SU618426A1 - Compression electric furnace - Google Patents
Compression electric furnaceInfo
- Publication number
- SU618426A1 SU618426A1 SU762414672A SU2414672A SU618426A1 SU 618426 A1 SU618426 A1 SU 618426A1 SU 762414672 A SU762414672 A SU 762414672A SU 2414672 A SU2414672 A SU 2414672A SU 618426 A1 SU618426 A1 SU 618426A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- electric furnace
- compression electric
- heater
- compression
- container
- Prior art date
Links
Landscapes
- Furnace Details (AREA)
- General Induction Heating (AREA)
Description
Изобретение относитс к электропечам , работающим под избыточным внутренним давлением.The invention relates to electric furnaces operating under excessive internal pressure.
Известно устройство, включающее контейнер на нержавеющей стали в форме ийлиндра , к которому с помошыо шпилек крепитс основание и крышка. .В контейнере установлена печь сопротивлени , котора состоит из платиновой спирали, намотанной на трубе из 25% окиси алюмиНИН , используетс дл нагрева кварцевого реактора закрытого с нижней стороны. В реактор помещаетс обрабатываемое изделие и газ - реагент подаетс в контейнер ППA device is known that includes a container on a stainless steel in the shape of an ilinder, to which a base and a lid are attached with pins. In the container, a resistance furnace is installed, which consists of a platinum coil wound on a 25% aluminin oxide pipe, which is used to heat the quartz reactor closed from the bottom. The workpiece and the gas are placed in the reactor - the reagent is supplied to the PP container.
Наиболее близкой к изобретению вл етс компрессионна электропечь, включающа корпус с К1 1шкой и расположенвую в ием реакционную камеру, в пространстве между которыми размещены теплокзол ци и нагреватели. Обработка производитс в газовой среде обшей дл нагревател н обрабатываемого издели Г21.Closest to the invention is a compression electric furnace, comprising a housing with K1 1b and located in a reaction chamber, in the space between which the heating is located and heaters. The treatment is carried out in a gaseous environment for the heater of the G21 product being processed.
Недостатками этой печи вл ютс : реакционный объем сообщаетс с объемом., The disadvantages of this furnace are: the reaction volume communicates with the volume.,
в котором расположен нагреватель и теплоизол ци , така конструкци не обеспечивает в случае обработки полупроводниковых изделий необходимой чистоты; при использовании агрессивных газов, напри мер кислорода, возникает необходимость использовани дл нагревател и теплоизол ции материалов инертных по отноше нию к рабочему газу при температурах химикотермического процесса; свпьное влв Ьние за счет конвективной составл ющей резко возрастающей при повышении давле НИИ, на распределение температур в peas ционной зоне.in which the heater and heat insulation are located, such a structure does not provide the necessary purity in the case of processing semiconductor products; when using aggressive gases, such as oxygen, it becomes necessary to use materials that are inert to the working gas for the heater and thermal insulation at temperatures of a chemical-thermal process; due to the convective component, which increases sharply with increasing pressure from the scientific research institute, to the temperature distribution in the peas zone.
Целью изобретени вл етс обеспече ние высокой чистоты газа реагента путем разделени рабочей среды нагревател рабочей среды реакционной каме| |1.The aim of the invention is to provide a high purity reagent gas by separating the working medium of the working medium heater to the reaction chamber | | 1.
Указанна цель достигаетс тем, что реакционна камера выпЬлнева в вше хо аксиально установленных колпаков, причем наружный колпак закреплен ва корпусе, а внутренний на крышке, при этом внутренний колпак снабжен дополнвтепьвым теплоизол цией с нагревателем.This goal is achieved by the fact that the reaction chamber is discharged at the top of the axially installed caps, the outer cap is fixed in the housing and the inner cap is attached, while the inner cap is equipped with additional heat insulation with a heater.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU762414672A SU618426A1 (en) | 1976-10-25 | 1976-10-25 | Compression electric furnace |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU762414672A SU618426A1 (en) | 1976-10-25 | 1976-10-25 | Compression electric furnace |
Publications (1)
Publication Number | Publication Date |
---|---|
SU618426A1 true SU618426A1 (en) | 1978-08-05 |
Family
ID=20680811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU762414672A SU618426A1 (en) | 1976-10-25 | 1976-10-25 | Compression electric furnace |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU618426A1 (en) |
-
1976
- 1976-10-25 SU SU762414672A patent/SU618426A1/en active
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