200417450 (1) 玖、發明說明 【發明所屬之技術領域】 本發明是有關印刷基板加工機，將保持工具成自由旋 轉的主軸藉由台架定位於水平方向，使主軸移動到工具之 軸線方向來進行加工。 【先前技術】 第6圖是顯示習知技術印刷基板加工機中之第1主軸裝 置的要部剖面圖。 同圖中，主軸17固定於台架15。在主軸17內部，設有 省略圖示的電動機，來旋轉驅動保持於前端之鑽頭丨6。台 架1 5，隔著導軸承5 1藉由導桿5 2引導於上下方向。導桿5 2 之兩端，隔著支承板5 3固定於橫向滑塊1 1。橫向滑塊1 1， 在垂直於紙面方向自由移動。固定於台架15之螺帽54螺合 於滾珠螺旋1 3。滾珠螺旋1 3，藉由固定於橫向滑塊1 1的馬 達14來旋轉驅動。 而且’使馬達14動作，藉由用來旋轉驅動滾珠螺旋π ，使台架15即鑽頭16上下移動。 第7圖是顯示習知技術印刷基板加工機中之第2主軸裝 置的要部剖面圖，與第6圖相同或同一功能則賦予同一編 號並省略其說明。 主軸1 7，藉由設於台架丨5之空氣軸承6】定位於水平方 向，並且在上下方向自由移動。 前者的情況下，因爲可加大導桿52的剛性，所以加工 (2) (2)200417450 後的孔軸線成爲垂直，可加工成品質優異的孔。可是藉由 使台架1 5上下移動因爲使鑽頭1 7上下動作，所以增加可動 部的重量，必須加大馬達14的容量。又，不能加快加工速 度。 又，後者的情況下，由於僅使主軸1 7上下移動，所以 不僅可減小馬達1 4的容量，而且可加速加工速度。可是， 因爲剛性小，所以使加工後的孔軸線傾斜，使孔品質下降 。又，因爲使用壓縮空氣，所以營運費用變高。 因此，日本特開2002 - 96298號公報所揭示，將保持 工具成自由旋轉的主軸，隔著由旋轉體及保持該旋轉體的 保持板（r e t a i n e r )所構成的直線引導裝置支承於台架， 使作業效率及加工精密度提高，並且可減低營運費用。 【發明內容】 [發明所欲解決之問題] 可是，日本特開2002 - 96298號公報所揭示的技術情 況下，未考慮對於用來防塵的直線引導裝置。 通常，印刷基板加工機在室溫大致固定，且麈埃少的 環境下所使用。又，由於加工產生的加工屑等藉由吸塵裝 置從加工部排出到外部。可是，產生的加工屑等不能完全 排出。因此，由於加工產生的加工屑等會附著在直線引導 裝置，降低加工速度的情況。 又，由於附著的加工屑等會損傷直線引導裝置，降低 加工精密度的情況。 (3) (3)200417450 本發明之目的是，解決上述習知技術的問題，提供一 種不會使加工速度下降，且容易維修檢查的印刷基板加工 機。 [解決問題之手段] 爲了達成上述目的，本發明，將自由旋轉地保持工具 的主軸隔著由旋轉體及保持該旋轉體的保持板所構成的直 線引導裝置而支承於台架，將該台架定位於水平方向，並 且使前述主軸移動於前述工具之軸線方向來進行加工的印 刷基板加工機，其特徵爲：在前述台架配置防塵手段，將 前述直線引導裝置從外部遮斷。 【實施方式】 [發明之實施形態] 以下，將本發明根據圖示之實施形態加以說明。 第1圖是有關本發明印刷基板加工機的斜視圖，與第6 圖相同或同一功能則賦予同一編號並省略其說明。同圖中 ，印刷基板1固定於工作台2上。工作台2將固定於工作床3 之一對直線引導裝置4上，朝前後（X )方向自由移動。馬 達5，將工作台2定位於X方向。 門形的橫軌7跨越工作台2固定於工作床3上。橫向滑 塊1 1，將固定於橫軌7之一對直線引導裝置8上，在左右（ Y )方向自由移動。馬達1 〇及滾珠螺旋9，將橫向滑塊1 1定 位於Y方向。 -8- 200417450 (4) 在橫向滑塊11，固定有馬達14及台架15。在台架15, 主軸1 7自由移動地支承於上下（Z )方向。圖示省略保持 於主軸1 7之螺帽是螺合在滾珠螺旋1 3。控制裝置1 8用來控 制各部動作。 第2圖是將台架1 5沿著鑽頭1 6之旋轉軸線0的剖面圖 。又第3圖是第2圖中的A部放大圖，第4圖是金屬板71的 平面圖。 在主軸1 7外圍，固定有將剖面形成八角形的外罩20。 在台架15，形成與外罩20相似形的孔15a。在外罩20之外 面20a及孔15a的內面15η之間，配置有直線引導裝置19。 直線引導裝置19由圓筒滾輪19a及自由旋轉地支承圓筒滾 輪19a的保持板（retainer ) 19b所構成。圓筒滾輪19a，在 附加預壓的狀態下，接觸於外面20a及內面1 5n。在保持板 19b上下方向的中央固定有銷25。在對置於銷25之內面15η ，設置溝15b。溝15b，軸線連通於與軸線〇平行的孔15c 。在銷25和密封單元70及下蓋85之間，分別配置螺旋彈簧 21、22。螺旋彈簧21、22的規格爲一樣，彈簧定數爲k， 自由長度僅比銷25和密封單元70及下蓋85的距離Μ較長m 爲M + m。即，當主軸17 (即外罩20 )在基準位置時’螺旋 彈簧2 1、22，僅壓縮m的狀態下，分別以力量彈推銷25 ° 在台架1 5之上端配置有密封單元7〇。密封單元70 ’如 第3圖所示，由金屬板7 1、承受板7 2、軟性滑動片7 3、防 塵器74、及，上蓋75所構成。 如第4圖所示，在金屬板7 1，形成有內徑大致等於外 -9- 200417450 (5) 罩20之內接圓，外徑大致等於外罩20之外接圓圓形的機油 溝80。機油供給孔82將軸線爲中心在點對稱位置配置2個 ，連通金屬板7 1外圍側及機油溝8〇。在機油溝80內側之側 面形成缺口 82a、82b。缺口 82a、82b是合對於直線引導裝 置19的中心所形成，其面積從機油供給孔82遠離因此形成 很大（即，缺口 82b面積比缺口 82a面積更大）。金屬板 71藉由省略圖示螺栓固定於台架15上端。又，在機油供給 孔82螺合著省略圖示的機油噴嘴。 承受板72，堵住機油溝80，並且用來防止軟性滑動片 73的變形。在承受板72之內面72a及外罩20之間設有Ο-ΐ m m 的間 隙。 軟性滑動片73以油毛氈系材料所形成，預先在內部含 有機油。軟性滑動片73的內面73a形成無間隙接觸於外罩 20 〇 防塵器74譬如以氟樹脂系材料所形成，在內面74a及 外罩20之間設有間隙0 · 1mm。防塵器74用來防止軟性滑 動片7 3的變形，並且用來防止在軟性滑動片7 3之前比0 · 1 m m更大加工屑進入到台架1 5內部。 上蓋75，隔著省略圖示的螺栓，匯整承受板72、軟性 滑動片73、防塵器74固定於金屬板71。 在台架1 5下端配置下蓋85。在下蓋85內徑側上下方向 形成2段圓周方向溝，在上段（接近外罩20側）裝著軟性 滑動片73，或在下段側裝著防塵器74。下蓋85藉由省略圖 示的螺栓固定於台架]5下端。在下蓋85上面形成有機油積 -10- 200417450 (6) 存部8 5 a。 在外罩2 0側面，形成有定位孔9 〇。在定位孔9 0外側’ 形成有螺釘孔9 1。 螺釘孔9 1，在內部螺合保持過濾器92的過濾器單元93 〇 其次，對於將直線引導裝置19及外罩20組裝於台架15 的順序加以說明。此外，預先在台架1 5固定下蓋8 5放著。 如第5圖所示，在定位孔90插入定位桿1〇〇 ’在這種狀 態下，將直線引導裝置19使下端19a抵接於定位桿100之前 插入孔1 5 a。 其次，使外罩20下端抵接於最上段的圓筒滾輪1 9a ’ 在這種狀態下，將定位桿100從定位孔90拔出。於是，外 罩20—邊引導於直線引導裝置19，一邊與直線引導裝置19 同時對於台架1 5定位於適當位置。將直線引導裝置1 9上端 比外罩20上端更低的狀態下，將密封單元70固定於台架15 。又，使過濾器單元93螺合於螺釘孔91。 其次，將本實施形態的動作加以說明。 藉由馬達使滾珠螺旋13旋轉，則外罩20對於台架15移 動於上下方向。當下降外罩20時，附著於外罩20外圍的加 工屑等之中，大的加工屑藉由防塵器74被除去。又，藉由 防塵器74被除去的加工屑等，藉由軟性滑動片73確實除去 ，不會進入到台架1 5內部。 又，夾在外罩20及下蓋85之間的空間內空氣，通過溝 1.5b，通過定位孔90及過濾器單元93排出到台架15外咅β， -11 - 200417450 (7) 所以不會降低外罩20的移動速度。 又，使外罩20上昇，則附著於外罩20外圍的加工屑等 之中，大的加工屑藉由配置於下蓋的防塵器74被除去。又 ，藉由防塵器74被除去的加工屑等，藉由軟性滑動片73確 實除去，不會進入到台架15內部。 又，夾在外罩20及密封單元70之間的空間內是成爲負 壓，但通過定位孔90及過濾器單元93外部的空氣供給到台 架15內部，所以不會降低外罩20的移動速度。而且，供給 到台架丨5內部的空氣，通過過濾器單元93供給到台架1 5內 部，所以加工屑等不會進入到台架1 5內部。 可是，使外罩20 (即主軸1 7 )從基準位置僅移動L距 離到下方，則直線引導裝置1 9僅移動L / 2距離到下方。 如眾所周知，由圓筒滾輪19a及保持板19b所構成直 線引導裝置19的情況下，重複移動，則對於外罩20或台架 15會使直線引導裝置19位置偏移。 即，當使主軸17僅移動L距離時，若不使圓筒滾輪 1 9a及外面1 7a或內面1 5n之間滑動的話，則保持板僅移動 L / 2距離，但實際上因爲產生微小的滑動，所以通常，在 重複移動之中形成顯著的滑動。 可是，本實施形態，因爲如以下的動作，所以直線引 導裝置1 9的位置不會偏移。 即，現在，在圓筒浪輪1 9 a及外面1 7 a或內面1 5 η之間 產生△ ζ距離的滑動，則直線引導裝置1 9對於外罩20僅在 圖下方滑動△ ζ距離。這種情況下，彈簧2 2以k ( m + △ ζ -12- 200417450 (8) )力量將銷2 5彈推於上方。其中一方，彈簧2 1由於會延伸 ，所以以k ( m + △ z )力量將銷25彈推於下方。這樣結 果，銷25以z力量彈推於上方，直線引導裝置19返回 到基準位置，則銷25返回到當初位置。 如以上說明，直線引導裝置1 9修正每次返回到基準位 置的位置，對於外罩20及台架15不會產生滑動。 本實施形態，兼用用來定位直線引導裝置1 9的定位孔 9 0及抽氣孔，所以可減少加工之孔數。 又，設置定位孔90，所以譬如使用者交換直線引導裝 置1 9的情況下，可確實且容易進行作業。 進而，在金屬板71設置機油溝80，通過缺口 82a、82b 來供給機油到直線引導裝置1 9內，所以對於直線引導裝置 1 9數遠少於機油供給部位，，容易維修作業。 此外，將抽氣孔不與定位孔90共用，所以亦可設於其 他位置。 [發明效果] 如以上說明，若依據本發明，則將自由旋轉地保持工 具的主軸隔著由旋轉體及保持該旋轉體的保持板所構成直 線引導裝置使支承於台架，將該台架定位於水平方向，並 且使前述主軸移動於前述工具的軸線方向進行加工的印刷 基板加工機中，在前述台架配置防塵手段，並將前述直線 引導裝置從外部遮斷，所以不會使加工速度降低。又，容 易維修檢查。 -13- 200417450 Ο) 【圖面之簡單說明】 % 1圖是有關本發明印刷基板加工機的斜視圖。 第2圖是將台架1 5沿者鑽頭1 6的旋轉軸線〇之剖面圖 〇 第3圖是第2圖中的A部放大圖。 第4圖是金屬板71的平面圖。 第5圖是將直線引導裝置19及外罩20組裝於台架15順 序的說明圖。 第6圖是前先技術的說明圖。 第7圖是前先技術的說明圖。 [圖號說明] 15…台架， 1 7…主軸， 19…直線引導裝置， 1 9a…圓筒滾輪， 1 9b…保持板， 2 0…外罩， 70…密封單元， 73…軟性滑動片， 7 4…防塵器， 85…下蓋。200417450 (1) 发明. Description of the invention [Technical field to which the invention belongs] The present invention relates to a printed circuit board processing machine. A spindle that holds a tool to rotate freely is positioned in a horizontal direction by a table, and the spindle is moved to the axis of the tool For processing. [Prior Art] Fig. 6 is a cross-sectional view showing a main part of a first spindle device in a conventional printed circuit board processing machine. In the same figure, the main shaft 17 is fixed to the stage 15. A motor (not shown) is provided inside the main shaft 17 to rotationally drive a drill bit 6 held at the front end. The stage 15 is guided in a vertical direction by a guide rod 5 2 via a guide bearing 5 1. Both ends of the guide rod 5 2 are fixed to the lateral slider 11 through the support plate 5 3. The horizontal slider 1 1 moves freely in a direction perpendicular to the paper surface. A nut 54 fixed to the stand 15 is screwed to the ball screw 1 3. The ball screw 1 3 is rotationally driven by a motor 14 fixed to the lateral slider 11 1. Furthermore, the motor 14 is operated, and the ball screw π is rotated to drive the stage 15 and the drill 16 up and down. Fig. 7 is a cross-sectional view showing a main part of a second spindle device in a conventional printed circuit board processing machine. The same or same functions as those in Fig. 6 are given the same reference numerals and descriptions thereof are omitted. The main shaft 17 is positioned in a horizontal direction by an air bearing 6] provided on the stand 5 and can move freely in the vertical direction. In the former case, since the rigidity of the guide rod 52 can be increased, the hole axis after machining (2) (2) 200417450 becomes vertical, and a hole of excellent quality can be machined. However, by moving the gantry 15 up and down because the drill 17 is moved up and down, the weight of the movable portion is increased, and the capacity of the motor 14 must be increased. In addition, the processing speed cannot be accelerated. In the latter case, since only the main shaft 17 is moved up and down, not only the capacity of the motor 14 can be reduced, but also the processing speed can be accelerated. However, because the rigidity is small, the hole axis after machining is inclined, and the hole quality is reduced. Moreover, since compressed air is used, the operating cost becomes high. Therefore, Japanese Patent Application Laid-Open No. 2002-96298 discloses that a holding tool is a main shaft that can rotate freely, and is supported by a stand via a linear guide device composed of a rotating body and a retainer that holds the rotating body, so that Improved operating efficiency and processing precision, and can reduce operating costs. [Summary of the Invention] [Problems to be Solved by the Invention] However, in the case of the technique disclosed in Japanese Patent Application Laid-Open No. 2002-96298, no consideration is given to a linear guide device for dust prevention. Generally, the printed circuit board processing machine is used in an environment where the room temperature is approximately constant and the angstrom is small. In addition, the machining chips and the like generated by the machining are discharged from the machining section to the outside by the vacuum cleaner. However, the generated chips and the like cannot be completely discharged. As a result, machining chips and the like generated during machining may adhere to the linear guide, thereby reducing the machining speed. In addition, the linear guide may be damaged due to adhered machining chips and the like, and the precision of machining may be reduced. (3) (3) 200417450 The object of the present invention is to solve the problems of the conventional techniques described above, and to provide a printed circuit board processing machine that does not reduce processing speed and is easy to maintain and inspect. [Means for Solving the Problem] In order to achieve the above object, the present invention supports a main shaft of a tool that is rotatably held on a table via a linear guide device composed of a rotating body and a holding plate that holds the rotating body, The printed circuit board processing machine which is positioned in a horizontal direction and moves the main shaft in the axial direction of the tool to perform processing is characterized in that a dustproof means is arranged on the stage to block the linear guide from the outside. [Embodiment] [Embodiment of Invention] Hereinafter, the present invention will be described based on the embodiment shown in the drawings. FIG. 1 is a perspective view of a printed circuit board processing machine according to the present invention. The same or the same functions as those in FIG. 6 are assigned the same reference numerals and descriptions thereof are omitted. As shown in the figure, the printed circuit board 1 is fixed on the table 2. The workbench 2 will be fixed on a pair of linear guides 4 of the workbench 3 and can move freely in the forward and backward (X) direction. Motor 5, position table 2 in the X direction. A gate-shaped cross rail 7 is fixed on the work bed 3 across the work table 2. The lateral sliding block 11 is fixed on a pair of linear guides 8 of the cross rail 7 and moves freely in the left-right (Y) direction. The motor 10 and the ball screw 9 position the lateral slider 11 in the Y direction. -8- 200417450 (4) The motor 14 and the stand 15 are fixed to the horizontal slider 11. On the stage 15, the main shaft 17 is movably supported in the up-down (Z) direction. The nut held on the main shaft 17 is omitted in the figure and is screwed onto the ball screw 1 3. The control device 18 is used to control the operation of each part. FIG. 2 is a sectional view of the stage 15 along the rotation axis 0 of the drill 16. Fig. 3 is an enlarged view of part A in Fig. 2, and Fig. 4 is a plan view of the metal plate 71. An outer cover 20 having an octagonal cross section is fixed to the periphery of the main shaft 17. A hole 15 a having a shape similar to that of the cover 20 is formed in the stage 15. A linear guide 19 is arranged between the outer surface 20a of the cover 20 and the inner surface 15η of the hole 15a. The linear guide 19 includes a cylindrical roller 19a and a retainer 19b that rotatably supports the cylindrical roller 19a. The cylindrical roller 19a is in contact with the outer surface 20a and the inner surface 15n under a preloaded state. A pin 25 is fixed to the center of the holding plate 19b in the vertical direction. A groove 15b is provided on the inner surface 15η opposite to the pin 25. The groove 15b has an axis communicating with a hole 15c parallel to the axis 0. Between the pin 25 and the sealing unit 70 and the lower cover 85, coil springs 21 and 22 are arranged, respectively. The specifications of the coil springs 21 and 22 are the same, the spring constant is k, and the free length is only longer than the distance M between the pin 25 and the seal unit 70 and the lower cover 85, and m is M + m. That is, when the main shaft 17 (i.e., the cover 20) is at the reference position, the coil springs 21, 22 are compressed only by m, and the sealing unit 70 is arranged at the upper end of the stage 15 with a force spring push pin 25 °, respectively. As shown in Fig. 3, the sealing unit 70 'is composed of a metal plate 71, a receiving plate 7 2, a soft sliding piece 7 3, a dust protector 74, and an upper cover 75. As shown in FIG. 4, the metal plate 71 is formed with an inner diameter approximately equal to the outer diameter. -9-200417450 (5) The inner diameter of the cover 20 is approximately equal to the outer diameter, and the outer diameter of the outer diameter of the outer diameter of the outer cover 20 is substantially equal to the circular shape of the oil groove 80. The two oil supply holes 82 are arranged at a point-symmetrical position with the axis as the center, and communicate with the outer side of the metal plate 71 and the oil groove 80. Notches 82a, 82b are formed on the inner side of the oil groove 80. The notches 82a and 82b are formed in conjunction with the center of the linear guide 19, and their areas are far away from the oil supply hole 82 and are therefore large (that is, the area of the notch 82b is larger than the area of the notch 82a). The metal plate 71 is fixed to the upper end of the stand 15 by bolts (not shown). An oil nozzle (not shown) is screwed into the oil supply hole 82. The receiving plate 72 blocks the oil groove 80 and prevents deformation of the flexible sliding piece 73. A gap of 0-ΐm m is provided between the inner surface 72a of the receiving plate 72 and the cover 20. The soft sliding sheet 73 is made of a linoleum-based material, and contains an organic oil in advance. The inner surface 73a of the flexible sliding sheet 73 is in contact with the cover 20 without a gap. The dust protector 74 is made of, for example, a fluororesin-based material, and a gap of 0.1 mm is provided between the inner surface 74a and the cover 20. The dust protector 74 is used to prevent deformation of the soft sliding sheet 73, and to prevent machining chips larger than 0 · 1 mm from entering the inside of the stage 15 before the soft sliding sheet 73. The upper cover 75 is fixed to the metal plate 71 via a bolt (not shown) through a collection receiving plate 72, a flexible sliding piece 73, and a dust protector 74. A lower cover 85 is arranged at the lower end of the stage 15. Two circumferential grooves are formed in the up-down direction on the inner diameter side of the lower cover 85, and a soft sliding sheet 73 is installed on the upper section (close to the cover 20 side), or a dust protector 74 is installed on the lower section side. The lower cover 85 is fixed to the lower stage by bolts (not shown). Organic oil deposits are formed on the lower cover 85 -10- 200417450 (6) The storage section 8 5 a. Positioning holes 90 are formed on the side of the cover 20. A screw hole 91 is formed on the outer side of the positioning hole 90. The screw hole 91 is screwed to hold the filter unit 93 of the filter 92 therein. Next, the procedure for assembling the linear guide 19 and the cover 20 to the stage 15 will be described. In addition, the lower cover 85 is fixed to the stand 15 in advance and placed. As shown in FIG. 5, the positioning lever 100 is inserted into the positioning hole 90. In this state, the linear guide 19 is inserted into the hole 15a before the lower end 19a abuts the positioning lever 100. Next, the lower end of the cover 20 is brought into contact with the uppermost cylindrical roller 19a '. In this state, the positioning rod 100 is pulled out from the positioning hole 90. Then, the cover 20 is positioned at a proper position on the stage 15 at the same time as the linear guide 19 while being guided by the linear guide 19. With the upper end of the linear guide 19 lower than the upper end of the cover 20, the sealing unit 70 is fixed to the stage 15. The filter unit 93 is screwed into the screw hole 91. Next, the operation of this embodiment will be described. When the ball screw 13 is rotated by the motor, the cover 20 moves in the up-down direction with respect to the stage 15. When the cover 20 is lowered, among the machining chips and the like adhered to the periphery of the cover 20, large machining chips are removed by the dust protector 74. In addition, the machining chips and the like removed by the dust preventer 74 are surely removed by the soft sliding sheet 73 and do not enter the inside of the stage 15. In addition, the air sandwiched between the cover 20 and the lower cover 85 is exhausted through the groove 1.5b, through the positioning hole 90 and the filter unit 93 to the outside of the stand 15 咅 β, -11-200417450 (7) The moving speed of the cover 20 is reduced. When the cover 20 is raised, among the machining chips and the like adhered to the periphery of the housing 20, large machining chips are removed by the dust protector 74 disposed on the lower cover. In addition, the machining chips and the like removed by the dust preventer 74 are surely removed by the soft sliding piece 73 and do not enter the inside of the stand 15. The space sandwiched between the cover 20 and the sealing unit 70 becomes a negative pressure. However, the air outside the positioning hole 90 and the filter unit 93 is supplied to the inside of the gantry 15, so that the moving speed of the cover 20 is not reduced. Furthermore, the air supplied to the inside of the stage 15 is supplied to the inside of the stage 15 through the filter unit 93, so that the machining chips and the like do not enter the inside of the stage 15. However, when the housing 20 (ie, the main shaft 17) is moved from the reference position by only L distance to the lower side, the linear guide 19 is moved only by L / 2 distance to the lower side. As is well known, in the case where the linear guide 19 is composed of the cylindrical roller 19a and the holding plate 19b, the linear guide 19 is shifted in position with respect to the housing 20 or the stage 15 when the movement is repeated. That is, when the main shaft 17 is moved only by a distance of L, if the cylindrical roller 19a and the outer surface 17a or the inner surface 15n are not caused to slide, the holding plate is moved only a distance of L / 2, but it is actually slightly , So usually, a significant slip is formed during repeated movements. However, in this embodiment, the position of the linear guide 19 is not shifted because it operates as follows. That is, at present, a sliding distance of Δζ occurs between the cylindrical wave wheel 19a and the outer surface 17a or the inner surface 15n. Then, the linear guide 19 for the housing 20 only slides the Δζ distance below the figure. In this case, the spring 2 2 pushes the pin 2 5 upward with a force of k (m + Δ ζ -12-200417450 (8)). On one side, since the spring 21 is extended, the pin 25 is pushed downward by k (m + Δz). As a result, the pin 25 is pushed upward with z-force, the linear guide 19 returns to the reference position, and the pin 25 returns to the original position. As described above, the linear guide device 19 corrects the position returned to the reference position each time, so that the cover 20 and the stand 15 do not slip. In this embodiment, since the positioning holes 90 and the exhaust holes for positioning the linear guide 19 are used simultaneously, the number of holes to be processed can be reduced. Further, since the positioning hole 90 is provided, for example, when the user exchanges the linear guide device 19, the operation can be performed reliably and easily. Furthermore, the oil groove 80 is provided in the metal plate 71, and the oil is supplied into the linear guide 19 through the notches 82a and 82b. Therefore, the number of linear guides 19 is far less than the oil supply portion, and maintenance work is easy. In addition, since the suction hole is not shared with the positioning hole 90, it may be provided at another position. [Effects of the Invention] As described above, according to the present invention, the main shaft of the tool which is rotatably held is supported on a stand via a linear guide device composed of a rotating body and a holding plate holding the rotating body, and the stand is supported. In a printed circuit board processing machine that is positioned in a horizontal direction and moves the main shaft in the axial direction of the tool, the stage is equipped with dust-proof means and the linear guide device is blocked from the outside, so the processing speed is not reduced. reduce. In addition, it is easy to maintain and inspect. -13- 200417450 〇) [Simplified description of the drawing]% 1 is a perspective view of a printed circuit board processing machine according to the present invention. Fig. 2 is a cross-sectional view of the stage 15 along the rotation axis 0 of the drill bit 16. Fig. 3 is an enlarged view of part A in Fig. 2. FIG. 4 is a plan view of the metal plate 71. Fig. 5 is an explanatory diagram of a sequence of assembling the linear guide 19 and the cover 20 to the stage 15. Fig. 6 is an explanatory diagram of the prior art. Fig. 7 is an explanatory diagram of the prior art. [Explanation of drawing number] 15 ... bench, 1 7 ... spindle, 19 ... linear guide, 1 9a ... cylinder roller, 19b ... retaining plate, 2 ... cover, 70 ... sealing unit, 73 ... soft slide, 7 4 ... Dustproof, 85 ... Under cover.