SU1396717A1 - Photoelectric interferometer for measuring displacement - Google Patents

Photoelectric interferometer for measuring displacement

Info

Publication number
SU1396717A1
SU1396717A1 SU3941463/28A SU3941463A SU1396717A1 SU 1396717 A1 SU1396717 A1 SU 1396717A1 SU 3941463/28 A SU3941463/28 A SU 3941463/28A SU 3941463 A SU3941463 A SU 3941463A SU 1396717 A1 SU1396717 A1 SU 1396717A1
Authority
SU
USSR - Soviet Union
Prior art keywords
beam splitter
measurements
signal
enters
measuring displacement
Prior art date
Application number
SU3941463/28A
Other languages
Russian (ru)
Inventor
Ю.В. Мищенко
Original Assignee
Ю.В. Мищенко
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ю.В. Мищенко filed Critical Ю.В. Мищенко
Priority to SU3941463/28A priority Critical patent/SU1396717A1/en
Application granted granted Critical
Publication of SU1396717A1 publication Critical patent/SU1396717A1/en

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  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

FIELD: measurement technology. SUBSTANCE: light beam, which passes through beam splitter 5 of modulator 5, enters prism reflector 8, attached to object 9. After that the beam is focused by optical element and, being reflected from prism reflector 8 with preset focus length, enters beam splitter 5. When beam splitter is periodically moved, variable component of photocurrent signal is present in signal of photodetector 10. Phase of photocurrent signal is connected with optical phase difference between interfering beams, which is caused by movement of the object. EFFECT: improved precision of measurements; reduced phase errors of measurements. 1 dwg
SU3941463/28A 1985-08-13 1985-08-13 Photoelectric interferometer for measuring displacement SU1396717A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU3941463/28A SU1396717A1 (en) 1985-08-13 1985-08-13 Photoelectric interferometer for measuring displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU3941463/28A SU1396717A1 (en) 1985-08-13 1985-08-13 Photoelectric interferometer for measuring displacement

Publications (1)

Publication Number Publication Date
SU1396717A1 true SU1396717A1 (en) 1994-05-30

Family

ID=60535664

Family Applications (1)

Application Number Title Priority Date Filing Date
SU3941463/28A SU1396717A1 (en) 1985-08-13 1985-08-13 Photoelectric interferometer for measuring displacement

Country Status (1)

Country Link
SU (1) SU1396717A1 (en)

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