TH34749A - A semiconductor manufacturing system with a safety device - Google Patents

Abstract

DC60 (25/12/41), a semiconductor generation system that includes A gas purifier based on a getter connected in Flow with the network Supply gas for semiconductor facilities Such gas supply networks supply pure gas to the conducting chamber. At least one wafer chamber in the device. Facilitate Semiconductor making Such gas purifiers include skaters with hollow vessels of metal. With an inlet, an exit channel and a partition between The inlet and outlet of the gator material, which allows the gas to flow through it. Pure by absorbing things Dirty out of it It was placed in a hollow container, one temperature sensing probe was placed in the upper part of the gator material. The detector knows the first temperature is correct. Positioned in the melting area to detect initiation in Reacting to a sudden chemical reaction Which will inform the condition A lot of dirt In excess of the incoming gas purification, a second temperature detector is placed in the lower part of the gator material. The second temperature detector is positioned in the molten area. To check the start In its immediate chemical reaction it indicates that the excess impurities are fed back. Into a skater stick Non-metallic cylinder, high melting point The first and second were placed in Hollow container in such a way that At least some of the top And the lower part, respectively, of the material The getter is separated from the partition wall of the hollow container. It also describes the gas purifier based on the getter basis. How to make an integrated circuit device and how to protect a gator stick A semiconductor production system that includes Pure gas heaters on the basis of the getter connected in flow to the network. Supply gas for semiconductor facilities Such a gas network supplies pure gas to the cooking chamber. At least one wafer chamber in the device Semiconductor making The gas purification equipment includes A skater bar with a hollow container made of metal. It has an inlet, outlet channel and a protrusion wall between the inlet and outlet material getter, which allows gas to pass through it. Purified by absorbing impurities from it. Was placed in a hollow container, one of the temperature sensors was placed In the upper part of the skater material The detector knows the first temperature is correct. To position it in the melting area To detect starting in Acting in a sudden chemical reaction Which will inform the condition Excess impurities in the incoming gas purify a second temperature senser to be placed in the lower part of the gator material. The second temperature sensing probe is positioned in the melting medium. To detect the onset of a sudden chemical reaction that indicates that the excess impurities are fed back. Into a skater stick Non-metallic cylinder, high melting point The first and second were placed in a hollow container in such a way that At least some of the top And the lower part, respectively, of the material, was separated from the partition wall of the hollow container. Pure on the basis of skater How to make an integrated circuit device and how to protect a gator stick

Claims (1)

1. A semiconductor manufacturing system consisting of a gas purifier based on a built-in generator Flow characteristics to the gas distribution network for the facilities. Convenient in conducting branching substances Such gas supply networks pay Pure gas to at least one wafer chamber in The central semiconductor facilitator where the purified gas purifier consists of A skater bar with a hollow container made of metal. With an inlet, an exit channel and a partition wall that extends between the inlet Said and the said exit channel Gator tag material: