TW200422704A - Micro-dispenser and method for manufacturing a color filter using the same - Google Patents
Micro-dispenser and method for manufacturing a color filter using the same Download PDFInfo
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- TW200422704A TW200422704A TW092134293A TW92134293A TW200422704A TW 200422704 A TW200422704 A TW 200422704A TW 092134293 A TW092134293 A TW 092134293A TW 92134293 A TW92134293 A TW 92134293A TW 200422704 A TW200422704 A TW 200422704A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Filters (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
200422704200422704
【發明所屬之技術領域】 本發明係有關一種用來將任何材料排放到一種基 舆其應用方法的裝置,更明確地說是一種微分配器與 該微分配器製造濾色器的方法。 &用 【先前技術】 一般而言,顯示裝置如液晶顯示裝置或以裝置是用於 電子器材的顯示單元,例如行動電話、筆記型電滕等。^ 時’在平面顯示裝置上可執行全彩顯示。 δ 液晶顯示裝置上的全彩顯示是藉由受到液晶層調控 光線透過濾色器來執行。濾色器是藉由排列由玻璃、臘 等所構成的基質表面上的紅、綠、藍色彩模式來形成。=孀 裝置上的全彩顯示是藉由排列由玻璃、塑膠等所構成的 質表面上的紅、綠、藍EL冷光層(色彩模式)來執行, EL冷光層保持在一對電極之間,以便形成像素,並按照 一像素控制施加到電極上的電壓,以便讓像素顯 权、 的色彩。 山艰要 眾所週知的是,液晶顯示裝置或虬裝置内的濾色器 傳統紅、綠、藍色彩模式是使用一種照相平板印刷法 j 種利用陰影罩幕的真空沉澱法來製造者。然而,照相平: 印刷法或利用陰影罩幕的真空沉澱法在製程方面極為繁複 ,並且消耗大量紅、綠、藍色彩材料,造成製造成本声加 的問題^ 曰 【發明内容】 本發明的目的係提供一種微分配器,其能在基本上解 2004227 〇4 五、發明說明(2) 決上述依據照相平板印刷法或利用陰影罩幕的真空沉澱法 形成色彩模式的問題。 同時,本發明的另一目的提供一種使用該微分配器製 造遽色器的方法。 為了達成上述目的,本發明的微分配器提供一個溶液 儲存槽,位於一個主體内,而溶液則儲存在裡面;一個微 噴嘴,位於該溶液儲存槽的下方,用來排放該溶液儲存槽 内的溶液;一個振動板,位於該溶液儲存槽的上方;一個 壓力促動器,位於該振動板的上方,其產生回應電壓印記 的振動,·及一個應變儀,位於該振動板與該壓力促動器之 間,該應變儀用來測量來自該壓力促動器的振動應力,以· 便控制該溶液儲存槽内的溶液之排放量。 微喷嘴可包含數個小洞,其不排放低於預定應力之溶 液。微喷嘴可以是圓形、矩形或多邊形。紅色材料溶液、 綠色材料溶液或藍色材料溶液可儲存在溶液儲存槽内。 為了達成本發明的另一目的,本發明提供了一種製造 濾色器的方法,個別在一種基質的第一行上形成數個紅色 模式、綠色模式與藍色模式,該基質使用一個頭部,該頭 部包含數個微分配器’用來個別排放行向的紅色材料溶液 、綠色材料溶液與藍色材料溶液;並藉由移動該頭部在行· 向或列向的預定寬度’在基質第二到第η行(η是一個整數 )上形成數個紅色模式、綠色模式與藍色模式。 基質可由玻璃或塑膠構成。紅色材料溶液、綠色材料 溶液與藍色材料溶液可分別透過位於頭部的紅色材料溶液[Technical field to which the invention belongs] The present invention relates to a device for discharging any material to a method for applying the same, and more specifically, to a micro-dispenser and a method for manufacturing a color filter using the micro-dispenser. & Use [Prior art] Generally, a display device such as a liquid crystal display device or a device is a display unit for an electronic device, such as a mobile phone, a notebook computer, and the like. ^ ’Can perform full-color display on a flat display device. δ Full-color display on a liquid crystal display device is performed by a light-transmitting filter controlled by the liquid crystal layer. The color filter is formed by arranging red, green, and blue color patterns on the surface of a substrate made of glass, wax, or the like. = 孀 The full-color display on the device is performed by arranging red, green, and blue EL cold light layers (color mode) on a quality surface composed of glass, plastic, etc. The EL cold light layer is held between a pair of electrodes. In order to form a pixel, the voltage applied to the electrode is controlled according to one pixel, so that the pixel displays the right color. It is well known that the color filters in liquid crystal display devices or chirp devices are traditionally produced in a red, green, and blue color mode using a photolithographic method and a vacuum deposition method using a shadow mask. However, photo flat: printing method or vacuum deposition method using shadow mask is extremely complicated in terms of manufacturing process, and consumes a lot of red, green, and blue color materials, which causes a problem of increased manufacturing cost. ^ [Summary of the Invention] Purpose of the Invention A micro-dispenser is provided, which can basically solve the problem of forming a color mode based on a photolithography method or a vacuum deposition method using a shadow mask. Meanwhile, another object of the present invention is to provide a method for manufacturing a toner using the micro-dispenser. In order to achieve the above object, the micro-dispenser of the present invention provides a solution storage tank, which is located in a main body, and the solution is stored therein; a micro-nozzle, which is located below the solution storage tank, is used to discharge the solution in the solution storage tank A vibration plate located above the solution storage tank; a pressure actuator located above the vibration plate, which generates vibrations in response to voltage imprints, and a strain gauge located between the vibration plate and the pressure actuator In the meantime, the strain gauge is used to measure the vibration stress from the pressure actuator to control the discharge of the solution in the solution storage tank. A micro-nozzle may contain several small holes that do not discharge a solution below a predetermined stress. Micro-nozzles can be circular, rectangular or polygonal. The red material solution, the green material solution, or the blue material solution can be stored in the solution storage tank. In order to achieve another object of the present invention, the present invention provides a method for manufacturing a color filter, and a plurality of red patterns, green patterns, and blue patterns are individually formed on the first row of a substrate using a head. The head contains several micro-dispensers 'for individually discharging the red material solution, the green material solution, and the blue material solution in the row direction; and by moving the head in a predetermined width in the row, column or column direction' Several red, green, and blue patterns are formed on the second to nth lines (n is an integer). The substrate may be made of glass or plastic. The red material solution, the green material solution, and the blue material solution can respectively penetrate the red material solution located on the head
2004227 〇42004227 〇4
注射線、綠色材料溶液注射線與藍色材料溶液注射線流入 本發明的微分配器包含一個壓力促動器、一個應變 ,與一個微喷嘴,以便能準確控制所排放的溶液之排敌$ 。此外,若本發明的微分配器應用於濾色器的製造方法 ,製造成本可降低而產能可增加。 【實施方式】 在下文中,本發明的實施例將按照附圖詳細說明。然 而’下文中所闞明的本發明實施例可變化成各種形式,而' 本發明的範圍並非受限於下文所述的實施例。本發明的資 施例是為了向具備相關技術普通技能的人士完整說明本發鲁 明。 第1圖係依據本發明的微分配器的概要斷面圓,而第2 圓是第1囷的微喷嘴的放大平面圓。 本發明的微分配器103包含一個溶液儲存槽13,位於 一個主體11内,其具有預定空間,其中的溶液,例如R(紅 )、G (綠)與B (藍)色彩材料溶液從外部被射入。換言之 ’溶液例如紅、綠與藍色彩材料溶液透過一個個別供應裝 置從外部被射入,並儲存在溶液儲存槽13内。 溶液儲存槽13的下方具有一個微喷嘴丨5,可排放色彩4 材料溶液,例如紅、綠與藍。微喷嘴1 5包含數個小洞1 7, 因此具有黏性的溶液,例如色彩材料溶液,由於表面張力 ’低於預定應力時不會被排放出來。小洞17的數量可依據 用途作改變。微喷嘴15可製成圓形、矩形或多角形。微喷The injection beam, the green material solution injection line and the blue material solution injection line flow into the micro-dispenser of the present invention including a pressure actuator, a strain, and a micro-nozzle, so as to accurately control the resistance of the discharged solution. In addition, if the micro-dispenser of the present invention is applied to a color filter manufacturing method, manufacturing costs can be reduced and productivity can be increased. [Embodiment] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the embodiments of the present invention described below can be changed into various forms, and the scope of the present invention is not limited to the embodiments described below. The embodiments of the present invention are intended to fully explain the present invention to persons having ordinary skills in the related art. Fig. 1 is a schematic sectional circle of a micro-dispenser according to the present invention, and a second circle is an enlarged flat circle of a micro-nozzle of the first volume. The micro-dispenser 103 of the present invention includes a solution storage tank 13 located in a main body 11 having a predetermined space, and the solutions therein, such as R (red), G (green), and B (blue) color material solutions, are shot from the outside. Into. In other words, a solution such as a red, green, and blue color material solution is injected from the outside through a separate supply device and stored in the solution storage tank 13. Below the solution storage tank 13, there is a micro-nozzle 5 which can discharge a solution of color 4 materials, such as red, green, and blue. The micro-nozzle 15 includes a plurality of small holes 17 so that a viscous solution, such as a color material solution, will not be discharged when the surface tension is lower than a predetermined stress. The number of small holes 17 can be changed depending on the use. The micro-nozzles 15 can be made into a circle, a rectangle or a polygon. Micro-spray
200422704 五、發明說明(4) 嘴15的尺寸可與下文所述的一個色彩模式相同。依據本實 施例’微喷嘴15的寬度與高度分別是100从m與80#m,但 必要時可作改變。 溶液儲存槽13的上方有一個振動板19、一個應變儀21 ’與一個壓力促動器23。明確地說,應變儀21位於振動板 19與壓力促動器23之間。若施加電壓到愿力促動器23,則 壓力促動器23會產生振動。如此所產生的振動透過應變儀 21與振動板19被傳送到溶液儲存槽13,以便作為應力經由 微喷嘴15去排放溶液,例如色彩材料溶液。當通過振動板 19時振動增加。壓力促動器23控制所施加的電壓量,以便塵 控制振動的密度與頻率。當然,若電壓並未被施加到壓力· 促動器2 3,則溶液,例如溶液儲存槽13内的色彩材料溶液 不會被排放出來。 應變儀21可準確測量壓力促動器23傳送多少應力到溶 液儲存槽13。若傳送到溶液儲存槽13的應力被準確測量, 則溶液量,例如被排放的色彩材料溶液可根據此準碟測量 加以精確控制。 第3圓顯不在使用具有圖1微分配器的頭部的基質上的 色彩模式形成過程,第4圖是第3圓頭部的列向透視斷面圖 ’第5圖是第3圓與第4圓微分配器的放大斷面圓,第6圖是· 沿著預定色彩溶液注射線的微分配器的行向部份放大圖。1 參見第3圓,其顯示一個頭部1〇1被用於本發明的濾色 器之製造方法。第3圓所顯示的頭部在其下方行向具有數 個第1圖的微分配器103。喷射紅、綠與藍色彩材料溶液的 IHHHI ΙΙΜΠ ---------- 第8頁 2004227 04 五、發明說明(5) 色彩材料溶液注射線105、107、109位於頭部101内呈行向 。編碼105、107舆109分別代表紅色材料溶液注射線、綠 色材料溶液注射線與藍色材料溶液注射線,並且在箭頭所 指方向,紅色材料溶液、綠色材料溶液與藍色材料溶液被 射入。紅色材料溶液注射線105、綠色材料溶液注射線107 與藍色材料溶液注射線109並未彼此相交。 在頭部101下方,有一個由塑膠或玻璃所構成的基質 111。頭部1 0 1變換行向或列向的預定間隔,以便藉由使用 微分配器1 03選擇性地排放紅、綠與藍色彩材料溶液在基 質111上。依據這樣的選擇性排放,數個紅色模式、綠色 模式或藍色模式以行向或列向被排列在基質上,以便形成 濾色器模式1 1 3 〇 參見第4圓,紅色材料溶液注射線105、綠色材料溶液 注射線107舆藍色材料溶液注射線109位於頭部101内。紅 色材料溶液注射線105、綠色材料溶液注射線107舆藍色材 料溶液注射線1 0 9並未彼此相交,並經由個別注射線排放 每個色彩材料溶液到一個微分配器103。也就是說,綠色 材料溶液注射線107使用第一排出線115,紅色材料溶液注 射線105使用第二排出線11 7,而藍色材料溶液注射線1〇9 使用第三排出線119,將色彩材料溶液排進微分配器1〇3。_ 第5圖是第3圊與第4圓微分配器的放大斷面圖。第6圖 是可排放第3圖行向的紅色、綠色或藍色中任何一個色彩 材料溶液的微分配器的部份放大圓。也就是說,第6圓是 沿著紅色材料溶液注射線105、綠色材料溶液注射線107與200422704 V. Description of the invention (4) The size of the mouth 15 may be the same as a color mode described below. According to this embodiment ', the width and height of the micro-nozzle 15 are 100 m and 80 #m, respectively, but may be changed if necessary. Above the solution storage tank 13, there is a vibration plate 19, a strain gauge 21 ', and a pressure actuator 23. Specifically, the strain gauge 21 is located between the vibration plate 19 and the pressure actuator 23. When a voltage is applied to the force actuator 23, the pressure actuator 23 generates vibration. The vibration thus generated is transmitted to the solution storage tank 13 through the strain gauge 21 and the vibration plate 19 so as to discharge a solution such as a color material solution through the micro-nozzle 15 as a stress. The vibration increases when passing through the vibration plate 19. The pressure actuator 23 controls the amount of voltage applied so that the density and frequency of vibrations are controlled. Of course, if a voltage is not applied to the pressure · actuator 23, a solution such as a color material solution in the solution storage tank 13 will not be discharged. The strain gauge 21 can accurately measure how much stress the pressure actuator 23 transmits to the solution storage tank 13. If the stress transmitted to the solution storage tank 13 is accurately measured, the amount of the solution, such as the discharged color material solution, can be accurately controlled based on this standard dish measurement. The third circle shows the color pattern formation process on the substrate using the head of the micro-dispenser of FIG. 1, and the fourth circle is a cross-sectional perspective view of the third circle's head. The fifth circle is the third circle and the fourth circle. An enlarged sectional circle of a circular micro-dispenser. Figure 6 is an enlarged view of a row portion of the micro-dispenser along a predetermined color solution injection line. 1 Refer to the third circle, which shows that a head 101 is used in the manufacturing method of the color filter of the present invention. The head shown in the third circle has a plurality of micro-dispensers 103 shown in Fig. 1 in a row below it. IHHHI ΙΙΜΠ spraying red, green and blue color material solutions ---------- Page 8 2004227 04 V. Description of the invention (5) The color material solution injection lines 105, 107, 109 are located in the head 101. Direction. The codes 105, 107, and 109 represent the red material solution injection line, the green material solution injection line, and the blue material solution injection line, respectively. In the direction of the arrow, the red material solution, the green material solution, and the blue material solution are injected. The red material solution injection line 105, the green material solution injection line 107, and the blue material solution injection line 109 do not intersect each other. Below the head 101, there is a substrate 111 made of plastic or glass. The head 101 changes a predetermined interval in a row direction or a column direction so that the red, green, and blue color material solutions are selectively discharged on the substrate 111 by using the micro-dispenser 103. Based on such selective emissions, several red, green, or blue patterns are arranged on the substrate in a row or column direction to form a color filter pattern 1 1 3 〇 See circle 4, red material solution injection line 105. The green material solution injection line 107 and the blue material solution injection line 109 are located in the head 101. The red material solution injection line 105, the green material solution injection line 107, and the blue material solution injection line 1 0 9 do not intersect each other, and each color material solution is discharged to a micro-dispenser 103 via an individual injection line. That is, the green material solution injection line 107 uses the first discharge line 115, the red material solution injection line 105 uses the second discharge line 11 7 and the blue material solution injection line 1 09 uses the third discharge line 119 to change the color The material solution was drained into the micro-dispenser 103. _ Figure 5 is an enlarged sectional view of the 3rd and 4th circular micro-dispensers. Figure 6 is a partially enlarged circle of a micro-dispenser that can discharge any color material solution of red, green, or blue in the row direction of Figure 3. That is, the sixth circle is along the red material solution injection line 105, the green material solution injection line 107, and
第9頁 2004227 04 五、發明說明(6) -------- ^色材料溶液注射線1〇9的任一線的微分配器的部份放大 圓。使用第5圖的微分配器的色彩材料溶液之排玫已於幻 圓說明,因此這裡不再赘述。在第5囷與第6圓中,與第1 囷相同的編碼是指相同元件。 "第7圖顯示使用具有第3圖到第6圖微分配器的頭部的 色彩模式製造方法。在第7圓中,與第3圖到第6圓相同的 編碼是指相同元件。 位於頭部(第1圖的101)下方的微分配器1〇3被設計成 可讓紅色材料溶液、綠色材料溶液與藍色材料溶液個別位 於行向。使用具有如上所述的微分配器1〇3的頭部,色彩 模式形成於一個基質的第一行121上。因此,在基質的第· 一行上’形成一個色彩模式,其中紅色彩模式、綠色彩模 式與藍色彩模式一個接著一個在行向上重複。 然後,具有微分配器103的頭部在列向移動一步作為 預定寬度,然後在行向向左移動一步作為預定寬度,以便 形成色彩模式。因此,在基質的第二行123上,形成色彩 模式,其中紅色彩模式、綠色彩模式與藍色彩模式一個接 著一個在行向上重複。 接著,具有微分配器1 0 3的頭部在列向移動一步作為 預定宽度,然後在行向向左移動一步作為預定寬度,以便4 形成色彩模式。因此,在基質的第三行125上,形成色彩 模式,其中紅色彩模式、綠色彩模式與藍色彩模式一個接 著一個在行向上重複。 同樣地,色彩模式形成於第四行127、第五行129與第Page 9 2004227 04 V. Description of the invention (6) -------- The part of the micro-dispenser of any one of the lines 109 of the color material solution injection line is enlarged. The arrangement of the color material solution using the micro-dispenser of Fig. 5 has been explained in a magic circle, so it will not be described again here. In the 5th circle and the 6th circle, the same code as the 1st circle refers to the same element. " Figure 7 shows a color pattern manufacturing method using a head having the micro-dispenser of Figures 3 to 6. In the seventh circle, the same codes as in the third to sixth circles refer to the same elements. The micro-dispenser 103 located under the head (101 in Fig. 1) is designed so that the red material solution, the green material solution, and the blue material solution are individually positioned in the row direction. Using the head having the micro-dispenser 103 as described above, a color pattern is formed on the first row 121 of a substrate. Therefore, a color pattern is formed on the first line of the matrix, in which the red color pattern, the green color pattern, and the blue color pattern are repeated one after another in the line. Then, the head having the micro-dispenser 103 is moved one step in the column direction as a predetermined width, and then moved one step to the left in the row direction as a predetermined width to form a color pattern. Therefore, on the second line 123 of the matrix, a color pattern is formed, in which the red color pattern, the green color pattern, and the blue color pattern are repeated one after another in the row direction. Next, the head having the micro-dispenser 103 is moved one step in the column direction as a predetermined width, and then moved one step to the left in the row direction as a predetermined width, so that 4 forms a color pattern. Therefore, on the third line 125 of the matrix, a color pattern is formed, in which the red color pattern, the green color pattern, and the blue color pattern are repeated one after another in the row direction. Similarly, the color pattern is formed in the fourth row 127, the fifth row 129, and the first row
第10頁 2004227 〇4 五、發明說明(7) 六行131上。第四行127的色彩模式是在第三行125形成色 彩模式之後,藉由在列向移動一步並在行向向右移動二步 來形成。第五行129的色彩模式是在第四行127形成色彩模 式之後’藉由在列向移動一步並在行向向左移動一步來形 成。第六行131的色彩模式是在第五行129形成色彩模式之 後,藉由在列向移動一步並在行向向左移動一步來形成。 從第六行131到第η行(η是一個整數)的色彩模式形成說明 為了方便起見,予以省略。 第8Α圊到第8C顯示依據圊7的方法在基質上所製造的 色彩模式的各種實施例。 第8 Α圓顯示條狀排列的色彩模式,其中列向的色彩模_ 式全都是相同的色彩模式。第8B圖顯示馬赛克式排列的色 彩模式,其中紅色彩模式、綠色彩模式與藍色彩模式以行 向與列向重複。第8C圖顯示三角排列的色彩模式,其中任 何相鄰色彩模式的色彩模式是紅色彩模式、綠色彩模式舆 藍色彩模式。 4業摩用 如上所述,本發明的微分配器藉由包含一個壓力促動 器、一個應變儀與一個徽喷嘴,能準確控制被排放溶液的· 排放量。 ^ 當本發明的微分配器應用到濾色器的製造方法時,與 使用傳:统照相平板印刷法或陰影軍幕製造濾色器的方法相 較之下’製造成本可降低而產能可增加。 特別是,依據本發明的濾色器的製造方法,若微分配Page 10 2004227 〇5. Description of the invention (7) Six lines 131. The color pattern of the fourth row 127 is formed by moving the color pattern of the third row 125 by one step in the column direction and two steps to the right in the row direction. The color pattern of the fifth row 129 is formed after the color pattern of the fourth row 127 is formed by moving one step in the column direction and one step to the left in the row direction. The color pattern of the sixth row 131 is formed by moving the color pattern of the fifth row 129 by one step in the column direction and one step to the left in the row direction. The description of the color pattern formation from the sixth line 131 to the nth line (n is an integer) is omitted for convenience. 8A to 8C show various examples of color patterns produced on a substrate according to the method of 7A. The 8th circle shows the color patterns arranged in a stripe, and the color patterns in the column direction are all the same color pattern. Figure 8B shows a mosaic pattern of color patterns, in which the red color pattern, green color pattern, and blue color pattern are repeated in the row and column directions. Fig. 8C shows the color pattern of the triangle arrangement, in which the color pattern of any adjacent color pattern is red color pattern, green color pattern and blue color pattern. As described above, the micro-dispenser of the present invention can accurately control the discharge amount of the discharged solution by including a pressure actuator, a strain gauge, and a emblem nozzle. ^ When the micro-dispenser of the present invention is applied to a color filter manufacturing method, as compared with a method of manufacturing a color filter using a conventional photolithography method or a shadow army curtain, the manufacturing cost can be reduced and the production capacity can be increased. In particular, the method for manufacturing a color filter according to the present invention
2004227 04 五、發明說明(8) 器的微喷嘴被設計成與色彩模式具有相同尺寸,且若排放 量可由應變儀準確控制,則製造成本可大幅降低而產能可 大幅增加。 此外,當使用本發明的微分配器時,可排放微小量的 化學溶液在玻璃或塑膠等基質上的理想位置上,不僅可應 用在半導體與平面顯示器領域,並且可應用在醫學領域。2004227 04 V. Description of the invention (8) The micro-nozzle of the device is designed to have the same size as the color mode, and if the discharge amount can be accurately controlled by the strain gauge, the manufacturing cost can be greatly reduced and the production capacity can be greatly increased. In addition, when the micro-dispenser of the present invention is used, a minute amount of a chemical solution can be discharged at an ideal position on a substrate such as glass or plastic, which can be applied not only to the fields of semiconductors and flat displays, but also to the medical field.
第12頁 2004227 04Page 12 2004 227 04
第1圖 第2圖 第3圖 第4圖 第5圖 第6圖 是依據本發明的微分配器的概要斷面 是第1圓的微噴嘴的放大平面囷。 圖 顯示在使用具有第1囷微分配器的 ^ ^ u . 色彩模式形成過程。 的碩部的基質上的 是第3圓頭部的列向透視斷面囷。 是第3圓與第4圖微分配器的放大斷面圖 是沿著色彩溶液注射線的微分配器的行向部份放 大圖。 第7圖:顯示使用具有第3圓到第6囷微分配器的頭部的色 彩模式製造方法。 第8A圏:顯示依據第7圖的方法在基質上所製造的色彩模 式的各種實施例。 ^ 第8B圓:顯示依據第7圖的方法在基質上所製造的色彩模 式的各種實施例。/ 第8C圓··顯示依據第7圓的方法在基質上所製造的色彩模 式的各種實施例。 圖號說明: 1 0 3微分配器 13溶液儲存槽 11主體 15微噴嘴 1 7小洞 1 9振動板 21應變儀 23促動器 1 01頭部 105紅色材料溶液注射線 107綠色材料溶液注射線 109藍色材料溶液注射線 111基質 113濾色器模式 115第一排出線 117第二排出線 119使用第三排出線 121色彩模式第一行Fig. 1 Fig. 2 Fig. 3 Fig. 4 Fig. 5 Fig. 6 Fig. 6 is a schematic cross section of a micro-dispenser according to the present invention, which is an enlarged plane 囷 of a micro-nozzle having a first circle. Figure shows the use of ^ ^ u with a 1 囷 micro-dispenser. The color pattern formation process. On the matrix of the large part is the 3rd round head of the column to the perspective section 囷. It is an enlarged sectional view of the micro-dispenser of the third circle and the fourth figure. It is an enlarged view of the row portion of the micro-dispenser along the color solution injection line. Figure 7: Shows the color pattern manufacturing method using the heads with the 3rd to 6th minute distributors. 8A 圏: Various embodiments of the color mode produced on the substrate according to the method of FIG. 7 are shown. ^ Circle 8B: shows various embodiments of color patterns produced on a substrate according to the method of FIG. / Circle 8C: Various embodiments of the color pattern produced on the substrate according to the method of Circle 7 are shown. Description of drawing number: 1 0 3 micro-dispenser 13 solution storage tank 11 main body 15 micro-nozzle 1 7 small hole 1 9 vibration plate 21 strain gauge 23 actuator 1 01 head 105 red material solution injection line 107 green material solution injection line 109 Blue material solution injection line 111 Matrix 113 Color filter pattern 115 First discharge line 117 Second discharge line 119 Use third discharge line 121 Color mode first line
第13頁 2004227 04Page 13 2004 227 04
第14頁Page 14
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JP2941247B2 (en) * | 1997-03-17 | 1999-08-25 | キヤノン株式会社 | Method for setting ink ejection density, method for manufacturing color filter, method for manufacturing display device, and method for manufacturing device equipped with display device |
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