TW200402390A - Foam box for transferring substrate - Google Patents

Abstract

A foam box for transferring substrates. The foam box includes a body 1, a supporting member 3, a cover 2, and fasteners 4a, 4b. The body 1 is made of polyolefin, and includes grooves 10A for supporting the substrates at its opposite inner walls. The supporting member 3 includes upper supporting grooves 10B for protecting the portion, protruding from the body 1, of the glass substrates 100. The cover 2 is made of polyolefin foam material. The fasteners 4a, 4b are disposed on the supporting members 3 and the cover 2. By such a structure, the portion, protruding from the body, of the glass substrates can be protected. Also, after the cover is assembled, the glass substrates are accurately disposed in the grooves of the body. In addition, the glass substrates can be automatically removed by an unpacker.

Description

200402390 V. Description of the invention (i) (Technical field to which the invention belongs) The present invention relates to a foaming box for substrate transportation, which is used to store and transport multiple glass substrates (plain glass, glass substrates for liquid crystal displays, Plasma glass substrates for display bodies, fluorescent display tubes, glass substrates for thermal heads, color filters [color fUter], etc.), or panels manufactured using these substrates, etc. . (Prior art) (Container for glass substrate transfer formed by injection molding and its problems) The injection molding of various resins including ABS resin and polyethylene-salinized ethylene, and the composition of the injection molding The glass substrate transport box 'is used for glass substrates such as glass manufacturers, color filter manufacturers, electronics panel manufacturers, and dev ice manufacturers, and glass panels (including finished panels) using this glass substrate. Removal. When transporting glass substrates, such as glass substrates that have formed TFTs (transistor) and liquid crystal cells [ce 1 1], into which circuits have been incorporated, use glass substrate transport boxes. It consists of a resin injection molded body containing a conductive polymer, a charge preventing substance, and the like, and a composition using the resin injection molded body. These glass substrates are typically configured as a pair of side plates of a box body and a box body at opposite sides of the box body. In order to hold the glass substrates in parallel with each other in a vertical posture, a plurality of grooves are formed. The broken substrate transport box generally contains glass substrates of about 10 to 30 pieces or more. 200402390 V. Description of the invention (2) '~ —- A conventional glass substrate transport box formed from the above-mentioned resin injection molded body and its composition can transport glass substrates and the like in a closed state. However, due to the weight of the light box itself, for example, there are also 5 or 6 kilograms, which has the disadvantage of being difficult to handle when moving, stacking, and transporting. In addition, since this glass substrate carrying case has no cushioning property, it has almost no ability to absorb shocks when shocks and vibrations are added. As a result, there is a problem that the glass substrate stored in the glass substrate transporting case is easily damaged.

Also, because the thermal conductivity of the glass substrate transport box formed by injection molding is large (approximately 0.26Kcal / m.hr · ° C), and because of poor thermal insulation, the stored glass substrate may become high temperature, and sometimes Dew condensation and the like are likely to occur on the glass substrate. As a result, the glass substrate may be stained with water droplets, damage to the circuit, etc., and the reliability of the glass substrate may be damaged. In addition, the cost of the injection molding mold that combines the body and cover of the glass substrate transport box is high. The average resin usage of a glass substrate transport box is, for example, 5 to 6 kg. In terms of resin cost, there are disadvantages such as heavy burden. (Foam box for substrate transfer of resin foam system)

In order to overcome the above-mentioned problems of the glass substrate transfer box formed by injection molding, the applicant has developed a resin transfer system for substrate transfer as disclosed in the following publications (A) and (B). Bubble box. (A) Japanese Unexamined Patent Publication No. 7-1 32986, each of which is disclosed in Japanese Unexamined Patent Publication No. 7-13, 1 2 2 8 8, and at least the main body of the box is foamed at a magnification ratio of 3 ~ 30 times of resin foam, and the pair of facings on the inner surface of the main body are formed as

200402390 V. Description of the Invention (3) — Groove for glass substrate support. (B) Japanese Unexamined Patent Publication No. 7-25768 1 disclosed in Japanese Unexamined Patent Publication No. 7-257681 here is a box for transporting substrates, which is inside a box formed of a foam having a foaming ratio of 3 to 30 times, A plate-shaped or box-shaped groove-shaped interpolating member 0 having a groove for supporting a substrate is provided. (Summary of the Invention) (Problems to be Solved by the Invention) In the manufacture of a substrate transporting device disclosed in the above two conventional technical documents, When the glass substrate is housed in the foamed box body for substrate transportation, the glass substrate is manufactured so as to protrude above the upper end of the opening portion of the foamed box body for substrate transportation, and the glass substrate is accessed by hand. Operation can be made easier. _ When the glass substrate is housed inside the foaming box body for substrate transportation, 'When the box-shaped lid with a groove on the inner side of the ceiling is covered from the top of the glass substrate, there is some space between the glass substrate and the groove. The gap, when covering the lid, may take into account that the upper edges of all the glass substrates arranged in a predetermined number of longitudinal differences may not be accurately aligned with the grooves of the lid. In this inconsistent state, "4. When the cover is forced into it, the upper edge of the glass substrate may not be in the concave part of the trench, but in the protruding part (groove), or in the same groove (concave surface). Part) into two glass substrates. Therefore, according to the research of the present inventors, a countermeasure is proposed to solve such a problem. The countermeasure can be performed from the upper surface of the exposed glass substrate before the cover is closed.

2075-5765-PF (Nl); Ahddub.ptd 200402390 V. Description of the invention (4) Clamped horizontally or with two pieces of self-contained inner package. However, the foamed box body of glass substrate. Therefore, the substrate is controlled by an automatic machine, which is a problem of removing the glass dust and the box body and is used. Under the plate, cover the cover in the form of the protective plate of the horizontal plate. In this operation, remove the cover and use it at the machine. His question substrate. Therefore, the foam cover structure includes a support member composed of a protective plate provided with a groove, and a support member composed of an inverted L-shape in which the groove of the vertical plate is suspended while supporting the structure. When countermeasures are taken, it is necessary to operate twice to take out the foaming box for substrate transportation. First, the support structure is removed from the top of the glass substrate after the substrate transportation. The above two operations can be performed as' When inserting the glass substrate into the box, or because of friction between the glass substrate and the support groove. In order to suppress the occurrence of this dust, the hardness of the foamed part is increased, and the foaming ratio is 3 ~ 3 〇times foam

However, since this type of glass substrate transport box is repeatedly used, it is particularly easy to deteriorate in the support groove portion that is frequently in contact with the glass substrate. By only increasing the hardness of the foam, there is a limit to suppressing the occurrence of dust. . This kind of problem is not only a glass substrate, but also has a similar problem even in a substrate transfer box for a substrate having the same characteristics as a glass substrate. The first object of the present invention is to provide a foaming box for substrate transportation under such a background. The foaming box has a better characteristic because it uses a polyolefin foam and can protect a glass substrate. The protruding part of the main body / when the cover is closed and the glass body is vertically inserted into the box main body, 'there is no detachment, rust, and

200402390 V. Description of the invention (5) The operation of taking out the glass substrate from the cassette can be performed automatically using a machine. A second object of the present invention is to provide a glass substrate transporting box having a structure capable of suppressing generation of dust. (Means to Solve the Problem) '' The foaming box for substrate transportation according to the present invention is a foaming box for substrate transportation for containing a glass substrate in the interior, and includes a ... A box body for supporting a substrate supporting groove of a glass substrate has a supporting member that supports an upper supporting groove beside the upper portion of the glass substrate, and the supporting member is packaged in a state where the supporting member is mounted on the upper end of the glass substrate Method, for engaging the box-shaped cover on the opening side of the upper part of the box body, between the support member = up =: =, and connecting the support member and the support-receiving glass substrate to the box body Inside, the upper end side of = corresponds to be by one by one. It is also placed in the upper support groove of the support member so that it can be correctly inserted. Therefore, compared with the conventional method of directly setting the upper support groove, it is possible to: only a plurality of glass substrates are embedded in the same groove. Kiyotaki In addition, by supporting the upper surface of the support member and the cover on the inner wall surface of the support member and the cover < and connecting the support member and the cover, the cover is set on the glass base and the cover to become Link status. The main body ’therefore supports the support member at the same time as the cover body is removed: The removal improves the workability when removing the glass substrate 200402390 V. Description of the invention (6). The foaming cover member for the foaming system for storing other substrates in the other substrate transporting of the present invention is an opening, a foaming cover member that opens the upper part of the main body of the foaming box that houses the substrate, and supports the groove on the side opposite to the substrate. , To the surface is covered by a protective film (fi 1 m). As described above, the side support grooves are used, and since they are not in contact with the substrate, they are not used even when they are reused, and the result is that the allowable life of the base due to the generation of dust can be greatly prolonged. This can reduce running costs. In addition, in the above-mentioned foaming box for substrate transportation, the above-mentioned box system further has a groove on the bottom wall for holding the groove, and at least the surface of the bottom supporting groove further includes an upper supporting member having an upper supporting groove on the upper end portion. At least the above protective film is covered. In this way, by adopting a structure in which the support substrate is covered with a protective film, the maintenance cost of the foaming box for substrate use can be greatly increased (running cm, and the protective film has an ultra-high molecular weight) ι ^ η Use the inner body of the foam to send the inner body to reduce the above-mentioned surface contact degradation and the board is transported in the foam box. The support system is guaranteed to be extended to support the board. The polyethylene box 'is an internal blister box, which includes: the upper wall has a surface to support and seal the side support grooves of the foam box, and the foam is covered with a protective film, so dust is generated. The maintenance cost of the use of the combined foam box is a better type, and it is covered by the bottom protective film of the substrate. The groove surface supporting the substrate is preferably used to maintain the entire surface of the groove. Dust generation reduces the substrate transport film. in

200402390

Therefore, this ultra-high molecular weight polymer has abrasion-resistant properties. The vinyl film is also included in the polyethylene film, so that the foaming box for substrate transportation can be extended. The above and other objects, features, and advantages of the present invention can be described in more detail as follows. As shown in the attached drawing, the foaming box for substrate transportation in (Embodiment),

The embodiments based on the present invention are described below with reference to the drawings. (First Embodiment) (Configuration of Foam Box for Substrate Transport) With reference to FIGS. 1 and 2, a configuration using a foam box will be described. The substrate (1), the supporting member (3), the box-shaped (4), (4). The foaming box for substrate transportation in this embodiment includes a cover (2), and male and female facial knots. Pieces (box body (1))

The box body (1) is formed by an open, bottomed box-like member from the top. Polyethylene (low density polyethylene, high density polyethylene, ethyl propylene polymer, ethyl acetate polymer, ionomer, etc., or a mixture of these) foams are used as constituent materials, and polypropylene is used. Polyolefin-based foams such as dilute foams. As the foaming box for substrate transportation, a strong polypropylene foam is preferred. & The expansion ratio of the polyfoam is 3 to 30 times, preferably 4 to 25 times.

200402390 V. Description of the invention (8) '------ It is more preferably 5 to 20 times, especially a range of 7 to 18 times is the best. If the expansion ratio is too small, the protective properties (cushion properties) of the glass substrate cannot be fully exhibited. On the other hand, if the expansion ratio is too large, the strength is insufficient and the elasticity becomes too large. . The thickness of the box body (丨) is considered to be a balance of strength, weight resistance, hardness, and elasticity, etc., and is preferably set to 15 to 100_degree ', especially about 20 to 80 mm. It is preferred that the polyolefin foam system is manufactured by a beads method. The four-bead method is a method in which a polyolefinic bead containing a foaming agent or a primary foam thereof is filled into a fork and heated at a predetermined temperature. So-called blowing agent

A volatile foaming agent, a chemically decomposable foaming agent, etc. may be used, and two or more hair extension / packaging agents may be used in combination. Because the bead foaming method is a low-pressure foaming method, the mold itself can be used, for example, an aluminum-type low-cost mold. The surface of this polyolefin-based foam preferably has a finer skin structure than the inside. In this case, the density of the surface structure to a depth of 1 mm is preferably increased by 5 times or more, and more preferably 2 times or more, than the internal density. For example, when post-heating is performed during foam molding, the surface contacting the inner surface of the mold can be formed into a delicate skin structure. Using only the surface as a delicate skin structure is beneficial in preventing dust generation and improving high yield. also

The box body (1) is generally constituted by a bottomed box, but it is also possible to engage the bottom body by fitting the bottom body into the bottomless body. The inner bottom of the box body (1) can be provided with a buffer material in advance. The bottom of the box body (1) may be formed in a leg shape. In the case body (1), a substrate supporting groove (10A) for supporting a glass substrate is formed directly on the opposite inner wall. The formation of the substrate support groove (10A) is acceptable.

200402390 V. Description of the invention (9) In the mold, the lower guard 'and the box body (1) are formed simultaneously. Zhaodi 9 also fixed an interposing member (la) to prepare a substrate supporting groove (10A) (see Inserting the interposing member ...) onto the two walls of the box body ife. The shape of the interpolating member (la) can be used as 2 pieces of hibiscus, "1 \ shaped body and 11-shaped or box-like plate ▲ body. As examples of f pieces = = 系, ⑻, ⑷ As shown in Figures ⑷ and ⑷, the structure of (a) below is the best. Te (:) Nine packs, especially foams with a foaming ratio of 3 to 30 times) Distinguish ^, or a box-shaped foamed molded body. This foamed molded body ,, = B, take the same situation / shape of the foam, especially the polyolefin foam as the second: olefin foam Polyethylene foam is more preferred. As the foam molding method, the joint bead method is used, and the foam is extruded. I.e., "sheets are formed by air-pressure molding to obtain plate-shaped,]-shaped molded bodies. The so-called pressure forming system uses a variety of resins that can be pressure-molded to form a square-shaped sheet that is vacuum-sucked under heat to form a predetermined shape. (C) The resin is melt-molded to obtain a plate-shaped, η melt-molded body. As an example, x π 士 r is in contact with the shape: ¾ 疋 phase and shape are opened, the method = ^ system uses the extrusion molding method and the injection 2 method. K is used for bath melt molding resin Machining (cutting processing, etc.) of various plate-shaped plate bodies that can be melt-formed to obtain plate-shaped] or shape-shaped machined products. In either case, as shown in Figure 2, interpolating members (⑷, a ~ When two pieces of plate are separated, insert this interpolating member qa) on the 15th page of the box, 2075-5765-PF (Nl); i \ fcddiib.ptd 342.2 200402390 5. Description of the invention (ίο ): (Toward 1): one opposite to the inner side of a pair of 66-direction / at least one pair of faces. The so-called phase difference ": side: when the I box body (1) is rectangular when viewed from the plane, a pair It can be either the long side or the opposite side. There are also two different-sized substrates with a rectangular shape and a groove-shaped interpolating member (⑷, (a pair of faces on the short side and a pair of faces on the long side). ^ Strips for engagement are formed on the inner surface side of each body = relative ^ -opposite surface: the grooves on the convex strips are formed on the inner side of the interpolation members (la), (丨 ㈧

At this time, the insertion and removal of the insertion members (la) and (la) of the box body ⑴ can be performed smoothly. When the insertion member (la) is in the shape of a letter or a box, the insertion member (ia) may be fitted into the box body (丨) as it is. The substrate support groove (10A) not directly placed in the box body (1) or the substrate support groove (10A) provided in the interposing member (la) is a depth that can be inserted into the edge portion of the glass substrate (100). And width, and in a state where the glass substrate (100) is inserted, it is set with some gaps. The number of grooves of the substrate supporting grooves (10 A) can be arbitrarily set, but most of them are set to have an average i-plane of 10 to 30 grooves or more. The shape of the protrusion on the groove structure

Since the contact with the glass substrate (100) is reduced, it is preferable to provide a slip surface and tilt. ° When the completed panel containing the TFT (thin film transistor) glass substrate and the liquid crystal cell is used as the purpose, the volume intrinsic resistance value of at least the surface of the inner side of the box body (1) or the interposer (la) is It is better to set it in the range of Q3 ~ 1 〇12 Ω · cm, especially 104 ~ IO11 Ω · cm. About Box

200402390 V. Description of the invention (11) body (1) and interpolating member (la) (or cover body (2) and support (3) described later) 'As a method with the inherent resistance value of this volume is used: for effect A method of using a raw resin with a conductive resin as a raw material. A method in which the raw resin contains several% to several 〇% antistatic properties f (f substances and surfactants). The conductive film is integrated with the molded body film on the surface of the mold surface 0 (supporting member (3)) Two (? Series) For example, as shown in Fig. 1, the protection is inserted in the opposite direction of the beneficial body (1). The substrate support (: ° 2 of the box body ⑴ is a protruding part of the box to prevent the dangerous mission when shaking ==. To prevent it from being used, ΪΐΠ H (3j series as shown in Figure 2, only from the horizontal plate ( 3. The structure ΐ generally hangs from one side of the horizontal plate ㈤, at least on the lower side of the flat plate iff and the lower side of the vertical plate (the upper support for the internal support of the ⑻ 黄, and has a glass substrate L · The structure of the horizontal phase of the type plate μ ((B). Use the upper left side and the right side inverted as shown in Figure 1. Right, these two pieces are used as the protective glass substrate (1.0) 彳 t @ f β Sometimes the left and right inverted plate can be integrated as a whole = 丄 clockwise rotation direction 9 °. The shape of the rotation). Material using a foamed body / Λ and the previously described interposer (soft-phase polyethylene-like soft = 4 molded body, molten molded body (polymer-based abrasion-resistant resin, fluorine resin) Elastomer

2075-5765-PF (Nl); Ahddu.b.ptd

Page 17 200402390 V. Description of the invention (12) (preferred). When the upper support structure (10B) is formed, it can be shaped or used as a machined product. The system T and the molding are the same. The foaming ratio is about 3 to 70 times (special), and the thickness of the horizontal plate (3a) is about 10 to 100 mm (especially at ° 15, ...). Foams and polypropylene; dene-based foams are preferred. : It is better to use a foam such as an inclusion body + 眭 ^ to make a polyethylene-based foam body and a polypropylene-based hair / inclusion body an m-supporting member and an olefin-based foam body. Click on the polyethylene (cover (2))

侔 m ref Λ Figure J: The body i has a box-like shape. The box _ 'which will support this Α = ί on the glass substrate (10.) in the above box body. In the divided state, a type 2 'card 5 including the supporting member (3) is placed on the opening side of the upper part of the box body (丨). „) 系 # The mouth box body ⑴ is the same, made of pinene foam. The expansion ratio is also the same as the box body (1). Also, the cover body (?) Is required to have the same strength as the box body (1) Therefore, although polypropylene-based foams are preferred, polyethylene-based foams are also useful based on this, and the thickness of the cover (2) is also in the range of 15 to 100 mm, especially in the range of 15 to 70 mm. , 20 ～ 60 ％ oldness' can also be set to be thinner than the box body (1).

(Surface knots [fastener] (4a), (4b)) In this embodiment, the male and female dough knots (4a), (4b) are provided on the horizontal plate (3a) of the support member (3) in a corresponding manner. ) And the inner surface side (2a) of the ceiling of the cover (2). Female or male face knots (4a) and (4b) can be set freely on any face, and female and

X 'w Λ' r 200402390 V. Description of the invention (13) :::: pieces (4a), (4b), the other side of the face is corresponding to > (4a) and (4b). The brackets H (4a) and (4b) are lifted together with the cover ⑴ when the cover ⑴ is removed from the box body ⑴. In addition, on the horizontal plate (3a) of the supporting member 3), the cover (the inner surface (Za) of the magic ceiling) may be provided as one or several small pieces. As the level of the supporting member (3) Any method can be used to place the upper surface of the board 0㈧ and the small piece-like surface knots (4a) and (^) on the inner surface (2a) of the ceiling. The method can be: The method of bonding, the method of using two-sided adhesive tape for bonding (adhesion), when the carcass (2) and the supporting member (3) are all made of polypropylene foam, the surface is bonded by (4a), (4b) A method of attaching a small piece as a label by sewing to polypropylene or the like, and a method of bonding a peripheral portion of the small piece with a hot-melt adhesive, etc. (packaging) When the foaming box for substrate transportation is transported (for example, output) to a remote place, the entire foaming box for substrate transportation of this embodiment containing a glass substrate (100) can be provided with a polyolefin film, an aluminum laminated film, etc. The moisture-proof packaging material can be packed with tape. When packing, it can also be pre-packaged. Put a desiccant such as silicone in the foaming box for substrate transportation. Y (Function) In the substrate transporting box of this embodiment, the substrate supporting groove (10A) provided in the box body (1) is used. The glass substrate (100) is longitudinally inserted in advance, and the glass substrate (100) is protected from the box body (0) by a supporting member (3).

200402390 V. Description of Invention (14) " '----- 的 人 部 #. After that, the lid body (Μ ί! Ί σ) can be placed on the upper opening side of the surplus body (1) so as to include the supporting member (3). The box body (1) is inserted in and out It may be performed in a state of a vertical posture, and may be performed in a state of a horizontal posture. Handling and storage are usually carried out in a vertical position. ·

The glass substrate (100) is taken out from the substrate transport box, and when the cover is opened, the upper surface of the horizontal plate (3a) of the supporting member (3) and the inner surface (2a) of the ceiling of the cover (j) are opened. The male and female facial knots (4a) and (4b) are provided in a corresponding manner, so the support member (3) is also lifted together with the cover (2). As a result, since the protruding portion 'of the glass substrate (100) is exposed from the case body (1), the glass substrate (100) can be easily taken out. The male and female noodles (4a) and (4b), the support member (3) connected to the cover (2) are manually removed, and can be used for the next packaging operation. Others' In this embodiment, since the main member of the substrate transport box is formed of a polyolefin-based foam, the following effects can be obtained. (1) With excellent elasticity, even if the impact and vibration are equal to the substrate, the glass substrate (100) can be effectively prevented from being damaged when the cassette is transported.

(2) High strength and resistance to tearing and rubbing. No dust is generated, and it can be washed with water or the like. (3) The support system of the glass substrate (100) is reliably formed. (4) Because it has excellent heat insulation properties (for example, a 15-fold expanded polystyrene foam, the thermal conductivity is 〇36 ～ 0 · 03 8Kcal / m · hr · t) The substrate (including the finished panel) (丨 00) becomes high temperature,

200402390 V. Description of Invention (15)

Dew condensation does not occur on the glass substrate (100), and there is no need to worry about damage to the reliability of the substrate, such as the occurrence of water droplet marks and circuit damage. (5) Since the amount of resin used per box is significantly reduced, the manufacturing cost is advantageous in terms of resin consumption. (6) The molding system of the foam uses an inexpensive mold such as an aluminum mold and can be performed at low pressure, which is advantageous in terms of mold cost.

(7) At least when using an object with a volume intrinsic resistance value of 〇〇3 ～ 丨 〇12 Ω · cm, in addition to effectively preventing the charging of the glass substrate (100) during the ingress and egress of the glass substrate (100) It is charged, because the volume intrinsic resistance value is within the above range, because the attenuation time is 0.5M seconds, it can be maintained for a certain time, so it can be carried out in a moderate range of attenuation without worrying about the circuit failure. ° (Examples) Next, the examples will be described in more detail with reference to the above-mentioned examples of the substrate transfer case. (Embodiment 1) Referring to Fig. 1 and Fig. 2, the foaming molding of the box body (1) of the substrate transporting foam box in this embodiment is as follows. First, once

After the foamable polypropylene particles have been foamed in advance, they are allowed to stand, and the enclosed gas is replaced with air. This aluminum-filled mold was foam-formed by blowing 4 kg / cm of water gas at a time. Thereafter, the bottomed box body (1) is obtained by post-heating at a temperature of 6 () t. The pair of opposing surfaces of the substrate support grooves. By working on the mold, the glass substrate support (10A) is formed on the phase of the box body (丨) in the vertical direction.

200402390 V. Description of the invention (16) ~ This foaming system has substantial closed cells. The overall foam has a hair / pack ratio of 12 times. However, the foaming ratio from the inside and outside surfaces to the depth of imm is 4 to 5 times. 'Skin layers are formed on both surfaces. . In the same manner, by foaming the foamable polypropylene particles, the box-shaped cover (2) shown in Figs. 1 and 2 is also foamed. This foaming system has substantially closed cells. The foaming ratio of the entire foam is i 2 times. However, the foaming ratio from the inner and outer surfaces to a depth of 1 mm is 4 to 5 times. A skin layer is formed on both surfaces. . The thickness of the box body (1) thus known is 50 mm, the thickness of the lid body (2) is 35 mm, and the size of the closed box is 1405 mm, the depth is 720 mm, and the height is 1210 mm. According to the forming method of the box body (1) and the cover body (2), the foamed polyethylene particles are formed by foaming, as shown in Figs. 1 and 2, to obtain a self-leveling plate (3a). The inverted l-shaped plate-shaped two-piece supporting members (3), (3) of the vertical plate (3b) hanging down from one side. By working on the mold, an upper support groove (10 B) for a glass substrate is formed on the lower surface side of the horizontal plate (3a) and the inner surface side of the vertical plate (3b). This foam also has substantial closed cells. The overall expansion ratio of the foam is 30 times. However, the expansion ratio from the inside and outside surfaces to a depth of 1 mm is 4 to 5 times. Skin layers are formed on both surfaces. . The thickness of the inverted L-shaped horizontal plate (3a) and the vertical plate (3b) are set to 26 mm. Next, "on the upper side of the horizontal plate (3a) of the support member (3) and the inner surface (2a) side of the ceiling of the cover (2), as shown in Figs. 1 and 2", The knots (4a) and (4b) are installed in a corresponding manner.

200402390 V. Description of the invention (17) ----- The top surface of the horizontal plate (3a) to the support member (3) and the cover (2) The inner surface (2a) side of the ceiling is made by using double-sided adhesive tape. In this example, the method of using the substrate transporting box is as described in the action item, and the glass substrate (100 ) Into the substrate transport box and take out the work. (Example 2) ', In addition to the use of conductive grade foamed polypropylene containing 20% by weight of carbon black (can also be charged with the interface prevention level of surface activity Hair

Except for the foamed polypropylene), the case body (1), the lid body (2), and the supporting member (3) formed of a foamed body were manufactured in the same manner as in Example 丨. The volume resistance value (according to D257) of both surfaces of this type of foam is in the range of 1 to 1 011 Ω · cm. The male and female facial knots (4a) and (4b) were also installed in the same manner as in Example 1. The substrate transporting box of this embodiment 2 is used to store a completed panel in which a TFT glass substrate and a liquid crystal tank have been formed, and it is preferable to provide the purpose of transportation and storage, and it can be extremely round.

The glass substrate (1000) is stored in a sliding manner into a substrate transporting box and taken out. I (Embodiment 3) FIG. 2 is a longitudinal sectional view showing another example of the substrate transport cassette of this embodiment. In this embodiment, the box body (1) having no groove formed in the polyolefin foaming system is formed, but two interposer members (la) for forming a substrate supporting groove (10A ^) for supporting a glass substrate are formed. Into the opposite inner wall of the box body (1).

2075-5765-Fi: (Nl); ^ ddub.ptd Page 23, 200402390 V. Description of the invention (18) The bottom of the box body (η is formed into a table-like shape. The other components are the same as in Example 1. (Again, Interposer (la) ABS resin sheet, etc. = = ί, under vacuum, it is sucked under vacuum to form a box-shaped c-shaped body, or it can be supported by a substrate with a pair of opposite sides as substrates The groove (1OA) is formed as a wave-shaped object.), (Embodiment 4) Example 3 is an overall perspective view of the substrate transport box of this embodiment. The supporting member (3) is replaced by Inverted [character plate shape] described in Examples 丨 3, the upper support grooves (10 β) for supporting the glass substrate are formed on the lower side. This = ⑻, except for the use of 30 times the self-foaming magnification, 26 mm thick Except for the polyethylene foam composed of the water board (3a) (same as the above-mentioned inverted l-shaped mesh, and forming skin layers on both surfaces), the same formula as in Example 丨 was used to produce a substrate transfer hair In the above-mentioned structure, in order to make the cover (2) and the support member 'indicate that the surface knot (4a), (4 b) As the case of the connection area 3 :, the structure of the connection area formed from the structure shown in FIG. 4 and FIG. 6 below may be adopted. As shown in FIG. 4, the structure of the connection area is provided with a downward protrusion 24. : On the inner surface (2a) side of the ceiling of the cover body 。. The outside of this column is # 丨 °. The rigid part of sa__ is set in the protruding deburring area 141. On the other hand, the An opening recess J 4 b capable of receiving the convex portion 1 4 a is provided on the upper side. The number of the talents may be appropriately selected as the convex shape and the open σ concave portion ⑷.

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In this way, when the connection area composed of the columnar convex portion 14a and the opening concave portion 14b is used, the columnar convex portion 14a is inserted into the opening concave portion 14b, and the deburring area 141 is engaged with the horizontal plate (3a). The shape of the cover body (2) mounted on the box body (1) can be used to connect the cover body (2) and the support member (3). Referring to Fig. 5, as a configuration of this connection region, a linear convex portion 24a having a rhombus-shaped cross section protruding downward is provided on the inner surface (2a) side of the ceiling of the cover body (2). On the other hand, on the upper surface side of the horizontal plate (3a), a linear concave portion 24b which can receive a linear shape of the linear convex portion 24a and has a rhombic opening cross section is provided. The number of the linear convex portions 24a and the linear concave portions 24b can be appropriately selected.

In this way, when the connection region formed by the linear convex portion 24a and the linear concave portion 24b is used, the linear convex portion 24a is inserted into the linear concave portion 24b, and the lid body (2) is mounted on the box body (1). Can be used as connecting cover (2) and component (3). # Referring to FIG. 6, the configuration of this connection area is provided with a linear convex portion 34a with a triangular cross-section protruding laterally on the inner surface (2b) side of the side wall of the cover (2). On the other hand, in the upper portion of the side end surface side of the horizontal plate (3a), a shielding portion 34b protruding from the outside is provided. °

In this way, when the continuous area composed of the linear convex portion 34a and the shielding portion 34b is used, the cover (2) is pressed into the linear convex portion 34a by the cover 34b when the cover (2) is mounted on the box body (1). Between the cover and the inner surface (2a), the cover ^ 34b ^ is engaged with the linear convex portion 34a, and the cover (2) and the supporting member (° 3 > (Example 2) are firstly referred to FIG. 7 and FIG. 8 The figure illustrates the schematic configuration of the foamed substrate 200 for glass substrate conveyance in this embodiment.

200402390

<Entire Configuration of Foam Box 200 for Glass Substrate Transportation> This glass substrate transportation foam box 2000 includes an upper opening, a foam box body 2 1 for storing a glass substrate, and sealing the foam box. An example of the outer diameter dimension of the foamed lid member 220 for opening the upper part of the main body 210 and the upper support member 23 for supporting the upper end portion of the glass substrate 2 is about 300 mm in width. No. 0mm, depth about 350mm ~ 1200mm, height about 400mm ~ i250mm. The foam box body 210, the foam cover member 2 20, and the upper support member 2 3 0 are polyethylene-based (low-density polyethylene, high-density polyethylene, ethyl propylene polymer, ethyl acetate polymer, Ion-crosslinked polymer, etc., or a mixture of these) Polyolefin foams such as foams and polypropylene foams. In particular, the material of the foaming box 2000 for substrate transportation is preferably a polypropylene foam having a high strength. When the expansion ratio is too small, the protective properties of the glass substrate (slowness) and the like are not fully exhibited. On the other hand, when the expansion ratio is too large, the strength is insufficient and the elasticity is also reduced. is too big. Moreover, the foaming ratio of the polyfoam is set to 3 to 30 times, preferably 4 to 3 times, more preferably 5 to 20 times, and particularly preferably a range of 7 to 18 times.

The thickness of each member is set to approximately 15 mm to 100 mm, preferably approximately 20 mm to 80 mm, in consideration of the balance 4 'of strength, weight resistance, hardness, and elasticity. A plurality of side support grooves 212 are provided in a state where the foam box main body 21 is opposed to 201. In addition, the inner wall 211 ′ of the box direction is also provided on the bottom wall 213 of the main body 210 where the glass substrate supports the glass substrate 201.

2075-5765-PF (Nl); Ahddub.ptd page 26 200402390 A plurality of bottom support grooves 2 1 &amp; for supporting the bottom of the glass substrate 201. Further, the upper supporting member 230 is provided with a plurality of upper supporting grooves 231 for supporting the upper end portion of the glass substrate 201.

The shape of the side support grooves 212, the bottom support grooves 214, and the upper support grooves 231 is such that the depth and width of the edges of the glass substrate 201 can be inserted into the glass substrate 201, respectively. The way to set is better. The number of grooves can be appropriately selected in accordance with the number of glass substrates to be accommodated in the glass substrate transport bubble box 200. However, most of the grooves have a number of grooves with an average wall surface of about 10 to 30 or more. The shape of the raised portion of the groove portion is reduced due to the reduction in contact with the glass substrate 201, and it is preferable to adopt a curved shape and an inclined shape. As an example of the groove size, the groove depth is approximately 4 mm to 20 mm, and the groove width is approximately 2 mm to 10 mm. …, Again, the side support groove 212 and the bottom support groove 214 can be directly formed on the inner wall surface and the bottom wall surface of the foam box body 2 10, however, the inner wall surface and the bottom wall surface can also be adopted The interposition buffer member is configured in a manner that can be provided in a soilable manner. When an interposition cushioning member is provided, the material of the interpolating cushion and the member is from the viewpoint of the efficiency of the fork juice workability made of the same foaming member as the foaming box body 2 丨 0. Between the inner surface sides 2 2 1 of the foamed member 2 2 0, a configuration is adopted in which the support grooves 231 are directly arranged on the inner surface side 2 2 1 of the foamed cover member 2 2 0. Exclamation on <composition of support groove>

200402390 V. Description of the invention (22) Secondly, 'Relevant side branching, 9] 9 The structure of the 9 support grooves 231, the basic structure of the reference / ^^ 底 / support groove, and the same, so s, again, As each support groove 212. &amp; For example, the side support grooves in this side support groove 2 j 2 ("212" or an interpolating buffer member) are formed into irregularities to form grooves 212a in the inner wall whose irregularities cover the grooves 212a. And along the need to cover the trench 212a, even. This protective film_ At least the inner surface of the package body 210

Also, the inner surface of the component 2 2 0 is comprehensive, and it may be called W coverage. The outer surface of the σ 卩 support member 230 has a comprehensive protective film 21 2 b, which is an erodible ear X, n &gt; &gt; ^, 4 ^, a film made of polyethylene ，, especially for abrasion resistance of the glass 瑀 substrate 201 The point of view is better. As the ancient Ba Gong said, using a polyethylene film in the same knife, .m Λ was used for the film thickness of the polyethylene film 2 12b for the same knife was used 〇 / 1 / zm ~ 1.0; The W degree is Θ. Here, a method for completing the side support grooves 212 and fusing the ultrahigh molecular fluorene polyethylene film 212b to the grooves 212a will be described with reference to FIG. 10. Baixian prepared ultra-high molecular weight polyethylene film 212B as shown in Figure 10 (a). Thereafter, as shown in FIG. 10 (b), the ultra-high molecular weight polyethylene film 120 is formed by heating in advance to form an ultra-high molecular weight polyethylene film 212b having a shape along the groove. Next, as shown in FIG. Fig. 10 ((0), and the groove 2 12a is formed. At the same time, the formed ultra-high molecular weight polyethylene film 2i2b is heated and melted to cover the groove 21 2a. Therefore, the side support groove 212 is completed. . Also 'as a storage glass substrate, plasma display substrate, has been formed

Page 28 2075-5765-PF (Nl); Ahddub.ptd 200402390 V. Description of the Invention (23) When the TFT (thin film transistor) glass substrate and the finished panel of the liquid crystal tank are for the purpose, the box body 210 or the upper support The volume intrinsic resistance value of the member at least in contact with the side surface of the substrate is set to 103 to 1012 Ω · cm, and particularly preferably in the range of 104 to 1 011 Ω · cm. <Actions and Effects> As described above, according to the foamed substrate 200 for transporting glass substrates formed from the above configuration, since at least each of the support grooves 211, 212, and 231 that directly contact the glass substrate are used, and an ultrahigh molecular weight polyethylene film 212b The structure covered by a protective film, etc., will not directly contact the foam when it comes into contact with the glass substrate 001, so even if the foam substrate for glass substrate transportation is reused, it will not be affected by the foam. Deterioration causes dust. As a result, the allowable life of the foamed box for substrate transportation caused by dust generation can be significantly extended. It is possible to reduce the running cost of the foaming box 200 for glass substrate transfer ° (running cost) ° In the foaming box 200 for glass substrate transfer, the installation side is shown in order to reliably support the glass substrate 201 The configuration of the partial support grooves 2 and 2, the bottom support grooves 214, and the upper support grooves 231, however, by having at least the side support grooves 212, the glass substrate 201 can be supported. σ In each of the above embodiments, the example of the present invention is applicable to a glass substrate transport foam box for transporting glass substrates. However, it can also be applied to storage and transportation. For the second time, the foaming box for substrate transportation of boards is a basic invention. The foaming box for substrate transportation has all of the preferred features except for all the items described in the item by the role of olefin foam.

200402390 V. Description of the invention (24) The part of π protruding from the box body of the glass substrate is protected. And i 合 Γί through the method of supporting members, so when the cover is closed,

Hi: The groove phenomenon is in the case body of the glass substrate inserted vertically. In addition, since the = support and the cover are in a male-female face type, a take-out machine (: two: the operation of a glass substrate) can be used to automatically enter and take out the right τ Γ Γ from the box. The foaming box for substrate transportation can be provided in one type and has a structure capable of suppressing an increase in dust generation. "&Amp; for seeding tools-although the present invention has been disclosed in the preferred embodiment as above, 鈇 * restricts the present invention, any familiarity, is not intended to be used within the scope, it can be done slightly; ^ ^ does not depart from the present invention The spiritual scope should be regarded as the attached application _ # i ^ =, so the protection of the present invention is defined by the patent sacrifice. P.30 2075-5765-PF (Nl); Ahddub.ptd 200402390 Brief description of the drawings Figure 1 is an overall perspective view of the basic bubble box in the first embodiment based on the present invention. Fig. 2 is a longitudinal sectional view of an entirety of a foaming box according to another embodiment of the present invention. Fig. 3 is a perspective view of the foaming box for substrate transportation according to the third embodiment of the present invention. Fig. 4 is a perspective view f showing a connection region not provided between the inner wall surface and the inner wall surface of the cover in the first embodiment according to the present invention. | Knife Enlargement Fig. 5 is a perspective view of a temple showing a connection region provided between the inner wall surface of the cover and the inner surface of the cover in the first embodiment according to the present invention. One-knife enlargement Fig. 6 is a perspective view showing the structure between the inner wall surface of the lid body and the inner wall surface of the cover body in the first embodiment according to the present invention. The third part of the connection area where the door is placed is enlarged. Fig. 7 shows the entire three-dimensional w of the configuration of the foaming box for the second embodiment based on the present invention. η slope glass substrate Fig. 8 is a sectional view corresponding to Fig. 7. Fig. 9 as viewed from the front of a 1 U line is a cross-sectional view showing the configuration of a side ridge supporting groove using a foamed box according to a second embodiment of the present invention.纟 Glass Substrate Carrying (a) ~ (c) in Fig. 10 show the first? Fentium's side support of the foaming box for glass substrate transportation is shown in the example. Ding / Dan Yin J Yi Yi process section

200402390

Brief description of the drawings: (1) Box body; (1 a) Insertion member; (2) Cover body; (2a) Inner surface; (3) Support member; (3b) Vertical plate; (10B) Upper support groove; (201) glass substrate; (211) inner wall; (2 1 2 a) groove; (2 1 4) side support groove; (2 2 1) inner surface side; (231) upper support groove; (200) glass substrate moving Use (4), (4), (4a), (4b) (212b) protective film (ultra high score (3a) horizontal plate; (1 0 A) substrate support groove; (1 0 0) glass substrate; (2 1 0) Foam box body; (2 1 2) side support grooves; (2 1 3) bottom wall; (2 2 0) foam cover member · (23 0) upper support member · (241), (242 ) Surface knot pieces ;; Foam box; Surface knot pieces; Polyethylene film).

2075-5765-PF (N1); Ahddub.ptd Page 32

Claims (1)

200402390 VI. Scope of patent application 1. A foaming box for substrate handling, in which Qiu Tian and board include: * Inside.卩 Receive the glass-based box body (1) 'There is a substrate support groove (10A) on the opposite inner wall to support (100);' The soil plate support member (3) is provided to support the above-mentioned glass substrate. H〇〇〇 The upper support groove (10B) next to the upper portion of the bracket); and the box-shaped cover (2), in the state where the supporting member (3) is mounted on the upper end portion of the upper substrate (100), the supporting member type is included, It is used to be engaged with the opening side of the upper part of the box body (丨); 'The inner wall surface of the support member (3) and the cover (2) is set to = the support member (3) and the cover ⑴ Link. . Zhangzhong upper ΠΪ special, the foaming box for substrate transportation as described in the first item, wherein the supporting member (3) is formed in an inverted L shape, the basin includes a side, and the upper plate (3a), which is provided with the upper portion. The support groove (1GB) hangs below, and the plate (3 magic, set the above upper support groove (10B) on the i side, and hangs down from the side of the horizontal plate (3a); "The inner door is in ί Ϊ t The above-mentioned connection area is interposed between the surface side of the flat plate (3a) and the inner wall surface of the cover body (2). Soil® 3 = Substrate installation described in item 1 of the scope of patent application = Upper support groove 'and upper 4 As stated above, the foaming box for substrate transportation as described in the item 1 of the patent scope, Page 33, 200402390 VI. Patent application scope Where the connection area is between the support member (3) and the inner wall surface of the cover (2), male and female facial knots (4a, 4b) 〇5. The foaming box for substrate transportation according to item 1 of the scope of patent application, wherein the connection area is provided with an engagement between the support member (3) and the inner wall surface of the cover (2). (14a, 14b, 24a, 24b, 34a, 34b). 6. The foamed box for substrate transportation as described in item i of the scope of patent application, wherein the box body (1) and the cover (2) are polyolefin foams. 7. The foamed box for substrate transportation according to item 6 of the scope of patent application, wherein the support member (3) is a polyolefin foam. The foaming box for transporting the Λ board is made of a good foam body for storing the substrate inside, including a carcass body (210), an opening at the upper part, which houses the substrate, at (212); A side support groove opening foam cover member (22) supporting the substrate is used to seal the foam box body ⑴. The surface of the above-mentioned side support groove (212) is covered with a protective film (212b). The foaming box for substrate transportation described in item 8 on the ninth in the basin, at least the bottom support groove (214). The surface is protected by a protective film. 200402390 ............ ^ 1 · 1—16 6. Covered by the scope of patent application. I 〇 · The foaming box for substrate transportation as described in item 8 of the scope of patent application, further including support for? The upper supporting member (2 30) of the upper supporting groove (23 1) of the second upper end portion; at least the surface of the upper supporting groove (2 31) is covered with a protective film (21 2 b). II. The foaming box for substrate transportation as described in item 8 of the scope of patent application, wherein the protective film (21 2b) is an ultra-high-density polyethylene. ____ ^ 2075-5765-PF (Nl); Ahddub.ptd p. 35 3442