TW200510239A - Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields - Google Patents

Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields

Info

Publication number
TW200510239A
TW200510239A TW093117999A TW93117999A TW200510239A TW 200510239 A TW200510239 A TW 200510239A TW 093117999 A TW093117999 A TW 093117999A TW 93117999 A TW93117999 A TW 93117999A TW 200510239 A TW200510239 A TW 200510239A
Authority
TW
Taiwan
Prior art keywords
micromirrors
mirror plate
array
plate
disclosed
Prior art date
Application number
TW093117999A
Other languages
English (en)
Inventor
Satyadev Patel
Andrew Huibers
Original Assignee
Reflectivity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reflectivity Inc filed Critical Reflectivity Inc
Publication of TW200510239A publication Critical patent/TW200510239A/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
TW093117999A 2003-07-03 2004-06-21 Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields TW200510239A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/613,379 US6873450B2 (en) 2000-08-11 2003-07-03 Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields

Publications (1)

Publication Number Publication Date
TW200510239A true TW200510239A (en) 2005-03-16

Family

ID=34103141

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093117999A TW200510239A (en) 2003-07-03 2004-06-21 Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields

Country Status (7)

Country Link
US (2) US6873450B2 (zh)
EP (1) EP1642162A4 (zh)
JP (1) JP2007521509A (zh)
KR (1) KR20060040653A (zh)
CN (1) CN1816765A (zh)
TW (1) TW200510239A (zh)
WO (1) WO2005010933A2 (zh)

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Also Published As

Publication number Publication date
US20040008402A1 (en) 2004-01-15
KR20060040653A (ko) 2006-05-10
JP2007521509A (ja) 2007-08-02
US6873450B2 (en) 2005-03-29
CN1816765A (zh) 2006-08-09
WO2005010933A2 (en) 2005-02-03
EP1642162A4 (en) 2010-10-20
US6974713B2 (en) 2005-12-13
WO2005010933A3 (en) 2005-05-19
EP1642162A2 (en) 2006-04-05
US20050190430A1 (en) 2005-09-01

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