SU565638A3 - Промывочный состав - Google Patents
Промывочный составInfo
- Publication number
- SU565638A3 SU565638A3 SU7502113540A SU2113540A SU565638A3 SU 565638 A3 SU565638 A3 SU 565638A3 SU 7502113540 A SU7502113540 A SU 7502113540A SU 2113540 A SU2113540 A SU 2113540A SU 565638 A3 SU565638 A3 SU 565638A3
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- plate
- washing composition
- wash
- composition
- photosensitive polymer
- Prior art date
Links
- 239000000203 mixture Substances 0.000 title description 8
- 238000005406 washing Methods 0.000 title description 6
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 238000012552 review Methods 0.000 claims 1
- 229920000642 polymer Polymers 0.000 description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- HWSSEYVMGDIFMH-UHFFFAOYSA-N 2-[2-[2-(2-methylprop-2-enoyloxy)ethoxy]ethoxy]ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCOCCOCCOC(=O)C(C)=C HWSSEYVMGDIFMH-UHFFFAOYSA-N 0.000 description 2
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- ANBBXQWFNXMHLD-UHFFFAOYSA-N aluminum;sodium;oxygen(2-) Chemical compound [O-2].[O-2].[Na+].[Al+3] ANBBXQWFNXMHLD-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 2
- 229910001388 sodium aluminate Inorganic materials 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000012261 resinous substance Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2554474A JPS5637543B2 (enExample) | 1974-03-04 | 1974-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU565638A3 true SU565638A3 (ru) | 1977-07-15 |
Family
ID=12168916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU7502113540A SU565638A3 (ru) | 1974-03-04 | 1975-03-03 | Промывочный состав |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5637543B2 (enExample) |
| DE (1) | DE2508856A1 (enExample) |
| FR (1) | FR2263535B1 (enExample) |
| GB (1) | GB1480705A (enExample) |
| IT (1) | IT1030259B (enExample) |
| NL (1) | NL7502561A (enExample) |
| SU (1) | SU565638A3 (enExample) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5032643B2 (enExample) * | 1971-10-04 | 1975-10-23 |
-
1974
- 1974-03-04 JP JP2554474A patent/JPS5637543B2/ja not_active Expired
-
1975
- 1975-02-28 DE DE19752508856 patent/DE2508856A1/de not_active Withdrawn
- 1975-03-03 FR FR7506563A patent/FR2263535B1/fr not_active Expired
- 1975-03-03 GB GB878975A patent/GB1480705A/en not_active Expired
- 1975-03-03 SU SU7502113540A patent/SU565638A3/ru active
- 1975-03-03 IT IT6754175A patent/IT1030259B/it active
- 1975-03-04 NL NL7502561A patent/NL7502561A/xx not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| FR2263535B1 (enExample) | 1980-11-14 |
| NL7502561A (nl) | 1975-09-08 |
| JPS50120336A (enExample) | 1975-09-20 |
| DE2508856A1 (de) | 1975-09-18 |
| FR2263535A1 (enExample) | 1975-10-03 |
| GB1480705A (en) | 1977-07-20 |
| IT1030259B (it) | 1979-03-30 |
| JPS5637543B2 (enExample) | 1981-09-01 |
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