TH8123A - Methods for deposition of polysilane vapor - Google Patents
Methods for deposition of polysilane vaporInfo
- Publication number
- TH8123A TH8123A TH8901001058A TH8901001058A TH8123A TH 8123 A TH8123 A TH 8123A TH 8901001058 A TH8901001058 A TH 8901001058A TH 8901001058 A TH8901001058 A TH 8901001058A TH 8123 A TH8123 A TH 8123A
- Authority
- TH
- Thailand
- Prior art keywords
- alkyl
- vapor
- polysilane
- deposition
- methods
- Prior art date
Links
Claims (2)
Publications (2)
Publication Number | Publication Date |
---|---|
TH8123EX TH8123EX (en) | 1990-09-03 |
TH8123A true TH8123A (en) | 1990-09-03 |
Family
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