SU531430A1 - SOURCE OF GALLIA FOR GAS-TRANSPORT EPITAXY OF ARSENIDE GALLIA - Google Patents
SOURCE OF GALLIA FOR GAS-TRANSPORT EPITAXY OF ARSENIDE GALLIAInfo
- Publication number
- SU531430A1 SU531430A1 SU2076946/25A SU2076946A SU531430A1 SU 531430 A1 SU531430 A1 SU 531430A1 SU 2076946/25 A SU2076946/25 A SU 2076946/25A SU 2076946 A SU2076946 A SU 2076946A SU 531430 A1 SU531430 A1 SU 531430A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- source
- gallia
- epitaxy
- capillary
- arsenide
- Prior art date
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
1. Источник галлия для газотранспортной эпитаксии арсенида галлия, представляющий собой кварцевую лодочку закрытого типа, отличающийся тем, что, с целью повышения стабильности работы и уменьшения времени насыщения источника, в отверстие источника опущен капилляр, имеющий на другом конце развитую поверхность контакта с газовой фазой.2. Источник по п.1, отличающийся тем, что капилляр образован близкорасположенными пластинами из материала, смачиваемого галлием, например вольфрама, имеющего отверстия в верхнем конце пластины.3. Источник по п.1, отличающийся тем, что капилляр образован спиралью, намотанной на пластину.1. A gallium source for gas transmission epitaxy of gallium arsenide, which is a quartz boat of a closed type, characterized in that, in order to increase stability and reduce the source saturation time, a capillary with a developed gas phase contact surface is lowered into the source hole. 2 The source according to claim 1, characterized in that the capillary is formed by closely spaced plates of material wetted with gallium, for example tungsten, having openings in the upper end of the plate. The source according to claim 1, characterized in that the capillary is formed by a spiral wound on a plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU2076946/25A SU531430A1 (en) | 1974-11-25 | 1974-11-25 | SOURCE OF GALLIA FOR GAS-TRANSPORT EPITAXY OF ARSENIDE GALLIA |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU2076946/25A SU531430A1 (en) | 1974-11-25 | 1974-11-25 | SOURCE OF GALLIA FOR GAS-TRANSPORT EPITAXY OF ARSENIDE GALLIA |
Publications (1)
Publication Number | Publication Date |
---|---|
SU531430A1 true SU531430A1 (en) | 2000-05-20 |
Family
ID=60520690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU2076946/25A SU531430A1 (en) | 1974-11-25 | 1974-11-25 | SOURCE OF GALLIA FOR GAS-TRANSPORT EPITAXY OF ARSENIDE GALLIA |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU531430A1 (en) |
-
1974
- 1974-11-25 SU SU2076946/25A patent/SU531430A1/en active
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