SU575599A1

SU575599A1 - Symmetric objective with magnification 1x

Info

Publication number: SU575599A1
Application number: SU7602354087A
Authority: SU
Inventors: Элла Семеновна Гуревич; Светлана Бахшиевна Манвелян; Ирина Ефимовна Басалаева
Original assignee: Предприятие П/Я Р-6495
Priority date: 1976-05-03
Filing date: 1976-05-03
Publication date: 1977-10-05

Description

1one

Изобретение относитс к оптическим системам . Оно может примен тьс в фотографии , а также в микроэлектронике в установках проекционного экспонировани и совмещени .This invention relates to optical systems. It can be used in photography, as well as in microelectronics in projection exposure and registration installations.

Известен симметричный объектив, предна наченный дл аналогичных целей. Он работает с увеличение м-1 , числовой апертурой 0,056 и полем зрени 2у 1,56/состоит из двух групп линз расположенных симметрично относительно диафрагмы. Кажда группа содержит два положительных мениска и один отрицательный, обращенные всигнутост ми к плоскости диафрагмы.A symmetrical lens designed for similar purposes is known. It works with an increase of m-1, a numerical aperture of 0.056 and a field of view of 2 1.56 / consists of two groups of lenses located symmetrically relative to the diaphragm. Each group contains two positive meniscus and one negative, facing at a distance to the plane of the diaphragm.

Объектив, разработанный фирмой (ФРГ), работает в режиме однократного увеличени с апертурой 0,125, полем-зрени 58 мм. Он состоит из двух идентичных линзовых групп, разделенных диафрагмой. Кажда группа содержит четыре менисковых компонента, три простых мениска идвусклеенный , обращенные вогнутост ми к диаф.рагме .The lens developed by the company (Germany), operates in a single-magnification mode with an aperture of 0.125, field of view 58 mm. It consists of two identical lens groups, separated by a diaphragm. Each group contains four meniscus components, three simple menisciks imbued, concave toward the diaphragm.

Ближайшим аналогом вл етс двенадцатилинсовый объектив, выполненный также The closest analogue is a twelve-lens lens, also made

из двух одинаковых групп линз, симметрично расположенных относительно диафрагмы. Группа содер сит три компонента, положительную двухсклеенную линзу, положительный и отрицательный трехлннзовый мениски, обращенные вогнутост ми к диафрагме. Объектив работает в режиме 1:1, имеет поле зрени 48,6 мм и апертуру 0,125.of two identical groups of lenses, symmetrically located relative to the diaphragm. The group contains three components, a positive bi-glued lens, and a positive and negative three-lnz menisci facing inwardly towards the diaphragm. The lens operates in 1: 1 mode, has a field of view of 48.6 mm and an aperture of 0.125.

Обшим недостатком перечисленных объективов вл етс качество изображени , не удовлетвор ющее требовани м микроэлектроники , причем у симметричного объект1геа маленька апертура, а у двенадцатилинзового объектива - малое пале зрени .A common drawback of these lenses is the image quality that does not meet the requirements of microelectronics, with a symmetrical geology object having a small aperture, and a twelve-lens lens with a small palette.

Цель изобретени - расширить поле зрени , улунщить качество изображени и ахроматизировать объектив на две рабочие области 436 нм и 546 нм.The purpose of the invention is to expand the field of view, improve image quality and chromatize the lens to two working areas of 436 nm and 546 nm.

Claims

This is achieved by introducing a positive meniscus between a negative meniscus and a diaphragm convex to the diaphragm, a negative two-lens meniscus glued from a flint and a heavy crown with equal refractive indices and different dispersions into each group of objective lenses. an interpositionally positive lens and a positive meniscus facing inward towards the diaphragm, the negative meniscus consisting of two lenses glued together from a flint and a heavy crown with equal indices and different Spurs E and convexity facing the diaphragm, ja single positive lens is formed. The invention is illustrated in the drawing, where: the optical scheme is shown: the lens The lens consists of fourteen lenses 1-7, assembled into two identical lens, r „- - .. groups, located symmetrically relative to the aperture diaphragm 8. Each group contains five components (9–13). Component 9 is a positive super-crown lens 1 with a ratio of 1:19 radii. Component 10 — a negative meniscus facing inward to the diaphragm — is glued together from two meniscuses 2, 3, made out of fleece and a heavy crown, the difference in the refractive indices of which does not exceed 0.0065 for strongly differing dispersions. The radius of the bonded surface. . is chromatic. Component 11 - positive meniscus 4 with equal radii, made of barite flint and facing concavity to the diaphragm

2. Component 12It represents a hint of a catholic two-lens meniscus facing with a convex to the diffraction, a double-concave Inza 5 and a double convex lens 6. The lenses are also made as in component 10 of lint and heavy crown, the refractive index difference of which does not exceed 0.0065 with very different dispersions, the radius being glued is chromatic. Component 13 — the positive meniscus 7 is made of a superheat crown, located at a distance of 0, O6foT of the diaphragm and facing towards it with a bulge. Claims. A symmetric lens with magnification i consisting of two symmetric with respect to the diaphragm groups of lenses, each of which contains a main negative meniscus, a positive meniscus facing the concavity of the diaphragm, and a positive lens, characterized in that, in order to broaden the field of vision, improve image quality and the achromatization of the lens in the region of 436 nm and 546 them, in each group of lenses are introduced between the negative meniscus and the diaphragm, a positive meniscus convex to the diaphragm and negative There is a two-sided meniscus located between the positive line and the positive meniscus and facing concavity towards the diaphragm, the main negative meniscus made of two lenses and convex to the diaphragm, and the positive lens is one.