TH71510B - Manufacturing process of thin film gas detectors on floating membrane heaters - Google Patents

Abstract

Thin-film sensor gas on a floating membrane heater This is mainly made by physical vapor deposition process. The heating membrane is formed by NiChrom (Ni80% Cr20%) or Titanium Nitride (TiN) on top of the base plate. On the flotation membrane, there is a thin film layer of suitable electrical insulation, such as Aluminum Nitride (AIN), Alumina (A12Oj), Silicon Nitride (Si3N4) or Silicon Dioxide (SiO2), followed by a thin film layer of the senser electrode. This is a suitable metal thin film layer such as Au / Cr and a thin metaloxide layer is coated over the Sencher electrode by an ion-assisted electron beamevaporation process:

Claims (8)

1. The manufacturing process of the sensor gas device consists of - arrangement of a base plate (3) consisting of one and two faces - arrangement of a floating membrane heater (1) that is made of metal and has an integral part. One floats above one surface of the base plate (3), with a gap (8) in between. The heater also contains at least two mounting tabs (2) for fixing the floating membrane heaters (1) to the aforementioned base plate (3). Thin-film insulating layer (4) built on such floating membrane heaters (1) to provide electrical insulation - at least metal oxide thin film electrodes (5). Bipolar These sensors are built on a thin-film insulating layer (4) to serve as the output terminals of such gas sensor devices - providing a thin film layer of metal oxide (7) formed from a material with a transition property. The conductivity according to the chemical reaction with the desired specific gas is measured by a thin film layer of metal oxide (7), which is placed on at least two of the two metal oxide thin film electrodes (5). And - the arrangement of the heater electrodes (6) built on the surface of the aforementioned mounting tabs (2) of the aforementioned floating membrane heaters (1) to supply electric current. With the aforementioned floating membrane heaters (1), where the gas sensor equipment manufacturing process is characterized by In the process of providing a floating membrane heater (1), it consists of the process of - creating a layer of photosensitive. (photoresist) (9) by the process of phototherapy. (Photolithography) is a rectangular rod or similar shape for the support of a floating membrane (1) such - construction of a heater's floating membrane (1) with mounting tabs (2). Say to have Required thickness with evaporation process (evaporation) or sputtering (sputtering) and removal of the photosensitive layer. (photoresist) (9) such away To create such a gap (8) between the aforementioned floating membrane heaters (1) and the aforementioned base layer (3). 2. The production process of the sensor gas device in claim 1 is that the thin metal film layer of the aforementioned heating membrane (1) has a thickness of 250 - 3000 nm. 3. The gas sensor manufacturing process in claim 1 or 2, where the process of creating such thin film insulating layer (4) is performed by evaporation process. (evaporation) 4. The gas sensor equipment manufacturing process in claim 1 or 2, wherein the aforementioned thin film insulating layer (4) is made by sputtering. 5. Gas sensor manufacturing process in claim 1 or 2, where at least two (5) metal oxide thin film electrodes (5) electrode construction process. On such thin-film insulating layer (4) with at least two heater electrodes (6). With metals, by means of evaporation (evaporation) 6.Process of manufacture of the gas changer device in claim 1 or 2, where at least two (5) metal oxide thin film electrodes are constructed. On such thin-film insulating layer (4) with at least two heater electrodes (6). With metal, done by a sputtering process 7. Process of production of such gas equipment in any Clause 1-6 Clause. The thin film of metal oxides (7) is formed by ion-assisted electron beam evaporation process. 8. The process of manufacturing the gas sensor device in claim 1 also adds to the process of etching the photosensitive layer. (photoresist) (9) exit to make such a gap (8).