SU1825125A1 - METHOD OF CALIBRATION OF SEMICONDUCTOR SENSITIVE ELEMENT BASED ON METAL OXIDE, INTENDED FOR DETERMINING THE MICROPRIME CONCENTRATION IN THE ATMOSPHERE OF AN UNISMENDABLE COMPONENT - Google Patents
METHOD OF CALIBRATION OF SEMICONDUCTOR SENSITIVE ELEMENT BASED ON METAL OXIDE, INTENDED FOR DETERMINING THE MICROPRIME CONCENTRATION IN THE ATMOSPHERE OF AN UNISMENDABLE COMPONENTInfo
- Publication number
- SU1825125A1 SU1825125A1 SU4775665/25A SU4775665A SU1825125A1 SU 1825125 A1 SU1825125 A1 SU 1825125A1 SU 4775665/25 A SU4775665/25 A SU 4775665/25A SU 4775665 A SU4775665 A SU 4775665A SU 1825125 A1 SU1825125 A1 SU 1825125A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- sensitive element
- calibration
- atmosphere
- concentration
- metal oxide
- Prior art date
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- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Способ калибровки полупроводникового чувствительного элемента на основе оксида металла, предназначенного для определения концентрации микропримеси в атмосфере неизмеряемого компонента, заключающийся в подаче на чувствительный элемент эталонной газовой смеси с последующим измерением электрофизического параметра и определением калибровочных постоянных чувствительного элемента, отличающийся тем, что, с целью повышения точности определения калибровочных характеристик, находят стационарное значение электрофизического параметра чувствительного элемента в атмосфере газа с постоянной концентрацией микропримеси, после чего заменяют среду на калибровочную газовую смесь с другим содержанием микропримеси, затем подают ее на чувствительный элемент и измеряют изменение электрофизического параметра чувствительного элемента во времени до нового стационарного значения, а по характерному спаду величины электрофизического параметра чувствительного элемента находят постоянную времени переходного процесса изменения электрофизического параметра от исходного до вновь полученного, по величине которой определяют калибровочные постоянные чувствительного элемента.A method for calibrating a semiconductor sensitive element based on a metal oxide, designed to determine the concentration of trace contaminants in the atmosphere of an immeasurable component, consisting in feeding a standard gas mixture to a sensitive element followed by measuring the electrophysical parameter and determining the calibration constants of the sensitive element, characterized in determine the calibration characteristics, find the stationary value of the electrophysical parameter h element in the gas atmosphere with a constant concentration of microimpurities, then replace the medium with a calibration gas mixture with a different content of microimpurities, then feed it to the sensitive element and measure the change in the electrophysical parameter of the sensitive element over time to a new stationary value the sensitive element find the time constant of the transition process of the change in the electrophysical parameter from the initial to the Acquiring, the magnitude of which is determined calibration constants sensor element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4775665/25A SU1825125A1 (en) | 1989-12-29 | 1989-12-29 | METHOD OF CALIBRATION OF SEMICONDUCTOR SENSITIVE ELEMENT BASED ON METAL OXIDE, INTENDED FOR DETERMINING THE MICROPRIME CONCENTRATION IN THE ATMOSPHERE OF AN UNISMENDABLE COMPONENT |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4775665/25A SU1825125A1 (en) | 1989-12-29 | 1989-12-29 | METHOD OF CALIBRATION OF SEMICONDUCTOR SENSITIVE ELEMENT BASED ON METAL OXIDE, INTENDED FOR DETERMINING THE MICROPRIME CONCENTRATION IN THE ATMOSPHERE OF AN UNISMENDABLE COMPONENT |
Publications (1)
Publication Number | Publication Date |
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SU1825125A1 true SU1825125A1 (en) | 2005-12-27 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU4775665/25A SU1825125A1 (en) | 1989-12-29 | 1989-12-29 | METHOD OF CALIBRATION OF SEMICONDUCTOR SENSITIVE ELEMENT BASED ON METAL OXIDE, INTENDED FOR DETERMINING THE MICROPRIME CONCENTRATION IN THE ATMOSPHERE OF AN UNISMENDABLE COMPONENT |
Country Status (1)
Country | Link |
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SU (1) | SU1825125A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2523089C2 (en) * | 2012-08-09 | 2014-07-20 | Открытое акционерное общество "Научно-производственное предприятие "Дельта" (ОАО "НПП"Дельта") | Calibration of semiconductor gas sensors and device to this end |
-
1989
- 1989-12-29 SU SU4775665/25A patent/SU1825125A1/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2523089C2 (en) * | 2012-08-09 | 2014-07-20 | Открытое акционерное общество "Научно-производственное предприятие "Дельта" (ОАО "НПП"Дельта") | Calibration of semiconductor gas sensors and device to this end |
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