TW200300841A - System and method for inspection using white light interferometry - Google Patents

Abstract

A system for inspecting components is provided. The system includes an image data system that generates image data of the component, such as from a position overlooking the top of a bumped wafer. An interferometry inspection system is connected to the image data system and receives the image data, and analyzes the image data to locate interference fringing that is used to determine the surface coordinates of the bump contacts.

Description

200300841 A7 B7 V. Description of the invention (1) Field of the invention The present invention relates to the field of component inspection systems. More specifically, the present invention relates to systems and methods for inspecting components using interference metrology, such as white light interference metrology, to measure the 3-dimensional features of the component. BACKGROUND OF THE INVENTION Inspection systems using image data are conventional techniques. Typically, this type of inspection system uses image data from components illuminated by a coherent or incoherent light source, and then performs image analysis processing on the image data to determine whether the component meets a predetermined standard. For example, image data analysis is used to determine whether a component is correctly labeled, whether its features are in the correct location, or if there are other specific criteria. In this regard, "features" may include desired features, such as contacts, or unwanted features, such as damaged contacts, and the damage extends on or into the surface of the contact. At present, in this type of component inspection system, the 3D appearance of the component must be inferred from the image data. Therefore, in many cases it is difficult to decide whether the indication above or below the plane or reference in the image data comes from a feature. Similarly, since this type of image data analysis uses relative changes in brightness to infer the location of features and determine whether these features fall within a pre-determined permission standard, features often fail to be identified under a single light source. Although multiple light sources are used in the conventional technology, such as light sources from two different angles, the image data generated by such light sources still cannot clearly identify the characteristics of components that do not meet certain standards, such as accurately determining the characteristics. size of. This paper size applies to China National Standard (CNS) Α4 size (210X 297 mm) — I. I-r — — — I (Please read the precautions on the back before filling this page)

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs -5- 200300841 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (2) Description of the invention According to the present invention, a system and method for inspecting components are proposed. To overcome current problems associated with inspecting components. In particular, the systems and methods provided for inspecting components can use interferometry to determine the surface coordinates of the components. According to an exemplary embodiment of the present invention, a system for inspecting a component is provided. The system includes an image data system for generating image data of a component, such as looking down on the top of a wafer with a solder bump from a certain position. The interferometry inspection system is connected to the image data system to receive the image data and analyze the image data to locate the interference fringes used to determine the surface coordinates of the solder joints. The invention provides many important technical advantages. One of the important technical advantages of the present invention is that the system and method for inspecting a component is to determine the 3D surface coordinates of the component using interferometry. In the present invention, interference fringe of monochromatic light or white light can be used to generate interference fringes on the component, and the triaxial coordinates can be determined from the interference fringes. Those skilled in the art will further understand the advantages, excellent features, and other important aspects of the present invention after reading the detailed description in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram of a system for performing component inspection using interference metrology according to an exemplary embodiment of the present invention; FIG. 2 is a system for analyzing an image data using interference metrology according to an exemplary embodiment of the present invention槪 Figure; This paper size applies to Chinese National Standard (CNS) A4 specification (21 × 297 mm) ~--6-(Please read the precautions on the back before filling this page)

200300841 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (3) Figure 3 is a hologram of a system for determining brightness changes according to an exemplary embodiment of the present invention; Figure 4 is an illustration according to the present invention A schematic diagram of a system for determining and controlling the position of a lens or other system or component used to generate interference fringes according to an exemplary embodiment; FIG. 5 is a diagram for determining pixels corresponding to image data according to an exemplary embodiment of the present invention Systematic diagram of component surface coordinates; Figure 6 is a graph of pixel brightness changes according to the teachings of an exemplary embodiment of the present invention; Figure 7 is a method for determining the surface coordinates of a component using interference metrics according to an exemplary embodiment of the present invention FIG. 8 is a flowchart of a method of determining a surface coordinate of a component according to an exemplary embodiment of the present invention; and FIG. 9 is a flowchart of a method of performing a component inspection according to an exemplary embodiment of the present invention. Comparison of main components 100 component inspection system 102 component 104 component stage 106 light source 116 shutter 110 lens 112 image data system (please read the precautions on the back before filling this page)

This paper size applies the Chinese National Standard (CNS) A4 specification (21〇X; 297 mm) -7- 200300841 A7 B7 V. Description of the invention (4) Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperatives 118 2-dimensional inspection system 114 Interferometry inspection system 200 system 202 pixel map drawing system 204 degree change system 206 coordinate system 208 pixel surface position system 210 feature loss system 212 defect body B- & product system 214 defect area system 216 defect depth / high : System 300 System 204 Shell Degree Change System 302 Frame Storage System 304 Data Compression System 306 Frame Averaging System 308 Scanning 1¾ Domain System 400 System 402 Tracking Rate Controller 404 Coordinate Generation System 406 Tracking Acceleration System 502 Midpoint Rendering System 504 Midpoint Analysis System 506 Stripe Counting System (Please read the notes on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210X297 mm)- 8- 200300841 A7 B7 V. Description of the invention (5) Detailed description of the preferred embodiments In the following description, the same components are given the same reference numbers in the description and drawings. The drawings are not drawn and do not need to be in actual proportions. Some components are presented in general or sketchy styles. For clarity and conciseness, they are identified by product names. FIG. 1 is a schematic diagram of a system 100 for performing component inspection using interference metrology according to an exemplary embodiment of the present invention. The system 100 may use interference metrology to determine the 3-dimensional surface coordinates of the component, such as using white light interference to generate interference fringes on the component, as a function of the characteristic height of the component. The system 100 includes a component 102 on a component carrier 104. The component stage 104 may be a die stage, a conveyor belt, a film frame, a tray, or any other suitable component inspection stage. The component 102 may be a semiconductor component, a wafer, a die, a wafer-scale package, a wafer with solder bumps, a spherical grid array, a packaged die, a die in a gel package, a die with or Dies in trays, or other suitable components in suitable structures. Typically, the component 102 is delivered below the interference system 120 by a suitable system or device, such as a conveyor belt, a robotic arm, or other suitable system or device. The system 100 includes a light source 106, which may be a monochromatic light source, a polychromatic light source, a white light source, an interference or non-interference light source, or other suitable light sources. The light beam produced by the light source 106 travels in the direction "A". When the extractable shutter 11 is in front of the adjustable lens 110, the light beam "A" is reflected off the beam splitter 108 and travels in the direction of the arrow "B". Light strikes the module 102 and returns in the direction of arrow C. Then, the light headed in the direction of "D" and reached the image data system 112. The paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) (Please read the precautions on the back before filling out this page) Intellectual Property of the Ministry of Economic Affairs Printed by the Bureau ’s consumer cooperatives

-9- Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 200300841 Α7 Β7 V. Description of the invention (6), where the light is converted into the brightness data of the pixel array of N × M or other suitable image data, where N and M Is an integer. This image data is then provided to a two-dimensional inspection system 118 for use in image data for two-dimensional image analysis. In addition, the extractable shutter 116 is pulled away from the front of the tunable lens 110. Thus, the light traveling in the direction "A" is split by the beam splitter 108 and travels in the direction E to reach the tunable lens 110. Then, the light is reflected back to the beam splitter 108 along the path F, where the light is guided to the component 102 along the path B, and then the light from the adjustable lens 110 is reflected back along the path C and reaches the image data along the path D System 112. The adjustable lens 110 is driven by a motor with a magnetic, optical, or other indication indicator to allow the displacement of the lens to be related to the angle of rotation of the motor. Precision position measurement (such as laser measurement) can be used to determine the lens The position and corresponding surface coordinates can also be determined by other applicable methods. As a result of the beam splitter and reflection, the image data generated by the image data system 112 includes interference fringes. Interference fringes are phenomena that occur when the phase of a light from a component differs from the wavelength of another light received from the component. For example, if the phase difference of the light is 180 ° or 1/2 wavelength, the brightness data will be seriously attenuated, and when the light of the same phase cancels the light of different phases, the brightness will be reduced. When the phase difference is less than or greater than 180 °, the brightness will also decrease, but not as severe as at 180 °. In an exemplary embodiment, the adjustable lens 110 is made of the same material as the component 102 to be inspected. For example, a gold lens may be used to inspect the contact pads made of gold to enhance the use of white light interference. The quality of the interference fringe pattern produced by metrology. This paper size applies Chinese National Standard (CNS) Α4 specification (210X297 mm) ~ (Please read the precautions on the back before filling this page)

-10- 200300841 Α7 Β7 V. Description of the invention (7) (Please read the precautions on the back before filling out this page) The use of lenses made of the same material as the object under test can improve the quality because interference light is generated under this structure The absorption of the wavelength is reduced, and absorption may occur when different materials are used. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Using this interference principle, the adjustable lens 110, the component carrier 104, or other suitable components in the system 100 must be able to move to produce a change in interference pattern on the component 102. For example, if the adjustable lens 110 is moved toward the beam splitter 108, when the adjustable lens 110 is moved, the phase between the different phase and the same-phase light received by the image data system 112 will change. Therefore, interference fringes appear on the illuminated portion of the surface of the component 102. Interference fringes at different points on the surface of the component 102 will show increasing or decreasing brightness. Therefore, the brightness 値 of the N × M image data pixels generated by the image data system 112 will change as the beam splitter 108 moves toward the adjustable lens 110. In this way, when the beam splitter 108 is moved toward the beam splitter 108, the image data system 112 can be used to generate a continuous frame of image data in order to determine that the brightness change of each pixel of the image data is a function of the position of the adjustable lens 110. Therefore, by locating the center of the interference fringe, according to the brightness of each pixel in the continuous image generated by the image data system 112 and the position of the adjustable lens 110, the surface of the component 102 corresponding to each pixel can be determined. The coordinates of the location. The tunable lens 110 can be corrected using known surface coordinates 値. The image data system 112 is connected to an interference metrology inspection system 114, a two-dimensional inspection system 118, and an interference system 120. The term "connection" as used herein includes physical connections (such as via one or more copper connectors), virtual connections (such as data memory locations of one or more randomly assigned data memory devices), logical connections (Such as one or more logic devices via semiconductor circuits), wireless paper size applies Chinese National Standard (CMS) A4 specification (210X297 mm) ~ -11-200300841 Α7 B7 V. Description of the invention (8) Connection, hypertext Transmission Protocol (HTTP) connections, other suitable connections, or a suitable combination of these connections. In an exemplary embodiment, the systems and connections may be connected to other systems and components via intermediary systems and components, such as operating systems via a common processing platform. The interference metrology inspection system 114 may be implemented using hardware, software, or a suitable combination of hardware and software, and may be one or more software systems operating on an image processing platform, such as available from Matrox, Dorval, Quebec Matrox Genesis LC. The interference measurement inspection system 114 receives a continuous image data set from the image data system 112 and analyzes the brightness data of each pixel to determine the surface coordinate data on the surface of the component 102 corresponding to each point of each pixel. . Similarly, the position data of the adjustable lens 110 generated by the adjustable lens is also provided to the interference measurement inspection system 114 via the image data system 112 or other suitable systems or components, so as to allow the interference measurement inspection system 114 to be the N × M of the image data. The surface data of each pixel generates 3D coordinates. In this way, a 3-dimensional map of the surface coordinates of the component 102 can be generated using the principle of interference. During operation, the module 102 is inspected using 2D and 3D techniques. In an exemplary embodiment, the component may be inspected using a two-dimensional technique, and if the result of the two-dimensional technique cannot be determined, then a three-dimensional drawing of the component is performed. Therefore, the image data system 112 can remove the extractable shutter 116 to switch from the 2-dimensional inspection mode to the 3-dimensional inspection mode. The image data system 112 also provides control data to the adjustable lens 110, so that the adjustable lens 110 starts tracking at a predetermined rate, a predetermined step, or other suitable methods. Then, when the adjustable lens 110 is tracked at a predetermined rate or in other ways, the paper size of the image data system applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm) ^ --- ί ----- install- -(Please read the notes on the back before filling this page), τ Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-12- 200300841 A7 __ B7 V. Description of Invention (9) (Please read the notes on the back before filling (This page) 112 generates an image data set of NxM pixel sequential order of component 102. These image data sets are provided to the interference metrology inspection system 114, which can use the principle of interference and the known position of the adjustable lens 110 to determine the surface coordinates corresponding to each pixel. After generating all the image data sets through the adjustable lens 110, the image data system 112 generates an appropriate control command or the local controller of the adjustable lens 110 causes the adjustable lens 110 to return to a predetermined position and insert the removable shutter 116. Similarly, there are two modes for operating the adjustable lens 110, one is that the adjustable lens 110 moves toward the beam splitter 108 to generate image data, and the second is that the adjustable lens 110 leaves the beam splitter 108 to generate image data. In this way, there is no need to reset the adjustable lens 110. FIG. 2 is a schematic diagram of a system 200 for analyzing image data according to an exemplary embodiment of the present invention. The system 200 may analyze 2 or more sets of image data to determine the surface coordinates of one or more pixels, such as each pixel in an N × M pixel array or other suitable pixel group or pixel group. The Intellectual Property Bureau employee consumer cooperative printing system 200 of the Ministry of Economic Affairs includes an interference measurement inspection system 114 and a pixel map drawing system 202, a brightness change system 204, a coordinate system 206, a pixel surface position system 208, a feature loss system 210, and a defect volume. The system 212, the defect area system 214, and the defect depth / height system 216, each of the above systems can be implemented by using hardware, software, or a suitable combination of hardware and software, and one or more software systems operating on a general-purpose processing platform. A software system as used herein may include one or more objects, agents, threads' subroutines, independent application software, machine-readable code, source code, executable code, in two or more independent Application software 'Two or more different processors or other suitable for this paper size Applicable Chinese National Standard (CNS) A4 specification (21〇 × 297 mm) " -13- 200300841 A7 B7 V. Description of the invention (1〇) (Please (Please read the notes on the back before filling out this page.) Two or more lines of code or other suitable software structures operating in the software architecture printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. In an exemplary embodiment, the software system is one or more lines of code or other suitable software structures operating in general-purpose application software (such as an operating system), one or more lines of code or other operating in special-purpose application software Suitable software structure. In another exemplary embodiment, the software system may be one or more lines of Hypertext Markup Language (HTML), Extensible Markup Language (XML), a plug-and-play web browser, or other web browsing Code for common operation of the controller. The pixel map drawing system 202 receives surface coordinate data for each pixel in the NxM pixel array, and generates a 3-dimensional image of a component corresponding to the NxM pixel array. In an exemplary embodiment, the pixel map drawing system 202 can generate a user-readable display image to allow an operator to determine whether an item has acceptable or unacceptable characteristics, such as determining the solder joint surface The size of the scratches, other damage on the solder bump contacts, or other types of damage on the component. The pixel map drawing system 202 can also perform a pre-analysis of the surface information of the component, such as determining the area of suspected damage, the depth of the suspected damage, or other features selected by the user, and when the features selected by the user have "indefinite "" Or if permission is exceeded, operator assistance can be requested. The pixel map drawing system 202 may also determine the volume of the damaged area, such as determining a discontinuous incremental volume for each pixel based on the difference between the expected surface position and the actual surface position. In this way, the tile drawing system 202 allows the user to specify an acceptable damage volume, so that the component can be accepted or rejected based on the damaged volume of the component or the characteristics of the component. For example, a component is a semiconductor die, which is characterized by bump contacts made of gold. The expected height of the bump contacts is, for example, 20 microns. Similarly, this paper size applies the Chinese National Standard (CNS) A4 specification (210X297mm) -14-200300841 Α7 Β7 V. Description of the invention (Ή) (Please read the precautions on the back before filling this page) Each pixel It can cover a predetermined surface area, for example 25 square microns. Therefore, the user can select a pass / fail criterion based on the volume of scratches or dents on the surface of the gold bump, rough edges or knobs on the surface of the gold bump, or other types of damage based on the volume of the damaged area. . In this exemplary embodiment, if the scratches cause the surface to be below 20 microns, the height of the adjacent pixel can be multiplied by an area of 25 square microns, with a volume equal to 20 microns and the actual height of the surface corresponding to the pixel The difference. The area of each such adjacent pixel can be added together to determine the approximate volume of missing material. The same treatment can be used to determine the volume of nodules, rough edges, or other features that extend beyond the surface. According to this method, the acceptance criteria of the characteristics can be determined based on the data of the damaged volume. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The brightness change system 204 determines the brightness change between pixels in the continuous image data set. In an exemplary embodiment, the brightness change system 204 may generate a two-dimensional map of brightness changes as a function of height for a single pixel. For example, the brightness change system 204 may retrieve the brightness data of a pixel from each image data set, and draw the brightness data map of the pixel using the position of the adjustable lens 110 as a function. The surface coordinates of the component surface corresponding to the pixels can be determined from the changes in brightness caused by interference fringes and the coordinates of the adjustable lens 110, the component stage 104, or other suitable system or component. In this way, the brightness change system 204 can form a brightness data set for each pixel, and analyze the data to determine the surface coordinates of the component corresponding to the pixel position. The brightness change system 204 can also compress the brightness data of pixels, such as receiving continuous frames of image data, and compress image data within a predetermined tolerance range for each pixel. In this way, the brightness change system 204 can reduce the size of this paper to apply the Chinese National Standard (CNS) Α4 specification (210 × 297 mm) " '— -15- 200300841 Α7 Β7 5. Description of the invention (12) Need to store for the image data set Data, increase the speed of processing image data, and can provide other advantages. In an exemplary embodiment, the brightness change system 204 may receive 1,000 sets of image data, each group including pixel brightness data of the N × M array 阵. In this exemplary embodiment, the number of image data sets required to determine the surface coordinates of the component surface corresponding to any pixel is only a small part of them, such as 50 sets. The brightness change system 204 can also determine the image data set that has the data needed to determine the position of each pixel surface, and discard other groups of data when determining the position of a certain pixel, such as using 3D array data compression technology or other Applicable data compression technology. The coordinate system 206 determines the Z-axis coordinates for the pixel data set, and generates control data for controlling the adjustable lens 110, the component stage 104, or other systems or components for generating interference fringes to determine the position of the surface coordinates. In an exemplary embodiment, the coordinate system 206 may determine the height or the Z-axis coordinate of each N × M array or pixel data frame, regardless of how the pixel data frame is generated (where the positions of the N and M arrays are used to determine X- and Υ-axis coordinates). Therefore, adjustable lenses, adjustable component stage 104, or other suitable adjustable features can be used to control the relative position of each pixel data frame along the Z axis. The coordinate system 206 may also generate control data to control the position of the adjustable component, such as the surface of the adjustable lens 110. In this exemplary embodiment, the coordinate system 206 may cause the adjustable lens 110 or other suitable system or component to move through areas that do not require image data, such as "fast forward" the image data set through the expected pixel surface without change The area, such as extending axially to the surface along the length of the gold bump, all the way to the surface area where the desired component characteristics are entered. This paper size applies to China National Standard (CNS) Α4 specification (210 × 297 mm) (Please read the precautions on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs

-16- 200300841 A7 _ ΒΊ V. Description of the invention (13) The pixel surface position system 208 receives the brightness data from the brightness change system 204 or other suitable systems, and uses the principle of interference measurement to decide to identify the component and a certain pixel. The pixel data set of the surface coordinates of a certain point. In an exemplary embodiment, the pixel surface position system 208 analyzes the pixel data of the N × M group frame by frame, and determines the pixels in each frame to identify the coordinates of a point on the surface of the component. In another exemplary embodiment, the pixel surface position system 208 analyzes the pixel data set, and determines each pixel according to one or more sets of pixel data before or after the data set including the positioned surface. A pixel in a data set used to identify points on the surface of a component. In this exemplary embodiment, the pixel surface position system 208 can determine the brightness change of the pixel, and determine the surface corresponding to each pixel according to the maximum change. An interpolation point exists at the maximum change. According to the pixel, Changes in brightness data or other suitable data indicate the center fringe of the interference pattern. Similarly, the pixel surface position system 208 can analyze pixel data sets of continuous frames on a pixel-by-pixel basis, such as all data sets are stored for the first time and then analyzed. ^ Feature loss system 210 receives surface coordinate data and generates missing feature data. In an exemplary embodiment, the feature loss system 2 10 receives the surface coordinate data of each pixel and determines whether there is a feature loss based on the surface coordinate data, such as by determining whether a predetermined number of pixels are not relevant. The surface coordinates of the surface coordinates determined by the feature are not consistent with the expected surface coordinates, or determined by other suitable procedures. The feature loss system 2 1 0 can generate inspection pass / fail data to indicate whether the inspection result is acceptable, uncertain, or rejected. It can also generate notification data to inform the operator that a characteristic is missing, or other suitable data can be generated. This paper size is applicable. National National Standard (CNS) Α4 specification (210X 297 mm) — -17- I ί a batch of clothing-(Please read the precautions on the back before filling this page), 11 Intellectual Property of the Ministry of Economic Affairs Printed by the Consumer Cooperatives of the Bureau of the People's Republic of China 200300841 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy The system 21 2 receives the surface coordinate data of each pixel, and determines the volume of scratches or other defects entering the surface, the nodules or other defects protruding from the surface, the "rat mole" or other defects appearing on the side of the feature, or Other types of defects determined based on surface coordinate data, such as by determining the difference between each pixel's expected and actual surface coordinate data, and by summing the volumes associated with these non-conforming pixels, or by other suitable procedures. Defects The volume system 212 can generate inspection pass / fail data to indicate that the inspection result is acceptable, uncertain or rejected, and can also generate a pass Data to inform the operator that features are missing, or other suitable data can be generated. The defect area system 214 receives surface coordinate data and generates defect area data. In an exemplary embodiment, the defect area system 214 receives each pixel's Surface coordinate data, and determine the area of scratches or other defects entering the surface, nodules or other defects protruding from the surface, "mouse" or other defects appearing on the side of the feature, or other types determined based on surface coordinate data Defects, such as by determining that the surface area of adjacent pixel groups that actually have surface coordinate data is higher or lower than the expected surface coordinates, or by other suitable procedures. The defect area system 214 may generate inspection pass / fail data to indicate that the inspection result is Acceptance, uncertainty, or rejection can also generate notification materials to inform operators of missing features or other suitable information. Defect height / depth system 2 1 6 Receives surface coordinate data and generates defect height / depth data. In an exemplary embodiment, the defect height / depth system 216 receives each The surface coordinate information of a pixel, and determine the scratches or other defects ---- S ---: ----- install-(Please read the precautions on the back before filling this page) China National Standard (CNS) A4 specification (210X297 mm) -18- 200300841 Α7 Β7 V. Description of the invention (y (Please read the precautions on the back before filling this page) Depth of recession into the surface, nodules or other defects The height of the protruding surface, "mouse" or other defects extending on the side of the feature, or other types of defects determined based on surface coordinate data, such as by determining the difference between each pixel expected and actual surface coordinate data, and determining Maximum height / depth, average height / depth, or by other suitable procedures. The defect height / depth system 216 can generate inspection pass / fail data to indicate whether the inspection result is acceptable, uncertain, or rejected. It can also generate notification materials to inform the operator of missing features or other suitable information. During operation ', the system 200 may analyze the image data to determine the surface coordinates of the component corresponding to one or more pixels in the N × M pixel data set. The system 200 uses two or more N × M pixel data sets to locate the components corresponding to the surface of each pixel. In this way, the system 200 can perform 3D mapping of the component surface ' to allow accurate estimation of the volume extending to areas above or below the feature surface, or to allow accurate estimation of the 3D features of the component. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Fig. 3 is a schematic diagram of a system 300 according to an exemplary embodiment of the present invention for determining brightness changes. The system 300 includes a brightness change system 204, and a frame storage system 302, a data compression system 304, a frame averaging system 306, and a scanning area system 308. Each of the above systems may use a suitable combination of hardware, software, or hardware and software, and One or more software systems operating on a general-purpose processor platform execute fj. The frame storage system 302 receives two or more pixel data frames, and each frame includes an N × M array of pixel data. In an exemplary embodiment, the coordinates of the pixels in each of the continuous pixel data frames correspond to areas with known (X, Y, Z) coordinates on the surface of the component or other item being inspected. In this way, the paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) -19- 200300841 Α7 Β7 V. Description of the invention (θ) The component can be determined by analyzing the changes in brightness between pixels in continuous frames. The surface coordinates of a point on the surface. Similarly, the frame storage system 3 02 can store a 3-dimensional array of pixel brightness 値, so that the pixel data set at a predetermined coordinate position can be individually retrieved and analyzed For example, each pixel data frame includes pixel data of coordinates (X, Y). Similarly, the position of the Z axis of each frame can also be known or inferred from other data, such as from the adjustable lens 110 Movement rate, position controller system, or other suitable systems. In this way, a 3-dimensional array of brightness data can be stored in the frame storage system 302. Each point in the array corresponds to one in the (X, Y, Z) coordinate system. Pre-determined positions. The frame storage system 302 can also analyze changes between individual pixels along the Z axis, between pixel rows along the X or Y axis, and between pixel data sets, such as continuous The pixel data group or other data combination extending in a predetermined direction along the X and Υ axes in the material frame. The data compression system 304 can be used to compress the data stored in the frame storage system 302 or other suitable systems. In an exemplary embodiment, the data compression system 304 can determine whether the changes between pixels with the same (X, Y) coordinates in the continuous data frame of the Z axis are within a predetermined permitted change range. Pixels without indication of brightness changes are deleted in order to reduce the amount of data that needs to be stored. In an exemplary embodiment, the data compression system 304 may view continuous frames of data and make such decisions, such as analyzing two or more consecutive images The brightness change of the pixel determines whether the data of the pixel is important for determining the surface coordinates of the component being inspected. The data compression system 304 can also compress the data of the inspected component and store it, such as those that have been identified as useless Surface position data deleted from the data set. This paper size applies the Chinese National Standard (CNS) Α4 specification (210X297 public envy 1 ~ a " ~ -20-(Please read the precautions on the back before filling out this page)-Installed, printed by 1T Intellectual Property Bureau, Ministry of Economic Affairs, Consumer Consumption Cooperative, 200300841 A7 B7 V. Description of the invention ((Please read the precautions on the back first (Fill in this page again) The frame averaging system 3 0 6 generates moving average data from the pixel brightness data used to determine the surface coordinate data corresponding to each pixel. In an exemplary embodiment, the frame averaging system 306 starts from the beginning. An average offset 値 is subtracted from the average of each data frame (such as using pixel brightness data), or other suitable methods are used. After this average 値 is subtracted, the frame averaging system 306 then takes the absolute value of the brightness data 値, Stores a moving average of the brightness data of the last 5 data frames generated for each pixel, and detects when the moving average decreases by a predetermined amount. Then, depending on the position of the first third frame, the surface corresponding to the pixel can be determined. Similarly, other suitable numbers of frames, other mathematical operations suitable for calculating continuous pixel luminance data, or other suitable processing that can determine the surface coordinate data of each pixel on the fly can be used. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The scanning area system 308 generates scanning area data based on wafer tilt data, applicable scanning data, or other suitable data. In an exemplary embodiment, the wafer tilt data is generated based on measuring the surface coordinates of a predetermined position in the wafer, such as determining a wafer caused by a wafer stage, a wafer surface change, or other tilt source tilt. This information can be determined from the height of one side of the wafer above the opposite side of the wafer, such as 25 microns. The scanning area system 308 adjusts the scanning area, such as to scan to determine the position of the solder joint surface, where the expected height of the solder bump surface is known in order to generate the optimal number of data frames for analysis. In this exemplary embodiment, a scanning area capable of containing 30 data frames is taken in the area where the surface of the solder bump contact is expected. Due to wafer tilt or other factors, the surface coordinates of the solder bump contacts included on one side of the wafer in the 30 frame areas may be higher or lower than the solder bump contacts included in the 30 frame areas on the other side of the wafer. The surface coordinates of the point. Scanning area system 308 can apply the Chinese National Standard (CNS) A4 specification (210X297 mm) on this paper size. -21-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 200300841 A7 ______B7 _ V. Invention Description (id adjustment scan Area to compensate for such wafer tilt or other factors. The scan area system 308 can also generate applicable scan data, such as by which the surface coordinates of a feature are determined to be positioned near the middle of the scan area. An exemplary In the embodiment, the scanning area includes a brightness data frame generating 30 positions, and the surface coordinates of each pixel are expected to be near the 15th frame. The scanning area system 308 may also determine whether the detected surface coordinates are not expected here. Position, such as in the 15th frame or in the 12th to 15th frames, and adjust the scanning area to accommodate wafer distortion, tilt, or other variations. During operation, the system 300 can analyze pixel brightness changes And save it as a pixel data set. The system 300 can also support data compression techniques, such as viewing the current and previous pixel brightness changes in two (X, Y) arrays. Technology 'Data compression technology that examines two or more sets of data and determines whether the data can be compressed from the change in brightness parameters, using a moving average to determine the surface coordinates corresponding to each pixel, or other applicable surface coordinate positioning techniques. System The 300 can also provide the stored data to other systems for analysis, such as a mirror position system, a pixel surface position system, a pixel map drawing system, or other suitable systems. Figure 4 is a system according to an exemplary embodiment of the invention 400 for determining and controlling the position of a lens or other system or component used to generate interference fringes. System 400 includes a coordinate system 206 and a tracking rate controller 402, a coordinate generation system 404, and a tracking acceleration system 406. Each of the above systems Both can be implemented by hardware, software, or a suitable combination of hardware and software, and one or more software systems operating on a general-purpose processing platform. The tracking rate controller 402 is used to control the size of the paper that defines the coordinates of the pixel data set. Applicable to China National Standard (CNS) Α4 specification (210 X 297 mm) '' --- -22- (please first Note Complete this page and then read it back)

200300841 Printed by A7 B7, Consumer Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs. 5. Description of the Invention (y) The tracking rate of the system or component. In an exemplary embodiment, the tracking rate controller 402 can be used to control the tracking rate of the adjustable lens 110. In order to control the number of data frames generated after a length of scanning component. In an exemplary embodiment, the number of data frames generated determines the resolution of the system. When the required resolution is small, the tracking rate can be Increase to reduce the number of data frames. Similarly, the tracking rate controller 402 can also be used to monitor the tracking rate to confirm that the tracking rate remains at a certain speed, or generate compensation data to change the tracking rate, and provide the compensation data to the coordinate generation system 404 or other suitable system. The coordinate generation system 404 generates Z-axis coordinate data for continuous frames of pixel data. In an exemplary embodiment, the coordinate generation system 404 receives tracking rate data from the tracking rate controller 402, And decided to separate the expected data from the actual coordinates between the continuous data frames along the Z axis. Here is an example implementation The coordinate generation system 404 can compensate for any changes in the tracking rate in order to correct the actual coordinate position based on the measured differences. Similarly, the coordinate generation system 404 can be determined from the movement of other components or systems, such as the component stage 104. Coordinates of a continuous data frame along the Z axis. The tracking acceleration system 406 allows to accelerate detection through the area where the component is expected to be undamaged or to sequentially scan for detection to optimize the time required to inspect the component. In an exemplary embodiment In the component, the characteristics of the component may include gold solder bumps or other features that need to be inspected for a variety of different defects. For example, one of the defects that may appear in the gold solder bump is "rat mole". The so-called "rat bug" refers to the lack of In this exemplary embodiment, the surface of the “rat” segment in the gold solder bump is at or near the bottom of the component die, so to detect this, simply scan the surface of the component die upward. A short paragraph of this paper size applies to Chinese National Standard (CNS) A4 (2! 〇X; 297 mm) (Please read the precautions on the back before filling this page)

-23- 200300841 Α7 Β7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention (2 () length. If there is no other damage mechanism that can cause damage to the Z-axis coordinate between the bottom and the top of the gold welding block, After scanning the bottom, you only need to scan the top of the gold pad. In this exemplary embodiment, except for the top area of the gold pad, there is no need to generate interpretation data along the Z axis. The tracking acceleration system 406 can Accelerate the position of the adjustable lens 110 or other suitable component or system in order to " fast forward " through areas that do not need to be inspected and provide additional data to the image data system 11 2 without generating image data sets for these positions. Click here In this way, the generation and inspection of components can be optimized, so that the ability to concentrate is only used to determine whether the component inspection generates image data through the required area. During operation, the system 400 controls the position of the lens or other suitable components in order to accurately track and Monitor (X, Y, Z) coordinates. System 400 can also speed up tracking through areas that do not need to be inspected in order to reduce the amount of data that needs to be generated and analyzed. 5 is a system 500 according to an exemplary embodiment of the present invention for determining the surface coordinates of pixels corresponding to pixels of image data. The system 500 includes a pixel surface position system 208, a luminance map drawing system 502, and a midpoint analysis system 504 And fringe counting system 506, each of the above systems can be implemented using hardware, software, or a suitable combination of hardware and software, and one or more software systems operating on a general-purpose processing platform. The luminance map drawing system 502 draws continuous pixel data The brightness change of the group. In an exemplary embodiment, the brightness map drawing system 502 receives the continuous brightness 値 of the pixel at the coordinate (χ, Υ) position in the direction of the Z axis in order to analyze the pixel in the Changes in the Z axis. In this way, the luminance map drawing system 502 performs a pixel-by-pixel analysis to determine the corresponding surface position for each pixel. The paper size of this paper applies the Chinese National Standard (CNS) Α4 specification (210X297 mm) ~ '-24-(Please read the notes on the back before filling out this page) 200300841 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economy A7 B7___ The Ming (21) degree map drawing system 502 can also generate user-readable displays, such as allowing the user to see the brightness change of a certain pixel along the Z axis. The midpoint analysis system 504 decides for each map The midpoint of the interference pattern generated by the pixel. In an exemplary embodiment, the midpoint analysis system 504 can receive the change in the pixel luminance data set of a single pixel along the Z axis, and analyze the pixel luminance data set. To determine the midpoint. For example, the midpoint can be a mathematical midpoint or a halfway point between the two ends. Similarly, the midpoint can be determined by counting, or the number of maximum and minimum brightness chirps. A point appears between these two ends, or the midpoint is specified at an actual or theoretical location where the point would exist based on other data, such as envelope matching, curve matching, or other suitable techniques. The mid-point analysis system 504 can also process pixel data sets, such as a subset of the χM group of pixel data for each box or all boxes, or other suitable combinations. The fringe counting system 506 performs fringe counting analysis on the image data set to determine the component surface corresponding to each pixel. In an exemplary embodiment, the 'strip counting system 506 may store appropriate data, such as the magnitude and direction of the brightness 値 above or below the average brightness 値. In this exemplary embodiment, the 'strip counting system 506 may store a single set of brightness 値, and may modify the brightness 根据 according to the brightness 每一 of each continuous frame along the Z axis. The fringe counting system 506 can be used to store (X, Y, Z) arrays that do not need data. For example, the surface data corresponding to each pixel can be determined according to the continuous frame of analyzing pixel data as if they were measured. During the operation, the system 500 performs pixel data analysis to determine the surface of the component corresponding to each pixel in the N × M pixel array. The system 500 allows users. This paper size applies the Chinese National Standard (CNS) Α4 specification (2ΐ〇χ297mm) ~ '' -25- (Please read the precautions on the back before filling this page)

200300841 A7 ____ B7_ V. Description of the invention ((Please read the notes on the back before filling this page) Watch the changes in the data display of a pixel or pixel group along the Z axis, and perform midpoint analysis, fringe counting or other A suitable function to position the component corresponding to the surface of each pixel in the pixel array. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Figure 6 is a graph of pixel brightness changes according to an exemplary embodiment of the present invention 600. Pixel brightness change graph 600 includes the lens position axis and the brightness axis. As shown, as the lens position increases, the change in pixel brightness 604 is flat until interference fringes begin to appear. The interference fringes cause the brightness of the pixels値 increases to the maximum 値, decreases to the minimum when corresponding to the pixel surface 602, and then increases to the maximum 値 again, and then returns to the center line 値. In this exemplary embodiment, these three interference fringes can be determined Corresponds to the component surface of the pixel. Those familiar with this technology should understand that the pixel brightness change 602 is only an exemplary 'actual pixel brightness change measurement and is not required. The smooth curve shown in the figure does not need to have only 3 interference fringes, and can also include a large number of changes. Therefore, envelope analysis such as envelope 606 in the figure can be used to estimate the pixel surface 602. Similarly Ground may also use the endpoints of the envelope, such as by determining that the pixel surface 602 corresponds to the midpoint of the envelope. In another exemplary embodiment, a moving average brightness 608 may be used to decrease the moving average by a predetermined Position of the pixel to determine the coordinates of the pixel surface 602. Similarly, other suitable analysis programs can also be used to determine the surface coordinates corresponding to a certain pixel position. Fig. 7 illustrates the use of interference measures according to an exemplary embodiment of the present invention. A flowchart of a method 700 for determining the surface coordinates of a component. The method 700 starts at 702 and generates an interference layer at 702. In an exemplary embodiment, the interfering layer can be generated using a beam splitter, an adjustable lens, and white light. In order to reduce the number of stripes and the size of this paper, the Chinese National Standard (CNS) A4 specification (210X29 * 7 mm) is applicable. -26- 200300841 Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Print A7 ____B7_ V. Description of the Invention (29 Simplify the process of locating the midpoint of the interference pattern, or other suitable interference methods can be used. Then, the method proceeds to 704. The pixel brightness array is stored at 704. In one example In the embodiment, the pixel luminance array is an array including N × M pixel luminance 値, such as the number of pixels per unit area should provide sufficient resolution to perform component inspection. Then, the method proceeds to 706. At 706 Determines whether N × M pixel data arrays at the last position of the Z axis have been generated. In an exemplary embodiment, a predetermined number of N × M pixel data arrays are generated at positions along the Z axis, such as whenever a desired When the resolution is 0.5 micron, one is generated every 0.5 micron, or it is generated at an appropriate pitch. In this exemplary embodiment, the component has a feature that extends X microns above the surface, and the tolerance factor of the continuous frame of the generated data must be X / 2 + /-in order to generate a surface for drawing the surface of the component. data. If the last layer has been generated, the method proceeds to 710. Otherwise, the method advances to 708, where the system is set to the next level. In an exemplary embodiment, the image data layer is generated by moving the lens at a set rate. In this way, the rate of the lens is not changed, but the setting for storing the data of the next N × M pixel array is changed. Similarly, changes in the lens movement rate can be tracked to produce the correct position data. Stepping motors can be used to cause the lens to step to the next position, or other suitable programs can be used. The method then returns to 702. At 710, the center fringe of the interference array for each pixel is generated or determined. In an exemplary embodiment, the pixel data set of each pixel along the Z axis can be analyzed to locate the central fringe, such as forming an envelope, and determining the midpoint of the envelope to find the change in pixel brightness data. Exceeding the pre-determined (please read the precautions on the reverse side and fill in this page). The size of the paper, 1T line paper is applicable to the Chinese National Standard (CNS) A4 specification (2) 0 × 297 mm. -27- Intellectual Property of the Ministry of Economic Affairs Printed by the Bureau ’s Consumer Cooperatives 200300841 A7 _ B7_ V. Description of the Invention (24 Tolerance position, and its midpoint is determined according to the endpoint of the change. By determining the magnitude and direction of the change from the midpoint, and determining the change in the brightness 値 size is Increasing or decreasing, or determined by other suitable methods. Next, the method proceeds to 7 1 2. At 7 1 2, the component surface coordinates corresponding to the pixels are stored. In this exemplary embodiment, the coordinates may be Stored as a χχ array, so that the array is inserted when the component is analyzed, and the analysis ends when the data entered into the array is sufficient to determine whether the component is acceptable or rejected. Then, the method proceeds to 714. At 7 1 4 Determine whether the last pixel has been analyzed. In an exemplary embodiment, the method of analyzing the measured pixels can be grouped into pixels, analyze individual pixels, or other suitable methods. If determined at 714 The last pixel 尙 has not been analyzed, the method proceeds to 7 1 6 where the next pixel or pixel group is selected, and then the method returns to 710. Otherwise, if it is determined at 714 that the last pixel has been analyzed For example, when all the pixels have been analyzed or the component check has passed or failed, then the method proceeds to 71 8. The component diagram is generated at 7 1 8. The situation to generate the diagram is as follows: due to the above analysis An unidentifiable image data set is generated, and the operator needs to analyze the image to determine whether the component is acceptable or rejected. At work, the method 700 analyzes the component to determine whether the 3D coordinates of the component are acceptable. The method 700 allows sufficient determination If the component accepts the data, the inspection will be stopped. When the data cannot be clearly determined to be accepted or rejected, this method can identify the undeterminable. Allow the operator to view the inspection data. Figure 8 is to determine the surface coordinates of the module according to / according to the exemplary embodiment of the present invention ^ Paper size applies Chinese national standards (Grid (210 > < 297mm)) (Please read the notes on the back before filling (This page)

-28- 200300841 A7 B7 V. Flow chart of method 800 of the description of the invention ((Please read the precautions on the back before filling this page). Method 800 starts from 802 and sets the tracking rate of the lens according to the required resolution at 802. In an exemplary embodiment, the number of data frames generated by each scan can be selected according to the tracking rate and the desired resolution. In this way, the accuracy of the surface position is a function of the standard specified by the user. In another example In an exemplary embodiment, several optical or magnetic measurement points surrounding the motor can be used as an encoder to make the step or angular position of the motor related to the coordinates along the height axis of the object being inspected. Thus, when A trigger is generated when a predetermined rotation angle is measured. Then, the method proceeds to 804. Scanning is initiated at 804. In an exemplary embodiment, a predetermined rate can be passed along an axis at a predetermined rate. This axis moves the adjustable lens in the positive or negative direction, initializes the scan using a predetermined number of encoder steps, or other suitable methods. Similarly, it can also be performed by moving The component carrier or other suitable system or device will initialize the scan. Then, the method advances to 806. The Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs prints it at 806 and stores the image data frame where the lens is currently located, such as upon receiving After the trigger signal generated by the counting encoder. In an exemplary embodiment, the rate of generating the image data frame can be much faster than the movement of the lens, so there is no need to generate pixel image data for compensation. Ground, the relative movement of the lens or other component that produces the Z-axis position differs at a certain rate and needs to be compensated. For example, the Z-axis coordinates of the pixel obtained in the first scan are different from those obtained in the last scan. The brightness data of a pixel has changed too much, and the image data may include an indication of the position difference of the Z axis, the interpolation of the brightness data, or other suitable correction data. In another paper standard application. National Standards (CNS) A4 specifications (210X297 mm) -29- 200300841 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs In the illustrative embodiment, on-the-fly processing may be used to determine the surface coordinates corresponding to each pixel, such as using a moving average of the pixel brightness, when the average degree decreases by a predetermined amount Determine the surface coordinates. In this exemplary embodiment, each pixel data frame is stored without having to perform the analysis of the next steps 814 to 824. Then, the method proceeds to 808. At 808, it is determined whether the cat scan is complete. If The scan is not complete, the method proceeds to 810 to determine whether a next trigger or other suitable indication is received. If it is determined at 808 that the scan is complete, the method proceeds to 812 to reset the lens. In an exemplary embodiment The lens can only be tracked in one direction. Therefore, after scanning a component, the lens must return to the starting position and initialize the scan to provide a reliable tolerance estimate of the position. Similarly, the lens can be moved in the first direction to scan the first component, starting from Z = 0 to generate an image data frame along the Z axis, and ending at Z = component feature maximum height. Similarly, subsequent scans can be performed in the opposite direction, starting at Z = component feature maximum height and ending at Z = 0. Other suitable programs can also be used. The method then proceeds to 814. The pixels are initialized at 8-14. In an exemplary embodiment, the initialization of the pixel position includes starting from pixel (0,0) and ending at pixel (N, M). In this exemplary embodiment, each pixel is analyzed individually and continuously, or a group of pixels can be analyzed in parallel using a parallel processor. Similarly, the pixel position can be initialized according to the Z-axis coordinates, and all pixels are analyzed in parallel together. In another exemplary embodiment, the pixels can be analyzed during the frame scan. In this way, after measuring the change in the brightness of the pixels sufficiently to determine the degree of the surface corresponding to the position of the pixels, the pixels are analyzed. . Next, before this method (please read the precautions on the back before filling this page) • Binding ·-Binding This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) -30- 200300841 Α7 __ Β7 Economy Printed by the Consumer Cooperatives of the Ministry of Intellectual Property Bureau V. Invention Description (27) Go to 816. Draw a brightness change map for each pixel at 8 1 6. In an exemplary embodiment, a pixel data set of pixels at coordinates (χ, γ) is captured for each Z coordinate 座, and the change in luminance 値 is plotted, such as via a decision centerline Deviations from centerline data, or other suitable procedures. The method then proceeds to 81.8. At 8 1 8 the pixel surface data is determined using the principle of interference. In an exemplary embodiment, the corresponding pixel may be determined according to the center fringe of the interference pattern, the midpoint of the interference region, the envelope of the interference region, the use size and direction settings, or other suitable programs. Position of the component surface. The method then proceeds to 820. It is determined at 820 whether the last pixel has been analyzed. In an exemplary embodiment, if pixels are used to analyze damage, the decision at 820 may be whether the damage exceeds a predetermined tolerance range. Similarly, the pixels are continuously checked individually to determine whether the pixels at the (N, M) position have been analyzed. If the decision of 820 is that the last pixel has been analyzed, the method proceeds to 824 to store the pixel map, such as a map of the surface position of each pixel, which can be used to analyze the image data. Otherwise, the method advances to 822 to add a pixel, such as performing sequential pixel analysis sequentially to the next pixel, or other suitable method. In operation, the method 800 allows interferometric measurements to be used to determine the 3-dimensional coordinates of the component surface. The method 800 uses the pixel data of the NχM array or other suitable data sets, and determines the surface position of each point according to the brightness change of the interference pattern when it moves axially along the Z-axis direction of the component. This process caused the current paper size to comply with the Chinese National Standard (CNS) Α4 specification (210 × 297 mm) (Please read the precautions on the back before filling this page)

-31-200300841 Printed by A7 B7, Employee Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs. 5. Description of Invention (The maximum brightness change occurs when the surface corresponds to the center position of the interference pattern. In this way, the position of the component surface corresponding to each pixel can be determined. 3D diagram of the component can be generated. Figure 9 is a flowchart of a method 900 for performing component inspection according to an exemplary embodiment of the present invention. The method 900 uses 2D analysis to perform component testing, and when the 2D analysis produces inconclusive results Or use 3D analysis when further analysis is required. Similarly, method 900 can be used to perform 2D analysis on certain image features and 3D analysis on other image features, such as 2D analysis of the entire component, but only A section uses 3D analysis. Method 900 performs a 2D scan starting at 902. In an exemplary embodiment, performing a 2D scan can use monochromatic or polychromatic light to illuminate the component without any interference fringes. Light This can be coherent or incoherent light. The method then proceeds to 904. At 904, the 2D image data is analyzed, such as using traditional image analysis techniques These image analysis techniques can detect defects in the luminance 値 changes in the 2D image data. Similarly, a histogram of the luminance 値 can be generated, which is based on the number of amplitudes, slopes, or other suitable histogram data. Both pass / fail criteria can be used to analyze the data. Then, the method proceeds to 906. The decision data at 906 indicates whether the component passed, failed, or could not be determined. If the decision of 906 is that the component passed the check, the method proceeds to 908 and ends Otherwise, the method proceeds to 910. In another exemplary embodiment, if the component fails, the component is rejected, and if the result of the inspection of the component is undeterminable, the method proceeds only to 91 °. In another In the exemplary embodiment, if the component inspection fails, the component is rejected, if the component (please read the precautions on the back before filling this page)

This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -32- 200300841 Α7 Β7 V. Description of the invention (29) If the inspection result cannot be determined, the method proceeds to 910 to perform 3D analysis. (Please read the precautions on the back before filling out this page) Perform a 3D scan of the component on 9 10. In an exemplary embodiment, a 3-dimensional scan is performed using interference metrology techniques, such as when the component is illuminated with light capable of generating an interference pattern, generating a number of pixel data frames of the component. Continuous image data frames can be used to generate 3D maps of components, or other suitable 3D drawing techniques can be used. The method then proceeds to 912. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs At 912, it is determined whether the component is passed, failed, or cannot be determined. In an exemplary embodiment, the component is analyzed to determine the size of the defect or crack, such as the surface area of the defect or crack, the volume of the defect or crack (such as the amount of material lost or extra), the average of the defect or crack, or Maximum height or depth, whether features are missing, or other suitable 3D data analysis can be performed. If it is decided at 9 12 that the component passes, the method proceeds to 914 and ends. In another exemplary embodiment, if the component fails and is rejected, if the result of the component inspection is undecidable, the method will only advance to 91.6. In another exemplary embodiment, if the component fails, it is rejected, but if the result of the component inspection is passed or cannot be determined, the method proceeds to 9 and 6 for the operator to review. Regardless of the τη method, it goes to 916 to generate image data for the component. In the ^ exemplary embodiment, a 3-dimensional image is generated for the operator to review, such as when the component data cannot be determined or is between acceptable and rejected. The method then proceeds to 9 1 8 where the operator is reminded to review the image data and make a decision on whether to accept or reject. The method then proceeds to 92, where it is determined whether the operator has given an indication that the component has passed inspection or failed inspection. In an exemplary embodiment, an operator may use one or more analysis tools, such as a shape tool, a volume tool, and a template showing acceptable or unacceptable damage standards. The paper dimensions are applicable to the Chinese National Standard (CNS) M Specifications (21〇χ7 ^ 喜) ------33- 200300841 Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (3d > or other suitable information. If the decision made at 920 is a component If it passes, the method proceeds to 922, where the component is accepted. Otherwise, the method proceeds to 924 to reject the component. At work, method 900 allows the components to be inspected using the order of 2D and 3D image data analysis, so, Can reduce the time required to inspect components. Method 900 performs a preliminary 2D analysis to find where it is easy to decide whether a component can be accepted or rejected, and if additional analysis is needed to better look at the component, continue to 3 Dimensional analysis, such as when a component is undecidable. Similarly, if an additional 3-dimensional analysis is performed only on a component that passes a 2-dimensional analysis, the method 900 allows only the first decision Accepted components perform 3D analysis without unnecessary processing of components determined to be rejected. Although the exemplary embodiments of the system and method of the present invention have been described in detail herein, those familiar with the technology in this regard It should be understood that these systems and methods can be replaced and modified in various ways without departing from the scope and spirit of the scope of the attached patent application. This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297). (Please read the back first Please pay attention to this page before filling in this page "

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Claims (1)

200300841 A8 B8 C8 D8 々 、 Scope of patent application 1 1 · A system for inspecting components, including: image data system to generate image data; and (please read the precautions on the back before filling this page) The system is connected to the image data system. The interference measurement inspection system receives the image data and generates inspection pass / fail data based on the surface coordinate data generated using the interference measurement. 2 · The system of item 1 of the patent scope, wherein the interference measurement inspection system further includes a pixel map drawing system for receiving component surface data and generating surface pixel map data. 3. The system according to item 1 of the scope of patent application, wherein the interference measurement inspection system includes a degree change system 'for receiving image data and storing a plurality of image data frames. 4 · The system according to item 3 of the patent application scope, wherein the interference measurement inspection system further includes a data compression system for receiving component surface data and deleting one or more pixel data. 5. The system according to item 1 of the patent application scope, wherein the interference measurement inspection system includes a lens position system for receiving lens position data and correlating the lens position data with the image data. Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 6. If the system of the first patent application scope, the interference measurement inspection system also includes a tracking rate controller to generate lens position control data. 7. The system of item 1 in the scope of patent application, wherein the interference measurement inspection system further includes a tracking acceleration system for generating tracking rate data. 8. If the system of the first scope of the patent application, the interference measurement inspection system includes a pixel surface position system to receive image data and generate the paper size applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 200300841 A8 B8 C8 —— _ D8 VI. Patent Application Scope 2 Pixel surface information. 9 · The system according to item 1 of the patent application scope, wherein the interference measurement inspection system includes a brightness rendering system for receiving image data and generating pixel brightness mapping data. 10. The system according to item 丨 of the patent application scope, wherein the interference measurement inspection system includes a brightness rendering system for receiving image data and generating pixel midpoint data. 11. The system according to item 丨 of the patent application range, wherein the interference measurement system 1 includes a fringe counting system for receiving image data and generating fringe count data. 12. The system according to item 丨 of the patent application, wherein the interference measurement inspection system includes a feature loss system to receive surface coordinate data and generate feature loss data. 13. The system according to item 1 of the patent application scope, wherein the interference measurement and inspection system includes a defect volume system for receiving surface coordinate data and generating defect volume data. 14. The system of item 1 of the patent application scope, wherein the interference measurement inspection system includes a defect area system for receiving surface coordinate data and generating defect area data. 15. The system according to item 1 of the patent application scope, wherein the interference measurement inspection system includes a defect depth / height system for receiving surface coordinate data and generating defect depth / height data. 16. —A method for inspecting components, including: generating two or more sets of image data of components; (please read the precautions on the back before filling this page) This paper scale applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) -36- 200300841 ABCD VI. Patent application scope 3 Determine the brightness data of each pixel in each group of image data; (please Read the notes on the back before filling this page.) Use the change in brightness of each pixel to determine the surface data for each pixel based on interference measurement; and use the surface data to generate inspection pass / fail data. 17. The method of claim 16 in the scope of patent application, wherein determining the surface data for each pixel using a change in the luminance data of each pixel according to the interference metric includes determining the center of the interference fringe for each pixel. 18 · The method according to item 16 of the scope of patent application, wherein the change of the data of each pixel is used to determine the surface data for each pixel according to the interference measurement, including the minimum and maximum of each pixel. Brightness data: Determine the surface data for each pixel. 19 · The method according to item 16 of the scope of patent application, wherein the change of the luminance data of each pixel to determine the surface data for each pixel according to the interference measurement includes: counting the number of interference fringes for each pixel Number; and set surface data for each pixel based on the number of interference fringes. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 20 · If the method of applying for the scope of patent No. 16 is used, determining the brightness data of each of the plurality of pixels in each group of image data additionally includes: for each pixel It is determined whether the change of the luminance data exceeds a predetermined threshold; and if the change does not exceed a predetermined threshold, the luminance data is compressed for each pixel. 21 · If the method of applying for the scope of the patent No.16, in which the paper size according to the amount of interference applies the Chinese National Standard (CNS) A4 specification (21〇297297) ---------— 200300841 A8 B8 C8 D8 VI. Applying for a patent scope of 4 degrees and using the changes in the brightness data of each pixel to determine the surface data for each pixel includes: (Please read the precautions on the back before filling this page) for a predetermined number of each image To calculate the moving average; and to determine the surface data based on a decrease in the moving average greater than a predetermined amount. 22 · —A method for inspecting a component, including: moving the lens of an interference system relative to the component to produce a characteristic on the component Changed interference pattern; Use the brightness change of each of a plurality of pixels to determine the surface data for each pixel according to the interference principle; Use surface data to generate component inspection pass / fail data. The method of 22 items, wherein the predetermined rate is selected according to the predetermined resolution. 24. The method of item 22 in the scope of patent application Including the first rate and the second rate. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 25. The method of claim 22 in the scope of the patent application, where the predetermined rate includes the time when image data is generated. The first rate used and the second rate when no image data is generated. _ 2 6 · —A system for inspecting a component, the component has a feature formed by a material, the system includes: a light source for Generates light; splits light 'to split light' and directs the first * beam in the first 'direction to the feature and directs the second beam in the second direction; a lens, made of this material, reflects the second beam back to the beamsplitter and reflects it This standard is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -38- 200300841 A8 B8 C8 D8 6. Application for patent scope 5 on the feature; and using the interference between the first and second beams To determine the surface coordinates of the feature. (Please read the notes on the back before filling this page) 27. If the system of the scope of patent application No. 26, where the feature is a solder bump connection And the material is gold. 28. If the system under the scope of the patent application is No. 26, it also includes: an image data system for generating image data of the features illuminated by the first and second light beams; an interference metrology inspection system, receiving Image data and inspection pass / fail data. * 29.—A system for inspecting components using interference metrology, including: a pixel surface position system that generates surface coordinate data using interference metrology; and a component inspection system that receives surface coordinates Data and produce inspection pass / fail data. 30 • The system of item 29 in the scope of the patent application, where the component inspection system includes a missing feature system to generate missing feature data. Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 31. If the system of the scope of patent application No. 29, the component inspection system includes a defect volume system to generate defect volume data. 3 2. The system according to item 29 of the patent application scope, wherein the component inspection system includes a defect area system for generating defect area data. .3 3 · The system according to item 29 of the patent application, wherein the component inspection system includes a defect depth / height system for generating defect depth / height data. 3 4 · —A method of inspecting components using interference metrology, including: This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 200300841 8 8 8 8 ABCD VI. Application for patent scope 6 Use of interference metrology Generating surface coordinate data; and generating component inspection pass / fail data based on the surface coordinate data. (Please read the precautions on the back before filling out this page) 35. For the method of applying for the scope of patent No. 34, which generates inspection pass / fail data based on the surface coordinate data, including: determining the pixels whose surface data exceed the predetermined range The number of pixels; and if the number of pixels is greater than a predetermined number, data with missing features is generated. 36. The method according to item 34 of the scope of patent application, wherein generating pass / fail data based on surface coordinate data includes: summing up the volume of each pixel whose surface coordinate data differs from the expected surface data to generate a total volume ; And if the total volume is greater than a predetermined volume, data for failed inspections are generated. 3 7 · If the method of applying for a patent ranges from item 34, in which the inspection pass / fail data is generated based on the surface coordinate data includes: summing up the area of each pixel whose surface coordinate data differs from the expected surface data to Generate the total area; and printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. If the total area is larger than the predetermined area, the data of inspection failure will be generated. 38. The method of claim 34, wherein generating pass / fail data based on surface coordinate data includes: determining the maximum depth or height of each pixel whose surface coordinate data differs from the expected surface data; and if The maximum depth or height is greater than the predetermined maximum depth or height. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) ^ 40- '200300841 Printed by the Employees ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 B8 C8 D8 _6 If the scope of patent application is 7, the inspection failure data will be generated. 39. The method of claim 34, wherein generating pass / fail data based on surface coordinate data includes: determining the average depth or height of each pixel whose surface coordinate data differs from the expected surface data; and If the average depth or height is greater than a predetermined average depth or height, data that fails to check is generated. 4 0. — A system for inspecting components, including: a 2-dimensional inspection system that receives image data and generates 2-dimensional inspection pass / fail data; an interference metrology inspection system that receives image data and generates interference quantities: metrological inspection Pass / fail data; and the interference measurement system receives the image data after the 2-dimensional inspection system generates the 2-dimensional inspection pass / fail data. 41 · If the system is under the scope of patent application No. 40, the interference measurement inspection system only receives the image data after the 2D inspection system generates the 2D inspection pass data. 42. The system according to item 40 of the scope of patent application, wherein the interference measurement inspection system only receives image data after the 2D inspection system generates 2D inspection failure data. 43. If the system of the scope of patent application is No. 40, among which the 1-dimensional measuring inspection system only produces 2D inspections that cannot be judged by the 2D inspection system ... / J 疋 receives the image data after the data. 4 4 · —A method for inspecting components using interference metrology, including: The paper size is suitable for towels (CNS) Α4 · (21 () > < 297 Public Magic ~: (Please read the back first) Please pay attention to this page before filling in this page) • Binding and Stitching _ 200300841 A8 B8 C8 D8 VI. Patent Application Range 8 Perform 2D inspection of components and generate 2D inspection pass / fail data. Pass / fail according to 2D inspection Interference measurement inspection of data execution components. 45. The method according to item 44 of the patent application, wherein the interference measurement inspection of execution components based on the 2-dimensional inspection pass / fail data includes the pass / fail data indication only in the 2-dimensional inspection. Interferometry inspection of the component is performed only if it fails. 46. The method as described in item 44 of the patent application scope, wherein performing the interference metrology inspection of the component based on the 2-dimensional inspection pass / fail data includes passing / failing only in the 2-dimensional inspection. The data indicates that the interference measurement of the component is performed only after the test is passed: check 47. If the method of the scope of patent application is 44, the pass / fail data execution group is based on the 2-dimensional inspection. Interferometry inspection includes performing interferometry inspection of components only if the pass / fail data of the 2-dimensional inspection indicates an undeterminable result. 48 · —A system for inspecting components, including ': 2-dimensional inspection system' reception Image data and generate 2D inspection pass / fail data; Interferometry inspection system, receive image data and generate pass / fail data for interference metrology check; and. Interference system, with an extractable mask, When the board is blocked, the 2 inspection system receives the image data, and when the shield is not blocked, the interference measurement system connects the image data. This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 public director) ------- ^ ----- Pack-(Please read the precautions on the back before filling out this page) Order Printed by the Employees 'Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-42 200300841 Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 B8 C8 D8 VI. Application scope 9 49. For the system under item 48 of the scope of patent application, the interference system also includes a beam splitter. The light mirror transmits the first light beam, and when the shutter is not blocked, the beam splitter transmits the first and second light beams. 50. For example, the system of the 48th aspect of the patent application, wherein when the 2D inspection system generates a 2D inspection pass When the data is applied, the shutter remains blocked. 51. For example, the system of item 48 in the scope of patent application, where the 2D inspection system generates the 2D inspection failure data, the shield remains in the area of the application. 52. A system in which the shutter remains occluded when the 2-dimensional inspection system generates data that cannot be determined by the 2-dimensional inspection. · 53 · —A method for inspecting a component, including: shielding a lens in an interference system so as to illuminate the component with the first * beam of light; receiving image data of the component and generating 2D inspection pass / fail information; not blocking The lens of the interference system, so that the first light beam and the second light beam illuminate the component; and receive the surface data of the component and generate the pass / fail data of the interference metrology inspection. 54. The method of claim 53, wherein the lens of the interference system is blocked to prevent the second beam illumination component from the beam splitter. 55. The method according to item 53 of the patent application scope, wherein when the 2-dimensional inspection system generates the data passed by the 2-dimensional inspection, it does not block the interference. The lens of the system uses the first beam and the second beam to illuminate the component. 56. If you apply for the method in the 53rd scope of the patent application, when the 2D inspection system generates 2D inspection failure data, do not block the lens of the interference system so that (please read the precautions on the back before filling this page) -43- 200300841 A8 B8 C8 _________ 08 VI. Scope of patent application 1 Use the first beam and the second beam to illuminate the component. (Please read the precautions on the back before filling this page) 57. For the method of applying for the scope of patent No. 53, when the 2D inspection system generates data that cannot be determined by the 2D inspection, the lens of the interference system is not blocked for use The first light beam and the second light beam illumination component. 58. If the system of claim 1, 26, 29, 40 or 48 is applied for, the component is a silicon wafer, a die, a silicon wafer on a thin film frame, a die on a thin film frame, a sealant Die, die on carrier, die on conveyor, die on tray, die in mold, semiconductor component, wafer-sized package, wafer with solder bump, and One of the grains of a spherical grid array. 59. If the method of claim 16, 22, 34, 44 or 53 is applied, the component is a silicon wafer, a die, a silicon wafer on a thin film frame, a die on a thin film frame, a package Die in the glue, die on the die carrier, die on the conveyor belt, die on the tray, die in the mold, semiconductor components, wafer-sized package components, wafers with solder bumps And one of crystal grains having a spherical grid array. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper ruler standard (CNS) A4 specification (210X297 mm) _ 44 _