TW200410387A - Routing layout of multi-layer metal lines - Google Patents

Abstract

A routing layout of multi-layer metal lines is disclosed. In the routing layout, one layer of metal lines is set vertically, and the other layers of metal lines are stacked and set horizontally, and between every two stacked metal lines there is a channel reserved. Then, vias or contact holes are put on the channel between every two stacked metal lines, thereby reducing the area of the routing layout.

Description

200410387 V. Description of the invention (1) The technical field to which the invention belongs: The present invention relates to a routing layout of a multilayer metal wire, and more particularly to a device having a winding layout area that can reduce the winding layout area and improve the speed of component operation. The winding layout of multilayer metal wires. Prior art: Please refer to Figs. 1 to 3 at the same time, wherein Fig. 1 is a top view showing a winding layout of a conventional multilayer metal, and Fig. 2 is a drawing along a section line I -1 of Fig. 1 The obtained cross-sectional view, and FIG. 3 is a cross-sectional view obtained along the cross-sectional line Π-Π of FIG. 1. In this multilayer metal winding layout 100, there are a total of six layers of metal. The first metal wire 102 of the first layer and the second metal wire 104 of the second layer are separated by an insulating layer 11 4. The second metal wire 104 of the second layer and the third metal wire 106 of the third layer are separated by the insulating layer 116, and the third metal wire 106 of the third layer and the fourth metal wire of the fourth layer The four metal wires 108 are separated by an insulating layer 118, the fourth metal wire 108 of the fourth layer and the fifth metal wires 110 of the fifth layer are separated by an insulating layer 120, and The fifth metal wire 110 of the fifth layer and the sixth metal wire 112 of the sixth layer are separated by an insulating layer 1 2 2. In addition, every two first metal wires 102 are separated by an insulating material 103, every two second metal wires 104 are separated by an insulating material 105, and every two third metal wires 1 0 6 are separated by an insulating material 1 0 7, every two fourth metal wires 1 0 8 are separated by an insulating material 1 0 9, and every two fifth metal wires 11 0 are separated by an insulating material 111. Each of the two sixth metal wires 11 2 is separated by an insulating material 11 3. Among them, all the first metal wires 102 are parallel to each other, all the second metal wires 104 are parallel to each other, all the third metal wires 106 are parallel to each other, and all the fourth metal wires 108 are parallel to each other, All fifth metal wires 11 0 are level with each other

200410387 V. Description of the invention (2) Row and all sixth metal wires 1 1 2 are parallel to each other. In addition, the third metal line 106 is stacked above the first metal line 102, the fifth metal line 110 is stacked above the third metal line 106 and the first metal line 102, and the fourth metal The lines 108 are stacked on the second metal line 104, and the sixth metal lines 1 12 are stacked on the fourth metal line 108 and the second metal line 104. That is, the first metal line 102, the third metal line 106, and the fifth metal line I 1 0 are parallel to each other, and the second metal line 104, the fourth metal line 108, and the sixth metal line 11 2 are parallel to each other. On the other hand, the first metal line 102, the third metal line 106, and the fifth metal line 110 and the second metal line 104, the fourth metal line 108, and the sixth metal line 1 1 2 Perpendicular to each other. When the first signal is to be transmitted between two elements, if the first signal of one element is transmitted by one of the first metal wires 102 of the first layer, and the first signal of the other element is transmitted by If one of the fourth metal wires 10 8 of the fourth layer is transmitted, a conductive plug 124 needs to be provided in the insulating layer II 8 below the fourth metal wire 108 to electrically connect the fourth metal wire. 108 与 third metal wire 106. Next, a conductive plug 1 2 6 is disposed in the insulating layer 11 6 below the third metal line 106 and above the second metal line 104, so as to electrically connect the third metal line 106 and the second metal line. 1 0 4. Then, a conductive plug 1 2 8 is disposed in the insulating layer 11 4 below the second metal wire 104, and the second metal wire 104 and the first metal wire 102 are electrically connected to each other, so as to form as shown in FIG. 4.示 的 结构。 Show structure. In this way, the transmission of the first signal between the two components can pass through the fourth metal wire 108, the conductive plug 124, the third metal wire 106, the conductive plug 126, and the second metal wire 104 electrically connected as described above. , A conductive plug 128, and a first metal wire 102.

200410387 V. Description of the invention (3) However, if there is a short circuit in the middle element. When it touches a metal wire, it will cause a short circuit if it is short-circuited. This will increase the operating speed. This third metal wire shown in Figure 4 is used to pass the second signal of 1. Time, it will cause the first signal and the second air shovel to be unable to carry out the transmission of the first signal and the second signal. In this situation, because of the plug system for electrical connection =, Therefore, the conductive plug 124 and the conductive plug 丄 must be selected from the third layer of the third metal wires 106 of the third layer ^ will not make the third metal wire 1 06, and then the entire signal is wound to jump to Only on the third metal wire 106, which can not pass, can the signal be effectively transmitted. However, the jumper wiring method not only causes damage to the entire winding layout area, but also reduces the component due to the longer winding distance, which seriously affects the performance of the component. In the above-mentioned practice, a multilayer metal wire winding layout in which a via or a contact window is arranged on a metal wire will cause a loss of layout area, which will increase the winding area, and then affect the operation speed of the component. Therefore, one of the main objectives of the present invention is to provide a winding layout of multilayer metal wires. One layer of metal wires and the stacked metal wires of the other layers are arranged vertically, and then disposed between each two stacked metal wires. One channel, and vias or contact windows are placed on these channels. Since the vias or contact windows are not located on the metal lines, the loss of the layout area can be avoided 'and the winding area can be reduced. Another object of the present invention is that the winding layout of the multilayer metal wire of the present invention is to place a via window or a contact window on the channel between each two stacked metal wires, so that the winding area can be effectively reduced, thereby improving Operating speed of components

Page 7 200410387 V. Description of Invention (4) Degree. According to the above purpose, the present invention further provides a winding layout of a multilayer metal wire for connecting a plurality of signal lines of a plurality of components, and the winding layout of the multilayer metal wire includes at least: a plurality of first metals A wire layer, wherein each first metal wire layer includes at least a plurality of first metal wires parallel to each other, and the first metal wire of each first metal wire layer and the first metal wires in the remaining first metal wire layers Stacked on each other; a second metal line layer, wherein the second metal line layer includes at least a plurality of second metal lines parallel to each other, and the second metal lines are perpendicular to the first metal line, and the second metal line Layers are stacked with the first metal line layer described above; a plurality of channels are located beside each of the two first metal lines of the first metal line layers; and a plurality of via windows are located on the channels, where the via windows may be, for example, The vias are stacked in multiple layers to expose portions of the second metal lines. The second metal line layer may be stacked above, below, or in the middle of the first metal line layer. Moreover, the above-mentioned interlayer window further has a conductive plug, which can be electrically connected to the above-mentioned second metal line. In addition, the winding layout of the multi-layer metal wire further includes a plurality of connecting wires located in the first metal wire layer, so as to electrically connect the first metal wires and the conductive plugs in the interlayer window respectively, and The first metal line and the second metal line can be electrically connected through the above-mentioned conductive plugs, respectively, and the signal lines of the above components can be connected together. When connecting the signal lines of the component, according to the layout of the signal line, between the first metal line of the first metal line layer where a component signal line is located and the conductive plug in the interlayer window next to the first metal line , Set the cable, you can get this signal

200410387 V. Description of the invention (5) The first metal line where the line is located and the second metal line where the signal line of another component is located are electrically connected to the second metal line on the layer. '' Because the multi-layered wire of the present invention belongs to the wire, there is no need for a winding distance, and the winding layout of the metal wire which shortens the operating speed of the component is reduced to prevent short-circuits, and the winding area is small to achieve and shrink the 0-layer window It is not located on the gold wire, but can shorten the layout area and improve the implementation: The present invention discloses a multilayer metal, wire, and winding layout, which has the advantages of reducing the layout area and the winding distance, and can improve components. Operating performance. In order to make the description of the present invention more complete and complete, reference may be made to the following descriptions in conjunction with the diagrams in FIGS. 5 to 8. Please refer to FIG. 5 to FIG. 7 together, where FIG. 5 is a top view of a winding layout of a multilayer metal according to a preferred embodiment of the present invention, and FIG. 6 is a cross-section line along FIG. 5 The cross-sectional view obtained by melon_melon, and FIG. 7 is a cross-sectional view obtained along the section line w-IV of FIG. 5. In the multilayer metal winding layout 200 of the present invention, there are a total of six layers of metal. The first metal line 202 of the first layer and the second metal line 204 of the second layer are separated by an insulating layer 214. The second metal line 204 is separated from the third layer third metal line 206 by an insulating layer 216, and the third layer third metal line 206 and the fourth layer fourth metal line 208 are separated by The insulating layer 218 is separated, the fourth metal line 208 in the fourth layer and the fifth metal line 2 10 in the fifth layer are separated by the insulating layer 2 2 0, and the fifth metal line 210 in the fifth layer It is separated from the sixth metal line 212 of the sixth layer by the insulating layer 222. In addition, every two first metal wires 200 are separated by an insulating material 203, and every two second metal wires 200 are separated by an insulating material 205.

200410387 V. Description of the invention (6) 'On, each second metal wire 206 is separated by an insulating material 207, and every two fourth metal wire 208 is separated by an insulating material 2 009 On, every two fifth metal wires 2 1 0 are separated by an insulating material 2 11, and every two sixth metal wires 2 2 are separated by an insulating material 213. Among them, all the first metal wires 202 are parallel to each other, all the second metal wires 20 4 are parallel to each other, all the third metal wires 2 06 are parallel to each other'all the fourth metal wires 2 08 are parallel to each other, all The fifth metal lines 2 1 0 are parallel to each other, and all the sixth metal lines 2 2 are parallel to each other.

In addition, the third metal line 206 is stacked on the second metal line 208, the fourth metal line 208 is stacked on the third metal line 206, and the fifth metal line 2 10 is stacked on the fourth metal The line 2 0 8 is above, and the sixth metal line 2 1 2 is stacked above the fifth metal line 210. That is, the second metal line 204, the third metal line 206, the fourth metal line 208, the fifth metal line 210, and the sixth metal line 21 2 are stacked and parallel to each other. On the other hand, the first metal line 202 and the second metal line 204, the second metal line 206, the fourth metal line 208, the fifth metal line 210, and the sixth metal line 21 2 are perpendicular to each other.

In addition, in the second, third, fourth, fifth, and sixth metal lines of the metal line stack, there are channels 224 beside each two metal lines. In other words, a channel 2 24 is provided beside every two sixth metal wires 21 2, as shown in FIG. 5. Since each sixth metal line 212 is stacked on the fifth metal line 2 10, each fifth metal line 2 is stacked on the fourth metal line 208, and each fourth metal line 208 is stacked On the third metal line 206 'and each third metal line 206 is stacked on the second metal line 204, so the channel 22 4 is also located at every two fifth metal lines 210, every two Fourth gold

Page 10 200410387 V. Description of the invention (7) ^ Belonging to line 2 0 8, every two third metal lines 2 06, and every two second metal lines 2 0 4. That is, the channel 2 2 4 extends from the sixth metal line 2 1 2 of the sixth layer to the second metal line 204 of the first layer until the second metal line 2 0 4 of the second layer, such as Figure 7 shows. Please refer to FIG. 5 and FIG. 7 again, a plurality of interlayer windows 226 are provided on the channel 2 2 4, wherein these interlayer windows 22 6 are multilayer stacking interlayer windows, that is, these interlayer windows 22 6 The layer from the sixth metal line 21 2 above the channel 22 4 passes through in the direction of the layer from the first metal line 202 until a portion of the first metal line 202 is exposed. A conductive material is filled in the interlayer windows 22 6 to form conductive plugs 228, and the conductive plugs 228 are electrically connected to the first metal lines 202 exposed by the interlayer windows 22 6. 'Between two elements' assuming that the first signal of one of the elements is transmitted by one of the first metal wires 202 of the first layer, and the first signal of the other element is by the fifth metal wire of the fifth layer One of 2 1 0 was passed. Therefore, when the first signal is to be transmitted between the two components, it is only necessary to change the area of the channel 224 between the fifth metal line 210 and the interlayer window 226 to a connection line 2 3 0, as shown in FIG. The structure shown in FIG. 8, wherein the connection line 2 3 0 is electrically connected to the fifth metal line 2 10 and the conductive plug 2 2 8 respectively. Therefore, the first signal between the two components can be effectively transmitted through the fifth metal wire 2 1 0, the connecting wire 2 3 0, and the conductive plug 2 2 8. Since the conductive plug 228 is independent of the area other than the metal wire, the required metal wire can be electrically connected to the conductive plug 228 according to the needs of signal transmission, which is quite convenient and easy. . Therefore, it not only has a quite southern application, but also saves the winding area increased by the jumper.

Page 11 200410387 V. Explanation of the invention In order to achieve the reduction in the interlayer window of the present invention, the other component of the connected component only needs to be °. Here the implementation layer is located to take several layers of metal as an example, and the above can be combined. The winding of the wire is quite high, high, and more layable area. If you are familiar with other unreleased parts of this preferred embodiment, you should (8) the purpose of the winding area. In the preferred embodiment, though, the interlayer window of the present invention may also be area. For example, if the second signal is from the first layer of metal, the second signal is from the third layer, and the interlayer window runs through the third layer to the example, although the number of stacked metal lines is clear, The present invention does not limit the vertical metal lines which can be located in several layers of the metal. The advantages of the present invention are that the layout of the interlayer window is not located and there is no jumper problem, which effectively reduces the winding distance and Those skilled in the art of speeding up the operation of components understand, but are not intended to limit the spirit disclosed in the present invention. The interlayer windows owned by the following patents are multi-layered and stacked in accordance with the needs of signal transmission. Suppose that one of the wires is passed and one of the wires is passed between the first layer, that is, the channel area between the first layers, that is, the layer of the wire is perpendicular to one of the wires. However, the above is only used. In the present invention, it is between the upper lines of several layers of metal wires stacked in this stack. It is because the multilayer metal wire of the present invention has a flexible layout. Therefore, not only the applicability of the winding area, but also the purpose of reduction. The above is only the scope of patent application for the comparative inventions of the present invention; all equivalent changes or repairs completed below. 200410387 Schematic illustration of the preferred embodiment of the present invention has been described in more detail in the preceding explanatory text with the following figures, where: Figure 1 is a top view showing the winding layout of a conventional multilayer metal; Fig. 2 is a sectional view obtained along the section line I -1 of Fig. 1; Fig. 3 is a sectional view obtained along the section line Π-Π of Fig. 1; Knowing the winding layout section 121 of the multilayer metal when transmitting a signal, FIG. 5 is a top view of the winding layout of the multilayer metal according to a preferred embodiment of the present invention; FIG. 6 is a drawing along FIG. 5 Figure 7 is a cross-sectional view obtained by section line II-II; Figure 7 is a cross-sectional view obtained along section line IV-IV of Figure 5; and Figure 8 is a view illustrating a preferred embodiment of the present invention A cross-sectional view of the winding layout of a multilayer metal when transmitting a signal. Comparative drawing description: 100 winding layout 102 first metal wire 103 insulating material 104 second metal wire 105 insulating material 106 third metal wire 107 insulating material 108 fourth metal wire 109 insulating material 110 fifth metal wire 111 insulating material 112 Six metal wires 113 Insulating material 114 Insulating layer 116 Insulating layer 118 Insulating layer 120 Insulating layer 122 Insulating layer

Page 13 200410387 Brief description of the diagram 124 conductive plug 126 conductive plug 128 conductive plug 200 winding layout 202 first metal wire 203 insulating material 204 second metal wire 205 insulating material 206 third metal wire 207 insulating material 208 Four metal wires 209 Insulating material 210 Fifth metal wire 211 Insulating material 212 Sixth metal wire 213 Insulating material 214 Insulating layer 216 Insulating layer 218 Insulating layer 220 Insulating layer 222 Insulating layer 224 Channel 226 Intermediate window 228 Conductive plug 230 Connecting line

Page 14

Claims (1)

200410387 6. Scope of patent application 1. A routing layout of a multilayer metal wire for connecting a plurality of signal lines of a plurality of components, and the routing layout of the multilayer metal wire includes at least: a plurality of first metals A wire layer, wherein each of the first metal wire layers includes at least a plurality of first metal wires parallel to each other, and the first metal wires of each of the first metal wire layers and the remaining of the first metal wires The first metal lines of the line layer are stacked on each other; A second metal line layer, wherein the second metal line layer includes at least a plurality of second metal lines parallel to each other, and the second metal lines are perpendicular to the first metal lines, and the second metal line layer and The first metal line layers are stacked; a plurality of channels are located beside each of the two first metal lines of the first metal line layers; and a plurality of via windows are located on the channels. 2. The winding layout of the multilayer metal wire as described in item 1 of the scope of the patent application, wherein the second metal wire layer is stacked on the first metal wire layers. 3. The winding layout of the multilayer metal wire as described in item 1 of the scope of the patent application, wherein the second metal wire layer is stacked under the first metal wire layers. 4. The winding layout of the multilayer metal wire according to item 1 of the scope of the patent application, wherein the second metal wire layer is stacked between the first metal wire layers. Page 15 200410387 VI. Scope of patent application 5 • The winding layout of the multilayer metal wire as described in item 1 of the patent application scope, wherein the interlayer windows are stacked with the second metal wires. 6. The winding layout of the multilayer metal wires as described in item 1 of the scope of the patent application, wherein the interlayer windows expose portions of the second metal wires. 7 · The winding layout of the multilayer metal wires as described in item 1 of the scope of the patent application, wherein the interlayer windows are a plurality of multilayer stacked interlayer windows. 8. The winding layout of the multilayer metal wires as described in item 1 of the scope of the patent application, wherein each of the interlayer windows further includes at least a conductive plug (Plug). 9 · The winding layout of the multilayer metal wires as described in item 8 of the scope of the patent application, which further includes at least a plurality of connection wires located in the first metal wire layers, thereby electrically connecting the first metal wires and each The conductive plugs of the vias are electrically connected to the first metal lines and the second metal lines through the conductive plugs of each of the vias, respectively. 10. A winding layout of a multilayer metal wire for connecting a plurality of signal lines of a plurality of components, and the winding layout of the multilayer metal wire includes at least: a plurality of first metal wire layers, each of which A metal line layer includes at least a plurality of first metal lines that are parallel to each other, and the first metal lines of each of the first metal line layers and the plurality of first metal lines of the remaining first metal line layers. Page 16 200410387-------- _ ^ — -----— 6. Scope of patent application-Metal wires are stacked on each other; a second metal wire layer, wherein the second metal wire layer includes at least parallel to each other. A plurality of second metal lines, and the second metal lines are perpendicular to the first metal lines, and the second metal line layer is stacked with the first metal line layers; a plurality of channels are respectively located on the third metal lines Next to each of the first metal lines of the line layer; and a plurality of multi-layer stacked vias are located on the channels, and the second metal lines are exposed from the multi-layer stacked vias. 11. The winding layout of the multilayer metal wire as described in item 10 of the scope of the patent application, wherein the second metal wire layer is stacked on the first metal wire layers. 1 2 · The winding layout of the multilayer metal wire according to item 10 of the scope of the patent application, wherein the second metal wire layer is stacked under the first metal wire layers. 1 3. The winding layout of the multilayer metal wire as described in item 10 of the scope of the patent application, wherein the second metal wire layer is stacked between the first metal wire layers. 14. The winding layout of the multi-layer metal wires as described in item No. 0 of the patent application scope, wherein each of the multi-layer stacked interlayer windows further includes at least one conductive plug. 15 · The winding layout of the multilayer metal wire as described in item 14 of the scope of the patent application, which further includes at least a plurality of connection wires located in the first metal wire layers, thereby electrically connecting the first metal wires. And each of those multilayer stacked interposers 200410387 VI. Scope of patent application The conductive plugs of the windows are electrically connected to the first metal lines and the second metal lines through the conductive plugs of each of the multilayer stacked interlayer windows, respectively. 16. · A winding layout of a multilayer metal wire for connecting a plurality of signal lines of a plurality of components, and the winding layout of the multilayer metal wire includes at least: a plurality of first metal wire layers, each of which A metal wire layer includes at least a plurality of first metal wires parallel to each other, and the first metal wires of each of the first metal wire layers and the first metal wires of the remaining first metal wire layers Stacked on each other; a second metal line layer, wherein the second metal line layer includes at least a plurality of second metal lines parallel to each other, and the second metal lines are perpendicular to the first metal lines, and the second metal A line layer is stacked with the first metal line layers; a plurality of channels are located beside each of the first metal lines of the first metal line layers; a plurality of multilayer stacked vias are located on the channels, and The multilayer stacked interlayer windows expose a portion of the second metal lines; a plurality of conductive plugs are respectively located in the multilayer stacked interlayer windows, and the conductive plugs are electrically conductive with the second metal lines, respectively. Connection; and plural The connecting wires are located in the first metal wire layers, thereby electrically connecting the first metal wires and the conductive plugs of the multilayer stacked interlayer windows, and electrically connecting the conductive plugs through the conductive plugs, respectively. The first metal lines and the second metal lines. 1 7. The winding layout of the multilayer metal wire as described in item 16 of the scope of patent application, Page 18 200410387 6. Scope of patent application Wherein the second metal line layer is stacked on the first metal line layers. 18 · The winding layout of the multilayer metal wire according to item 16 of the scope of the patent application, wherein the second metal wire layer is stacked under the first metal wire layers. 19 · The winding layout of the multilayer metal wire according to item 16 of the scope of the patent application, wherein the second metal wire layer is stacked between the first metal wire layers. Page 19