SU725031A1 - Device for measuring the location of charged particle beams - Google Patents
Device for measuring the location of charged particle beams Download PDFInfo
- Publication number
- SU725031A1 SU725031A1 SU782667532A SU2667532A SU725031A1 SU 725031 A1 SU725031 A1 SU 725031A1 SU 782667532 A SU782667532 A SU 782667532A SU 2667532 A SU2667532 A SU 2667532A SU 725031 A1 SU725031 A1 SU 725031A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- measuring
- location
- charged particle
- particle beams
- output
- Prior art date
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- Measurement Of Radiation (AREA)
- Electron Beam Exposure (AREA)
Description
обраЗоМ, Чтобы разность потёнди лбВ между точками а и б равн лась нулю. При размещении исследуемого пучка зар женных частиц в центре устройства на выходе измерительной схемы сигнал равен нулю, так как увеличение тока, например, на вывод Q в левой части устройства уравновешиваетс возрастанием тока на вывод б правой части устройства; При уходе пучка из геометрического центра устройства полной компенсации приращени токов в левой и правой части устройства не происходит, мостова схема измерени выходит из состо ни баланса и на выходе по вл етс разность потенциалов коррелировани с величиной смещени пучка X относительно центра устройства 2. Пол рность выходного сигнала определ етс только направлением смещени пучка. Симметричность устройства относительно геометрического центра 2, описанное встречное включение анодов линеаризует выходную характеристику устройства (() в широком диапазоне изменений X (фиг. 2).For the difference in the difference between the a and B points between points a and b was zero. When placing the investigated beam of charged particles in the center of the device at the output of the measuring circuit, the signal is zero, since an increase in current, for example, to the output Q in the left part of the device is balanced by an increase in the current to the output b of the right side of the device; When the beam leaves the geometric center of the device to fully compensate for the current increment in the left and right parts of the device, the bridge measurement circuit goes out of balance and the output shows the potential difference of correlation with beam offset X relative to the center of the device 2. Output polarity the signal is determined only by the direction of the beam offset. The symmetry of the device relative to the geometric center 2, the described counter-switching on of the anodes linearizes the output characteristic of the device (() in a wide range of changes in X (Fig. 2).
При необходимости регистрации смещеНИИ в двух взаимно перпендикул рных направлени х X и У перпендикул рно описанному устройству, измер ющему смещение в направлении X, размещаетс еще одно устройство , измер ющее смещение в направлеНИИ У (фиг. 3).If it is necessary to register an offset in two mutually perpendicular directions X and Y perpendicular to the described device, measuring the displacement in the X direction, another device is placed that measures the displacement in the direction NII (Fig. 3).
Предлагаемое устройство обладает линейной характеристикой в широком диапазоне изменений X, более помехозащищеноThe proposed device has a linear characteristic in a wide range of changes X, more noise-proof
Of влййни магнитных пбЛёй внешних потоков зар женных частиц и проводов, обладает широким частотным диапазоном (О- 30 МГц) и позвол ет определ ть местоположение сильноточных пучков зар женных частиц, токи которых измен ютс по произвольному закону.Of course, magnetic flux particles of external particles and wires, has a wide frequency range (~ 30 MHz) and allows you to determine the location of high-current charged particles, the currents of which vary according to an arbitrary law.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU782667532A SU725031A1 (en) | 1978-09-27 | 1978-09-27 | Device for measuring the location of charged particle beams |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU782667532A SU725031A1 (en) | 1978-09-27 | 1978-09-27 | Device for measuring the location of charged particle beams |
Publications (1)
Publication Number | Publication Date |
---|---|
SU725031A1 true SU725031A1 (en) | 1980-03-30 |
Family
ID=20786628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU782667532A SU725031A1 (en) | 1978-09-27 | 1978-09-27 | Device for measuring the location of charged particle beams |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU725031A1 (en) |
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1978
- 1978-09-27 SU SU782667532A patent/SU725031A1/en active
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