TR201909209A2 - STATIC AND DYNAMIC SPIN COATING DEVICE - Google Patents

STATIC AND DYNAMIC SPIN COATING DEVICE Download PDF

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Publication number
TR201909209A2
TR201909209A2 TR2019/09209A TR201909209A TR201909209A2 TR 201909209 A2 TR201909209 A2 TR 201909209A2 TR 2019/09209 A TR2019/09209 A TR 2019/09209A TR 201909209 A TR201909209 A TR 201909209A TR 201909209 A2 TR201909209 A2 TR 201909209A2
Authority
TR
Turkey
Prior art keywords
static
spin coating
coating device
dynamic spin
dynamic
Prior art date
Application number
TR2019/09209A
Other languages
Turkish (tr)
Inventor
Yakuphanğlu Fahretti̇n
Original Assignee
Firat Ueniversitesi Rektoerluegue
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Firat Ueniversitesi Rektoerluegue filed Critical Firat Ueniversitesi Rektoerluegue
Priority to TR2019/09209A priority Critical patent/TR201909209A2/en
Publication of TR201909209A2 publication Critical patent/TR201909209A2/en

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  • Manufacturing Optical Record Carriers (AREA)

Abstract

Buluş, ince film malzeme üretiminde kullanılan statik, dinamik ve çoklu RPM spin kaplama cihazı ile ilgilidir. Cihaz bir altlık üzerine dökülen çözeltiyi belirli bir RPM de döndürerek, altlık yüzeyine kaplamaktadır.The invention relates to a static, dynamic and multiple RPM spin coating device used in thin film material production. The device covers the solution poured on a base by rotating it at a certain RPM.

TR2019/09209A 2019-06-20 2019-06-20 STATIC AND DYNAMIC SPIN COATING DEVICE TR201909209A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TR2019/09209A TR201909209A2 (en) 2019-06-20 2019-06-20 STATIC AND DYNAMIC SPIN COATING DEVICE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TR2019/09209A TR201909209A2 (en) 2019-06-20 2019-06-20 STATIC AND DYNAMIC SPIN COATING DEVICE

Publications (1)

Publication Number Publication Date
TR201909209A2 true TR201909209A2 (en) 2019-07-22

Family

ID=67900571

Family Applications (1)

Application Number Title Priority Date Filing Date
TR2019/09209A TR201909209A2 (en) 2019-06-20 2019-06-20 STATIC AND DYNAMIC SPIN COATING DEVICE

Country Status (1)

Country Link
TR (1) TR201909209A2 (en)

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