TW200303159A - A device for exposing a face of a panel - Google Patents

Abstract

The invention provides apparatus for exposing a face (22) of a panel (20), in particular a printed circuit panel, the device including a light source (26). The device further comprising: two moving shutters (16A, 16B) suitable for masking said light source (26), each of said shutters (16A, 16B) presenting a respective edge, said (edges together) defining a window through which a light zone is generated on said face (22) of the panel (20) to be exposed; means (32) for displacing said shutters (16A, 16B) in a plane (P) lying between said light source (26) and said panel (20); and control means (34') for controlling the displacement of said shutters (16A, 16B) (in such a manner) that both shutters (16A, 16B) move past said face (22) of the panel (20) at substantially the same speed (V) and in the same direction.

Description

(i) (i) 200303159 Description of the invention (The description of the invention should state: the technical field to which the invention belongs, the prior art, the content, the embodiments, and the drawings.) The invention relates to a method for exposing a panel, especially a A device on at least one side of a printed circuit board. The device includes a light source and a device that supports the panel to face the beta light source. w The above device is particularly suitable for making a printed circuit from a photosensitive material coated on a panel and an original image placed in front of the panel, which conveys a path to be generated on the printed circuit. A light beam is suitable for exposing the entire panel, either by continuously scanning the surface or by fully exposing the surface. Φ A photosensitive material that usually includes a dry film or ink needs to receive an accurate amount of light energy. In order to ensure the complete polymerization of the photosensitive material, this light energy is fixed throughout the region ', thus ensuring the final quality of the printed circuit. When the material is underexposed, the subsequent development is defective, especially the cohesion of the photosensitive material is irregular, which usually causes the wiring on the printed circuit to be too thin or even broken, and the over-exposure example, on the other hand, reproduces the image. The accuracy is not good, especially when the lines become larger than the desired width, which can cause some lines to contact each other and therefore short circuits. In order to improve productivity, especially by reducing the total time required to expose the panel, use always brighter light sources and more sensitive photosensitive materials. However, the above-mentioned light source can only be adjusted to a small range, which makes it necessary to be able to adapt to the period of the panel exposure time is getting shorter and shorter. · Furthermore, the time required to turn off the light source is too long, which may be as long as 30 minutes. Before the light source may be turned on again, it is best to avoid turning off and on, in order to optimize the productivity of the exposure device. Therefore, it is common to make precautions to keep the light source on and to use a shutter that moves the light source interactively off and on by moving between the light source and the surface to be exposed. 200303159 (2) Description of the invention It is known that the above-mentioned device has a shutter for interactive shading and does not cover the light, so it is possible to keep the light source on. Moreover, the large sensitive range of photosensitive materials can be from less than 10 mJ / cnT2 to more than 600 mJ / cnr2, and it is important to adjust the exposure time. However, those devices having a single shutter cannot shorten the exposure time, which is obtained with a certain degree of accurate shutter shift.

In addition, either the light source is blocked by moving a single shutter on a plane, or it is moved around by the light source. In the first situation, the flat shutter usually makes one go and one back travel through the light source, and the panel area exposed for the first time is exposed for a long time because it is finally blocked, which means that the entire surface is unevenly exposed of.

In the second situation, the shutter usually rotates and requires a rotation drive mechanism, which makes it possible to obtain a fast rotation speed and a short stop time. Such a mechanism enables the panel to be exposed uniformly and the exposure time can be adjusted. However, in order to obtain a very short exposure time, it is important to increase the rotation speed of the shutter, especially when they are shorter than 1 second, which causes technical difficulties in implementation. Due to the inertia of the driving system and the dynamic stress of the driving force received by the device, the rotation speed increases as the rotation speed increases. Therefore, for a short exposure time, 'this device cannot satisfy the reproducibility guaranteed between two exposures', both in terms of the rotation speed and the accuracy in which the shutter can be stopped. The object of the present invention is to provide a device that enables improved panel exposure, especially when the panel is covered by a very sensitive material, which enables a very wide range of exposure times to be achieved, thus enabling the same device to be used in 200303159 (3) To expose materials with different sensitivities. This is achieved because the fact is that the device includes: • The first and second moving shutters properly cover at least part of the light source continuously, each shutter represents a different end, which together defines a window suitable for adjustment and passes through A light area is generated on the face of the panel to be exposed; a shifting device configured to move the shutter in a plane between the light source and the panel; and

• A shift control device that controls the shutter shift as a function of the sensitivity of the face to be exposed and as a function of the power of the light source. The two shutters move at substantially the same speed and in the same direction through the face of the panel. Since the high-power light source operates at a fixed power that is difficult to adjust, the energy level is changed by different exposure times.

Having two shutters makes it possible to start and end exposure in the same area of the panel. By moving the shutter in the same direction and at the same speed, the uniformity of exposure across the entire surface can be guaranteed, even when the exposure time is very short. Similarly, when scanning is used, because each area is relative to the area of the window, each area receives the same energy, for example, the area exposed for the first time is also the area covered for the first time. For very sensitive materials, the exposure time required is very short, the grade is a few tenths of a second, it is best to choose the size of the window to be smaller than the size of the panel to be exposed, in order to pass through the fixed panel by moving the window To scan the entire area. Conversely, for less sensitive materials, the longer exposure time may be as long as several tens of seconds. Open the window to the maximum and fully expose the entire surface. 200303159 (4) Light 0 Shift speed of each shutter The surface to be exposed is preferably fixed, but in order to optimize the production time, the displacement speed can be changed according to the nature of the displacement.

It should be understood that when the exposure window is opened, that is, until the first shutter has reached a distance from the second shutter corresponding to the desired window size, the shift speed of the first shutter may be higher than the speed during exposure itself. Then after the exposure period, the speed of the second shutter (exactly the same as the shift speed of the first shutter during opening) is also greater than the speed of the second shutter during the exposure. Similarly, panels may have discontinuous exposure areas, between which the two shutters can shift faster than their speed during exposure. Shutter speed can be changed. While the panel is being processed (before, during, and after exposure), for each of the same operations (open / close window, exposure, etc.), one of the two shutters has a speed substantially equal to the other speed

The advantage is that the shifting device enables the shifting speed of each shutter to adjust the shifting through them. The advantage is that the shifting means comprises a first shifting means for a first shutter and a second shifting means for a second shutter. Therefore, each shutter is advantageously connected to a specific shifting device so that it is possible to move one shutter without involving the other. Two specific embodiments can thus be imagined. In the first embodiment, the shutters are different from each other and are driven together when shifted. However, in the second embodiment, the two shutters are the same and are driven by the shifting device, respectively. The devices are preferably the same. , But specify -9-200303159 (5) Da Ming I ㉟ ㉟ Continued pages, χλ,, ^ νΐ-* · ν · r · For each shutter. In order to drive the shutter faster and completely through the panel to be exposed, the shifting device is an accurate device, preferably a linear device so as to ensure that the shutter has a fixed shifting speed along the path through the panel to be exposed. The advantage is that the displacement device comprises a drive, preferably a rodless pneumatic drive.

Any other shifting device enables the shifting speed of the shutter to be adjusted to be accurate, reliable, and reproducible, such as a linear motor. The advantage is that the shift control means includes a first initial shift means for a first shutter initial shift and a second initial shift means for a second shutter initial shift, the first and second initial shift means Are independent of each other and enable the window size to be adjusted. The advantage is that this control device enables the shutter speed to control and adjust the shifting effect of all panel process shifting devices.

Adjusting the window size makes it possible to adjust the amount of energy received by the photosensitive material without having to specifically affect the shutter speed. Therefore, every time the sensitivity of the photosensitive material changes, the power of the light source may change every time. In order to obtain the required energy level, it has the ability to adjust the window size. This adjustment is only performed by modifying the shift parameters of the two shutters, so a single exposure device can be used to make a print circuit from any type of photosensitive material. For the second specific embodiment imagined above, each shutter has its own initial shifting means. For the first embodiment, the first difference is that the window is opened before the exposed plate surface. Compared with the second embodiment, -10- 200303159 (6) It requires each shutter to have its own initial device . However, its second difference is that the first shutter is placed in an appropriate position relative to the second shutter before the exposure, and the two are shifted simultaneously throughout the entire exposure so that the initial device can be common. The advantage is that the first shifting device is arranged on the second shutter so that the first shutter is adapted to move relative to the second shutter.

Therefore, in the first embodiment, the first shutter is fixed to the second shutter, which carries the first shutter. In this example, the first shutter represents a solid surface placed as a mask in front of the second shutter, which also has a solid surface but has a large opening area, and the first shutter is placed before that.

The compensation of the first shutter position determines the area of the second window. The shift speed of the first shutter relative to the second shutter is less important, especially because the window remains open away from the exposure area before the second shutter is shifted, and can be achieved using any known device, whether this device is mechanical , Pneumatic, or other. The device that moves the first shutter relative to the second shutter, however, should be selected in such a way that the position can be accurately and reproduced, so as to ensure that the area of the window can be adjusted appropriately. The advantage is that the device further includes a device for cooling the light source. Because this light source is high-power, such as a mercury vapor discharge bulb up to 10 kilowatts, it is desirable to cool it, such as to circulate cold air to dissipate as much heat as possible and avoid heating up the exposure device, although the temperature near the light source may be high At 1000 ° C. When the shutter is placed in front of the light source, especially in the off position, it receives all the intensity from the light source. Therefore, in order to avoid thermal damage to the shutter and his week -11-200303159 (7) 茕 According to the continuation page: Fen ** > μ * vs > · × {. Tt <-ta < / * 4. (Shutters, control devices, etc.), each shutter advantageously contains a heat-resistant material. Therefore, even when the shutter is in the off position, it remains in front of the light source and stays permanently, the shutter can accumulate a large amount of heat without damage.

In addition, to protect the shutter, they had better reflect the light back to the light source as much as possible. Therefore, each shutter advantageously presents a reflective surface, so that it returns at least a portion of the light emitted by the light source. Because the light source is preferably cooled, it can handle the heat reflected by the shutter. After reading the detailed description of the following specific embodiments rather than limiting examples, the present invention will be easier to understand and its benefits will be more apparent. The description accompanying the illustration is as follows: Fig. 1 is a perspective view of the front of the exposure apparatus of the present invention; Fig. 2 is a perspective view of the rear of the exposure apparatus of the present invention; and Fig. 3 is a perspective view of a shutter in a specific embodiment, two shutters touching each other ;

4 is a view similar to FIG. 3, but the two shutters are separated; FIG. 5 is a perspective view of the shutter in another specific embodiment, the two shutters are touching each other; and FIG. 6 is a view similar to FIG. 4, but two The shutters are separate. The exposure apparatus of the present invention shown in FIG. 1 includes a light box fitting 10 and a reflector fitting 12 for collimating and distributing the light emitted by the light box fitting 10 in a uniform manner. The light box accessory 10 and the reflector accessory 12 are both placed on a frame 14 which is fixed to the main structure (not shown) of the exposure device. Two shutters 1 6 A and 1 6 B are suitable to move between the light box accessory 10 and the reflector accessory -12- 200303159 (8) Description of the invention continued on page 1 2 according to the individual position of the shutter to cover and / or Do not cover the light box accessories 10. In Figure 1, the first shutter 16A is in the off position and is placed before the light box accessory 10, while the second shutter 16B is on the left-hand side of the device in the waiting position. In this structure, no light leaves the light box accessory 10 closed by the first shutter 16A. This device is not doing an exposure.

Preferably, each shutter 16A (16B) includes a metal-strength member of a heat-resistant material 17A (17B), which is covered by a sheet of metal 18A (18B) and represents a rear surface 19A (19B) (see FIG. 2). , Its reflected light returns to the light box 10. Fig. 2 shows the exposure apparatus seen from the rear, and the two shutters 16A and 16B are in the same direction as Fig. 1. A panel 20 is supported in front of the reflector fitting 12 by a supporting device 21 such as a skeleton and the main structure of the device, and is suitable for placing the face 2 of the panel 2 0 2 into the light box fitting 1 before the reflector fitting 1 2 0.

The light box accessory 10 has an additional reflector 24 forming an openable back cover, especially to make it easy to replace the light source, such as a single tubular bulb 26. A cooling device such as an air conditioner (not shown) serves as a cooling light box fitting 10 by injecting air through an inner duct 2 8 located on the side close to the light box fitting 10. The outer duct 30 is located on the opposite side of the light box fitting 10 as the airflow exhausted through the light box fitting 10, and in particular through the light source 26, thus generating an airflow suitable for removing a large amount of heat. The shifting device 32 for moving the shutters 16A and 16B cooperates with the skeleton 14 so that the shutters 16A and 16B can be moved relative to the fixed skeleton 14, thus causing the shutters 16A and 16B to move relative to the light box accessory 10 at The plane P substantially parallel to the panel 20 is moved. The shift control device 3 4 is connected to the shift device 3 2 for controlling the shutter 1 6 A and -13-200303159 (9) Description of the invention A common shift speed V of the subsequent page 16B is provided, which extends through the speed of the exposure panel 20 All platforms are preferably fixed, with an average speed ranging from 1 ms · 1 to 1.5 ms · 1; the shift control device 34 also has an initial device 36 which triggers the start of the shift of each shutter. The shift control device 34 enables each of the shutters 16A and 16B to move independently at a variable speed VD, e.g., greater than V, during two periods when the exposure windows are opened / closed separately.

In addition, for special execution reasons, the shift speeds of the shutters 16A and 16B are preferably variable during exposure. Regardless of the stage (opening / closing the window, exposure, etc.), it is necessary that each of the shutters 16 A and 16B have the same speed, not at the same time but at the same time they pass through the same geometric position, and apply to all the same positions, It is natural that the speed of the two shutters 16A and 16B changes over time, that is, from one geometric position to another.

In the first specific embodiment shown in Figs. 3 and 4, the shutters slide relative to each other. The first shutter 16'A and the second shutter 16'B cooperate via a first shifting device including a slideway 32'A, a shelf or any other known device for generating movement and is preferably fixed to the second shutter 16'B on. In this specific embodiment, the shifting device includes: on the one hand, for the first shutter 16'A, the slideway 32'A is fixed to the second shutter 16'B and is driven by the first initial device 36'A; On the other hand, for the second shutter 16'B, the second shifting device includes, for example, a rodless pneumatic actuator 32'B fixed to the fixed frame 14, and the shutter 16'B is driven by the second initial device 36'B Move down in plane P. The control device 34 'is connected to the first and second of the shutters 16'A and 16'B, respectively. 14-200303159 (ίο) Description of the Invention Continued Initial devices 36'A and 36'B. In Figure 3, the two shutters 16'A and 16'B are shown in the off position, that is, no light passes through the light box accessory 10 (shown in Figures 1 and 2) to the face 2 2 of the exposed panel 20, the face Placed facing the exposure device.

Initially, the first shutter 16'A slides in the first direction D1 contained in the plane P, exceeding the second shutter 16'B to open a window 38, as a function of the photosensitive material and as a function of the light source 26 6 Function (shown in Figure 2). Window 38 is formed by the edges 40'A and 40'B in the direction of the shift of the shutters 16'A and 16'B, and the edge 40'C or the supporting device 32, or the device in the lateral direction of the second shutter 16'B. Defined by any other element. The second shutter 16'B has an opening 42 'which is equivalent in size to the surface 22 of the exposed panel 20, so that when the first shutter 16'A is fully opened, the entire surface 22 can be exposed in one exposure time.

Therefore, depending on the type of photosensitive material on the surface 22, the first shutter 16'A is opened in whole or in part so as to expose the window 38, so that the light area 3 8 'can be generated on the surface 22 by the second shutter 16'B. Shift can scan the entire surface. Regardless of the selected exposure type, the first shutter 16'A is initially opened at a proper distance L from the second shutter 16'B at a speed V, that is, to the right of the direction D 1 shown in FIG. For the entire exposure, after an exposure time of preferably 2 seconds, or by scanning once the window 38 is opened to expose, the second shutter 16'B, like the first shutter 16'A, moves at the same speed V in the same direction D1, also That is, the first shutter 16'A to the right. The left part of the second shutter 16'B therefore moves forward to cover the exposed area 38 ', when the window 38 moves through the surface 22 in the direction D1. To interrupt the exposure, the second shutter 16'B closes the light box accessory 10 (as shown in Figs. 1 and 2). Then, exposure is performed from right to left in the opposite direction D2. -15-(11) 200303159 Beeps saying that the electrical margins leave the exposure area. The first shutter 16'A is best opened before the first exposure '. The second shutter 16 is used to close the light box accessories. 〇. In such a case, the speed A of opening the first shutter 16 of the window 38 may be v, which is different from the scanning speed v of the window 38 driven by the two gates 16 'and 16 and β. For example, the window 38 opens the exposure area outward, that is, it is out of the range of the light source 26. For example, on the side of the device, the window 38 can be adjusted to a special value before the exposure in each panel 22. Move out of the exposure area,

The sub-window 38 has a 8-dimensional surname B and looks for an exposure cycle period that exposes the entire panel 22. When there is only the power of nine sources 26 or the type of photosensitive material, then you need to perform #first adjustment. ° First ’leave the exposure area at the size of the whole window 38, and the second ~ M on the second shutter M, b

However, the shift speed V of the internal n U′A may approach 0, and the first shutter 16, A, is manually moved a desired distance B. To the members of the sage time. Many, such as when the panel 22 to be exposed is put in place or when the light source 26 is changed. Figs. 5 and 6-In the second embodiment, each of the shutters 16A and 16B passes through 酉 * * quot Φ * 1 Π υ. In this embodiment, the two shutters 16A and 16B are completely similar to each other Sr ® and must move through the light source 2 6 at the same speed (see Fig. 2). This embodiment: As shown in FIG. 7, the specific embodiment is only different in the phase of the shutter 16A and the phase shift and the shift device. The shutters 16A and 16B have the same heat bearing capacity f, and ′ have a strength member of a heat-resistant material (not shown), and remove the heat through the main glazing to reflect the individual slideways 19A, 19B of the material to the 4+ u person. / JE 'Vision® 3 8 as a reduction of the need to expose a series of panels 2 2 total field pre-adjustment window 3 8 size parallel to other operations to reduce the time parallel to the light box same and solid -16-200303159 (12) Therefore' starting from The closed position is shown in FIG. 5. By way of example, when the second shutter 16B is on the right-hand side of the device, the first shutter MA closes the entire light box 10, and the two individual edges 40A and 40B of the shutter collide.

Each shutter 16A, 16B is fixed to a pair of rodless pneumatic actuators 32A, 32B disposed on the opposite side of the shutters 16A, 16B so as to ensure proper guidance of each shutter 16A, 16B. Each pair of rodless pneumatic actuators 32A, 32B is controlled by the displacement control device 34 through the first and second initial devices 36a * 36B. By way of example, for a scanning exposure, the window 38 is used for the first shutter 16A to drive it to move to the left opening portion of the first initial device 36A at the speed V, that is, in the direction D2 as shown in FIG. 6 while maintaining the first Two shutters 16B are fixed.

Once the window 38 is opened to the desired size, that is, once the first shutter is moved so that the distance L exists between the two edges 40A and 40B, the second initial device 36B is used to shift the second shutter 16B and start to follow the first The shutter 16A moves at the same speed V in the same direction D2. The fixed size of window 38 is based on the interval between the two shutters 16A and 16B moving at the same speed V, so it moves in the direction D2 through the light box accessory 10 (shown in Figures 1 and 2) and passes at the speed V through the exposed surface. twenty two. The window 38 is closed at the end point of a generally approximately 50 cm long stroke by moving the edge 40B of the second shutter to the edge 40A of the fixed first shutter 16A. The following exposures are made by moving the shutters 16A and 16B in the same manner as described, but they come back to the right, that is, in the direction D1. In order to expose the entire surface 22 ′, the window 3 8 is opened to the maximum size by moving the first shutter 1 6 A to the left in the direction D2 at the speed v, allowing for a better 2 seconds -17- 200303159 (13)

Mengming said: Ming continued on page A. The exposure time elapsed during the two shutters 16A and 16B for a fixed period. Once the time has passed, the second shutter 16B starts to move to the left at the speed V in the direction D2, until the window 38 is closed again, and when the edge 40B comes in contact with the edge 408 again. .t Regardless of the type of exposure, scanning exposure by moving window 38 or... by opening window 38 to the maximum overall exposure, maintaining the window open at the end of exposure surface 2 2. This has the ability to move the window 3 8 beyond the exposure area, that is, whether it is on the left or right hand side of the device. When the exposure time is shorter than 1 second, the technique of exposing the surface 22 by scanning, that is, moving the window 38 is particularly recommended, in view of the fact that the overall exposure is more suitable for exposure times up to several seconds. The purpose of the present invention is to make it possible to expose all surfaces 22, whether by scanning or by global exposure, but it will be naturally understood that the device can also be used to expose a defined area on the surface 22, that is, a strip or some other more complex shape. For this purpose ’it has the ability to provide shutters or windows that move in other directions, or shutters of more complex shapes.

Description of Symbols for Symbols 10 Light Box Accessories 12 Reflector Accessories 14 Skeleton 16A '16B Shutters 17A, 17B and Thermal Materials 18A' 18B Sheet Metal 19A, • 19B Back 20 Panel 21 Supporting Device-18- 200303159 (14) 22 Sides 24 Reflector 26 Light source 28 Inner tube 30 Outer tube 32 Displacement device 34 Displacement control device 36 Initial device 16, A, 16, B Shutter 19, A, 19, B Back 32, A slideway 32Έ Driver 34, displacement Control device 36, A, 36, B Initial device 40, A, 40'B, 40'C edge 38, window 42, opening 32A, 32B drive 34 shift control device 36A, 36B initial device 40A, 40B edge 38 window Distance from P plane D and D2 direction L

-19-

Claims (1)

200303159 Patent application scope 1. A device for exposing at least one side (22) of a panel (20), especially a printed circuit board. The device includes a light source (26) and supports the panel (20) facing the The support device (21) of the light source (26). The feature of the device is that the device further includes: • The first and second moving shutters (16A, 16B; 16, A, 16, B) cover at least part of the appropriate continuous Light source (26), each shutter (ι6A ,; 16, A, 16 B) represents one other end (40A, 40B; 40'A, 40, B, 40, C), the end (40A '40B; 40'A, 40'B, 40'C) together define a window (38) suitable for adjustment, and a light area (38,) is generated on the surface (22) of the panel (20) to be exposed through it; • Move the shutter (16A, 16B; 16'A, 16'B) of the shifting device (32; 32A, 32B; 32'A '32'B) to move the light source (26) and panel (20) Between the shutters (16A, 16B; 16, A, 16, B) within the plane (P); and • a shift control device (34;) that controls the shift of the shutters (16A, 16B; 16'A, 16, B); 34 ')' as to be The sensitivity function of the exposed surface (22) as a function of the power of the light source is in the form of two shutters (16A, 16B; 16, A, 16, B) at substantially the same speed (V) and in the same direction (Dl, D2) Move the face (22) through the panel (20). 2. The device according to item 1 of the scope of patent application, wherein the shifting device (32; 32A, 32B; 32'A, 32'B) includes a first shift for the first shutter (16A; 16'A) Device (32A; 32, A) and a second shifting device (32B; 32, B) for a second shutter (16B; 16, B). 3. The device according to any one of the foregoing patent application scopes, wherein the shifting device 200303159 patent application scope continued pages include a driver (32B; 32'A, 32'B). 4. The device according to any one of the foregoing patent applications, wherein the shift control device (34; 34 ') includes a first shift start device (36A; for starting movement of the first shutter (16A; 16'A)); 36'A) and a second shift start device (36B; 36'B) for starting movement of a second shutter (16B; 16'B), the first and second shift start devices (36A, 36B; 36 'A, 36'B) are independent of each other and make the size of the window (38) adjustable. 5. The device according to any one of items 2 to 4 of the aforementioned patent application scope, wherein the first shifting device (32A) is disposed on the second shutter (16B), so that the first shutter (16A) is suitable for relatively The two shutters (16B) move. 6. The device according to any one of the aforementioned patent applications, the device further comprising a cooling device (28, 30) for cooling the light source (26). 7. A device according to any one of the foregoing patent applications, wherein each shutter (16A, 16B; 16'A, 16'B) contains a refractory material (17A, 17B), 8. According to any one of the foregoing patent applications Device, wherein each shutter (16A, 16B; 16'A, 16'B) represents a reflecting surface (19A, 19B) such that it reflects at least a portion of the light emitted by the light source (26).