SU590590A1 - Device for measuring the thickness of oxide films and coatings - Google Patents
Device for measuring the thickness of oxide films and coatingsInfo
- Publication number
- SU590590A1 SU590590A1 SU742031651A SU2031651A SU590590A1 SU 590590 A1 SU590590 A1 SU 590590A1 SU 742031651 A SU742031651 A SU 742031651A SU 2031651 A SU2031651 A SU 2031651A SU 590590 A1 SU590590 A1 SU 590590A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- thickness
- coatings
- measuring
- oxide films
- current
- Prior art date
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
1one
Изобретение относитс к контрольно-измерительной технике и может быть использовано дл контрол толщины защитных или диэлектрических оксидных нленок или слоев, нанесенных на поверхность металлов или полупроводников .The invention relates to instrumentation technology and can be used to control the thickness of protective or dielectric oxide films or layers deposited on the surface of metals or semiconductors.
Известно устройство дл измерени толщины диэлектрических пленок или покрытий, содержащее электролитический пол ризующий элемеит, источник питани этого элемента и индикатор тока, проход щего через указанный элемент 1.A device for measuring the thickness of dielectric films or coatings comprising an electrolytic polarizing element, a power source of this element and a current indicator passing through said element 1 is known.
Однако точность измерени толщины этим устройством недостаточна, так как коррел ционна взаимозависимость между током и скоростью электрохимического процесса не контролируетс .However, the accuracy of thickness measurement by this device is not sufficient, since the correlation relationship between current and speed of the electrochemical process is not monitored.
Наиболее близким техническим рещением к изобретению вл етс устройство, содержащее последовательно соединенные источник линейно возрастающего напр жени , электролитический элемент, индикатор тока, амплитудный селектор и схему управлени дл источника линейно возрастающего напр жени . Инднкатор тока, выполненный в виде электронного преобразовател аналоговой величины в последовательность импульсов реле времени, контролирует величину тока, проход щего через электролитический элемент. Устройство срабатывает при величине тока.The closest technical solution to the invention is a device comprising a series-connected linearly increasing voltage source, an electrolytic cell, a current indicator, an amplitude selector, and a control circuit for the linearly increasing voltage source. A current indicator, made in the form of an electronic converter of analog value to a sequence of pulses of a time relay, controls the amount of current passing through the electrolytic cell. The device is triggered when the current value.
соответствующей моменту перфорации покрыти , и, следовательно, не обеснечивает достаточной точности измерени - толщины покры тий, обладающих дефектами типа трещинcorresponding to the moment of perforation of the coating, and, therefore, does not ensure sufficient measurement accuracy - the thickness of the coatings with defects such as cracks
царапин, пор и т. д. Ток, обусловленный де фектностью покрыти , может вызвать прежде временное срабатывание устройства.scratches, pores, etc. The current caused by the defectiveness of the coating may cause the device to temporarily activate.
Целью изобретени вл етс повыщенир точности измерени .The aim of the invention is to increase measurement accuracy.
Дл этого в предлагаемом устройстве дл измерени толщины оксидных пленок и покрытий , индикатор тока выполнен в виде измерител скорости нарастани тока.For this purpose, in the proposed device for measuring the thickness of oxide films and coatings, the current indicator is made in the form of a current rise rate meter.
На чертеже представлена блок-схема предлагаемого устройства.The drawing shows a block diagram of the proposed device.
Устройство содержит источник 1 линейно возрастающего напр жени , к выходу которого подключены электроды электролитического пол ризующего элемента 2. Анодом электролитического элемента вл етс испытуемый образец. В цепь питани электролитического элемента включен резистор 3, параллельно которому нрисоединен индикатор 4 тока. Выход индикатора тока присоединен к амплптудному селектору 5, который св зан со схемой 6 управлени дл источника линейно возрастающего напр жени . Напр жение источника , подаваемое на электролитический элемент , контролируетс с помощью вольтметра 7.The device contains a source of linearly increasing voltage, to the output of which electrodes of an electrolytic polarizing element 2 are connected. The sample under test is the anode of an electrolytic element. A resistor 3 is connected to the power supply circuit of the electrolytic cell, in parallel with which current indicator 4 is connected. The output of the current indicator is connected to an amplitude selector 5, which is connected to a control circuit 6 for a source of linearly increasing voltage. The source voltage applied to the electrolytic cell is monitored with a voltmeter 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU742031651A SU590590A1 (en) | 1974-05-31 | 1974-05-31 | Device for measuring the thickness of oxide films and coatings |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU742031651A SU590590A1 (en) | 1974-05-31 | 1974-05-31 | Device for measuring the thickness of oxide films and coatings |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU590590A1 true SU590590A1 (en) | 1978-01-30 |
Family
ID=20586988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU742031651A SU590590A1 (en) | 1974-05-31 | 1974-05-31 | Device for measuring the thickness of oxide films and coatings |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU590590A1 (en) |
-
1974
- 1974-05-31 SU SU742031651A patent/SU590590A1/en active
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