SU715609A1 - Solution for pickling crystalline quartz piezoelements - Google Patents

Description

(54) SOLUTION FOR Etching PIEZO ELEMENTS FROM A CRYSTALLINE QUARTZ

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Example y, In In water dissolve 00 g of ammonium bifluoride. To the resulting solution, 1.53 liters of 45% hydrofluoric acid, 2.3 ml of quinoline and 1.3 g of captax are added. At that, the following relations are obtained

Components, wt.%:

Hydrofluoric acid25

Ammonium bifluoride .25

QuinolinOD

Kaptaks0.0510

WaterEverything

The rate of dissolution of quartz in this solution is 0.15 µm / min, the stability time of the mixed coatings in the solution is 20 h. The metallic coating is preserved. Gaps 15 were etched on, 150 microns. Kra clear. Example 2. 540 g of ammonium bifluoride is dissolved in water. 640 ml of 45% hydrofluoric acid and 2.1 ml of quinoline are added to the resulting solution. After that, 1.2 g of captax are added. This gives the following ratio of components, wt.%: Hydrofluoric acid 15

Ammonium bifluoride23,3

Quinoline 0.125

Kaptaks0.05. .

Water is the rest.

The dissolution rate of quartz is 0.067 µm / min, the stability time is more than 22 hours. The meuallic coating is preserved. The slits were treated with 100 μm. The edge of the picture is clear.

T asnewim were exposed to quartz sheets of a 2UV / + 5 ° slice with a size of 19.8x24x0.2 mm with a printed pattern of metal electrodes. Metallic coatings with a thickness of 35 microns of 0.05 microns / silver 0.2 microns. After applying the electrodes, the plates were coated with a hydrophobic substance — phenyl trichlorosilane — and then a protective mask of a positive acid resistant photoresist was applied in the form of a group of piezoelements.

The proposed composition of the etching solution of piezoelectric elements made of crystalline quartz allows you to simultaneously obtain a whole (series of piezoelectric elements, provides a smooth cut edge of the piezoelectric element, does not destroy the metallic electrodes deposited on the piezoelement. no quartz undercut is observed. Finished products have specified geometrical parameters with an accuracy of 2 µm. Etching occurs at room temperature temperature

Claims (1)

Invention Formula A solution for etching piezoelement from crystalline quartz containing hydrofluoric acid, ammonium bifluoride and water, characterized in that, in order to increase the etching rate and reduce the aggressiveness of the solution, it additionally contains XYNOLIN and captax in the following ratio of components, wt.%: Hydrofluoric acid 15-25 Ammonium bifluoride 15-25 Quinoline 0.05-0.1 Kaptaks 0.01-0.05 WaterEverything Sources of information taken into account in the examination 1. Kharivulo I. G. and Litinska N. M., Almazy, 1970, 3, No. 4, 27-31 (prototype).