SU958693A1 - Vacuum production method - Google Patents
Vacuum production method Download PDFInfo
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- SU958693A1 SU958693A1 SU803004177A SU3004177A SU958693A1 SU 958693 A1 SU958693 A1 SU 958693A1 SU 803004177 A SU803004177 A SU 803004177A SU 3004177 A SU3004177 A SU 3004177A SU 958693 A1 SU958693 A1 SU 958693A1
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- production method
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Description
(54) СПОСОБ ПОЛУЧЕНИЯ ВАКУУМА(54) METHOD OF OBTAINING A VACUUM
1one
Изобретение относитс к вакуумной технике, а именно к способам получени вакуума.The invention relates to vacuum technology, and specifically to methods for producing vacuum.
Известен способ получени вакуума, включающий откачку газов и охла,ждение участка поверхности откачиваемого объема 1.A known method for producing a vacuum involves pumping gases and cooling, waiting for the surface area of the pumped volume 1.
Недостатком известного способа вл етс значительное загр знение откачиваемого объема парами органических веществ вследствие того, что при сцеплении участка поверхности ранее сконденсированные органические вещества испар ютс в откачиваемый объем, загр зн ,его.A disadvantage of the known method is a significant contamination of the pumped volume with vapors of organic substances due to the fact that during the adhesion of a surface area, the previously condensed organic matter evaporates into the pumped volume, the contaminated one.
Цель изобретени - уменьщение загр знени откачиваемого объема парами органических веществ.The purpose of the invention is to reduce the contamination of the pumped volume with vapors of organic substances.
Указанна цель достигаетс тем, что дополнительно подвергают охлаждаемый участок бомбардировке зар женными частицами с энергией 200-300 эВ и плотностью потока 3-8-10 /V А/см 2, где М - масса зар женной частицы .This goal is achieved by additionally subjecting the cooled section to bombardment by charged particles with an energy of 200-300 eV and a flux density of 3-8-10 / V A / cm 2, where M is the mass of the charged particle.
Под действием бомбардировки между молекулами органических веществ, сконденсированными на охлаждаемом участкеUnder the action of bombardment between organic molecules condensed in the cooled section
поверхности откачиваемого объема, возникают устойчивые св зи, подобные св з м при полимеризации молекул. Таким образом, молекулы органических веществ оказываютс прочно св занными как с поверхностью,surfaces of the volume being pumped; stable bonds appear, similar to bonds upon polymerization of molecules. Thus, the molecules of organic matter are firmly bound to both the surface,
5 так и между собой. При последующем отеплении поверхности испарени органических молекул не происходит. Диапазон изменени энергии зар женных частиц и плотности потока соответствует наибольшей эффективности процесса образовани св зей. При меньших энерги х и плотности потока образование св зей происходит недостаточно интенсивно и часть молекул остаетс не св занной, при больших - происходит распыление молекул по объему.5 and between themselves. During the subsequent heating of the surface, evaporation of organic molecules does not occur. The range of variation of the energy of the charged particles and the flux density corresponds to the highest efficiency of the bonding process. At lower energies and flux densities, bonding is not sufficiently intense and some of the molecules remain unconnected; for high energies, the molecules are sputtered by volume.
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Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU803004177A SU958693A1 (en) | 1980-11-12 | 1980-11-12 | Vacuum production method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU803004177A SU958693A1 (en) | 1980-11-12 | 1980-11-12 | Vacuum production method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU958693A1 true SU958693A1 (en) | 1982-09-15 |
Family
ID=20926029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU803004177A SU958693A1 (en) | 1980-11-12 | 1980-11-12 | Vacuum production method |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU958693A1 (en) |
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1980
- 1980-11-12 SU SU803004177A patent/SU958693A1/en active
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