SU931977A1

SU931977A1 - Molecular vacuum pump

Info

Publication number: SU931977A1
Application number: SU803219278A
Authority: SU
Inventors: Вадим Павлович Иванов; Валерий Николаевич Христачев
Priority date: 1980-12-12
Filing date: 1980-12-12
Publication date: 1982-05-30

Description

II

Изобретение относитс к вакуумHov i технике, а именно к устройству молекул рных вакуумных насосов.The invention relates to a vacuum Hov i technique, namely to the design of molecular vacuum pumps.

Известен молекул рный вакуумный насос, содержащий корпус с размещенными в нем статором и ротором, выполненным в виде пакета дисков, установленных на валу l3 ,A molecular vacuum pump is known, comprising a housing with a stator and a rotor arranged in it, made in the form of a package of disks mounted on a shaft l3,

Недостатком известного насоса вл етс невысока надежность, так как неточности,возникающие при жесткой сборке дисков ротора с валом, привод т к перекосу ротора при высоких скорост х вращени , а следовательно , к неравномерности нагрузки на подшипники.A disadvantage of the known pump is low reliability, since inaccuracies arising from a rigid assembly of rotor discs with a shaft, lead to a misalignment of the rotor at high rotational speeds and, consequently, to uneven load on the bearings.

Цель изобретени - повышение надемности работы насоса.The purpose of the invention is to increase the pump operation.

Указанна цель достигаетс тем, что каждый диск ротора установлен на валу посредством сферического шарнира, выполненного в виде закрепленной на диске цилиндрической обоймы с прорез ми и контактируюи4еГО с ней сферического кольца, жестко закрепленного на валуи снабженного диаметральными выступами, расположенными в прорез х обоймы.This goal is achieved by the fact that each rotor disk is mounted on a shaft by means of a spherical hinge, made in the form of a cylindrical cage fixed to a disk with cuts and a spherical ring in contact with it, rigidly fixed on a shaft fitted with diametral projections located in the cuts of the cage.

При этом обойма имеет высоту, не превышающую ширину кольца.In this case, the yoke has a height not exceeding the width of the ring.

На фиг.1 представлен насос, продольный разрез; на фиг.2 - узел на фиг. 1.Figure 1 shows the pump, a longitudinal section; FIG. 2 shows the assembly in FIG. one.

10ten

Молекул рный вакуумный насос« содержит корпус 1 с размещенными в нем статором 2 и ротором 3, выполненным , в виде пакета дисков Ц, установленных на валу 5, причем каждый The molecular vacuum pump comprises a housing 1 with a stator 2 and a rotor 3 arranged therein, in the form of a package of disks C mounted on shaft 5, each

15 диск k ротора 3 установлен на валу15 disk k of the rotor 3 mounted on the shaft

5,посредством сферического шарнира5, by spherical hinge

6,выполненного в виде закрепленной на диске k цилиндрической обоймы 7 с прорез ми 8 и контактирующего с 6, made in the form of a cylindrical holder 7 fixed on the disk k with slots 8 and contacting with

Claims

20, a spherical ring 9 rigidly fixed on the shaft 5 and provided with diametrically protrusions 10 located in the slot 8 of the casing 7. 393 The pump proceeds as follows when the rotor 3 rotates the pumped gas, interacting with the rotor disks 4 and the stator 2, is transferred from the pump inlet to getting out of it. The hinge connection of the disks C with the shaft 5, at high revolutions of the shaft, ensures their self-alignment to a position perpendicular to the axis of rotation. In this case, the cylindrical holder 7 fixed to the disk has the ability to rotate around the spherical ring 9 towards the shaft 5 securely fixed to the shaft 5, and the rotation is possible only in the plane defined by the arrangement of the slots 8 of the ring 7 and the protrusions 10. of the ring 9. But the rotation around the shaft 5 is impossible, which reduces the final unbalance of the rotor. The use of a swivel disc with a shaft makes it possible in general to increase the reliability of the pump, reducing the wear of bearing assemblies. Claim 1. Molecular vacuum pump comprising a housing with a stator and rotors arranged in it in the form of a disk pack mounted on a shaft, characterized in that, in order to increase the reliability of operation, each rotor disk is mounted on a shaft by means of a spherical hinge, made in the form of a cylindrical cage fixed on a disk with slots and a spherical ring in contact with it, rigidly fixed on the shaft and provided with diametrically protrusions arranged in the cuts of the cage.

2. The pump according to any one of the preceding claims, so that the holder has a height not exceeding the width of the ring. Sources of information taken into account during the examination 1. German patent number 1b28352, cl. 27, 15 / 0t, published 1968.