SU1571306A1 - Turbomolecular vacuum pump - Google Patents
Turbomolecular vacuum pump Download PDFInfo
- Publication number
- SU1571306A1 SU1571306A1 SU884413854A SU4413854A SU1571306A1 SU 1571306 A1 SU1571306 A1 SU 1571306A1 SU 884413854 A SU884413854 A SU 884413854A SU 4413854 A SU4413854 A SU 4413854A SU 1571306 A1 SU1571306 A1 SU 1571306A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- parallel
- pump
- atmosphere
- vacuum pump
- ball
- Prior art date
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- Non-Positive Displacement Air Blowers (AREA)
Abstract
Изобретение относитс к вакуумной технике и позвол ет повысить надежность насоса при аварийном прорыве атмосферы. Рабочие лопатки (Л) 3 закреплены на центральном диске (Д) 6 полого ротора (Р) 2 параллельно оси насоса, образу две параллельные ступени откачки. Р 2 опираетс на гибкий стержень (С) 4, нижний конец которого расположен в отверстии шарика, закрепленного в эластичной манжете, установленной на подп тнике. При прорыве атмосферы как со стороны всасывани насоса, так и со стороны нагнетани наличие параллельных ступеней откачки обеспечивает уравновешивание сил, действующих на Д 6 и Л 3. В результате возможно лишь небольшое перемещение С 4 в отверстии шарика без дополнительных осевых усилий на опоры. 2 ил.The invention relates to vacuum technology and makes it possible to increase the reliability of a pump during an emergency breakthrough of the atmosphere. Working blades (L) 3 are fixed on the central disk (D) 6 of the hollow rotor (P) 2 parallel to the pump axis, forming two parallel pumping stages. P 2 rests on a flexible rod (C) 4, the lower end of which is located in the opening of a ball fixed in an elastic cuff mounted on a bolster. When the atmosphere breaks through both from the suction side of the pump and from the discharge side, the presence of parallel pumping stages balances the forces acting on D 6 and L 3. As a result, only a small movement of C 4 in the ball opening is possible without additional axial forces on the supports. 2 Il.
Description
Фиг. ZFIG. Z
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU884413854A SU1571306A1 (en) | 1988-04-19 | 1988-04-19 | Turbomolecular vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU884413854A SU1571306A1 (en) | 1988-04-19 | 1988-04-19 | Turbomolecular vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1571306A1 true SU1571306A1 (en) | 1990-06-15 |
Family
ID=21370180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU884413854A SU1571306A1 (en) | 1988-04-19 | 1988-04-19 | Turbomolecular vacuum pump |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1571306A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003076810A1 (en) * | 2002-03-14 | 2003-09-18 | Gesellschaft für Schwerionenforschung mbH | Turbomolecular pump with a high-vacuum sided circular suction surface |
-
1988
- 1988-04-19 SU SU884413854A patent/SU1571306A1/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003076810A1 (en) * | 2002-03-14 | 2003-09-18 | Gesellschaft für Schwerionenforschung mbH | Turbomolecular pump with a high-vacuum sided circular suction surface |
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