399170A (en) 2003-03-05 2003-03-05 Chemical sensor with temperature differential between measurement and reference SAWs

Country Status (3)

Country Link
GB (1) GB2399170A (en)
TW (1) TW200510718A (en)
WO (1) WO2004079360A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITMI20042017A1 (en) * 2004-10-22 2005-01-22 Getters Spa GAS SURFACE SENSOR OF ACOUSTIC WAVES AND PROCEDURE FOR ITS MANUFACTURING
US10600952B2 (en) 2016-05-20 2020-03-24 Pulmostics Limited Surface acoustic wave sensor coating

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5012668A (en) * 1989-08-22 1991-05-07 The Boeing Company Inclined electrode surface acoustic wave substance sensor
US5465608A (en) * 1993-06-30 1995-11-14 Orbital Sciences Corporation Saw vapor sensor apparatus and multicomponent signal processing
US5795993A (en) * 1995-11-29 1998-08-18 Sandia Corporation Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent
US5918258A (en) * 1996-07-11 1999-06-29 Bowers; William D. High-sensitivity instrument to measure NVR in fluids
US5992215A (en) * 1997-05-29 1999-11-30 Sensor Research And Development Corp. Surface acoustic wave mercury vapor sensors
US6295861B1 (en) * 1999-01-28 2001-10-02 Advanced Technology Materials, Inc. Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same

Also Published As

Publication number Publication date
TW200510718A (en) 2005-03-16
WO2004079360A1 (en) 2004-09-16
GB2399170A (en) 2004-09-08

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)