TW200423428A - Light-emitting diodes and method of manufacturing same - Google Patents

Light-emitting diodes and method of manufacturing same Download PDF

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Publication number
TW200423428A
TW200423428A TW92109978A TW92109978A TW200423428A TW 200423428 A TW200423428 A TW 200423428A TW 92109978 A TW92109978 A TW 92109978A TW 92109978 A TW92109978 A TW 92109978A TW 200423428 A TW200423428 A TW 200423428A
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Taiwan
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emitting diode
light
alloy
bonding layer
metal bonding
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TW92109978A
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Chinese (zh)
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Wen-Chieh Huang
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Arima Optoelectronics Corp
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Priority to TW92109978A priority Critical patent/TW200423428A/en
Publication of TW200423428A publication Critical patent/TW200423428A/en

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Abstract

Disclosed provides a light-emitting diode and method of manufacturing same, comprising: provide a chip carrier, define a solid chip surface upon the carrier, form a metal adhesion layer upon the above chip surface, locate an LED chip with a plurality of epitaxial semiconductor layers upon the metal adhesion layer of the above solid chip surface, and secure the above mentioned LED chip on the solid chip surface of the chip carrier, through metal adhesion layer by performing a self-assembly process. The above mentioned LED chip was secured onto the chip carrier through a metal adhesion layer such that to achieve the heat dissipating purpose by rapidly conducting the heat flow, generated by LED, to the chip carrier though the metal adhesion layer with a high thermal conduction coefficient.

Description

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五、發明說明(l) 【發明所屬之技術領域】 本發明係有關於一種發光二極體(Light Emitting Diode,LED)及其製造方法’特別係有關於一種利用金屬 接合層固合二極體晶粒之發光二極體及其製造方法。 【先前技術】 發光一極體(Light Emitting Diode,LED)是一種固 態的半導體元件,利用電流通過時二極體内產生的二個載 子(分別為帶負電的電子與帶正電的電洞)之相互結合,將 能量以光的形式釋放。由於其具有體積小(多顆、多"種組 合)、反應速度快(可在咼頻操作)及無污染等優點,使得 發光二極體應用領域逐漸跨足至高效率照明光源市場,是 未來成為替代傳統照明器具的一大潛力商品。 隨著發光二極體製造技術的不斷進步和新型材料的開 發’尤由疋具有寬能隙(wide bandgap)之氮化鎵藍光二極 體的出現,使得二極體發光效率大幅的提昇。由於通過二 極體單位面積之電流變大,使得發光晶粒產生更多的作用 熱,若不設法改善二極體之散熱效率,將導致二極體因作 用熱積聚而劣化,造成二極體發光特性不穩定、較低二極 體亮度及壽命。 一發光二極體雖被稱為冷光源,但由於其發光晶粒在發 光同亦有部分能量轉換成熱,其中心發光層之溫度可達到 約高達四百度左右。在發光二極體裝置中,請參考第1 圖,通常為了增加發光二極體1〇的散熱效率,會加大其晶V. Description of the invention (l) [Technical field to which the invention belongs] The present invention relates to a light emitting diode (LED) and a method for manufacturing the same. In particular, the present invention relates to a method for fixing a diode using a metal bonding layer. Light-emitting diodes of crystal grains and manufacturing method thereof. [Previous technology] Light Emitting Diode (LED) is a solid-state semiconductor device that uses two carriers (respectively negatively charged electrons and positively charged holes) generated in the diode body when current passes. ) Are combined with each other to release energy in the form of light. Due to its small size (multiple pieces, multiple combinations), fast response speed (can be operated in high frequency), and no pollution, the light emitting diode application field has gradually entered the high-efficiency lighting source market and is the future. Become a great potential commodity to replace traditional lighting appliances. With the continuous progress of light-emitting diode manufacturing technology and the development of new materials, especially the emergence of gallium nitride blue light diodes with wide bandgap, the light-emitting efficiency of diodes has been greatly improved. Because the current per unit area of the diode becomes larger, the light-emitting grains generate more active heat. If you do not try to improve the heat dissipation efficiency of the diode, it will cause the diode to deteriorate due to the accumulation of active heat, resulting in the diode. Luminous characteristics are unstable, lower diode brightness and lifetime. Although a light-emitting diode is called a cold light source, because the light-emitting crystals also emit part of their energy into heat during the light emission, the temperature of the central light-emitting layer can reach about four hundred degrees. In the light-emitting diode device, please refer to FIG. 1. Generally, in order to increase the heat-dissipation efficiency of the light-emitting diode 10, its crystal will be enlarged.

0691 -9377TWF(N1) ;AOC-〇2- 15-TW;PH0ELIP.ptd 2004234280691 -9377TWF (N1); AOC-〇2- 15-TW; PH0ELIP.ptd 200423428

粒承載座14或導線架15之面積以用來散熱。因此,發光二 極體晶粒11與其晶粒承載座14之間之熱交換如果越容易, 則發光二極體晶粒11所產生之作用熱越可以迅速的逸散至 二極體晶粒1 1外,所以二極體晶粒1 1與其晶粒承載座丨5之 間散傳導率對於發光二極體散熱有決定性的影響。 傳統的發光二極體而言,在將具有複數磊晶半導體層 之發光二極體晶粒製成成品時,一般均需將發光二極體晶 粒以樹脂(或是銀膠,因基板導電與否而定)配置於一晶粒 承载座之一固晶面,待樹脂(或銀膠)乾著後,發光二極體 晶粒便固合於晶粒承載座之固晶面上。然而,由於用作膠j 合劑的樹脂(或銀膠)其本身通常為具有斷熱效果之樹脂類 化合物’其熱導效果差,若以其作發光二極體晶粒與晶粒 承載座接合之介質,極易在二極體晶粒與晶粒承載座之間 形成一幾近保溫封閉之作用環境,而二極體晶粒所積聚的-作用熱將導致其能階能隙(j unct i 〇n ) ( p-n接面發光層)之 崩潰’則發光效率即因而降低甚至破壞,導致發光二極體 不能再注入更大電流。因此,重新審視二極體之固合方式 以利散之傳導,實為二極體技術發展中一項重要的課題。 【發明内容】 + 有鑑於此’為了解決上述問題,本發明之主要目的在 於提供一種發光二極體及其製作方法,其利用一金屬接合 層使二極體發光晶粒固合於晶粒承載座之固晶面上,由於 金屬具有良好的熱導效率,可將二極體發光晶粒所產生的The area of the pellet carrier 14 or the lead frame 15 is used for heat dissipation. Therefore, if the heat exchange between the light-emitting diode crystal grains 11 and the die carrier 14 is easier, the more effective heat generated by the light-emitting diode crystal grains 11 can be quickly dissipated to the diode crystal grains 1 1. Therefore, the scattered conductivity between the diode grain 11 and its grain carrier 5 has a decisive influence on the heat dissipation of the light emitting diode. For traditional light-emitting diodes, when the light-emitting diode crystals with a plurality of epitaxial semiconductor layers are made into a finished product, the light-emitting diode crystals are generally made of resin (or silver glue) because the substrate is conductive. Whether or not) is arranged on a solid crystal surface of a die carrier. After the resin (or silver glue) dries, the light-emitting diode crystals are fixed on the solid surface of the die carrier. However, because the resin (or silver glue) used as the glue j is usually a resin compound with a heat-insulating effect, its thermal conductivity is poor. If it is used as a light-emitting diode, it will be bonded to the die carrier. Medium, it is easy to form a nearly heat-insulating and sealing environment between the diode grains and the die carrier, and the accumulated-action heat of the diode grains will cause its energy gap (j unct The collapse of i) (pn junction emitting layer) will reduce the luminous efficiency and even destroy it, which will cause the light-emitting diode to no longer inject a larger current. Therefore, re-examining the diode's consolidation method to facilitate the dissipation of conduction is indeed an important issue in the development of diode technology. [Summary of the invention] + In view of this, in order to solve the above problems, the main purpose of the present invention is to provide a light emitting diode and a manufacturing method thereof, which uses a metal bonding layer to fix the light emitting diode of the diode to the die carrier. Since the metal has good thermal conductivity, the

200423428 五、發明說明(3) — 熱迅速傳導致二極體晶粒外,免除上述習知之二極體封裳 方式因熱傳導效率差,導致改變元件發光特性、晶粒溫度 過高及二極體壽命較短等問題。 ^ 為獲致上述之目的,本發明所述之發光二極體,至少 包括一 sa粒承載座,該晶粒承載座係具有一固晶面於其 上;一發光二極體晶粒,該晶粒具有複數磊晶半導體層, 當通入電流之後產生光,以及一金屬接合層,用以固合該 發光二極體晶粒於上述晶粒承載座之固晶面上。200423428 V. Description of the invention (3)-Except for the fast diode heat transfer, which causes diode crystal grains, the conventional diode sealing method is exempted due to poor thermal conduction efficiency, which causes changes in the light emitting characteristics of the device, excessive grain temperature, and diodes. Short life and other issues. ^ In order to achieve the above-mentioned object, the light-emitting diode according to the present invention includes at least one sa grain carrier, and the crystal grain carrier has a solid crystal surface thereon; a light-emitting diode crystal, the crystal The particles have a plurality of epitaxial semiconductor layers, which generate light when a current is applied, and a metal bonding layer for fixing the light-emitting diode crystal grains on the solid crystal surface of the crystal grain carrier.

本發明之另一目的係提供本發所述之發光二極體製作 方法,其步驟至少包括提供一晶粒承載座,其上定義有一 固晶面,形成一金屬接合層於上述固晶面上,配置一具有 複數蟲sa半導體層之發光二極體晶粒於上述固晶面上乂金 屬接合層上,以一自固合步驟使上述余屬接合層將上述發 光二極體晶粒固合於該晶粒承載座之固晶面上。 本發明所述之發光二極體製作方法亦可以另一方式表 現,其步驟至少包括提供一具有複數磊晶半導體層之發光 二極體晶粒,在該發光二極體晶粒底部形成一金屬接合 層’配置該發光二極體晶粒於一晶粒承載座之固晶面上, 使上述金屬接合層與晶粒承載座之一固晶面接觸,以一自 固合步驟使上述金屬接合層將上述發光二極體晶粒固合於 該晶粒承載座之固晶面上。 本發明關於另一種發光二極體製作方法,其步驟至少 包括提供一晶粒承載座,其上定義有一固晶面,配置一金 屬接合物質做為金屬接合層於上述固晶面上,配置一具有Another object of the present invention is to provide the method for manufacturing the light-emitting diode according to the present invention, the steps of which at least include providing a die carrier, and a solid crystal surface is defined thereon to form a metal bonding layer on the solid crystal surface. A light emitting diode crystal having a plurality of semiconductor layers of sa semiconductor is arranged on the metal bonding layer on the solid crystal surface, and the remaining light emitting diode crystal is consolidated by the self-consolidation step. On the solid crystal surface of the die carrier. The manufacturing method of the light-emitting diode according to the present invention can also be expressed in another way. The steps include at least providing a light-emitting diode crystal with a plurality of epitaxial semiconductor layers, and forming a metal on the bottom of the light-emitting diode crystal. The bonding layer is configured to dispose the light emitting diode crystal grains on a solid crystal surface of a crystal chip carrier, so that the metal bonding layer is in contact with one solid crystal surface of the crystal chip carrier, and the metal is bonded by a self-consolidation step. The layer fixes the above-mentioned light-emitting diode crystal grains on the solid crystal surface of the crystal grain carrier. The invention relates to another method for manufacturing a light-emitting diode, the steps of which at least include providing a die carrier, a solid crystal surface is defined thereon, and a metal bonding material is arranged as a metal bonding layer on the solid crystal surface, and a have

0691 -9377TWF(N1);AOC-02- 15-TW;PHOELIP.ptd 第 6 頁0691 -9377TWF (N1); AOC-02- 15-TW; PHOELIP.ptd page 6

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複數磊晶半導體層之發光二極 上,以一自固合步驟使上述金 晶粒及該晶粒承載座固合,使 該晶粒承載座之固晶面上。 體晶粒於上述之金屬接合層 屬接合層與上述發光二極體 上述發光二極體晶粒固合於 本發明亦關於另一種發光二極體製作方法,其 少包括提供一晶粒承載座,其上定義有一固晶面,忐一 體層於上述固晶面上,且在一具有複數遙晶半 導體層之發光一極體晶粒之底部形成一第二金屬接合層, 將上述晶粒配置於上述晶粒承載座之固晶面上,使第二 屬接合層與第一金屬接合層接觸,以一自固合步驟使上 第一金屬與第二金屬接合層固合,以使上述發光二極體: 粒固合於該晶粒承載座之固晶面上。 曰曰 本發明之特徵在於本發明所述之發光二極體,係以一 自固合步驟使金屬接合層分別與晶粒承載座接合,進而使 發光二極體晶粒固合於晶粒承載座,當該發光二極體電流 導通發光時,能將二極體產生之作用熱藉由高熱導係數之 金屬接合層迅速導引至晶粒承載座。On the light emitting diodes of the plurality of epitaxial semiconductor layers, the above-mentioned gold crystal grains and the crystal grain bearing seat are consolidated by a self-consolidation step, so that the crystal grain surface of the crystal grain bearing seat is fixed. And the light emitting diode is bonded to the light emitting diode, and the light emitting diode is bonded to the light emitting diode, and the present invention also relates to another method for manufacturing a light emitting diode, which includes providing a die bearing seat. A solid crystal plane is defined thereon, and the gadolinium layer is integrated on the solid crystal plane, and a second metal bonding layer is formed on the bottom of a light-emitting polar crystal grain having a plurality of telecrystalline semiconductor layers, and the crystal grains are arranged. The second metal bonding layer is brought into contact with the first metal bonding layer on the solid crystal surface of the above-mentioned die carrier, and the upper first metal and the second metal bonding layer are fixed by a self-consolidation step, so that the light is emitted. Diode: The particles are fixed on the solid crystal surface of the crystal bearing seat. The invention is characterized in that the light-emitting diode according to the present invention uses a self-consolidation step to respectively join the metal bonding layer with the die carrier, and then the light-emitting diode die is fixed on the die carrier. When the light-emitting diode is turned on by light, it can quickly guide the heat generated by the diode to the die-bearing seat through the metal bonding layer with high thermal conductivity.

為使本發明之上述目的、特徵能更明顯易僅,下文特 舉較佳實施例,並配合所附圖式,作詳細說明如下: 、 【實施方式】 兹配合附圖將本發明之較佳實施例詳細說明如下· 本發明之有機電激發光裝置,至少包括一晶粒承栽In order to make the above-mentioned objects and features of the present invention more obvious and easy, the following exemplifies preferred embodiments in conjunction with the accompanying drawings, and describes them in detail as follows: [Embodiment] The present invention will be described in conjunction with the accompanying drawings. The embodiments are explained in detail as follows. The organic electro-optical excitation device of the present invention includes at least one grain support.

200423428 五、發明說明(5) 座、一發光二極體晶粒以及一金屬接合層,而該金屬接合 層係位於發光二極體晶粒及晶粒承載座之間,用以固合該 發光二極體晶粒於上述晶粒承載座之固晶面上。上述之金 屬接合層可預先形成於上述晶粒承載座之固晶面上(如實 施例1所示)、可預先形成於上述發光二極體晶粒底部(如 實施例2所示)、可預先形成於上述晶粒承載座之固晶面上 及上述發光一極體晶粒底部(如實施例3所示)或是可預先 配置於上述晶粒承載座之固晶面上(如實施例4所示),再 以一自固合步驟使上述金屬接合層與其所接觸之部位固 合,以使上述發光二極體晶教固合於該晶粒承載座之固晶 面上。在本發明的敘述中,"配置"一詞係指放置一物於= 物之表面,不含固疋之意思,而"固合"一詞係指固定一 物於另一物之表面,以使其接合(若有需要,亦包含電性 之接合)。 實施例1 «月參考第2 a圖,其顯示本實施例之起始步驟,係形 一金屬接合層24於一晶粒承載座25之一固晶面22上y該 屬接合層24所使用之材質可擇自鍺金合金、鉛錫銀人^、 矽金合金'鈹金合金、錫金合金、金鍺鎳合金、鉛錫人 :、船銦合金、銦錫合金、錫銀合金、錫銀鉍合金、:銀 σ金及銦金屬所組成之族群中。金屬接合層24於晶粒 座25之方法係可使用濺鍍法、電子束蒸鍍法1蒸鍍法栽 化學氣相鑛膜法或;!:喷霧熱裂解法。所形成之金$接合&200423428 V. Description of the invention (5) seat, a light-emitting diode die and a metal bonding layer, and the metal bonding layer is located between the light-emitting diode die and the die-bearing seat to fix the light-emitting The diode crystal grains are on the solid crystal surface of the crystal grain bearing seat. The above-mentioned metal bonding layer may be formed in advance on the solid crystal surface of the above-mentioned die carrier (as shown in Embodiment 1), may be formed in advance on the bottom of the above-mentioned light-emitting diode die (as shown in Embodiment 2), It is formed in advance on the solid crystal surface of the above-mentioned crystal grain carrier and the bottom of the light-emitting monopolar crystal grain (as shown in Example 3), or it may be pre-configured on the solid crystal surface of the above-mentioned crystal grain carrier (as in the embodiment) (4), and then a self-consolidation step is used to fix the metal bonding layer and the part it touches, so that the light-emitting diode crystal is fixed on the solid crystal surface of the grain bearing seat. In the description of the present invention, the term " configuration " refers to placing an object on the surface of an object, without the meaning of solidification, and the term " solidified " refers to fixing one object to another. Surface to make them bonded (including electrical bonding if necessary). Example 1 «Monthly reference to Figure 2a, which shows the initial steps of this example. A metal bonding layer 24 is formed on a solid crystal surface 22 of a die carrier 25. This is used as the bonding layer 24. The material can be selected from germanium-gold alloy, lead-tin-silver alloy ^, silicon-silver alloy 'beryllium-gold alloy, tin-gold alloy, gold-germanium-nickel alloy, lead-tin alloy :, ship indium alloy, indium-tin alloy, tin-silver alloy, tin-silver Bismuth alloy, silver σ gold and indium metal. The method for bonding the metal bonding layer 24 to the die seat 25 can be a chemical vapor deposition method or a sputtering method, an electron beam evaporation method, a vapor deposition method, or a spray spray pyrolysis method. Gold $ Joint &

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24可視需要而 將一完成磊晶 合層2 4上。利 發光二極體晶 該自固合步驟 與之接觸的發 與其固合。其 熔點之溫度。 接觸部位固合 方式、電弧焊 而該金屬接合 該發光極體 疋具有任意 步驟之發光 用一自固合 粒21固合於 係包括提供 之圖案 二極體 步驟使 該晶粒 一特定 。接著, 晶粒21配 上述金屬 承載座25 溫度予金 光二極體晶粒21底部及晶粒 定溫度係指一高 中上述該特 而上述提供 的方法可為 接方式、雷 層2 4係以共 晶粒21於上 一特定 電阻加 射焊接 晶結合 述晶粒 溫度使金 熱焊接方 方式或高 方式或金 承載座25 請參考 置於上 接合層 之固晶 屬接合 承載座 於該金 屬接合 式、超 週波焊 屬融合 之固晶 第2b圖, 述金屬接 24將上述 面2 2上。 層2 4,使 固晶面2 2 屬接合層 層24與其 音波焊接 接方式。 方式固合 面2 2上。 實施例2 ^〇1 = >考第仏圖,係在一完成磊晶步驟之發光二極體晶 粒21其底部(基板侧)形成一金屬接合層24。該金屬接合層 24所使用之材質可擇自鍺金合金、鉛錫銀合金、矽金合曰 =、鈹金合金、錫金合金、金鍺鎳合金、鉛錫合金、ς銦 銦錫合金、錫銀合金、錫銀鉍合金、銦銀合金及銦 金屬所組成之族群中。金屬接合層24形成之方法係可使用 濺鍍法、電子束蒸鍍法、熱蒸鍍法、化學氣相鍍膜法或是 喷霧熱裂解法。所形成之金屬接合層24可視需要而定具有 任意之圖案。接著,請參考第3b圖,將上述具有金屬接合 層24之發光二極體晶粒21配置於一晶粒承載座25之固晶面24. An epitaxial bonding layer 24 can be formed as required. Facilitate the light-emitting diode crystal with which the self-consolidation step comes into contact. Its melting temperature. The contact part is fixed, arc welding, and the metal is bonded to the light emitting body. The light emitting body having any step is fixed with a self-fixing particle 21, which includes a patterned diode step provided to make the crystal grain specific. Next, the temperature of the crystal grain 21 with the temperature of the metal bearing seat 25 at the bottom of the gold photodiode crystal grain 21 and the constant temperature of the crystal grain refers to a method described above in a high school, and the method provided above may be a connection method. The die 21 is welded on a specific resistance plus laser welding method in combination with the above-mentioned die temperature to make gold heat welding in a square or high mode or a gold bearing seat 25. Please refer to the solid crystal joint bearing seat placed on the upper bonding layer in the metal joint type The super-frequency welding is a fused solid crystal Figure 2b, the metal connection 24 is on the above surface 2 2. Layer 24, so that the solid crystal surface 2 2 is a bonding layer, and the layer 24 is sonic welded to it. Way to fix on the surface 2 2. Example 2 ^ 〇1 = > According to the second figure, a metal bonding layer 24 is formed on the bottom (substrate side) of the light-emitting diode crystal 21 after the epitaxial step is completed. The material used for the metal bonding layer 24 can be selected from germanium-gold alloy, lead-tin-silver alloy, silicon alloy, beryllium-gold alloy, tin-gold alloy, gold-germanium-nickel alloy, lead-tin alloy, indium-indium-tin-tin alloy, and tin Silver alloy, tin-silver-bismuth alloy, indium-silver alloy and indium metal. The metal bonding layer 24 can be formed by a sputtering method, an electron beam evaporation method, a thermal evaporation method, a chemical vapor deposition method, or a spray thermal cracking method. The formed metal bonding layer 24 may have an arbitrary pattern as required. Next, referring to FIG. 3b, the above-mentioned light-emitting diode crystal grains 21 having the metal bonding layer 24 are arranged on the solid crystal surface of a crystal grain carrier 25

200423428200423428

22上,使上述金屬接合層24與晶粒承載座25之固晶面相 鄰。利用一自固合步驟使上述金屬接合層24將上述發光二 極體晶粒21固合於該晶粒承載座25之固晶面22上。該自固 〇步驟係包括提供一特定溫度予金屬接合層,使與之接觸 的發光二極體晶粒21底部及晶粒承載座固晶面22與其固 =。其中上述該特定溫度係指一高於該金屬接合層熔點之 /里度。而上述提供一特定溫度使金屬接合層24與其接觸部 位固合的方法可為電阻加熱焊接方式、超音 :弧焊接方式、雷射焊接方式或高週波焊;==金 接〇層24係以共晶結合方式或金屬融合方式固合該發光 二極體晶粒21於上述晶粒承載座25之固晶面22上。 實施例3 〇 、明參考第4a圖,係形成一第一金屬接合層2 4a於一晶 粒承載座25之一固晶面22上。該金屬接合層所使用之材賢 可擇自鍺金合金、鉛錫銀合金、矽金合金、鈹金合金、錫 金口金、金鍺鎳合金、鉛錫合金、鉛銦合金、銦錫合金、 錫銀合金、錫銀鉍合金、銦銀合金及銦金屬所組成之族群 中金屬接合層形成於晶粒承載座25之方法係可使用濺鍍 法、電子束蒸鍍法、熱蒸鍍法、化學氣相鍍膜法或是喷霧 熱裂解法。所形成之金屬接合層具有一第一圖形,可視需 要而為任意之圖案。在一完成磊晶步驟之發光二極體晶粒 21其底部(基板側)形成一第二金屬接合層26b。該金屬接 合層所使用之材質可擇自鍺金合金、鉛錫銀合金、矽金合On 22, the metal bonding layer 24 and the solid crystal plane of the die carrier 25 are adjacent to each other. The metal bonding layer 24 is used to fix the above-mentioned light-emitting diode crystal grains 21 on the solid crystal surface 22 of the crystal grain carrier 25 by a self-adhesion step. The self-solidification step includes providing a specific temperature to the metal bonding layer so that the bottom of the light-emitting diode crystal grain 21 and the crystal grain bearing seat solid crystal surface 22 which are in contact therewith are fixed. The specific temperature mentioned above refers to a temperature / degree that is higher than the melting point of the metal bonding layer. The above-mentioned method of providing a specific temperature for the metal bonding layer 24 to be fixed to its contact portion may be resistance heating welding, supersonic: arc welding, laser welding, or high frequency welding; == 金 接 〇 Layer 24 is based on The eutectic bonding method or the metal fusion method is used to fix the light-emitting diode crystal grains 21 on the solid crystal surface 22 of the crystal grain bearing base 25. Embodiment 30, referring to Fig. 4a, a first metal bonding layer 24a is formed on a solid crystal surface 22 of a crystal carrier 25. The material used for the metal bonding layer can be selected from germanium-gold alloy, lead-tin-silver alloy, silicon-gold alloy, beryllium-gold alloy, tin-gold alloy, gold-germanium-nickel alloy, lead-tin alloy, lead-indium alloy, indium-tin alloy, tin The method for forming a metal bonding layer in the group consisting of a silver alloy, a tin-silver-bismuth alloy, an indium-silver alloy, and an indium metal on the crystal grain carrier 25 can be a sputtering method, an electron beam evaporation method, a thermal evaporation method, a chemical Vapor coating or spray pyrolysis. The formed metal bonding layer has a first pattern and can be any pattern as required. A second metal bonding layer 26b is formed on the bottom (substrate side) of the light-emitting diode die 21 after the epitaxial step is completed. The material used for the metal bonding layer can be selected from germanium-gold alloy, lead-tin-silver alloy, and silicon alloy

•>11 200423428 五、發明說明(8) 金、鈹金合金、錫金合金、金鍺鎳合金、鉛錫合金、鉛銦 合金、銦錫合金、錫銀合金、錫銀鉍合金、銦銀合金及銦 金屬所組成之族群中。金屬接合層形成之方法係可使用濺 鍵法、電子束蒸鍍法、熱蒸鍍法、化學氣相鍍膜法或是喷 霧熱裂解法。㈣成之金屬接合層具有一第二圖形,可視 需要而為任忍之圖案。而上述第一圖形與第二圖形可互成 映像或不互成映像。請參將上述發光二極體晶粒2丨配置於 接合層上,使上述第一金屬接合層與發光二 4b圖:用白部之第二金屬接合層相鄰。接著,請參考第 屬Λ合步驟, 曰教/l ^ ώ /構成金屬接合層24 ,使上述發光二極體 上。該自固人牛接合層固合於該晶粒承載座25之固晶面22 24,:與之括提供一特定溫度予金屬接合層 晶面22與其Π的;底部及晶粒承載座固 接合層24嫁點之溫度。而上述提金屬 層24與其接觸部位固合 度使金屬接合 音波焊接方式、電弧焊接= 超 方式固合該發光二極體晶粒2 或金屬融合 面22上。 %上逆日日粒承載座25之固晶 實施例4 晶粒承载座25,其上定義有 請參考第5a圖,提供 0691 -9377TW(N1); A0C-02.15^;pH〇ELIp. ptd 第11頁 200423428 五、發明說明(9) 固晶面22 ’配置一金屬物質層26於上述固晶面22上做為金 屬接合層’此作為金屬接合層之金屬物質層26的形態可以 為焊條、焊膏、焊墊、片狀、粒狀或粉末狀,不過此處為 了簡化圖式,僅以一平整層表示之。該金屬物質層26所使 用之材質可擇自鍺金合金、鉛錫銀合金、矽金合金、鈹金 合金、錫金合金 '金鍺鎳合金、鉛錫合金、鉛銦合金、銦 錫合金、錫銀合金、錫銀叙合金、銦銀合金及銦金屬所組 成之族群中。接著,請參考第51)圖,配置一具有複數磊晶 半導艘層之發光二極體晶粒21於上述之金屬物質層26上, 以一自固合步驟使上述金屬 上述發光二極體晶粒21及該 光>一極體晶粒21固合於該晶 自固合步驟係包括提供一特 之接觸的發光二極體晶粒21 其固合。其中上述該特定溫 溶點之溫度。而上述提供一 接觸部位固合的方法可為電 方式、電弧焊接方式、雷射 而該金屬物質層26係以共晶 該發光二極體晶粒21於上述 綜上所述,本發明之發 屬接合層將發光二極體晶粒 上,進而使發光二極體晶粒 物質層26作為金屬接合層24與 晶粒承載座2 5固合,使上述發 粒承載座25之固晶面22上。該 定溫度予金屬物質層2 6,使與 底部及晶粒承載座固晶面2 2與 度係指一高於該金屬物質層2 6 特定溫度使金屬物質層26與其 阻加熱焊接方式、超音波焊接 焊接方式或高週波焊接方式。 結合方式或金屬融合方式固合 晶粒承載座2 5之固晶面2 2上。 光二極體及其製造方法係以金 111合於該晶粒承載座之固晶面 固合於晶粒承載座。藉由作為• > 11 200423428 V. Description of the invention (8) Gold, beryllium-gold alloy, tin-gold alloy, gold-germanium-nickel alloy, lead-tin alloy, lead-indium alloy, indium-tin alloy, tin-silver alloy, tin-silver-bismuth alloy, indium-silver alloy And indium metal. The metal bonding layer can be formed by a sputtering method, an electron beam evaporation method, a thermal evaporation method, a chemical vapor deposition method, or a spray pyrolysis method. The formed metal bonding layer has a second pattern, which can be a tolerable pattern as needed. The first graphics and the second graphics may or may not be mutually mapped. Please refer to the above-mentioned light-emitting diode grain 2 丨 arranged on the bonding layer, so that the above-mentioned first metal bonding layer and the light-emitting diode 4b: the second metal bonding layer adjacent to the white part. Next, please refer to the step of combining the metal oxide layer and the metal bonding layer 24 to form the light emitting diode. The self-fixing human cattle bonding layer is fixed on the solid crystal surface 22 24 of the grain bearing seat 25, and provides a specific temperature for the metal bonding layer crystal face 22 and its Π; the bottom and the grain bearing seat are solidly bonded Layer 24 is the temperature of the point of marriage. The degree of consolidation of the metal-lifting layer 24 and its contact portion enables the metal to be bonded to the light-emitting diode crystal grain 2 or the metal fusion surface 22 by the sonic welding method or the arc welding = super method. Example 4 of the solid crystal bearing seat 25 of the sun-resistant sun grain bearing seat 25. The grain bearing seat 25 is defined thereon, please refer to FIG. 5a, providing 0691-9377TW (N1); A0C-02.15 ^; pH〇ELIp. Ptd Page 11 200423428 V. Description of the invention (9) Solid crystal surface 22 'A metal material layer 26 is arranged on the solid crystal surface 22 as a metal bonding layer' The metal material layer 26 as a metal bonding layer may be in the form of a welding rod, Solder paste, pads, flakes, granules, or powders, but to simplify the diagram here, only a flat layer is used. The material used for the metal substance layer 26 can be selected from germanium-gold alloy, lead-tin-silver alloy, silicon-gold alloy, beryllium-gold alloy, tin-gold alloy, gold-germanium-nickel alloy, lead-tin alloy, lead-indium alloy, indium-tin alloy, tin Silver alloy, tin-silver alloy, indium-silver alloy and indium metal. Next, please refer to FIG. 51), arrange a light-emitting diode crystal grain 21 having a plurality of epitaxial semiconductor layers on the above-mentioned metal substance layer 26, and make the above-mentioned metal and the above-mentioned light-emitting diode in a self-consolidation step. The crystal grains 21 and the light > polar crystal grains 21 are fixed to the crystal. The self-consolidation step includes providing a special contact with the light emitting diode crystal grains 21 to be consolidated. The temperature of the specific melting point mentioned above. The above-mentioned method for providing a contact site fixation can be electric, arc welding, laser, and the metal material layer 26 is eutectic, and the light-emitting diode crystal grains 21 are as described above. The metal bonding layer fixes the light-emitting diode crystal grains, and further makes the light-emitting diode crystal material layer 26 as the metal bonding layer 24 and the crystal grain carrier 25, so that the crystal grain surface 22 of the hair grain carrier 25 is fixed. on. The predetermined temperature is predetermined for the metal material layer 26, and the degree of contact with the bottom and the crystal bearing surface of the grain bearing seat 22 is a temperature higher than that of the metal material layer 26. The specific temperature makes the metal material layer 26 and its resistance to heat welding. Sonic welding or high frequency welding. Bonded by means of bonding or metal fusion. The photodiode and its manufacturing method are fixed on the grain bearing base with gold 111 bonded to the solid crystal plane of the grain bearing base. By being

200423428 五、發明說明(ίο) 金屬接合層之金屬物質之高熱導係數,當該發光二極體電 時,.能將二極體產生之作用熱時,能:速將熱 等Μ至曰曰粒承載座,跟習之利用樹脂或銀膠固合二極體晶 粒之技術相比,大幅的改善二極體之散熱效率, ^ !因熱傳導效率差,導致改變元件發光特性、晶粒溫;過 尚及二極體壽命較短等問題。200423428 V. Description of the invention (ίο) The high thermal conductivity of the metal substance of the metal bonding layer, when the light-emitting diode is electrically charged, when the heat generated by the diode can be used, it can: Compared with Xi's technology of using resin or silver glue to fix the diode grains, the particle carrier greatly improves the heat dissipation efficiency of the diodes. Due to the poor heat conduction efficiency, the element's light-emitting characteristics and grain temperature are changed. ; Excessive problems and short diode life.

本發明雖以較佳實施例揭露如上,然其並非用以限定 本發明的範圍,任何熟習此項技藝者,在不脫離本發明之 精神和範圍内,當可做各種的更動與潤飾,因此本發 保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention is disclosed as above with a preferred embodiment, it is not intended to limit the scope of the present invention. Any person skilled in the art can make various modifications and retouches without departing from the spirit and scope of the present invention. The protection scope of this issue shall be determined by the scope of the attached patent application.

200423428 圖式簡單說明 第1圖係顯示習知之發光二極體之結構剖面圖。 第2a圖及第2b圖係顯示根據本發明之發光二極體之一 較佳實施例之流程圖。 第3a圖及第3b圖係顯示根據本發明之發光二極體之另 一較佳實施例之流程圖。 第4a圖及第4b圖係顯示根據本發明之發光二極體之另 一較佳實施例之流程圖。 第5a圖及第5b圖係顯示根據本發明之發光二極體之另 一較佳實施例之流程圖。 〇 【符號說明】 1 〇〜發光二極體; 11〜晶粒; 1 2〜導線; 1 3〜封裝材料; 14〜散熱承座; 1 5〜架線架; 21〜晶粒, 22〜固晶面;200423428 Brief Description of Drawings Figure 1 is a sectional view showing the structure of a conventional light emitting diode. Figures 2a and 2b are flowcharts showing one preferred embodiment of a light emitting diode according to the present invention. Figures 3a and 3b are flowcharts showing another preferred embodiment of a light emitting diode according to the present invention. Figures 4a and 4b are flowcharts showing another preferred embodiment of the light emitting diode according to the present invention. Figures 5a and 5b are flowcharts showing another preferred embodiment of a light emitting diode according to the present invention. 〇 [Description of symbols] 1 〇 ~ Light-emitting diode; 11 ~ Crystal; 12 ~ Wire; 13 ~ Packaging material; 14 ~ Heat sink; 15 ~ Wire frame; 21 ~ Crystal, 22 ~ Solid crystal surface;

24〜金屬接合層; U 24a〜第一金屬接合層; 24〜第二金屬接合層; 2 5〜晶粒承載座,以及 26〜金屬物質層。24 ~ metal bonding layer; U 24a ~ first metal bonding layer; 24 ~ second metal bonding layer; 2 5 ~ grain bearing seat, and 26 ~ metal substance layer.

0691-9377TWF(Nl);AOC-02-15-,DV;PHOELIP.ptd 第14頁0691-9377TWF (Nl); AOC-02-15-, DV; PHOELIP.ptd Page 14

Claims (1)

200423428 六、申請專利範圍 1· 一種發光二極體,至少包括: 晶粒承載座,該晶粒承載座係具有一固晶面於其 一發光二極體晶粒,該晶粒具有複數蟲晶半導體層, 當通入電流之後產生光;以及 一金屬接合層,用以固合該發光二極體晶粒於上述晶 粒承載座之固晶面上。 2·如申請專利範圍第1項所述之發光二極體,其中該 金屬接合層係以共晶結合方式固合該發光二極體晶粒於上 述晶粒承載座之固晶面上。 3·如申請專利範圍第1項所述之發光二極體,其中該 金屬接合層係以金屬融合方式固合該發光二極體晶粒於上 述晶粒承載座之固晶面上。 4·如申請專利範圍第1項所述之發光二極體,其中上 述金屬接合層係擇自鍺金合金、鉛錫銀合金、矽金合金、 鈹金合金、錫金合金、金鍺鎳合金、鉛錫合金、鉛銦合 金、姻錫合金、錫銀合金、錫銀鉍合金、銦銀合金及銦金 屬所組成之族群中。 • 5·如申請專利範圍第1項所述之發光二極體,其中上 述發光二極體晶粒係具有一第一型電極及一第二型電極形 成於上述晶粒之同一側且高低不等之表面上,以一第一導 線連接上述晶粒之第一型電極至上述晶粒承載座,使其電 性導通,且以一第二導線,連接上述晶粒之第二型電極至 一導線架,並使其電性導通。200423428 6. Scope of patent application 1. A light-emitting diode, at least including: a grain bearing base, the grain bearing base has a solid crystal plane on one of the light-emitting diode grains, the grains have a plurality of insect crystals The semiconductor layer generates light when a current is applied; and a metal bonding layer for fixing the light-emitting diode crystal grains on the solid crystal surface of the crystal grain bearing seat. 2. The light-emitting diode according to item 1 of the scope of the patent application, wherein the metal bonding layer fixes the light-emitting diode crystal grains on the solid crystal surface of the crystal grain bearing base by eutectic bonding. 3. The light-emitting diode according to item 1 in the scope of the patent application, wherein the metal bonding layer fixes the light-emitting diode crystal grains on the solid crystal surface of the crystal grain bearing base in a metal fusion manner. 4. The light-emitting diode according to item 1 in the scope of the patent application, wherein the metal bonding layer is selected from germanium-gold alloy, lead-tin-silver alloy, silicon-gold alloy, beryllium-gold alloy, tin-gold alloy, gold-germanium-nickel alloy, Lead-tin alloy, lead-indium alloy, marriage tin alloy, tin-silver alloy, tin-silver-bismuth alloy, indium-silver alloy, and indium metal. • 5. The light-emitting diode according to item 1 of the scope of the patent application, wherein the light-emitting diode grains have a first-type electrode and a second-type electrode formed on the same side of the crystal grains, and the height is not high or low. On the surface, a first wire is used to connect the first-type electrode of the die to the die carrier to make it electrically conductive, and a second wire is used to connect the second-type electrode of the die to a Lead frame and make it electrically conductive. 200423428 六、申請專利範圍 6丄如申請專利範圍第μ所述之發光二 極體晶粒係具有一第一型電極及一其中上 id:::於上述晶粒承載座之固晶面上並以上述 電極至—導線架,並使其電性導通。 之第一型 7. —種發光二極體製造方法,至少包括提供—曰 曰面上其ΐΐίί一固晶面’形成一金屬接合層於:述固 :上述固曰數遙晶半導體層之發光二極體晶粒 於上迷固日日面上之金屬接合層上,以一自 不 金屬接合層將上述發光_&_ 使上述 固晶面上。 發先一極體曰曰粒固合於該晶粒承載座之 8甘$申請專利範圍第7項所述之發光二極體製造方 til上述金屬接合層係擇自鍺金合金、鉛錫銀合金 鈹金合金、錫金合金、金鍺鎳合金、鉛錫人 金、鉛銦《金、銦錫合金、錫銀合金 '錫銀鉍合 合金及銦金屬所組成之族群中。 銦銀 法Λ:!ϊί利範圍第7項所述之發光二極體製造方 展技傾 〇步驟係提供一特定溫度使與上述金屬接人 ϊί:Γ‘ί?極體晶粒底部、晶粒承載座固晶面與心 本^由如又請專利範圍第9項所述之發光二極體製造方 ί 2:”:合步驟中提供一特定溫度使金屬接合層* 其接觸部位固合的方法係為電阻加熱焊接方式、超音;焊 第16頁 0691 -9377TWF(N1) ;A0C-02- 15-T^ ;PHOELIP. ptd 200423428 六、申請專利範圍 雷射焊接方式或高週波焊接方 接方式、電弧焊接方式、 式0 〇丨·如申請專利範圍第7項所述之發光二極體製造方 法’其中該金屬接合層係以共晶結合方式固合該發光二極 體晶粒於上述晶粒承載座之固晶面上。 、1 2 ·如申請專利範圍第7項所述之發光二極體製造方 法’其中該金屬接合層係以金屬融合方式固合該發光二極 體aa粒於上述晶粒承載座之固晶面上。200423428 6. Application patent scope 6: The light-emitting diode grains described in the patent application scope μ have a first-type electrode and an upper id ::: Take the electrode to the lead frame and make it electrically conductive. The first type 7. — A method for manufacturing a light emitting diode, at least including providing — forming a metal bonding layer on the surface of the surface, forming a metal bonding layer on the surface: the light emission of the above-mentioned solid-state telecrystalline semiconductor layer The diode crystal grains are on the metal bonding layer on the surface of the solid surface, and the above-mentioned light emission is made by a non-metal bonding layer to make the solid crystal surface. The first monolithic body is said to be fixed to the crystal bearing base of 8g $. The manufacturing method of the light-emitting diode described in item 7 of the patent scope. The above metal bonding layer is selected from germanium-gold alloy, lead-tin-silver Alloy beryllium gold alloy, tin-gold alloy, gold-germanium-nickel alloy, lead-tin-gold, lead-indium "gold, indium-tin alloy, tin-silver alloy 'tin-silver-bismuth alloy and indium metal. The indium-silver method Λ :! ϊ The range of the light-emitting diode manufacturing method described in item 7 is to provide a specific temperature to make contact with the above-mentioned metal: The solid crystal surface and the core of the particle bearing seat are manufactured by the light emitting diode as described in the 9th aspect of the patent application: 2: ": a specific temperature is provided in the combining step to make the metal bonding layer * and the contact part is fixed The method is resistance heating welding method, supersonic; welding on page 16 0691 -9377TWF (N1); A0C-02- 15-T ^; PHOELIP. Ptd 200423428 6. Application scope of patent laser welding method or high frequency welding method Connection method, arc welding method, formula 0 〇 · The manufacturing method of the light-emitting diode as described in item 7 of the scope of the patent application, wherein the metal bonding layer is a eutectic bonding method to fix the light-emitting diode grains to The solid crystal surface of the above-mentioned crystal chip bearing seat. 1, 2 · The light-emitting diode manufacturing method as described in item 7 of the scope of the patent application, wherein the metal bonding layer is a metal fusion method to fix the light-emitting diode aa The grains are on the solid crystal surface of the above-mentioned crystal grain carrier. 13· —種發光二極體製造方法,至少包括提供一具有 複數兹晶半導體層之發光二極體晶粒,在該發光二極體晶 粒底部形成一金屬接合層,配置該發光二極體晶粒於一晶 粒承載座之固晶面上,使上述金屬接合層與晶粒承載座之 一固晶面接觸’以一自固合步驟使上述金屬接合層將上述 發光二極體晶粒固合於該晶粒承載座之固晶面上。 14·如申請專利範圍第13項所述之發光二極體製造方 法’其中上述金屬接合層係擇自鍺金合金、鉛錫銀合金、 石夕金合金、皱金合金、錫金合金、金鍺鎳合金、錯錫合 金、鉛銦合金、銦錫合金、錫銀合金、錫銀鉍合金、銦銀 合金及銦金屬所組成之族群中。13. · A method for manufacturing a light-emitting diode, at least including providing a light-emitting diode crystal having a plurality of crystalline semiconductor layers, forming a metal bonding layer on the bottom of the light-emitting diode crystal, and disposing the light-emitting diode. The crystal grains are on the solid crystal surface of a crystal grain bearing base, and the metal bonding layer is brought into contact with one solid crystal surface of the crystal grain bearing base. In a self-consolidation step, the metal bonding layer makes the light emitting diode crystal grains It is fixed on the solid crystal surface of the die carrier. 14. The method of manufacturing a light-emitting diode according to item 13 of the scope of the patent application, wherein the metal bonding layer is selected from the group consisting of germanium-gold alloy, lead-tin-silver alloy, shixi gold alloy, corrugated gold alloy, tin-gold alloy, and gold-germanium Nickel alloy, tin alloy, lead indium alloy, indium tin alloy, tin silver alloy, tin silver bismuth alloy, indium silver alloy and indium metal. 15·如申請專利範圍第13項所述之發光二極體製造方 法,其中自固合步驟係提供一特定溫度使與上述金屬接合 層接觸之發光二極體晶粒底部、晶粒承載座固晶面與該金 屬接合層固合。 16·如申請專利範圍第15項所述之發光二極體製造方15. The method for manufacturing a light-emitting diode according to item 13 of the scope of the patent application, wherein the self-consolidation step provides a specific temperature to make the bottom of the light-emitting diode crystal grains contacting the metal bonding layer and the die carrier The crystal plane is bonded to the metal bonding layer. 16. The manufacturer of the light-emitting diode as described in item 15 of the scope of patent application O691-9377TWF(Nl);AOC-02-15-TlV;PHOELIP.ptd 第17頁 200423428O691-9377TWF (Nl); AOC-02-15-TlV; PHOELIP.ptd page 17 200423428 法,其中在自固合 其接觸部位固合的 接方式、電弧焊接 式。 步驟中提供一特定 方法係為電阻加熱 方式、雷射焊接方 溫度使金屬接合層與 焊接方式、超音波焊 式或高週波焊接方 、、1 7·如申請專利範圍第1 3項所述之發光二極體製造方 法’其中該金屬接合層係以共晶結合方式固合該發光二極 體阳粒於上述晶粒承載座之固晶面上。 、18·如申請專利範圍第13項所述之發光二極體製造方 法’其中該金屬接合層係以金屬融合方式固合該發光二極 體晶粒於上述晶粒承載座之固晶面上。 19, 一種發光二極體製造方法,至少包括提供一晶粒 承載座,其上定義有一固晶面,配置一金屬物質做為金屬 接合層於上述固晶面上,配置一具有複數磊晶半導體層之 發光二極體晶粒於上述之金屬接合層上,以一自固合步驟 使上述金屬接合層與上述發光二極體晶粒及該晶粒承載座 固合,使上述發光二極體晶粒固合於該晶粒承載座之固晶 面上。 20 ·如申請專利範圍第丨9項所述之發光二極體製造方 法,其中上述金屬接合層係擇自鍺金合金、鉛錫銀合金、 矽金合金、鈹金合金、錫金合金、金鍺鎳合金、鉛錫合 金、錯銦合金、銦錫合金、錫銀合金、錫銀银合金、銦銀 合金及銦金屬所組成之族群中。 21·如申請專利範圍第19項所述之發光二極體製造方 法,其中自固合步驟係提供一特定溫度使與上述金屬接合The method includes the method of self-fixation and the contact position of the contact point, and the arc welding type. A specific method provided in the step is the resistance heating method, the temperature of the laser welding side to make the metal bonding layer and the welding method, the ultrasonic welding type or the high-frequency welding method, and 17 as described in item 13 of the scope of patent application. A method for manufacturing a light emitting diode ', wherein the metal bonding layer is used to fix the light emitting diode male particles on a solid crystal surface of the above-mentioned crystal grain carrier by eutectic bonding. 18. The method for manufacturing a light emitting diode as described in item 13 of the scope of the patent application, wherein the metal bonding layer is a metal fusion method for fixing the light emitting diode crystal grains on the solid crystal surface of the crystal grain bearing seat. . 19. A method for manufacturing a light-emitting diode, comprising at least providing a die carrier, a solid crystal surface is defined thereon, a metal substance is disposed as a metal bonding layer on the solid crystal surface, and a plurality of epitaxial semiconductors is disposed. Layer of light-emitting diode grains on the above-mentioned metal bonding layer, the metal-bonding layer and the light-emitting diode crystal and the grain bearing seat are fixed by a self-consolidation step, so that the light-emitting diode is The crystal grains are fixed on the crystal grain surface of the crystal grain bearing seat. 20 · The method for manufacturing a light emitting diode according to item 9 of the scope of the patent application, wherein the metal bonding layer is selected from the group consisting of germanium-gold alloy, lead-tin-silver alloy, silicon-gold alloy, beryllium-gold alloy, tin-gold alloy, and gold-germanium Nickel alloy, lead-tin alloy, indium alloy, indium-tin alloy, tin-silver alloy, tin-silver alloy, indium-silver alloy, and indium metal. 21. The light-emitting diode manufacturing method according to item 19 of the scope of application for a patent, wherein the self-consolidation step provides a specific temperature for bonding with the above metal 0691-9377™F(Nl);AOC.〇2-15-T1IV;PHOELIP.ptd 第 18 貢 200423428 六、申請專利範圍 f接觸之發光二極體晶粒底部、晶粒承載座固晶面與該金 屬接合層固合。 、22·如申請專利範圍第21項所述之發光二極體製造方 $ ,其中在自固合步驟中提供一特定溫度使金屬接合層與 八接觸部位固合的方法係為電阻加熱焊接方式、超音波焊 接方式、電弧焊接方式、雷射焊接方式或高週波焊接方 式。 、23·如申請專利範圍第19項所述之發光二極體製造方 法’其中該金屬接合層係以共晶結合方式固合該發光二極 體aa粒於上述晶粒承載座之固晶面上。 1 、24·如申請專利範圍第19項所述之發光二極體製造方 法’其中該金屬接合層係以金屬融合方式固合該發光二極 體晶粒於上述晶粒承載座之固晶面上。 25· —種發光二極體製造方法,至少包括提供一晶粒 承載座’其上定義有一固晶面,形成一第一金屬接合層於 上述固晶面上,且在一具有複數磊晶半導體層之發光二極 體晶粒之底部形成一第二金屬接合層,將上述晶粒配置於 上述晶粒承載座之固晶面上,使第二金屬接合層與第一金 屬接合層接觸,以一自固合步驟使上述第一金屬與第二金 屬接合層固合,以使上述發光二極體晶粒固合於該晶粒承 載座之固晶面h。 26·如申請專利範圍第25項所述之發光二極體製造方 法’其中上述金屬接合層係擇自鍺金合金、鉛錫銀合金、 矽金合金、鈹金合金、錫金合金、金鍺鎳合金、鉛錫合0691-9377 ™ F (Nl); AOC.〇2-15-T1IV; PHOELIP.ptd No. 18 Tribute 200423428 Six, the scope of the patent application f contacts the bottom of the light-emitting diode crystal grains, the crystal bearing surface of the grain bearing seat and the The metal bonding layer is fixed. 22.The light emitting diode manufacturer as described in item 21 of the scope of patent application, wherein the method of providing a specific temperature in the self-consolidation step to consolidate the metal bonding layer with the eight contact parts is the resistance heating welding method. , Ultrasonic welding, arc welding, laser welding or high frequency welding. 23. The method for manufacturing a light emitting diode according to item 19 in the scope of the patent application, wherein the metal bonding layer is a eutectic bonding method for fixing the light emitting diode aa particles on the solid crystal surface of the above-mentioned crystal grain bearing seat. on. 1. 24. The method for manufacturing a light emitting diode as described in item 19 of the scope of the patent application, wherein the metal bonding layer is a metal fusion method for bonding the light emitting diode crystal grains to the solid crystal surface of the crystal grain bearing seat. on. 25 · —A method for manufacturing a light-emitting diode, which at least includes providing a die-bearing base with a solid crystal surface defined thereon, forming a first metal bonding layer on the solid crystal surface, and a semiconductor having a plurality of epitaxial semiconductors. A second metal bonding layer is formed on the bottom of the light-emitting diode grains of the layer. The above-mentioned crystal grains are arranged on the solid crystal surface of the above-mentioned grain bearing base, and the second metal bonding layer is in contact with the first metal bonding layer. A self-consolidation step fixes the first metal and the second metal bonding layer to fix the light-emitting diode crystal grains to the solid crystal plane h of the crystal grain bearing seat. 26. The method for manufacturing a light-emitting diode according to item 25 of the scope of the patent application, wherein the metal bonding layer is selected from the group consisting of germanium-gold alloy, lead-tin-silver alloy, silicon-gold alloy, beryllium-gold alloy, tin-gold alloy, and gold-germanium-nickel Alloy, lead-tin 0691.9377TWF(Nl);AOC-02-15-TW;PHOELIP.ptd 第19頁 200423428 六、申請專利範圍 金、鉛銦合金、銦錫合金、錫銀合金、錫銀鉍合金、銦銀 合金及銦金屬所組成之族群中。 又 27·如申請專利範圍第25項所述之發光二極體製造方 法,其中自固合步驟係提供一特定溫度使上述第一金 合層與上述第二金屬接合層固合。 28·如申請專利範圍第27項所述之發光二極體製造方 法’其中在自固合步驟中提供一特定溫度使金屬接合層與 其接觸部位固合的方法係為電阻加熱焊接方式、超音波焊 接方式、電弧焊接方式、雷射焊接方式或高週波焊接方 式。 29 ·如申請專利範圍第2 5項所述之發光二極體製造方 法’其中該金屬接合層係以共晶結合方式固合該發光二極 體晶粒於上述晶粒承載座之固晶面上。 、30 ·如申請專利範圍第2 5項所述之發光二極體製造方 法’其中該金屬接合層係以金屬融合方式固合該發光二極 體晶粒於上述晶粒承載座之固晶面上。0691.9377TWF (Nl); AOC-02-15-TW; PHOELIP.ptd Page 19 200423428 VI.Applicable patent scope Gold, lead indium alloy, indium tin alloy, tin silver alloy, tin silver bismuth alloy, indium silver alloy and indium In a group of metals. 27. The method of manufacturing a light-emitting diode according to item 25 of the scope of the patent application, wherein the self-consolidation step provides a specific temperature to fix the first metal layer and the second metal bonding layer. 28. The method for manufacturing a light-emitting diode according to item 27 in the scope of the patent application, wherein the method of providing a specific temperature in the self-consolidation step to fix the metal bonding layer and its contact portion is a resistance heating welding method, an ultrasonic wave Welding method, arc welding method, laser welding method or high frequency welding method. 29. The method for manufacturing a light-emitting diode according to item 25 of the scope of the application for patent, wherein the metal bonding layer is a eutectic bonding method for fixing the light-emitting diode crystal grains on the solid crystal surface of the crystal grain bearing seat. on. 30. The method for manufacturing a light emitting diode as described in item 25 of the scope of the patent application, wherein the metal bonding layer is a metal fusion method for fixing the light emitting diode crystal grains to the solid crystal plane of the crystal grain bearing seat. on. 0691 -9377TWF(N1) ;A0C-02- 15-TW;PHOELIP. ptd 第20頁0691 -9377TWF (N1); A0C-02- 15-TW; PHOELIP. Ptd page 20
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103636009A (en) * 2011-08-02 2014-03-12 东芝技术中心有限公司 Non-reactive barrier metal for eutectic bonding process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103636009A (en) * 2011-08-02 2014-03-12 东芝技术中心有限公司 Non-reactive barrier metal for eutectic bonding process
US9343641B2 (en) 2011-08-02 2016-05-17 Manutius Ip, Inc. Non-reactive barrier metal for eutectic bonding process

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