SU1573234A1 - Double-stage tubromolecular vacuum pump - Google Patents
Double-stage tubromolecular vacuum pump Download PDFInfo
- Publication number
- SU1573234A1 SU1573234A1 SU884437716A SU4437716A SU1573234A1 SU 1573234 A1 SU1573234 A1 SU 1573234A1 SU 884437716 A SU884437716 A SU 884437716A SU 4437716 A SU4437716 A SU 4437716A SU 1573234 A1 SU1573234 A1 SU 1573234A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- stage
- rotor
- stator
- vacuum pump
- outer diameter
- Prior art date
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- Non-Positive Displacement Air Blowers (AREA)
Abstract
Изобретение относитс к вакуумной технике и позвол ет улучшить откачные характеристики насоса. Между первой турбомолекул рной и второй молекул рной, ступен ми насоса ротор (Р) 6 имеет торцовый участок 11. На поверхности последнего выполнены спиральные канавки 12, причем внешний диаметр цилиндрического участка 10 Р 6 равен внешнему диаметру лопаток роторных дисков 8. 1 з.п.ф-лы, 2 ил.The invention relates to vacuum technology and allows for improved pumping performance of a pump. Between the first turbomolecular and the second molecular, the pump rotor (P) 6 has end section 11. On the surface of the latter there are spiral grooves 12, and the outer diameter of the cylindrical section 10 P 6 is equal to the outer diameter of the blades of the rotor disks 8. .f-ly, 2 Il.
Description
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фиг.22
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU884437716A SU1573234A1 (en) | 1988-06-07 | 1988-06-07 | Double-stage tubromolecular vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU884437716A SU1573234A1 (en) | 1988-06-07 | 1988-06-07 | Double-stage tubromolecular vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1573234A1 true SU1573234A1 (en) | 1990-06-23 |
Family
ID=21380133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU884437716A SU1573234A1 (en) | 1988-06-07 | 1988-06-07 | Double-stage tubromolecular vacuum pump |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1573234A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2560133C1 (en) * | 2014-10-10 | 2015-08-20 | Общество с ограниченной ответственностью "Владимирский центр механической обработки" | Single-flow four-stage turbomolecular pump |
-
1988
- 1988-06-07 SU SU884437716A patent/SU1573234A1/en active
Non-Patent Citations (1)
Title |
---|
Авторское свидетельство СССР № 1285198, кл. F 04 D 19/04, 1985. * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2560133C1 (en) * | 2014-10-10 | 2015-08-20 | Общество с ограниченной ответственностью "Владимирский центр механической обработки" | Single-flow four-stage turbomolecular pump |
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