TW200508122A - Substrate transfer - Google Patents

Substrate transfer

Info

Publication number
TW200508122A
TW200508122A TW092123133A TW92123133A TW200508122A TW 200508122 A TW200508122 A TW 200508122A TW 092123133 A TW092123133 A TW 092123133A TW 92123133 A TW92123133 A TW 92123133A TW 200508122 A TW200508122 A TW 200508122A
Authority
TW
Taiwan
Prior art keywords
substrate transfer
pan
transfer
cassette
groove
Prior art date
Application number
TW092123133A
Other languages
English (en)
Other versions
TWI293281B (en
Inventor
Cheng-Doul Chuang
Chien-Sung Deng
Hung-Wen Yang
Original Assignee
Innolux Display Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Innolux Display Corp filed Critical Innolux Display Corp
Priority to TW092123133A priority Critical patent/TWI293281B/zh
Priority to US10/925,287 priority patent/US20050042065A1/en
Publication of TW200508122A publication Critical patent/TW200508122A/zh
Application granted granted Critical
Publication of TWI293281B publication Critical patent/TWI293281B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
TW092123133A 2003-08-22 2003-08-22 Substrate transfer TWI293281B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW092123133A TWI293281B (en) 2003-08-22 2003-08-22 Substrate transfer
US10/925,287 US20050042065A1 (en) 2003-08-22 2004-08-23 Substrate transfer device with cassettes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW092123133A TWI293281B (en) 2003-08-22 2003-08-22 Substrate transfer

Publications (2)

Publication Number Publication Date
TW200508122A true TW200508122A (en) 2005-03-01
TWI293281B TWI293281B (en) 2008-02-11

Family

ID=34192425

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092123133A TWI293281B (en) 2003-08-22 2003-08-22 Substrate transfer

Country Status (2)

Country Link
US (1) US20050042065A1 (zh)
TW (1) TWI293281B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI372717B (en) * 2007-12-14 2012-09-21 Prime View Int Co Ltd Apparatus for transferring substrate
US20150101290A1 (en) * 2013-10-16 2015-04-16 Gt Crystal Systems, Llc Transporting product from a product cartridge
US20150104277A1 (en) * 2013-10-16 2015-04-16 Gt Crystal Systems, Llc Product cartridge for transporting product
CN108820343B (zh) * 2018-09-11 2024-05-28 江西创一精密机械有限公司 一种具有防尘功能的针剂装盒装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW344847B (en) * 1996-08-29 1998-11-11 Tokyo Electron Co Ltd Substrate treatment system, substrate transfer system, and substrate transfer method
JPH10203584A (ja) * 1997-01-22 1998-08-04 Nec Corp 基板用カセット
KR100247138B1 (ko) * 1997-11-20 2000-03-15 구본준, 론 위라하디락사 유리기판 적재용 카세트
CN1136609C (zh) * 1999-09-06 2004-01-28 淀川化成株式会社 基板用盒

Also Published As

Publication number Publication date
TWI293281B (en) 2008-02-11
US20050042065A1 (en) 2005-02-24

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees