TW200419275A - Pixel structure and method of repairing the same - Google Patents

Pixel structure and method of repairing the same Download PDF

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Publication number
TW200419275A
TW200419275A TW92107256A TW92107256A TW200419275A TW 200419275 A TW200419275 A TW 200419275A TW 92107256 A TW92107256 A TW 92107256A TW 92107256 A TW92107256 A TW 92107256A TW 200419275 A TW200419275 A TW 200419275A
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Taiwan
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source
thin film
patent application
film transistor
wiring
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TW92107256A
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Chinese (zh)
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TW583490B (en
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Chien-Hung Wang
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Au Optronics Corp
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Abstract

A pixel structure and method of repairing the same are provided. The pixel structure is driven by a scan line and a data line. The structure comprises a first thin film transistor, a second thin film transistor, and a pixel electrode. The first thin film transistor has a first gate and a first source/drain, wherein the first gate is electrically connected the scan line and one end of the first source/drain is electrically connected the data line. The second thin film transistor has a second gate and a second source/drain, wherein the second gate is electrically floated and one end of the second source/drain is electrically connected the data line. The pixel electrode is electrically connected the other end of the first source/drain and the other end of the second source/drain.

Description

200419275 五、發明說明(1) 發明所屬之技術領Μ 本發明是有關於一種書音 i收3古冰日牲,丨3旦素結構(pixel Structure)及 士修補方:,且特別是關於一種能 素結構及其修補方法。 门儿』彳> 復丰之旦 先前技術 隨著高科技之發展,視訊 〇 或影像裝置已經成為在—妒°日^ασ,j別是數位化之視訊 些數位化之視訊或影像裝活:所常見的產品。這 以顯示相關資訊。使用者可由是-個重要元件’ 制裝置的運作。f 了由顯不益讀取資訊,或進而控 為了配合現代生活模式,鉬如々旦/ μ 趨於薄輕。傳統的陰極層射線“衫:裝置之體積曰漸 但是其需佔用大體積且耗:線=益配=仍有其優點’ 體製造技術,面板式的顯示琴 σ光電技術與半導200419275 V. Description of the invention (1) The technical field to which the invention belongs The present invention relates to a kind of book sound i 3 ancient ice sun animal, 3 pixel structure (pixel structure) and scholar repair side: and especially about a Energy structure and repair method. Door "儿 > The previous technology of Fufengzhidan With the development of high-tech, video 0 or video devices have become in-envious ° ^^ σ, j other than digital video. Digital video or video installation : Common products. This displays relevant information. The user can control the operation of the device by being an important component. f In order to read the information from the unfavorable, or further control In order to match the modern life mode, molybdenum such as dandan / μ tends to be thin and light. The traditional cathode layer ray "shirt: the volume of the device is gradually decreasing, but it needs to occupy a large volume and consume: line = benefit matching = still has its advantages" bulk manufacturing technology, panel display piano σ photoelectric technology and semiconductor

Ig -. 〇 貝不益已被發展出成為目前常見之 壓操作、無輕射線散射、重量輕 1低電 線管(cathode ray tube,汽稱CRT)所制\ :統$極射 達到的優點,與直他平板製造之顯示器無法 .r, +, 他十板式顯不益如電漿顯示器及電致發 尤leiectroluminance)顯示 ,点 a < 左士 主要謖顔,-诎通成為近年來顯示器研究的 、夜被:見為二十-世紀顯示器的主流。而目前的 ^日日顯不益疋以缚膜電晶體(thin film transistor, 稱T F T)液晶顯示器為發展主流。 於 板,2!ί體ί晶顯示器主要是由薄膜電晶體陣列基 衫色4先陣列基板和液晶層所構成,其中薄膜電晶體Ig-. 〇 Beibuyi has been developed into the current common pressure operation, no light ray scattering, light weight 1 low wire tube (cathode called CRT) made by the advantages of: It is impossible to display with a flat panel. R, +, his ten-panel display is not as good as a plasma display and electro-fabricated display. Point a < Zuo Shi mainly looks, and-诎 通 has become a display research in recent years. , Night quilt: see the mainstream of twentieth-century displays. At present, thin film transistors (referred to as T F T) liquid crystal displays have become the mainstream for development. On the panel, the 2! Body crystal display is mainly composed of a thin film transistor array substrate and a first array substrate and a liquid crystal layer, of which the thin film transistor

10741twf.ptd 第6頁 200419275 五、發明說明(2) 陣列基板是由多個以陣列排列的畫素結構所纟且 常見的t *結構是由兩層金屬與一層透明電 ^ = =,近來為修補元件(device)損壞時 、’ =構進行改良,而為說明晝素結構中各以構會= 八刀成二個圖不(請見第1 A圖至第1 C圖)作說明。 第1 A圖至第1C圖係習知一種具有修補亮點功 結構之上視示意圖。請參照第⑽,習知的晝素社構係J 在一基板1〇〇上形成-閘極102、一掃晦配線1〇4素以及一修 補配線106,其中掃瞄配線丨04係與閘極1〇2連接而上述 之閘極102、掃瞄配線104以及修補配線1〇6即為第一金 層(又稱Ml)。之後,在基板100上形成一間介電層(未繪 =),覆蓋住閘極102、掃猫配線104以及修補配線1〇6。接 著,於閘極102上方形成一非晶矽通道層1〇8。 之後,請參照第1B圖,在非晶矽通道層1〇8上形成一 源極/汲極110a/110b,並且同時形成與源極11〇3連接之一 資料配線114,其中閘極1〇2、通道層1〇8與源極/汲極 110a/11 Ob係構成一薄膜電晶體112。此外,在形成源極/ 汲極11 Oa/11 Ob的同時,一併在修補配線丨〇6上方形成一斷 路結構11 6,其中斷路結構11 6 —端與汲極丨丨〇 b連接、另一 端與資料配線11 4連接。而上述之源極/汲極丨丨〇a/1丨〇b、 資料配線114以及斷路結構116即為第二金屬層(又稱M2)。 隨後,請參照第1 C圖,於基板丨〇 〇上方形成一晝素電 極1 2 0,其中畫素電極1 2 0係藉由接觸窗丨丨8而與薄膜電晶 體11 2之汲極11 〇b電性連接。當圖中的薄膜電晶體丨丨2發生10741twf.ptd Page 6 200419275 V. Description of the invention (2) The array substrate is a common t structure with multiple pixel structures arranged in an array. * The structure consists of two layers of metal and one layer of transparent electricity. ^ = =, Recently When the repairing device (device) is damaged, the '= structure is improved, and in order to explain the structure of the day element, each structure is divided into two figures (see Figures 1 A to 1 C). Figures 1A to 1C are schematic top views of a conventional structure with repairing bright spots. Please refer to Section VII. The conventional day-light system J is formed on a substrate 100-a gate 102, a scan line 104, and a repair line 106, among which the scan line 04 and the gate 10, and the gate 102, the scanning wiring 104, and the repair wiring 106 described above are the first gold layer (also called M1). Thereafter, a dielectric layer (not shown) is formed on the substrate 100 to cover the gate electrode 102, the cat wiring 104, and the repair wiring 106. Next, an amorphous silicon channel layer 108 is formed over the gate electrode 102. Then, referring to FIG. 1B, a source / drain 110a / 110b is formed on the amorphous silicon channel layer 108, and at the same time, a data wiring 114 connected to the source 1103 is formed, among which the gate 1 is 2. The channel layer 108 and the source / drain 110a / 11 Ob system constitute a thin film transistor 112. In addition, while the source / drain 11 Oa / 11 Ob is formed, a disconnection structure 11 6 is also formed above the repair wiring 丨 〇6, and the interruption structure 116-end is connected to the drain 丨 丨 b, One end is connected to the data wiring 11 4. The source / drain 丨 丨 a / 1 丨 b, the data wiring 114, and the disconnection structure 116 are the second metal layer (also referred to as M2). Subsequently, referring to FIG. 1C, a day electrode 12 is formed on the substrate 丨 00, wherein the pixel electrode 1 2 0 is connected to the thin film transistor 11 2 through the contact window 丨 8 and the drain electrode 11 2 〇b Electrical connection. When the thin film transistor in the figure

10741twf.ptd 第7頁 200419275 五、發明說明(3) ---------- 故障時,^ 1 22 『先用雷射燒斷閘極1 02與掃瞄配線1 〇4連接處 介電層##1用雷射燒開斷路結構116與修補配線106之間的 —公 並藉由雷射化學氣相沈積(laser CVD)形成一層 薄立γ層連接斷路結構丨丨6與修補配線丨〇6。不過,經過修 補後^晝素結構將不再具有主動式的特性與優點,而只能 避免其變成亮點。 ^ ’目兩薄膜電晶體的設計在元件(d e v i c e )損壞時 會&成,面板形成亮/暗點的問題,尤其在形成亮點的情 况下不奋易修復,且使得面板的瑕疵更為明顯。此外,當 在大f寸之面板上加上補償膜來增加視角時,在修復完亮 點後=易因為漏光而導致在某個視角再度形成亮點。而 且、、、二過修補後的晝素將不再具有主動式的特性與優點, 所以利用驾知方式進行的修補方法仍會在顯示上產生瑕 曼J月内签 ' 口此’本發明之目的是提供一種晝素結構及其修補方 法,可於7L件損壞時避免在面板形成亮/暗點。 本發明之另一目的是提供一種晝素結構及其修補方 法’以提南亮點修復率。 本發明之再一目的是提供一種晝素結構及其修補方 法,以使修補後的晝素仍具有主動式的特性與優點。 根據上述與其它目的,本發明提出一種畫素結構,適 於藉由-掃描配線以及_資料配線驅動“匕一晝素結構包 括〆第-薄膜電晶體、_第二薄膜電晶體以及一晝10741twf.ptd Page 7 200419275 V. Description of the invention (3) ---------- In case of failure, ^ 1 22 "First use the laser to blow off the gate 1 02 and the scanning wiring 1 〇4 The dielectric layer ## 1 is used to open the circuit between the circuit breaking structure 116 and the repair wiring 106 by laser and form a thin vertical γ layer to connect the circuit breaking structure by laser CVD. 6 and repair Wiring 丨 〇6. However, after modification, the daylight structure will no longer have active characteristics and advantages, but can only be prevented from becoming a bright spot. ^ 'The design of the two thin film transistors will & when the device is damaged, the panel forms a problem of light / dark spots, especially in the case of forming bright spots, it is not easy to repair, and it makes the defects of the panel more obvious. . In addition, when a compensation film is added to a large f-inch panel to increase the viewing angle, after repairing the bright spots = it is easy to form bright spots at a certain viewing angle due to light leakage. In addition, the day and night after repairing will no longer have the active characteristics and advantages, so the repair method using driving knowledge will still produce flaws on the display. The purpose is to provide a daylight structure and its repair method, which can avoid the formation of light / dark spots on the panel when 7L pieces are damaged. Another object of the present invention is to provide a daylight structure and its repair method 'to improve the repair rate of bright spots in the south. It is still another object of the present invention to provide a diurnal structure and a repairing method thereof so that the repaired diurnal still has active characteristics and advantages. According to the above and other objectives, the present invention proposes a pixel structure, which is suitable for driving by a scanning wiring and a data wiring. The "dual-day" pixel structure includes a first thin-film transistor, a second thin-film transistor, and a single-day transistor.

200419275 五、發明說明(4) Π:!膜電晶體具有-第-閑極與-第-源極/没 t炼二山:閘極電性連接於該掃描配線,而第-源極/ 〆有二繁- 3 士性連接於該育料配線。第二薄膜電晶體則具 ,w ,二i亟與一第二源極/汲極,其中第二閘極係電性 二,蚩φ厂源極/汲極的一端電性連接於資料配線。另 二/’、μ查電性連接於第一源極/汲極的另一端以及第 一源極/ >及極的另一端。 u mi提出一種晝素結構的修補方法,是用來修補 二-:切:構:包括先將第一源極/汲極與資料配線連 動、真ϋ ± 一以使第一溥膜電晶體不受資料配線連驅 補導體雷身:修補製程形成一修補導體層,並藉由修 ΐτΐ弟二閘極與掃描配線電性連接,以使第二薄脖 電晶體被掃描配線與資料配線驅動。運# u使弟厚腐 一資ΐ tί=一種晝素結構,適於藉由一掃描配線以万 一第二镇膜=曰,此一畫素結構包括一第一薄膜電晶體、 薄膜電晶體且有—第一t體層以及一晝素電極。而第一 一閘極電性11 ^ 閘極與一第一源極/汲極,其中第 甲1極電f生連接於該掃描 , 電性連接於該資料配線。第源極/汲極的一端 極與-第二源極/汲極,第_、門’:體則具有-第二~ 性連接於掃二綠 連接於資料配線。擬導體層則電 畫素電極電性連接於笛:t體層位於弟二閘極旁。另外, 極/汲極的另一連端。、4源極/汲極的另-端以及第二源200419275 V. Description of the invention (4) Π: The film transistor has a -first-free pole and a -second-source / metaline: the gate is electrically connected to the scanning wiring, and the -source / 〆 There are two-3 taxis connected to this breeding wiring. The second thin-film transistor has, w, two i and a second source / drain. The second gate is electrically two. One end of the source / drain of the φφ factory is electrically connected to the data wiring. The other two / ', μ are electrically connected to the other end of the first source / drain and the other end of the first source />. Umi proposed a method for repairing the daytime structure, which is used to repair the two-: cut: structure: Including the first source / drain connected to the data wiring, true ϋ ± one, so that the first 溥 film transistor does not The data conductor is continuously driven to repair the conductor lightning body: the repair process forms a repair conductor layer and is electrically connected to the scanning wiring by repairing the second gate of the τΐ brother, so that the second thin neck transistor is driven by the scanning wiring and the data wiring.运 # u 使 弟 厚 腐 一 资 ΐ tί = a daylight structure suitable for a second ballast film by a scanning wiring = this pixel structure includes a first thin film transistor, a thin film transistor And there are-a first t-body layer and a diurnal electrode. The first gate electrode is electrically connected to the scan, and the first gate electrode is electrically connected to the data wiring. One end of the first source / drain and-the second source / drain, the first and the gate ': the body has-the second ~ connected to the sweep green and connected to the data wiring. The pseudo-conductor layer is electrically connected to the pixel electrode: the t-body layer is located next to the second gate. In addition, the other end of the pole / drain. , The other source of the 4-source / drain and the second source

五、發明說明(5) 本發明又提 前一段所述之書 配線連接 連驅動, 由修補導 薄膜電晶 本發 在平常狀 將另一個 少,且仍 為讓 顯易Μ ^ 說明如下 的一端 再藉由 體層將 體被掃 明之晝 態下運 備用薄 舊保有 本發明 下文特 素結構 切斷, 一雷射 第二閘 描配線 素電極 作’而 膜電晶 主動式 之上述 舉較佳 晝素結 ’包括 以使第 修補製 極與擬 與資料 因為具 當其損 體取代 的特性 和其他 實施例 構的修 先將第 一薄膜 程形成 導體層 配線驅 有兩個 毀時, 之,使 與優點 目的、 ,並配 補方法,是用來修補 源極/沒極與資料 電晶體不受資料配線 —修補導體層,並藉 電性連接,以使第二 動。 薄膜電晶體,—個是 可利用雷射修補製程 面板亮/暗點問題減 〇 特徵、和優點能更明 合所附圖式,作詳細 實施方4 、,本發明係於同一晝素結構中設計兩個薄膜電晶體,且 為詳細說明其中各層之結構,故將其分成三個圖示(請見 第2Α圖至第2C圖)作說明。 弟2 Α圖至第2 C圖係依照本發明之一較佳實施例之畫素 結構之上視示意圖。請參照第2 A圖,本發明之畫素結構係 先在一基板200上形成一第一閘極212、一第二閘極222以 及一掃瞄配線2 0 4,其中掃瞄配線2 0 4係與第一閘極2 1 2連 接,而第二閘極2 2 2係電性浮置。上述之閘極2 1 2、2 2 2以 及掃瞄配線2 0 4即為第一金屬層(又稱Μ1)。之後,在基板 2 0 0上形成一閘介電層(未繪示),覆蓋住閘極2 1 2、2 2 2以V. Description of the invention (5) The present invention also drives the connection and connection of the book described in the previous paragraph, and repairs the thin film transistor film to reduce the other one in the normal state, and still makes it easy to display. By using the body layer, the body is cleaned in the daylight state, and the spare thin structure is retained. The following features are cut off by the present invention. The junction includes the following steps: firstly, the first repairing electrode and the data are destroyed when the damaged body is replaced and other embodiments are constructed, and when the first thin film is formed into a conductor layer, the wiring is destroyed, so that The advantages and purposes, and the complementary method are used to repair the source / non-electrode and the data transistor from the data wiring-repair the conductor layer, and electrically connect to make the second move. The thin film transistor can reduce the light / dark spot problem of the panel by using laser repair. The characteristics and advantages can be more clearly described in the attached drawings. For detailed implementation, the present invention is in the same daylight structure. Two thin-film transistors are designed, and in order to explain the structure of each layer in detail, they are divided into three diagrams (see Figures 2A to 2C) for illustration. Figures 2A through 2C are schematic top views of a pixel structure according to a preferred embodiment of the present invention. Please refer to FIG. 2A. The pixel structure of the present invention is to first form a first gate electrode 212, a second gate electrode 222, and a scanning wiring 2 0 on a substrate 200. The scanning wiring 2 0 4 It is connected to the first gate 2 1 2 and the second gate 2 2 2 is electrically floating. The above-mentioned gates 2 1 2, 2 2 2 and scanning wiring 2 0 4 are the first metal layer (also referred to as M1). After that, a gate dielectric layer (not shown) is formed on the substrate 2000 to cover the gate electrodes 2 1 2 and 2 2 2.

10741twf.ptd 第10頁 200419275 五、發明說明(6) 及掃瞄配線204。接著,於第一閘極212與第二閘極222上 方分別形成一第一通道層214與一第二通道層224,其中通 道層2 1 4、2 2 4之材質譬如是非晶石夕。 然後,請參照第2B圖,分別在第一通道層214與第二 通道層224上形成一第一源極/汲極2i6a/216b以及一第二 源極/汲極2268/2261),而且第一汲極216b與第二汲極226b 係電性相連。同時,形成與第一源極21 6a、第二源極226a 連接的一資料配線206,其中閘極212、通道層214與源極/ 汲極2 16a/2 16b係構成平常狀態下運作的第一薄膜電晶體 210 ;閘極222、通道層224與源極/汲極226a/226b則構成 備用的第二薄膜電晶體2 2 0。另外,雖然本實施例中的薄 膜電晶體2 1 0、2 2 0為底閘極結構之薄膜電晶體,但是亦可 將本發明應用於頂閘極結構之薄膜電晶體。 值得注意的是,在第2A圖與第2B圖中所繪示的薄膜電 晶體210、220為非晶矽型態之薄膜電晶體(a —si TFT),意 即薄膜電晶體210、220中通道層214、224的材質為非晶 矽,但熟習此項技術者在參照本案技術之後,應可推知本 案之薄膜電晶體210、220亦可以是低溫多晶矽型態之薄膜 電晶體(Low Temperature PolySilicon-TFT ,簡稱 LTPS-TFT)。 此外,請繼續參照第2 B圖,本發明之晝素電極還可以 在形成第一源極/沒極2 1 6 a / 2 1 6 b以及第二源極/;:及極 226a/226b的同時’ 一併形成一擬導體層230,其中擬導體 層230 —端是藉由一第三接觸窗238而與掃瞄配線204連10741twf.ptd Page 10 200419275 V. Description of the invention (6) and scanning wiring 204. Next, a first channel layer 214 and a second channel layer 224 are formed above the first gate electrode 212 and the second gate electrode 222, respectively. The material of the channel layers 2 1 4 and 2 2 4 is, for example, amorphous stone. Then, referring to FIG. 2B, a first source / drain 2i6a / 216b and a second source / drain 2268/2261 are formed on the first channel layer 214 and the second channel layer 224, respectively, and the first A drain 216b is electrically connected to the second drain 226b. At the same time, a data wiring 206 connected to the first source electrode 21 6a and the second source electrode 226a is formed, in which the gate electrode 212, the channel layer 214, and the source / drain electrodes 2 16a / 2 16b constitute the first operation in a normal state. A thin film transistor 210; the gate electrode 222, the channel layer 224 and the source / drain electrodes 226a / 226b constitute a second thin film transistor 220. In addition, although the thin film transistors 210 and 220 in this embodiment are thin film transistors with a bottom gate structure, the present invention can also be applied to thin film transistors with a top gate structure. It is worth noting that the thin film transistors 210 and 220 shown in FIG. 2A and FIG. 2B are amorphous silicon type thin film transistors (a-si TFT), which means that the thin film transistors 210 and 220 The material of the channel layers 214 and 224 is amorphous silicon, but those skilled in the art should know that the thin film transistors 210 and 220 in this case can also be low temperature polysilicon thin film transistors (Low Temperature PolySilicon) -TFT, referred to as LTPS-TFT). In addition, please continue to refer to FIG. 2B. The daylight electrode of the present invention can also form a first source / inverter 2 1 6 a / 2 1 6 b and a second source /; At the same time, a pseudo-conductor layer 230 is formed together, wherein the pseudo-conductor layer 230 is connected to the scanning wiring 204 through a third contact window 238 at one end.

10741twf.ptd 第11頁 200419275 五、發明說明(7) 接、另一端則位於第二閘極222旁。而上述之第一源極/汲 極216a/216b、第二源極/汲極226&/2261)、資料配線2 06以 及擬導體層230即為第二金屬層(又稱M 2)。 隨後,請參照第2C圖,於基板20 0上方形成一晝素電 極240 ’其中畫素電極240係分別藉由第一接觸窗218而與 弟一薄膜電晶體210之汲極216b電性連接;以及藉由第二 接觸窗228而與第二薄膜電晶體22〇之汲極226b電性連接。10741twf.ptd Page 11 200419275 V. Description of the invention (7) The other end is located beside the second gate electrode 222. The first source / drain 216a / 216b, the second source / drain 226 & / 2261), the data wiring 206, and the pseudo-conductor layer 230 are the second metal layer (also referred to as M2). Subsequently, referring to FIG. 2C, a pixel electrode 240 'is formed over the substrate 200. The pixel electrode 240 is electrically connected to the drain electrode 216b of the thin film transistor 210 through the first contact window 218, respectively. And is electrically connected to the drain electrode 226b of the second thin film transistor 22 through the second contact window 228.

當第2 C圖中的第一薄膜電晶體2 1 〇發生故障時,可進 行一修補方法,而修補後的晝素結構如第3A圖所示。另 外’ ¥本發明之晝素結構是將第二閘極2 2 2與掃瞄配線2 〇 4 設計成相鄰配置且電性浮置時,就不需要另外形成擬導體 層230,而此種晝素結構經修補後將如第3B圖所示。 第3A圖與第3B圖係依照本發明之修補方法修補後的畫 素結構之上視示意圖。請參照第^圖,修補後的畫素結構 與修補前最大的不同點在於第一源極/汲極216a與資料配 線20 6連接的一端250被切斷,以使第一薄膜電晶體21〇不 受資料配線20 6驅動。而且,第二閘極222與擬導體層23() 藉由一修補導體層310電性連接,以使第二薄膜電晶胃體22〇 被掃描配線204與資料配線206驅動。When the first thin film transistor 2 10 in Fig. 2C fails, a repair method can be performed, and the repaired daylight structure is shown in Fig. 3A. In addition, the daytime element structure of the present invention is that when the second gate electrode 2 2 2 and the scanning wiring 2 04 are designed to be adjacent to each other and electrically floated, it is not necessary to form a pseudo-conductor layer 230, and this kind of The daily structure will be repaired as shown in Figure 3B. Figures 3A and 3B are top schematic views of the pixel structure after repairing according to the repair method of the present invention. Please refer to FIG. ^. The biggest difference between the pixel structure after repair and that before repair is that the end 250 of the first source / drain 216a connected to the data wiring 20 6 is cut to make the first thin film transistor 21. Not driven by data wiring 20 6. In addition, the second gate electrode 222 and the pseudo-conductor layer 23 () are electrically connected through a repair conductor layer 310, so that the second thin film transistor body 22 is driven by the scanning wiring 204 and the data wiring 206.

另外,請參照第3B圖,於本圖中的畫素結構並不需要 另外形成擬導體層,故其修補後的晝素結構與修補前最大 的不同點在於第一源極/沒極2 1 6a與資料配線2〇6連接的一 端25 0被切斷。而且,第二閘極222與資料配線2〇6藉由一 修補導體層320電性連接,以使第二薄膜電晶體22〇被掃描In addition, please refer to FIG. 3B. The pixel structure in this figure does not need to form a quasi-conductor layer. Therefore, the biggest difference between the daytime pixel structure after repairing and the time before repairing is the first source / inverter 2 1 6a The end 250 connected to the data wiring 206 is cut off. In addition, the second gate electrode 222 and the data wiring 206 are electrically connected through a repair conductor layer 320 so that the second thin film transistor 22 is scanned.

10741twf.ptd 第12頁 200419275 五、發明說明(8) 配線2 0 4與資料配線2 〇 6驅動 第4圖則是依照本發明之—較佳 構的步驟流程圖。請參照第4圖,於_之修補晝素結 極/汲極與資料配線連接的—端中,严第-源 體不受資料配線驅動,盆中脾笛 ^ ^彳更弟—缚膜電晶 連接的-端切斷之方法例如及λ與資一 420中,藉由一雷射修補製程形成一修補導體後’於步驟 修補導體層將第二閘極與掃描配線電性 _,',並猎由 膜電晶體被掃描配線與資料配線驅動,農攸以使第二薄 形成方法例如雷射化學氣相沈積。 一甲修補導體層的 闻、另士外,备本發明之畫素電極具有擬導體声23Or二主 3A圖)牯,可進行步驟41〇, 曰230(岣見第 補導體層,並於第二閉極旁二以修 修補導體層將第二閘極與擬導體層電性連接第i :):、由 體層的形成方法例如雷射化學氣相沈積。 八夕補導 $發明因為在同一畫素結構中設計 -個疋在平常狀態下運作,巾當其損 ;::=, 補製程將另一個•用薄膜電晶體取代< 射修 後仍保有主動式的特性與優點。 Μ纟且於修補 發明已以較佳實施例揭露如上,然其並非用以 何熟習此技藝者’在不脫離本發明之精神 可作各種之更動與潤飾,因此本發明之保i 耗圍S視後附之申請專利範圍所界定者為準。10741twf.ptd Page 12 200419275 V. Description of the invention (8) Wiring 2 0 4 and data wiring 2 0 6 Drive Fig. 4 is a flow chart of the preferred structure according to the present invention. Please refer to Figure 4. In the end of the patch that connects the day junction / drain to the data wiring, Yan Di-the source body is not driven by the data wiring, the spleen flute in the basin ^ ^ 彳 更 弟-film binding For example, in the method of -terminal cutting of the crystal connection and λ and Ziyi 420, after a repairing conductor is formed by a laser repairing process, 'the second gate electrode and the scanning wiring are electrically conductive at the step of repairing the conductor layer,', In addition, the film transistor is driven by the scanning wiring and the data wiring, so that the second thin film forming method such as laser chemical vapor deposition is used. One patch repairs the conductor layer. In addition, the pixel electrode of the present invention has a pseudoconductor sound 23Or and two main 3A pictures.), Step 41 can be performed, which is 230 (see the second supplementary conductor layer, and the second The second gate is next to the repaired conductor layer to electrically connect the second gate electrode to the quasi-conductor layer. I :): The formation method of the bulk layer, such as laser chemical vapor deposition. The starry night invention was invented because it is designed in the same pixel structure-a unit works in the normal state, and the towel is damaged; :: =, the replacement process will replace the other with a thin film transistor < still active after the repair The characteristics and advantages of the formula. Μ 纟 And the repairing invention has been disclosed as above with a preferred embodiment, but it is not for those who are familiar with the art. 'It can be modified and retouched without departing from the spirit of the present invention. Therefore, the guarantee of the present invention consumes S Subject to the scope of the attached patent application.

10741twf.ptd 第13頁 200419275 圖式簡單說明 〜__ 苐1A圖至第1C圖為習知一種具有侈、 結構之上視示意圖; 補冗點功效的畫素 第2 A圖至第2 C圖係依照本發明夕 4 ~ -fe λ ^ 結構之上視示意圖; 貫施例之畫素 第3 A圖與第3B圖係依照本發明之修 素結構之上視示意圖;以及 > ?方法修補後的畫 之修補畫素結 第4圖則是依照本發明之一較佳實施例 構的步驟流程圖。 圖式標示說明 1 0 0、2 0 0 :基板 1 0 2、2 1 2、2 2 2 :閘極 1 0 4、2 0 4 :掃瞄配線 1 0 6 :修補配線 108、214、224 :通道層 110a/110b、216a/216b、226a/226b :源極/ 汲極 1 1 2、2 1 0、2 2 0 :薄膜電晶體 1 1 4、2 0 6 :資料配線 1 1 6 :斷路結構 118、218、228、238 :接觸窗 120、240 ·•晝素電極 122 連接處 230 擬導體層 250 連接端10741twf.ptd Page 13 200419275 Simple explanation of the drawings ~ _ 图 Figures 1A to 1C are conventional top-view schematic diagrams with extravagant and structural features; pixels with redundant point effects are shown in Figures 2A to 2C 4 ~ -fe λ ^ structure top view according to the present invention; Figures 3A and 3B of the pixels of the embodiment are top views of the pixel structure according to the present invention; and > after the method is repaired Figure 4 of the repaired pixel structure of the painting is a flowchart of steps constructed in accordance with a preferred embodiment of the present invention. Graphical descriptions: 1 0 0, 2 0 0: substrate 1 0 2, 2 1 2, 2 2 2: gate 1 0 4, 2 0 4: scanning wiring 1 0 6: repair wiring 108, 214, 224: Channel layer 110a / 110b, 216a / 216b, 226a / 226b: source / drain 1 1 2, 2 1 0, 2 2 0: thin film transistor 1 1 4, 2 0 6: data wiring 1 1 6: open circuit structure 118, 218, 228, 238: contact windows 120, 240 · day electrode 122 connection 230 quasi-conductor layer 250 connection

10741twf.ptd 第14頁 200419275 圖式簡單說明 252 :區域 3 1 0、3 2 0 :修補導體層 4 0 0 :將第一源極/汲極與資料配線連接的一端切斷 4 1 0 :藉由一雷射修補製程形成一修補導體層,並藉 由修補導體層將第二閘極與擬導體層電性連接 420 :藉由一雷射修補製程形成一修補導體層,並藉 由修補導體層將第二閘極與掃描配線電性連接10741twf.ptd Page 14 200419275 Simple description of the diagram 252: Area 3 1 0, 3 2 0: Repair conductor layer 4 0 0: Cut off the end where the first source / drain is connected to the data wiring 4 1 0: Borrow A repairing conductor layer is formed by a laser repairing process, and the second gate electrode is electrically connected to the pseudo conductor layer by the repairing conductor layer 420: A repairing conductor layer is formed by a laser repairing process, and the conductor is repaired by Layer electrically connects the second gate to the scanning wiring

10741twf.ptd 第15頁10741twf.ptd Page 15

Claims (1)

200419275 六、申請專利範圍 1 · 一種晝素結構,適於藉由一掃描配線以乃—一 線驅動,該晝素結構包括: 、、’ 貪料配 極盘電晶體’該第-薄膜電晶體具有—第—n 描配線,而;第」及極’其中該第-閘極電性連接於該掃ψ 線· Μ苐一源極/汲極的一端電性連接於該資料配 極盥一? 一薄膜電晶體,該第二薄膜電晶體具有一第二閘 兮^ Γ第二源極/汲極,其中該第二閘極係電性浮置,而 “—源極及極的一端電性連接於該資料配線;以及 一晝素電極,該晝素電極電性連接於該第一源極/淡 極的另一端以及該第二源極/汲極的另一端。 >2 ·如申請專利範圍第1項所述之晝素結構,其中該第 /專膜電ΒΘ體更具有一第一通道層,且該第一通道廣係位 於該第一閘極與該第一源極/汲極之間。 3 ·如申請專利範圍第2項所述之晝素結構,其中該第 一通道層之材質包括非晶矽以及多晶矽其中之一。 a 4·如申請專利範圍第1項所述之畫素結構,其中該/第 二薄膜電晶體更具有一第二通道層,且該第二通道層係位 於該第二閘極與該第二源極/汲極之間。 5 ·如申請專利範圍第4項所述之畫素結構,其中該第 二通道層之材質包括非晶石夕以及多晶石夕其中之一。 片 6 ·如申請專利範圍第1項所述之畫素結構,其中 一薄膜電晶體與該第二薄膜電晶體為頂閘極結構之薄膜電 晶體。200419275 6. Scope of patent application1. A daylight element structure, suitable for driving by a scanning line and a single line, the daylight element structure includes: ', 料 electrode plate transistor', the first thin film transistor has —The —n traces the wiring, and the "and" poles, where the -gate is electrically connected to the scan line, and one end of the source / drain is electrically connected to the data pole. A thin film transistor, the second thin film transistor has a second gate ^ Γ second source / drain, wherein the second gate is electrically floating, and "-" the source and one end of the electrode are electrically Connected to the data wiring; and a celestial electrode, which is electrically connected to the other end of the first source / light electrode and the other end of the second source / drain electrode. ≫ 2 · If applied The daytime element structure described in the first item of the patent scope, wherein the first / special film electric BΘ body further has a first channel layer, and the first channel is widely located between the first gate and the first source / drain. Between poles 3. The daylight structure as described in item 2 of the scope of patent application, wherein the material package of the first channel layer Including one of amorphous silicon and polycrystalline silicon. A 4. The pixel structure according to item 1 of the patent application scope, wherein the / second thin film transistor further has a second channel layer, and the second channel layer system It is located between the second gate and the second source / drain. 5 · The pixel structure described in item 4 of the scope of patent application, wherein the material of the second channel layer includes amorphous stone and polycrystalline One of Shi Xi. Sheet 6 · The pixel structure as described in item 1 of the patent application scope, wherein a thin film transistor and the second thin film transistor are thin film transistors with a top gate structure. 10741twf.ptd 第16頁 200419275 六、申請專利範園 —_______ 一薄膜 晶體‘ 如申請專利範圍第丨項所述 電晶體與該第二薄臈電晶體為-素結構,其中該第 ' ·、、_ g極結構之薄膜電 8. 如申請專利範圍第ljf所述之 擬導體層,其中該擬導體層電性連接-上;構’更包括- 擬導體層位於該第二閘極旁。 $私配線,且該 9. - J申請專利範圍第!項之 包括下列步驟·· 傅幻修補方法, 將該卜源極/沒極與該資料配線連 以使=第-薄膜電晶體不受該資料配線連驅動;而切斷, 補 ^ q3項m系释偁的修補方 極/及極與該資料配線連接的一端切 .斷。 述之晝素結構的修補方 法包括雷射化學氣相沈 之晝素結構的修補方法 藉由一雷射修補製程形修補導體 導體層將該第二閑極與該掃描配線電性連接 薄膜電晶體被該掃描配線與該資料配線驅動。使該弟 1 0.如申請專利_ w Λ A 士 ··…· 法,其中將該第一源一 斷之方法包括雷射燒斷。 11 ·如申請專利範圍之晝素結構 法,其中該修補導體層的形i方-…- 确方 積。 1 2 ·種申睛專利範 包括下列步驟: @ $ δ s 太Ϊ f ΐ 3源極/彡及極與該資科配線連接的一端切斷, 以使f弟一溥膜電晶體不受該資科配線連驅動;以及 藉由田射修補製程形成〆修補導體層,並藉由該修 10741twf.ptd 第17頁 200419275 六、申請專利範圍 補導體層將該第二閘極與該擬導體層電性連接,以使該第 二薄膜電晶體被該掃描配線與該資料配線驅動。 1 3.如申請專利範圍第1 2項所述之畫素結構的修補方 法,其中將該第一源極/汲極與該資料配線連接的一端切 斷之方法包括雷射燒斷。 1 4.如申請專利範圍第1 2項所述之畫素結構的修補方 法,其中該修補導體層的形成方法包括雷射化學氣相沈 積010741twf.ptd Page 16 200419275 VI. Patent Application Park — _______ A thin film crystal 'The transistor described in item 丨 of the patent application and the second thin fluorene transistor have a -primary structure, in which the first, _ Thin-film electricity with g-pole structure 8. The quasi-conductor layer described in Patent Application Scope ljf, wherein the quasi-conductor layer is electrically connected-on; the structure is further included-the quasi-conductor layer is located beside the second gate. $ Private wiring, and the 9.-J patent application scope! The item includes the following steps: · Fu magic repair method, connect the source / non-electrode with the data wiring so that the = th -thin film transistor is not driven by the data wiring; The end of the repair square pole and / or pole connected to the data wiring is cut off. The method for repairing the daytime structure includes a method for repairing the daytime structure of the laser chemical vapor deposition method. The second idler electrode and the scanning wiring are electrically connected to the thin film transistor by a laser repair process to repair the conductor layer. Driven by the scanning wiring and the data wiring. The method of applying the patent 1 0. As described in the patent application method, the method of breaking the first source includes laser burning. 11 · The day-to-day structure method as in the scope of the patent application, wherein the shape of the repaired conductor layer is----the exact square product. 1 2 · This patent application includes the following steps: @ $ δ s Ϊ Ϊ f ΐ 3 The source / 彡 and the end of the electrode connected to the Zike wiring are cut off, so that the f's film transistor is not affected by the Driven by the wiring of the capital department; and the formation of a puppet repair conductor layer by the field shot repair process, and the repair of the 10741twf.ptd page 17 200419275 6. The scope of the patent application for the supplementary conductor layer electrically connects the second gate electrode to the pseudo-conductor layer. Connected so that the second thin film transistor is driven by the scanning wiring and the data wiring. 1 3. The method of repairing a pixel structure as described in item 12 of the scope of the patent application, wherein the method of cutting off the first source / drain connected to the data wiring includes laser blow. 14. The method for repairing a pixel structure as described in item 12 of the scope of the patent application, wherein the method for forming the repaired conductor layer includes laser chemical vapor deposition. 10741twf.ptd 第18頁10741twf.ptd Page 18
TW92107256A 2003-03-31 2003-03-31 Pixel structure and method of repairing the same TW583490B (en)

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