SU1396717A1 - Photoelectric interferometer for measuring displacement - Google Patents
Photoelectric interferometer for measuring displacementInfo
- Publication number
- SU1396717A1 SU1396717A1 SU3941463/28A SU3941463A SU1396717A1 SU 1396717 A1 SU1396717 A1 SU 1396717A1 SU 3941463/28 A SU3941463/28 A SU 3941463/28A SU 3941463 A SU3941463 A SU 3941463A SU 1396717 A1 SU1396717 A1 SU 1396717A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- beam splitter
- measurements
- signal
- enters
- measuring displacement
- Prior art date
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
FIELD: measurement technology. SUBSTANCE: light beam, which passes through beam splitter 5 of modulator 5, enters prism reflector 8, attached to object 9. After that the beam is focused by optical element and, being reflected from prism reflector 8 with preset focus length, enters beam splitter 5. When beam splitter is periodically moved, variable component of photocurrent signal is present in signal of photodetector 10. Phase of photocurrent signal is connected with optical phase difference between interfering beams, which is caused by movement of the object. EFFECT: improved precision of measurements; reduced phase errors of measurements. 1 dwg
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU3941463/28A SU1396717A1 (en) | 1985-08-13 | 1985-08-13 | Photoelectric interferometer for measuring displacement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU3941463/28A SU1396717A1 (en) | 1985-08-13 | 1985-08-13 | Photoelectric interferometer for measuring displacement |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1396717A1 true SU1396717A1 (en) | 1994-05-30 |
Family
ID=60535664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU3941463/28A SU1396717A1 (en) | 1985-08-13 | 1985-08-13 | Photoelectric interferometer for measuring displacement |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1396717A1 (en) |
-
1985
- 1985-08-13 SU SU3941463/28A patent/SU1396717A1/en active
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