SU487664A1 - Method for automatic control of thermal mode of process of induction crucible zone melting - Google Patents
Method for automatic control of thermal mode of process of induction crucible zone meltingInfo
- Publication number
- SU487664A1 SU487664A1 SU1955071A SU1955071A SU487664A1 SU 487664 A1 SU487664 A1 SU 487664A1 SU 1955071 A SU1955071 A SU 1955071A SU 1955071 A SU1955071 A SU 1955071A SU 487664 A1 SU487664 A1 SU 487664A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- automatic control
- zone melting
- thermal mode
- induction crucible
- crucible zone
- Prior art date
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
Изобретение относитс к металлургии полупроводниковых материалов и может быть использовано при индукционной бестигельпой зонной плавке.This invention relates to the metallurgy of semiconductor materials and can be used in induction-free zone melting.
Известен способ автоматического управлени тепловым режимом процесса бестигельной зонной плавки путем стабилизации диа .метра выращиваемого кристалла. Но известный способ не обеспечивает стабилизацию электрофИзических свойств по длине монокристалла .There is a known method for automatically controlling the thermal regime of the process of crucibleless zone melting by stabilizing the diameter of the grown crystal. But the known method does not provide stabilization of the electrophysical properties along the length of the single crystal.
Предлагают способ, по которому управл ют диапазоном пластичности монокристалла в зависимости от девиации частоты генератора воздействием на мощность подогревающего индуктора.A method is proposed for controlling the plasticity range of a single crystal depending on the generator frequency deviation by affecting the power of the heating inductor.
На чертеже представлена схема реализации способа.The drawing shows a diagram of the implementation of the method.
Схема состоит из высокочастотного генератора 1, частотного дискриминатора 2, сумматора 3, регул тора 4, задатчика 5, программирующего блока 6, плавильного индуктора 7, подогреваюплего индуктора 8.The circuit consists of a high-frequency generator 1, a frequency discriminator 2, an adder 3, a controller 4, a setting device 5, a programming unit 6, a melting inductor 7, a heating inductor 8.
Способ осуществл ют следующим образом.The method is carried out as follows.
Отклонение частоты колебательного контура генератора 1 от номинальной выдел етс частотным дискриминатором 2. Напр жение, пропорциональное величине этого отклонени частоты, через сумматор 3 поступает на регул тор 4. Задатчиком 5 и программирующим блоком 6 измен етс мощность на подогревающем индукторе 8 до тех пор, пока частота генератора 1 не достигнет заданного значени .The frequency deviation of the oscillating circuit of the generator 1 from the nominal frequency is discriminated by the frequency discriminator 2. A voltage proportional to the magnitude of this frequency deviation through the adder 3 is supplied to the regulator 4. The unit 5 and the programming unit 6 change the power on the heating inductor 8 until the frequency of oscillator 1 will not reach the set value.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU1955071A SU487664A1 (en) | 1973-07-26 | 1973-07-26 | Method for automatic control of thermal mode of process of induction crucible zone melting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU1955071A SU487664A1 (en) | 1973-07-26 | 1973-07-26 | Method for automatic control of thermal mode of process of induction crucible zone melting |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU487664A1 true SU487664A1 (en) | 1975-10-15 |
Family
ID=20563317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU1955071A SU487664A1 (en) | 1973-07-26 | 1973-07-26 | Method for automatic control of thermal mode of process of induction crucible zone melting |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU487664A1 (en) |
-
1973
- 1973-07-26 SU SU1955071A patent/SU487664A1/en active
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