TW200402554A - Reducing the temperature sensitivity of optical waveguide interference filters - Google Patents

Reducing the temperature sensitivity of optical waveguide interference filters Download PDF

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TW200402554A
TW200402554A TW092113578A TW92113578A TW200402554A TW 200402554 A TW200402554 A TW 200402554A TW 092113578 A TW092113578 A TW 092113578A TW 92113578 A TW92113578 A TW 92113578A TW 200402554 A TW200402554 A TW 200402554A
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waveguide
waveguide device
compensation
interference
output
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TW092113578A
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TWI276855B (en
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Dmitri E Nikonov
Xianmin Yi
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Intel Corp
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12026Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence
    • G02B6/12028Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence based on a combination of materials having a different refractive index temperature dependence, i.e. the materials are used for transmitting light
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/2935Mach-Zehnder configuration, i.e. comprising separate splitting and combining means
    • G02B6/29352Mach-Zehnder configuration, i.e. comprising separate splitting and combining means in a light guide
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/28Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/29398Temperature insensitivity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12019Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes

Description

200402554 玖、發明說明: 【發明所屬之技術領域】 背景 本發明大致上係關於光通訊網路,且具體地說,係關 5 於光波導干涉濾波器。 目前廣泛地使用光通訊網路,干涉濾波器以供波長通 道多工,切換以及傳播補償之目的用。這樣的濾波器之最 有前途的型式係基於平面波導電路,其基本上是由矽土或 10矽所製造的。其主要缺點之一為在用來形成電路之材料中 折射係數之溫度相關性所造成之頻譜溫度相關性。因此理 由,包含這樣的電路之晶片需以一加熱器或一熱電冷卻器 (TEC)來做溫度穩定。這需要電源,回授之控制電子,以及 消耗熱之管理。 15 @此,建造溫度视錢導電路是有_。有幾個方 法形成-非熱裝置,其沒有1是完全令人滿意的。一些 包括輸入光纖接觸波導電路之點之機械移動。這結果造成 嚴重的可靠性問題。 其他方法具林_率綺射餘溫度相關性 之材料。這樣的材料之-範例為—聚合物,諸如石夕樹脂。 又 在一晶片中結合二 且使得程序更為複雜,且 穿過波導_槽且將之填以聚合物。此方法之不利在於槽 會因為衍射而造成咼的插入損失 材料減少了晶圓良率和可靠性, 因此更為昂貴。 20 200402554 同時’正在發展一全由聚合物所構成之波導。在此情 況中’其可能修改聚合物之參數使之適於實現十分小的溫 度相關性。然而,到目前,與矽土波導裝置相比,在性能 和可罪性上,聚合物波導裝置已失敗了。 5 如此’有對減少光波導干涉濾波器之溫度敏感度之方 式之需求。 【明内穷】 一種補償一波導之方法,其包含:提供一具有第一折射 係數之干涉波導裝置;提供一具有第二折射係數之補償波 10導裝置·,以及將補償波導裝置之一輸出耦合至該干涉波導 裝置之'輸入。 式簡單說明
第1圖為一本發明之一實施例之示意說明。 t實施方式;J 15 較佳貫施例之詳細說明 二由異種材料構成之晶片10和12可對齊(“接合耦合”) 且封裝在一起做為一單一裝置,如第丨圖中在本發明之一實 施例中所示的。補償晶片10可為例如一傳統的矽土晶片。 補償晶片12可例如為一補償Mach-Zehnder干涉計(MZI),其 20由諸如矽樹脂之聚合物所構成的。在晶片10和晶片12之間 有一接觸。若在每個晶片中之波導大小類似,可使在晶片 1〇,12間之干涉之損失十分小(例如降至02dB,其遠小於槽 中之損失)。 補償晶片12可包括一Mach-Zehnder干涉計,其具有一 63Θ 6 200402554 對臂18和20。其接收一來自一輸入埠14之輸入,且透過一 50/50耗合器15將之搞合至臂18和20。其他埠16亦可連接至 柄合器15。一對輸出埠22和24可連接至一輸出搞合器23。 以由矽土構成之補償晶片10以作用如一陣列波導柵 5 (AWG)之範例來說明此原理。補償晶片1〇可包括輸入波導 26和28,耦合器30和32,其可為星形耦合器,和在此範例 .中包括四個輸出波導34a至34d之多個輸出波導34。 補償晶片10可為一諸如石夕土之材料,其具有一對溫度 之折射係數導數。補償晶片12可為一諸如聚合物之材料, 10 其具有相反和較大的折射係數導數。 設計補償晶片12,如此使得當溫度改變時,其輸出訊 號被重新導引至不同的輸出蜂22或24。因此,來自輸出蜂 22或24之輸出訊號進入補償晶片1〇之不同之輸入波導26或 28 〇 15 選擇補償晶片丨〇之光學特性,如此使得輸入之位移補 償溫度改變。例如,在原始溫度上,訊號抵達輸入26,且 干涉裝置導引一組波長至輸出波導34a-d。在修改的溫度 上,使訊號維持在輸入26,該組波長將被導引至一組波導 34b-e,其相對於原始輸出被位移。然而,因為在修改溫度 20上來自輸入26至輸入28之位移之故,該組波長仍被導引至 相同的輸出組34a-d。如此,補償了裝置10之溫度敏感度。 因為例如在一聚合物中,對溫度之折射係數導數之大 的絕對值’所以可使在晶片12中MZI之二臂18,20間對於 產生從波導22至波導24之輸出位移為必要之之長度差異十 200402554 分的小。因此,晶片12在例如使用一聚合物材料之實施例 中了由小尺寸構成。這在一些情況中可減輕良率和可靠性 問題。由更複雜之補償晶片10來決定由晶片10和12構成之 全部裝置之性能。以及,最重要地,補償晶片12之相對小 5的尺寸可能意指自由的頻譜範圍,即,在一些實施例中此 補償動作之小波長相關性。 做為一簡單的範例,一由矽土構成作用如一 Mach-Zehnder干涉計(MZI)之補償晶片10可由一型式為一 由一聚合物所構成之MZI之補償晶片12所補償。在真空中 10之波長為λ,頻率為v,光速為c。每個干涉計之臂長之個別 差異為ALi,且有效型式係數為ni,其中丨指序號,其中使用 多個背對背MZIs。在此例中,在效率型式係數中之改變等 於用來形成晶片10或12之材料之折射係數之改變。然後, 在每個干涉計中之相位差異為:
27rvniALi c 15 在具有恰50/50耦合器之背對背MZIs中,總相位 Φ=Φ1+Φ2決定頻譜響應。選擇自由頻譜範圍等於通道間隔: V 一 c FSR (n\ALx +«2ΔΙ2) 為了簡化,忽略熱脹,相位必不隨溫度改變. dm -AL, dT 1
dn2 ^dT AL2 = 0 因此對lOOGhz來說 ,在一由晶片10所實現切土 MZI中之 20 200402554 長度差異(AL)將為2mm,但在補償晶片12中,長度差異只 為54μιη。以一聚合物補償晶片MZI,長度差異及晶片本身 可為十分的小。若溫度從0C改變至85C,則矽土之折射係 數改變Αη=8·5χ10-4,且相位改變6.9rad,即頻譜位移超過 5 —個通道間隔。以聚合物補償晶片,係數改變可減少至實 際上為零,其由耦合器分離比率之精確度決定。 現在,我們返回至一較複雜的做為補償得片122AWG 晶片之範例。其參數為:在厚片或星形耦合器3〇,32中之係 數為ns,其如材料之折射係數般改變;相鄰陣列波導26和 10 28間之長度差異為,輸入,輸出和陣列接面上之波導間 之分離分別為ai,ao和a;且星形耦合器30,32之半徑為尺。然 後,對應於從輸入波導p至輸出波導q通過陣列波導m之路徑 之相位差異(全從星形耦合器之中心開始標記)為:
c R R 15 當下列時頻譜中之峰值發生: =2 泖Μ 其中Μ為一整數,對特定頻率範圍之柵之量級。為使補償 發生’當叫改變_,從一ΜΖΙ之一輸入移動至其他題為貝:
c dT 20 Μ必須維持相同,但對其他輸入pj,換句話說,
n2 dT R 200402554 其導致下列狀況 n2 dT dT RZ2 對一 AWG之型參數來說,波導26和28間之ΔΠ為130μηι以提 供所需之補償。 5 在已以有限數目之實施例描述本發明之同時,熟悉技 藝之人士會從其體會到多種不同的修改和變化。預定所附 之申請專利範圍涵蓋落在本發明之實際精神和範圍内之所 有這樣的修改和變化。 【圖式簡單說明3 10 第1圖為一本發明之一實施例之示意說明。 【圖式之主要元件代表符號表】 1〇,12…晶片 22,24…輸出埠 14…輸入埠 23…耦合器 15…耦合器 26,28…輸入波導 16…蜂 30,32…麵合器 18,20…臂 34,34a-34d···輸出波導

Claims (1)

  1. 200402554 拾、申請專利範圍: 1. 一種補償一波導之方法,其包含: 提供一具有第一折射係數之干涉波導裝置; 提供一具有第二折射係數之補償波導裝置;以及 5 將補償波導裝置之一輸出耦合至該干涉波導裝置 之一輸入。 2. 如申請專利範圍第1項之方法,其包括將該補償波導裝 置之多個輸出麵合至該干涉波導裝置之多個輸入。 3. 如申請專利範圍第2項之方法,其包括視溫度而定,使 10 得該補償波導裝置之輸出從一輸出改變至其他。 4. 如申請專利範圍第3項之方法,其包括將該補償波導裝 置之輸出導引至在該干涉波導裝置上之一不同的輸入。 5. 如申請專利範圍第4項之方法,其包括在該干涉波導裝 置之每個輸入上提供二個不同的波導。 15 6.如申請專利範圍第5項之方法,其包括提供該輸入波導 之每一個以一不同長度以補償司的溫度。 7. 如申請專利範圍第1項之方法,其包括使用一具有二個 輸出之Mach-Zehnder干涉計來做為補償波導裝置。 8. 如申請專利範圍第7項之方法,其包括將該 20 Mach-Zehnder干涉計耦合至一陣列波導以提供對該陣 列波導之溫度補償。 9. 一種光波導,其包含: 一具有第一折射係數之干涉波導裝置; 一具有第二折射係數之補償波導裝置;以及 11 200402554 該補償波導裝置之一輸出耦合至該干涉波導裝置 之一輸入。 10. 如申請專利範圍第9項之波導,其中該補償波導裝置包 括多個輸出,且該干涉波導具有多個輸入,且該等輸出 5 合至該等輸入。 11. 如申請專利範圍第10項之波導,其中一來自該波導裝置 之一輸出訊號視溫度而定,從一輸出改變至其他。 12. 如申請專利範圍第11項之波導,其中該波導裝置之輸出 訊號被導引至在該干涉波導裝置上之一不同的輸入。 10 13.如申請專利範圍第12項之波導,其包括在該干涉波導裝 置上之二個不同輸入上之二個不同的波導。 14. 如申請專利範圍第13項之波導,其中該不同的波導具有 不同長度以補償不同的溫度。 15. 如申請專利範圍第9項之波導,其中該補償波導裝置為 15 一具有二個輸出之Mach-Zehnder干涉計。 16. 如申請專利範圍第15項之波導,其中該Mach-Zehnder干 涉計耦合至一陣列波導以提供對該陣列波導之溫度補 償。 12
TW092113578A 2002-05-30 2003-05-20 Reducing the temperature sensitivity of optical waveguide interference filters TWI276855B (en)

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